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NT-MDT Solver SNOM Instruction Manual

Scanning near-field optical microscope
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Solver SNOM
Scanning Near-Field
Optical Microscope
Instruction Manual
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  • Page 1 Solver SNOM Scanning Near-Field Optical Microscope Instruction Manual www.ntmdt-si.com...
  • Page 3 Solver SNOM Scanning Near-Field Optical Microscope Instruction Manual 2009 - 2018, Copyright © NT-MDT SI NT-MDT Spectrum Instruments Proezd 4922, 4/3 Zelenograd, Moscow 124460, Russia Tel.: + 7 (499) 110-2050 www.ntmdt-si.com...
  • Page 5 Read me First! Observe safety measures for operation with devices containing sources of laser radiation. Do not stare into the beam. A label warning about the presence of laser radiation is attached to the laser sources (Fig. 1). Fig. 1 Before you start working with the instrument, get acquainted with the basic safety measures and the operation conditions for the instrument! If you are a beginner in scanning probe microscopy, we recommend you to familiarize with...
  • Page 7 User’s documentation set The following manuals are included into the user’s documentation set: - Instruction Manual – is the guidance on preparation of the instrument and other equipment for operation on various techniques of Scanning Probe Microscopy. The contents of the user’s documentation set may differ depending on the delivery set of the instrument.

  • Page 9: Table Of Contents

    SSEMBLY OF THE ASER ODULE 2.6................... 35 ONFIGURING THE CONTROL PROGRAM 2.7........................35 OWERING SEQUENCE 3. PREPARATION OF THE SOLVER SNOM FOR OPERATION ............ 37 3.1............37 NSTALLATION OF THE ROBE INTO THE EASURING 3.2......40 REPARATION AND...

  • Page 10: Basic Information

    Solver SNOM easy to adapt it to a broad variety of research tasks and to use it in research laboratories, universities and scientific centers. For exam ple, to study...

  • Page 11: Inverted Optical Microscope

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Investigation of optical charac teristics with resolution b etter than the dif fraction lim it is performed with a SNOM scanni ng measuring head equipped with an optical fiber probe. The probing beam is coupled into the probe by means of a laser module. When running the “Transmission Mode”...

  • Page 12: Xy Scanning Stage

    Chapter 1. Basic Information 1.2.2. XY Scanning Stage The scanning stage (Fig. 1-2) is made of an aluminum alloy by electro-erosion processing. It contains two m oveable fram es with flexible guidew ays. The guideways secure translation of the outer f rame with respect to the fixed part of the stag e in the direction of the longer part of the stage, this is the axis X.

  • Page 13: Z-Scanner Of The Objective

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Fig. 1-3. Adapter plate The scanning stage is mounted on the adapter plate ( Fig. 1-3), which is m ounted on the sample stage of the inverted microscope. 1.2.3. Z-scanner of the objective When perform ing research on trans parent sam ples, th e pro be ligh t co mes out from the probe and passes through the sample.

  • Page 14: Snom Measuring Head

    Chapter 1. Basic Information 1.2.4. SNOM Measuring Head The SNOM m easuring head ( Fig. 1-6) is u sed for both m easurements of surface topography of the sam ple and for m easurements of its near-su rface o ptical p roperties. Oscillation am plitude and phase of the pr obe can also be registered during these measurements.
  • Page 15 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Observation of the probe tip both during the approach procedure a nd while se lecting the area for measurement is available through a special groove in the protective case 4. Fig. 1-7. Probe holder assembly 1 –...
  • Page 16 Chapter 1. Basic Information Fig. 1-8. Functional schematics of the SNOM measuring head A special optical attachm ent unit is used for measurem ents on non-transparent samples (Fig. 1-9). Light radiation reflected from the sample is focused by the optical system of this unit onto the receiving element of a photomultiplier module installed in it.

  • Page 17: Optical Fiber Probe

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Fig. 1-9. Measuring head with the optical attachment unit 1.2.5. Optical Fiber Probe Optical fiber probe ( Fig. 1-10) makes it possible to control the distance between the probe tip and the sample and it is used to deliver laser beam to the sample surface.

  • Page 18: Photomultiplier Modules

    Chapter 1. Basic Information resonator’s console so that it comes out by 0.5÷1.0 mm. Th e force interaction occurs between this sharpened end (probe tip) and the surface under investigation. Signal generated by the quartz resonator is received through the contact areas. 1.2.6.

  • Page 19: Laser Module

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 1.2.7. Laser Module The laser m odule is intended to couple laser ra diation into the optical fiber. An overall view of the module equipped with a solid-state 532 nm laser is given in Fig. 1-12.

