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A
Figure 11.
Focus, Brightness and Alignment Setup:
1. Click "Freeze/Run"
2. Click the ABCC button
starting point. Further fine adjustment controls are on the manual dial panel.
3. Use the "Fast 1" or "Slow 1"
the screen refreshes quickly. Clicking on the button twice makes it change from 1
to 2 (slower) USE SLOW 1 or 2 FOR BSE-you can't see an image on "Fast".
4. Once you see an image, turn the mechanical aperture
the illumination across the image. If the image disappears, click ABCC again. If it
turns flat grey, go back to a lower aperture and do an alignment.
Alignments must be done whenever changing the KV, probe current, or
aperture size. Get our help. Refer to "Align the Instrument" (Appendix 1)
If you need to align the instrument, do it first between 2000-5000x, then repeat
5. Focusing your sample is a multi-step process:
a. Increase magnification on dial
moves, it isn't properly aligned yet-repeat alignment. Adjust focus
contrast
b. To sharpen the focus -start by using the fine focus
possible image. Using auto focus "AFC"
to the focal plane.
c. Next, use Stigmator X
dial
(Fig 12-E)
way and then the other to
find best image. Stop at
the best point.
d. Now repeat this using
Stigmator Y dial
e. Adjust the fine focus again.
Repeat this process 2-3 times until you get the best possible image.
Unless you change the beam, stigmation is now complete. Using only fine
focus should work hereafter.
C
B D
to start the scan if it isn't running.
(Fig.11-A)
to set Auto Contrast and Brightness. This is only a
(Fig.11-B)
(Fig.11-C)
again at 2x desired magnification.
, and brightness
(Fig.12-C)
– turn one
(Fig 12-F).
scan speed settings to adjust focus so
(Fig.10)
slowly to desired level. If the image
(Fig.12-A)
as needed as you magnify.
(Fig.12-D)
may help if you are close
(Fig.11-D)
E
A
Figure 12. PC-SEM Control Buttons
slightly to even out
(Fig.12-B)
to get the best
(Fig 12-B)
D
F
C
B
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