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Summary of Contents for Brooks PC125
- Page 1 Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series Ultra-High Purity Digital Pressure Control Devices PC115 Pressure Controller, Model PC125 Pressure Controller with Flow Meter...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your pressure control and flow measurement requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of pressure control and flow measurement products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Perform a Leak Test ........................2-6 2-14 Zeroing the PC100 Series - Setup ....................2-6 2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125) ..2-6 2-14-2 Zeroing PC125 Series Flow from LCD Display Panel ..............2-8 2-15 Performance Checks ........................ - Page 6 Contents Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Figure Page Number Number PC100 Series Digital Pressure Controller ..................1-1 LCD Display ..........................1-6 Dimensions - PC100 Series ......................1-8 Typical PC100 Series Configurations .................... 2-3 PC100 Series Mounting Attitude Positions for UPSTREAM Applications ........
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Page 7: Section 1 General Information
MOCVD, and other pressure control applications that require a high purity all-metal flow path. • PC115 Pressure Controller and PC125 Pressure Controller with integrated thermal mass flow metering. Initial product offering includes N2 and H2 gases with full scale 1000 Torr pressure operation. -
Page 8: Product Support References
1-5 Product Warranty Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group. -
Page 9: Industry Standard References
Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16... -
Page 10: Terms And Acronyms
Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement Chemical Vapor Deposition DeviceNet A 5-wire local network I/O communication device that employs a command/response communication protocol Digital Signal Processor EPI Epitaxy (EPI) -
Page 11: Description
• Improved long-term stability High Purity Flow Path The Brooks PC100 Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. -
Page 12: Specifications For Pc100 Series Devices
The PC100 Series supports DeviceNet™ communication protocol. DeviceNet is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). -
Page 13: Specifications - Pc100 Series
Part Number: 541B207AAG PC100 Series May, 2017 Table 1-3 Specifications - PC100 Series Performance Performance Performance Performance Performance PC115 PC115 PC115 PC125 PC125 PC125 PC115 PC115 PC125 PC125 Embedded Thermal Flow Sensor: Pressure Control Mode: Downstream and Upstream Downstream Full Scale Range: o Min Flow Range: 0-20 sccm H2;... -
Page 14: Dimensions - Pc100 Series
Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series - VCR ® Configuration Figure 1-3 Dimensions - PC100 Series... -
Page 15: Section 2 Installation
Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. All instruments returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument. -
Page 16: Transit Precautions
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit. -
Page 17: Mechanical Installation
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-9 Mechanical Installation The recommended installation procedure guidelines are as follows: • The device should be located in a clean, dry atmosphere relatively free from shock and vibration. •... -
Page 18: Purge The Gas Supply Line Before Pc100 Series Installation
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-11 Purge the Gas Supply Line Before PC100 Series Installation Before operating the PC100 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. -
Page 19: Position And Mount The Pc100 Series
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-12 Position and Mount the PC100 Series Position the PC100 Series so that the gas flow is pointed in the direction of the flow arrow on the PC100 Series rear S/N label. The various mounting positions for UPSTREAM applications are described in Figure 2-2, and the mounting positions for DOWNSTREAM applications are described in Figure 2-3. -
Page 20: Perform A Leak Test
0.1%). If the output signal is too high, re-zero the PC100 Series as described below. 2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125) 1. Place the PC100 Series under a strong vacuum with the PC100 Series set to 100% set point. -
Page 21: Display With Psi Reading
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Figure 2-4 Display with PSI Reading Figure 2-5 Display Reading Zero PSI 2. Looking at the top of the PC100 Series, press the "Display" button, starting at the MACID, four times to "PSI", five times to "kPa"... -
Page 22: Zeroing Pc125 Series Flow From Lcd Display Panel
1. Place the PC125 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow. 2. Looking at the top of the PC125 Series, press the "Display" button until the LCD display label is "%FS" as shown in Figure 2-6. Three button depressions from the MACID label display. -
Page 23: Performance Checks
The active gas page must be correct. • The PC100 Series pressure transducer must be correctly zeroed. • The PC125 Series flow must be correctly zeroed. A331710003 Cable Assembly 2.5mm A332295001 Power Supply MFC A332297001 Cable, Power, DeviceNet Diagnostic Port... -
Page 24: Electrical Connections
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-16 Electrical Connections 2-16-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave. -
Page 25: Section 3 Operation
PC125 Pressure Controller leverages the mass flow measurement capability and sensor accuracy of the GF1xx Thermal Mass Flow series. For the downstream PC125 device, gas flow first travels through the control valve into the bypass. The gas flow entering the bypass is separated into two paths;... - Page 26 Section 3 Operation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 27: Section 4 Maintenance & Troubleshooting
If reactive gases are being used, it is recommended that you send the device to a Brooks Service Center for cleaning and recalibration. Please follow the instructions for removal, product packaging and product return instructions found in Section 2- Installation—Return... - Page 28 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017...
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Page 29: Troubleshooting
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a PC100 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. The PC100 is generally used as a component in gas delivering systems which can be quite complex. -
Page 30: Pc100 Series Troubleshooting Guide
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 4-5 PC100 Series Troubleshooting Guide Table 4-1 PC100 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No pressure control and flow measurement. Is the gas supply turned on? Check shut-off valve and pressure readout. - Page 31 For PC125 flow meter, equalize the pressure across the PC125 Series by opening it briefly. Set up the PC125 Series for zeroing. Then perform the zeroing procedure in Section 2-14.
- Page 32 11. PC100 Series indicates Overshoot. Additional PID adjustments may be required Contact the factory for support. per the application. 12. Tool display output doesn’t match PC125 Series flow meter output. Improper zeroing of the PC125 flow meter? Check PC125 Series zero.
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Page 33: Pc100 Series Product Description Code Table
III. III. III. Flow Direction U U U U U Upstream (For PC115 only) III. III. D D D D D Downstream (For PC125 and PC115) IV. IV. Full Scale Pressure 1000 1000 1000 Full Scale Pressure 1000 1000 V. V. V. V. V. - Page 34 Section 5 Product Description Code Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 35 Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). „ ” 2014/34/EU. Brooks Instrument 25 mm 1"...
- Page 36 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 37 Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.
- Page 38 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 39 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 40 PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut tuotteet ovat 2014/34/EU EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat ryhmään 1. Laitteet, jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.
- Page 41 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 42 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 43 Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED. 2014/34/EU. Brooks Instrument 25 mm PED.
- Page 44 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 45 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 46 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 47 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 48 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 49 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 50 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 51 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 52 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 53 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 54 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 55 Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 56 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.