  • Page 20: Vibration Isolation System

    Fig. 1-13. Vibration isolation system 1.3. Theory of Operation of Solver SNOM The optical fiber probe is fixed to the scanne r, which is ins talled in side the m easuring head. A piezo vibrato r is located at the place where the probe is fixe d to the sca nner. It oscillates at the resonance frequency of the system consisting of the probe, quartz resonator and probe holder.
  • Page 21 Fig. 1-14. Block diagram of the Solver SNOM...
  • Page 22 For convenience the microscope can be connected with a CCD camera and video monitor. The Solver SNOM can operate in two principa l optical schemes, which are based on Shear Force Microscopy: −...
  • Page 23 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Transmission Mode The Transm ission Mode ( Fig. 1-15) is used for m easurements on tran sparent and semitransparent sam ples. The probe approach es the sam ple from the top. The optical radiation, which is transmitted through the sam ple, contains the inform ation on prop erties of the sa mple and it is collected by the objective and, then, directed to the photo-detector.
  • Page 24 Chapter 1. Basic Information Reflection Mode The Reflection Mode ( Fig. 1-16) is used for measurem ents on non-transparent samples . The probe approaches the sample from the top. The optical radiation, which is scattered on the surface the sam ple, contains the inform ation on properties of the sample surface. It is diverted to the objective by a mirror and is then directed to the photo-detector of the optical system.

  • Page 25: Technical Characteristics

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 1.4. Technical characteristics Scanning Stage Travel of the measuring head along X,Y 5×5 mm Minimum resolution along X,Y 5 µm Scanning range along X, Y 100×100 µm Residual non-linearity 0.1 % Sample size up to ∅100 mm...
  • Page 26 Chapter 1. Basic Information Laser Module Wavelength 532 nm Output power 3 mW Focusing objective 40× − Magnification 0.65 mm − Aperture 0.4 mm − Operating segment Positioning stage 1 µm − Translation resolution along X, Y, Z 4 mm −...

  • Page 27: Basic Safety Measures

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 1.5. Basic Safety Measures General Safety Measures − Ground the instrument before operation! − Do not disassem ble any part of the device. Disassem bling of the product is perm itted only to persons certified by NT-MDT.

  • Page 28: Operating Conditions

    1.6. Operating Conditions Solver SNOM is a h igh prec ision optica l instrument. Therefore high requirem ents are made on the prem ises, power supply syst...

  • Page 29: Storage And Transport Regulation

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual − the room should be protected from m echanical vibrations and acoustic noises, either internal or external; − the table intended for installation of the measuring unit of the instrument must be stable and, whenever possible, massive;...

  • Page 30: Setup And Installation

    Chapter 2. Setup and Installation 2. Setup and Installation Preparation for Solver SNOM include the following basic operations: 1. Installing the Z-scanner and the Objective (item on page 25). 2. Installing the Scanning Stage (item on page 26). 3. Installing of a Special Support on the Measuring Head (item on page 28) 4.

  • Page 31: Nstalling The Canning Tage

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 4. Loosen the lock-nut 4 and set the case of th e Z-scanner 1 so that it faces the center of the revolver head. Tighten the lock-nut. 5. Screw adapter 3 into the Z-scanner 1 6.
  • Page 32 Chapter 2. Setup and Installation Fig. 2-3. Scanning stage mounted on the sample stage of the microscope When the vacuum holder of the sa mple is used, it is necessary to connect the thin pipe of the sample holder to the pump pipe through the corresponding connecting pipe (Fig. 2-4). Fig.

  • Page 33: Support On The Measuring Head

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 2.3. Installing of a Special Support on the Measuring Head A special motorized leg (Fig. 2-5) is used instead of the standard m otorized leg ( Fig. 2-6) to mount the measuring head on the scanning st age. Measuring heads can be supplied with a special motorized leg that is already installed in it.
  • Page 34 Chapter 2. Setup and Installation 4. Install the special motorized support rig and fix it with the two screws (Fig. 2-10). Fig. 2-9 Fig. 2-10 5. Install the bottom part of the housing and fix it with the three screws (Fig. 2-11). Fig.
  • Page 35 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 2.4. Cable Connections ATTENTION! Before connecting of disconnecting any parts of the instrument power off the controller. Any connections during the instrument operation may result in damage of the electronic circuitry. Set cable connections between parts of the instrum ent.

  • Page 36: Assembly Of The Laser Module

    Chapter 2. Setup and Installation ATTENTION! SPM controller can be connected to an electrical power supply line of 110/220 V (60-50 Hz) after setting the voltage selection switch to the position corresponding to this power supply line. Not following this instruction may cause damage to the electronic components.
  • Page 37 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual The laser module assembly procedure consists of the following steps: 1. Installation of the microscope objective. 2. Switching the laser on. 3. Alignment of the system laser-objective. 4. Installation of the fiber mounting stage.
  • Page 38 Chapter 2. Setup and Installation Fig. 2-18 Alignment of the system laser-objective To align the optical system, perform the following: 1. Set a white screen at the back of the posit ioning stage perpendicu lar to the lase r beam (Fig.
  • Page 39 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 3. If not, then loosen the laser fastening screws (Fig. 2-21). Adjust the laser position until the laser projection spot is aligned with the guide groove. Tighten the laser fastening screws. Fig. 2-21...

