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A
Figure 7. PC-SEM Control Buttons
Electron Beam Setup:
1. Double click on the Beam Settings Frame
2. In the settings window
for your specimen.
(Fig.8-A)
3. Set the Probe Current
current should be lower for very high magnifications
(>20,000x). Turn it higher for EDAX or long working
distances.
4. Set the Working Distance to match your stage height.
This is where the beam will come to a focus
5. Once the chamber properly evacuated
and the HV warning disappears,
switch ON the electron beam
Wait for the HV progress to complete
(Fig.9)
6. Click the AFS button
filament so it emits a good electron flow. It should
deliver an emission current above 65-70uA
7. Choose the Mechanical Aperture
for your sample and magnification (see us). You need a
higher number (smaller, 3-4) for high magnification
(above 10,000) and a low number (1—2) for very low
magnification (below 2000) or EDAX.
8. Turn Magnification to 100x using button at top of
screen
(Fig.7-B)
keyboard. You will use this to find your specimen and
start to focus.
Aperture:
Probe Current:
, select the appropriate KV
(Fig.8)
to ~50 to begin. Probe
(Fig.8-B)
(Fig.8-D).
to auto-saturate the
(Fig.8-E)
, or using the manual dial by the
Record Your Best Settings Here:
B
to open the settings window.
(Fig.7-A)
.
(Fig.8-C)
Figure 9. HV Progress
.
(Fig.8-F)
recommended
(Fig.10)
Figure 10. Mechanical Aperture
Kilovolts (KV)
Stage Height/WD:
A-
D-
F-
E-
-B
C-
Figure 8. Beam Setup Panel
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