Related Manuals for Agilent Technologies VPI Series
Summary of Contents for Agilent Technologies VPI Series
- Page 1 Vacuum Products Division Vacuum Pump INSTRUCTION MANUAL Isolation (VPI) Valve Manual No. 699912117 Revision F December 2012...
- Page 2 Vacuum Pump Isolation (VPI) Valve Vacuum Pump Isolation (VPI) Valve Dust-Off is a registered trademark of Falcon Safety Products, Inc. Krytox is a registered trademarks of DuPont. TriScroll is a trademark of Agilent, Inc. Viton is a registered trademark of DuPont Dow Elastomers. Apiezon L is a registered trademark of M &...
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Page 3: Table Of Contents
Vacuum Pump Isolation (VPI) Valve Contents Warranty ............................9 Warranty Replacement and Adjustment ..................9 Hazard and Safety Information ....................10 Contacting Agilent ........................11 Section 1. Introduction ........................13 1.1 Description ........................... 13 1.2 Operating Principles......................13 1.3 Operation Sequence ......................14 1.4 Technical Specifications ....................... - Page 4 Vacuum Pump Isolation (VPI) Valve This page intentionally left blank.
- Page 5 Vacuum Pump Isolation (VPI) Valve Figures Operating Sequence ......................14 Single Phase Motor Electrical Connections ................. 19 Three Phase Motor Electrical Connections................19 VPI Application in TriScroll 300, 600 Inverter Pumps ............20 Installation Diagram ......................22 Assembly View and Replacement Parts ................23 Assembly View and Replacement Parts ................
- Page 6 Vacuum Pump Isolation (VPI) Valve...
- Page 7 Vacuum Pump Isolation (VPI) Valve Tables Technical Specifications ..................... 16 Operating Voltages ......................17 VPI Valve Installation Data ....................18 Replacement Parts/Kits ...................... 31...
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Page 9: Warranty
Vacuum Pump Isolation (VPI) Valve Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. -
Page 10: Hazard And Safety Information
Vacuum Pump Isolation (VPI) Valve Hazard and Safety Information This manual uses the following standard safety protocols: The warning messages are for attracting the attention of the WARNING operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury. The caution messages are displayed before procedures, which CAUTION if not followed, could cause damage to the equipment. -
Page 11: Contacting Agilent
Vacuum Pump Isolation (VPI) Valve O-ring Care When removing, checking or replacing O-rings, keep in mind the following: Agilent recommends replacing all O-rings during routine NOTE maintenance or during any maintenance procedure requiring that O-rings be removed. Remove O-rings carefully with your fingers. Do not use metal CAUTION tools for this task. - Page 12 Vacuum Pump Isolation (VPI) Valve This page intentionally left blank.
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Page 13: Section 1. Introduction
Vacuum Pump Isolation (VPI) Valve Section 1. Introduction 1.1 Description The Vacuum Pump Isolation (VPI) valve is a safety valve that protects a vacuum system in the event of power failure by isolating the vacuum system and venting the mechanical pump. -
Page 14: Operation Sequence
Vacuum Pump Isolation (VPI) Valve 1.3 Operation Sequence Figure 1 Operating Sequence... - Page 15 Vacuum Pump Isolation (VPI) Valve Figure 1 (a): Normal Operation – Open Position Power is on to the mechanical pump and the VPI valve. The mechanical pump, inlet side of the VPI valve, and the VPI valve are all under vacuum at approximately the same pressure. The spring is holding the VPI valve open, and the vacuum system is exposed to the mechanical pump’s full pumping speed.
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Page 16: Technical Specifications
Vacuum Pump Isolation (VPI) Valve 1.4 Technical Specifications Table 1 Technical Specifications Nominal body ID 2 in. (50 mm) Leak rate Body <1 x 10-9 atm cc/sec He Seal <1 x 10-9 atm cc/sec He Closing time 30 milliseconds Closing burst 1 x 10 Torr-liter Power... -
Page 17: Section 2. Installation
Vacuum Pump Isolation (VPI) Valve Section 2. Installation 2.1 Electrical The VPI Valve should be installed so that it is controlled by the vacuum pump’s electrical source, preferably at the vacuum pump’s automatic or manual switch. Ideally the opening of the valve should occur simultaneously with or after the pump start up. The valve closing should occur simultaneously or prior to the pump shut off. -
Page 18: Installing Vpi Valve To Agilent Triscroll™ Vacuum Pump
Vacuum Pump Isolation (VPI) Valve 2.2 Installing VPI Valve to Agilent TriScroll™ Vacuum Pump TriScroll 300, 320, 600, and 620 2.2.1 When installed correctly, the position of the VPI Valve is controlled by the TriScroll vacuum pump motor internal thermal switch and it’s electrical supply. The VPI Valve will open when the pump is running and close when it is stopped. -
Page 19: Single Phase Motor Electrical Connections
Vacuum Pump Isolation (VPI) Valve Table 3 VPI Valve Installation Data (Continued) TriScroll NW25 NW40 Solenoid Wiring Diagram Vacuum Pump VPI Valve VPI Valve Operating Location Operating Voltage Part Number Part Number Voltage Range 415 VAC VPI252205060 VPI402205060 180-264 VAC Figure 3 on page 19 50/60 Hz 50/60 Hz *... -
Page 20: Triscroll 300, 600 Inverter
Vacuum Pump Isolation (VPI) Valve 2.2.3 TriScroll 300, 600 Inverter For TriScroll 300/600 Inverter models (Figure 4), a 24 VDC VPI kit (VPI25INV24DC for triScroll 300/VPI40INV24DC for TriScroll 600), includes a VPI valve, a communication cable, a 24 VDC power supply, and a splitter cord. The VPI valve is controlled by an output signal from the inverter that is tied to motor operation. - Page 21 Vacuum Pump Isolation (VPI) Valve To install: 1. Connect the 24 VDC power supply and the pump inverter to the mains power using the splitter cord. 2. Connect the communication cable DB9 connector into the inverter I/O port (P1). 3. Connect the 24 VDC power supply output cord to the communications cable labeled 24 V.
