Related Manuals for Brooks VDM300
Summary of Contents for Brooks VDM300
- Page 1 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 ® Brooks VDM300 DI Water Vapor Delivery Module VDM300 Vapor Delivery Module...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your vaporizer and flow control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of vaporizer, flow and pressure measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Description ..........................1-3 Specifications for VDM300 Devices ................... 1-4 Overview of VDM300 Device Enclosure ..................1-5 1-10 Internal Layout of VDM300 and Basic Function ................. 1-9 1-11 Dimensions of VDM300 Device Enclosure ................1-10 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... - Page 6 Error Logic for Devices Without Low Level Alarm Configuration ..........4-3 4-1b Error Logic for Devices With Low Level Alarm Configuration ............. 4-3 List of Possible Alarm Codes Detected by the VDM300 ............4-4 VDM Product Description Code ....................5-1...
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Page 7: Section 1 Introduction
Utilizing a heated, all- welded titanium vapor tank with automated level-sensing and filling, the VDM300 produces vapor flow in a non-superheated vapor stage to reduce the aggressive effects of DI water. Vapor flow is controlled by an integrated Brooks Instrument high temperature thermal mass flow controller. -
Page 8: Product Support References
VDM300 Vapor Delivery Module August, 2017 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the VDM300 Series. Those documents include: • Brooks VDM300 data sheet (DS-VAP-VDM300-eng) ® • Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series (X-DPT-EtherCAT-VDM300-eng;... -
Page 9: Description
• Tank Drain: 1/8" Instant Tube fitting Analog & Digital Interfaces The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc) digital controls and alarms or optionally up to 24 Vdc when using an external power supply, a USB diagnostic port, and EtherCAT communications. -
Page 10: Specifications For Vdm300 Devices
Section 1 Introduction Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 1-8 Specifications for VDM300 Devices (See Table 1-2) Table 1-2 Specifications for Standard VDM300 Description Description Description Description Description Performance Specifications... -
Page 11: Overview Of Vdm300 Device Enclosure
Section 1 Introduction Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 1-9 Overview of VDM300 Device Enclosure Figure 1-2 Front View of the VDM300... -
Page 12: Front View Details Of The Vdm300 Led Indicators
Figure 1-3 Front View Details of the VDM300 LED Indicators Figure 1-3 (above) shows a detailed view of the switches and indicators located on the front of the VDM300. The following is a description of each switch and indicator. ZERO: This is a momentary detent switch that activates a zeroing function to remove any zero offset that may have accumulated over time during normal VDM300 operation. -
Page 13: Bottom View Of The Vdm
August, 2017 Figure 1-4 Bottom View of the VDM Figure 1-4 is a diagram of the bottom view of the VDM300. The following is a description of the various connections and features: A. lnput/Output: This connection is a 15-Pin D-subminiature (DB-15) plug (male). - Page 14 VDM300 tank heaters. See Section 1-13 VDM300 lnternal Layout and Basic Function for more details about the tank heaters. The VDM300 is configured to accept 230 VAC power, provided by the end user, via a shielded AC power cord with an IEC C-13 connector.
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Page 15: Internal Layout Of Vdm300 And Basic Function
1-10 Internal Layout of VDM300 and Basic Function Figure 1-5 below illustrates the internal layout of the VDM300 system. The VDM300 has a titanium tank inside that serves as a reservoir for Dl water and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state in the tank through the use of heaters attached to the tank and a heater control system along with the vacuum outlet pressure. -
Page 16: Dimensions Of Vdm300 Device Enclosure
Section 1 Introduction Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 1-11 Dimensions of VDM300 Device Enclosure (See Figure 1-6) Figure 1-6 Dimensions - VDM300 1-10... -
Page 17: General
Remove the envelope containing the packing list. Unpack and inspect the VDM300 and additional items for any possible shipping damage. The VDM300 is shipped with two each 312 series replacement fuses for the power entry module, a 6’ length of 1/8" O.D. Teflon tubing, a ferrite core for the control cable, the certificate of conformance/ final test data and the Installation &... -
Page 18: Recommended Storage Practice
• Relative humidity 45% nominal, 60% maximum, 25% minimum. 2-4 VDM300 Mounting and Orientation Figure 2-1 shows the proper mounting orientation for the VDM300.The VDM300 should be mounted using four 5/16" (7.9mm) screws tightening them to the screw manufacturer’s recommended specifications. -
Page 19: Vdm300 Installation Orientation
Section 2 Installation and Operation Manual X-VAP-VDM300-eng Installation Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 Figure 2-1 VDM300 Installation Orientation... -
Page 20: Inlet Connections
August, 2017 2-5-1 Inlet Connections Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR male fitting or a 1/4" tube compression fitting. This inlet is where the Dl water source is connected for normal operation, or where the nitrogen source is connected when draining the VDM300. -
Page 21: Electrical Connections
VDM300. Detailed instructions on how to make the electrical connections will follow. Figure 2-2 Diagram of Electrical Connections to the VDM300... -
Page 22: Vdm300 Analog Connector Pin-Out
It is this connection that allows the user to send commands and setpoints and receive flow and alarm signals from the VDM300. It is also where DC power (±15 Vdc) for the internal electronics and the DC powered MFC heaters is needed. The connector on the VDM300 is a 15-pin D-subminiature (DB-15) plug (male). - Page 23 VDM300. lt is recommended that this connection be secured to the jack screws on either side of the DB-15 plug on the VDM300. Note that if the DC power supplied by the user is on, the VDM300 electronics will power up at this point.