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Page 22: Mechanical
Vacuum Pump Isolation (VPI) Valve 2.3 Mechanical The VPI valve is installed between the mechanical pump and vacuum chamber or high vacuum pump (Figure 5). The flow arrows on the unit’s label point from the vacuum system to the mechanical pump. Figure 5 Installation Diagram While it is preferable to mount it directly onto the mechanical pump, it may be located remotely. -
Page 23: Section 3. Service
Vacuum Pump Isolation (VPI) Valve Section 3. Service Vacuum components must be kept free of both particulate contamination and all foreign materials which have a significant vapor pressure. Before repairing a vacuum valve, prepare a clean dust-free work area and use clean, degreased tools devoted to precision assembly. The VPI valve should be periodically tested for proper NOTE operation. -
Page 24: Repair Of Sub-Assemblies
Vacuum Pump Isolation (VPI) Valve 4. Inspect the nose piece O-ring carefully. It must be replaced if it is scratched or imbedded with foreign material 3.2 Repair of Sub-Assemblies 3.2.1 Piston/Diaphragm Sub-Assembly 1. Remove the diaphragm from the piston by unscrewing the sleeve from the piston using a spanner wrench. -
Page 25: Nose Piece O-Ring Replacement
Vacuum Pump Isolation (VPI) Valve 3.2.2 Nose Piece O-ring Replacement The nose piece O-ring should be removed only if a new replacement is available. To remove the old O-ring: 1. Insert a sharp pointed tool, such as a machinist’s scribe obliquely into the ring. The sharp point must not pass through the seal or the surface of the groove will be damaged. -
Page 26: Reassembly
Vacuum Pump Isolation (VPI) Valve 3.3 Reassembly Figure 7 Assembly View and Replacement Parts Refer to Figure 7 for these instructions. 1. Slide the piston/diaphragm subassembly onto the guide pin. With the piston facing up so it does not slide off of the guide pin, place the body down over the piston, flat surface to the diaphragm. -
Page 27: Troubleshooting
Vacuum Pump Isolation (VPI) Valve 3.4 Troubleshooting This section is a guide for solving problems that may occur with the VPI valve. Listed below are symptoms with possible causes and suggestions for help. 3.4.1 VPI Valve Cannot Be Pumped Down to High Vacuum 1. -
Page 28: Vpi Valve Closes Too Slowly
Vacuum Pump Isolation (VPI) Valve 3.4.3 VPI Valve Closes Too Slowly 1. Inlet filter to solenoid valve is clogged. Clean or replace filter. 2. Solenoid valve is defective. Replace with a new solenoid valve. 3. There is excess friction between bushing and guide pin. -
Page 29: Solenoid Valve Is Hot
Vacuum Pump Isolation (VPI) Valve 3.4.7 Solenoid Valve is Hot 1. This is a continuous duty valve equipped with Viton seals capable of sustained high temperature operation. A 85° C temperature rise is normal for this valve. 2. Coil and operating voltage/frequency not matched. Change the solenoid coil to one with a voltage/frequency compatible with the pump. -
Page 30: Factory Repair
Vacuum Pump Isolation (VPI) Valve 3.5 Factory Repair The VPI valve was designed for user repair, but occasionally it is necessary to return a valve to the factory. Before shipping, observe the following steps: 1. Call Agilent to obtain a Returned Material Authorization (RMA) number. You will be asked to fax a completed copy of the Health and Safety Certification form, located in the back of this document, before an RMA number is issued. -
Page 31: Replacement Parts
Vacuum Pump Isolation (VPI) Valve 3.6 Replacement Parts Table 4 Replacement Parts/Kits Description Part Number VPI Rebuild Kit, NW25 VPI25PSTNKIT VPI25RBLDKIT Includes: Piston Assembly, NW25 Piston Bearing (2) Sleeve Diaphragm Spring Krytox Grease O-ring Kit (also available separately) VPI Rebuild Kit, NW40 VPI40PSTNKIT VPI40RBLDKIT Includes:... - Page 32 Vacuum Pump Isolation (VPI) Valve This page intentionally left blank.
- Page 33 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
- Page 34 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
- Page 35 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
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- Page 38 Service & Support North America India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2, Lexington, MA 02421 USA 230/231, Sahar Road, 2 Jalan SS21/37, Damansara Uptown Tel.: +1 781 861 7200...