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Page 24: Diagnostic Port Connection
August, 2017 2-7 Diagnostic Port Connection The VDM300 can also be operated in a Service Mode through the micro USB diagnostic port connection utilizing Brooks Expert Support Tool (BEST) and a USB to micro USB cable. You should not use this port for normal operation. -
Page 25: Product Safety Information
Safety Interlocks The VDM300 uses 230 VAC to power the tank heaters. The tank heaters have a primary protection of two fuses located in the fuse drawer of the power entry module. - Page 26 Section 2 Installation and Operation Manual X-VAP-VDM300-eng Installation Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10...
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Page 27: Section 3 Startup
Unknown State (VDM idle) 3-1 Idle Mode The ldle Mode is just that; the VDM300 is idle. lt is expected that AC and DC power to the VDM300 is on; therefore the internal electronics are active. However, the tank and MFC heaters are off, the fill and drain water valves are closed, and the VDM300 will not deliver water vapor on demand. -
Page 28: Start-Up (Normal Mode)
5 and 55 minutes to complete the Start-up sub-mode. The Start-up sub-mode functions as follows: 1. Pin 3 of the DB-15 is grounded by the user: This signals the VDM300 to begin normal operation in the Normal mode. This pin must remain grounded to keep the VDM300 in Normal mode. -
Page 29: Ready-To-Use (Normal Mode)
Brooks VDM Vapor Delivery Module August, 2017 • The VDM300 is put into drain mode to drain the water from the tank and then put back into normal mode as soon as possible (typically less than 30 minutes) • lf the VDM300 is put into ldle mode temporarily (typically less than 30 minutes) and then put back into Normal mode •... -
Page 30: Procedure For Manually Zeroing The Vdm300
FAULT” LED must be off and Pins 4 and 10 on the DB-15 must be in their nactive states. 3. There should have been no set point given to the VDM300 for at least 2 minutes. 4. The downstream external shutoff valve should be closed. -
Page 31: Operation Of Best For Vdm300
Drain Mode is initiated. 3-4 Operation of BEST for VDM300 This section will be completed once the VDM300 BEST module is released. (In the interim, Brooks engineers will utilize Python tools to interface with the VDM300 in a diagnostics mode.) - Page 32 Section 3 Installation and Operation Manual X-VAP-VDM300-eng Startup Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 33: Introduction
Any precision unit such as a vapor delivery module requires occasional servicing, especially if it has been operating for an extended period of time. It is recommended that you send the device to a Brooks Service Center for cleaning and recalibration at 12 month intervals. -
Page 34: Brooks ® Vdm300 Vapor Delivery Module
August, 2017 4-3 Troubleshooting the VDM300 The VDM300 is not intended to be serviceable by the customer. ln some instances, however, Brooks Field Service personnel or customers trained on the operation of the VDM can do basic diagnostic investigation and repair. -
Page 35: General Troubleshooting Guide
3. Make sure all fittings and connections to the VDM300 are secure. 4. Verify that all operating conditions of the system in which the VDM300 is installed have been met for proper operation a. -
Page 36: Using Best As A Diagnostic Tool
August, 2017 4-5 Using BEST as a Diagnostic Tool N.B., this section will be completed once the VDM300 BEST module is released. In the interim, Brooks engineers will utilize Python tools to interface with the VDM300 in a diagnostics mode. - Page 37 Section 4 Installation and Operation Manual X-VAP-VDM300-eng Maintenance and Troubleshooting Part Number: 541B210AAG Brooks ® VDM300 Vapor Delivery Module August, 2017 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued)
- Page 38 Section 4 Installation and Operation Manual X-VAP-VDM300-eng Maintenance and Troubleshooting Part Number: 541B210AAG Brooks ® VDM300 Vapor Delivery Module August, 2017 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued)
- Page 39 Section 4 Installation and Operation Manual X-VAP-VDM300-eng Maintenance and Troubleshooting Part Number: 541B210AAG Brooks ® VDM300 Vapor Delivery Module August, 2017 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued)
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Page 40: Vdm300 Removal
Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued) 4-6 VDM300 Removal • Drain system according to section 3-3 • Turn off tank heater • Remove electrical connections •... -
Page 41: Section 5 Product Description Code
VDM300 Vapor Delivery Module August, 2017 5 VDM300 Product Description Code The following Product Description Code (PDC) indentifies the VDM300 and its optional features. This code is used to order the product. Call your Brooks sales representative if you need assistance. - Page 42 Section 5 Installation and Operation Manual X-VAP-VDM300-eng Product Description Code Part Number: 541B210AAG Brooks ® VDM300 Vapor Delivery Module August, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 43: Section A Essential Instructions
Section A Essential Instructions Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG August, 2017 ® Brooks VDM300Vapor Delivery Module Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). - Page 44 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 45 Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.
- Page 46 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 47 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 48 PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut tuotteet ovat 2014/34/EU EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat ryhmään 1. Laitteet, jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.
- Page 49 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 50 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 51 Section A Essential Instructions Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG August, 2017 ® Brooks VDM300Vapor Delivery Module Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
- Page 52 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 53 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 54 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 55 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 56 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 57 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 58 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 59 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 60 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 61 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 62 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 63 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG ® Brooks VDM300 Vapor Delivery Module August, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 64 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.