  • Page 40: Configuring The Control Program

    Chapter 2. Setup and Installation 2.6. Configuring the control program Before running the instrum ent for the first time, the control program Nova needs to be configured. A special Configurator is used to set parameters of the program. A detailed description of th e Configurator is given in SPM Software (part 1, Appendix, item 1 “Configurator”).
  • Page 41 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual ATTENTION! Perform calibration of the ADC Z with respect to the DAC Z during the first run of the control program Nova after its reinstallation, or after replacement of the controller, with the controller being on (the probe must be taken away from the sample).

  • Page 42: Preparation Of The Solver Snom For Operation

    Chapter 3. Preparation of the Solver SNOM for Operation 3. Preparation of the Solver SNOM for Operation Preparation of the instrum ent for operation in dependence of the choice of the optical measurement scheme requires the following procedural steps: 1. Installation of the Probe into the Measuring Head (item on page 37).
  • Page 43 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual To install the probe into the measuring head, perform the following steps: 1. Place the box with probes next to the measuring head (Fig. 3-2). Fig. 3-2 2. Open the box with probes ( Fig. 3-3). Roll the fiber out carefully; do not bend it too much.
  • Page 44 Chapter 3. Preparation of the Solver SNOM for Operation 3. Insert the end of the optical fiber into the orifice in the measuring head located between the spring clips of the probe ( Fig. 3-4). Push the f iber till it com es out f rom the opposite side of the measuring head.

  • Page 45: Reparation And Nstallation Of The Optical Fiber In The Laser Module

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 6. Holding the probe near the holder in th e m easuring head, pull the fiber through the head. Insert the probe under the spring clips (Fig. 3-8). Fig. 3-8 1 – contact areas of the probe; 2 – spring clips; 3 – holder The procedure of installation of the probe into the measuring head is completed.
  • Page 46 Chapter 3. Preparation of the Solver SNOM for Operation To load the optical fiber into the laser module, perform the following steps: 1. Take off the magnetic fasteners from the fiber mounting stage 2 (Fig. 3-11). 2. Load the fiber into the groove of the fibe r m ounting stage so that its end com es out from the edge of the mounting stage by 3÷4 mm (Fig.
  • Page 47 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 3.3. Setting up the Transmission Mode Optical measurements on transparent samples are performed using the transmission mode. An overall view of the transmission mode is shown in Fig. 3-13. Fig. 3-13. Overall view of the transmission mode NOTE.
  • Page 48 Chapter 3. Preparation of the Solver SNOM for Operation NOTE. When choosing the optical paths, light can be distributed as follows: – 100% of light goes to the oculars; – 50% of light to the oculars, 50% of light to the port;...
  • Page 49 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 7. Switch th e selecto r o f the microscope optical path ( Fig. 3-15) into the position “trinocular” (pictogram Fig. 3-15. Selector of the microscope optical path in the position “trinocular”;...

  • Page 50: Setting Up The Reflection Mode

    Chapter 3. Preparation of the Solver SNOM for Operation 3.4. Setting up the Reflection Mode Optical m easurements on non-transparent sa mples are perform ed using the reflection mode. An overall view of the reflection mode is shown in Fig. 3-17.
  • Page 51 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Preparations for operatio ns on the “reflectio n mode” optical schem e require the following steps: 1. Watching the probe tip through the orifice 2 ( Fig. 3-19), set it at the cente r of this orifice using the micrometer screws 1.

  • Page 52: Measurement Procedure

    Chapter 4. Measurement Procedure 4. Measurement Procedure As it has been pointed out in item on page 15, Solver SNOM can p erform measurements using several m easurement techniques. T hose are the Shear Force Microscopy (ShFM) technique an d the techniques of...

  • Page 53: Etting Of The Instrument Configuration

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 4.3. Setting of the Instrument Configuration To configure the system, select the option f rom the lis t of conf igurations of the SNOM1 program main menu (Fig. 4-1). Fig. 4-1. Setting of the Instrument Configuration...

  • Page 54: Adjusting The Scanning Stage Sensors

    Chapter 4. Measurement Procedure Fig. 4-3. Sample installed ATTANTION! During operation in the transmission mode, the substrate should be transparent and its thickness should be less than the working distance of the objective. 4.6. Adjusting the scanning stage sensors When selecting the scanning-by-sample m ode, after the sample has been m ounted, it is necessary to adjust the sensors of the scanning stage.
  • Page 55 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 3. I ncrease the feedback loop gain coefficient fo r the X-axis until the effect of CL Gain generation becomes visible (Fig. 4-6). CL Gain Fig. 4-6. Effect of generation at high value of 4.

  • Page 56: Installation Of The Measuring Head On The Scanning Stage

    Chapter 4. Measurement Procedure 4.7. Installation of the Measuring Head on the Scanning Stage ATTANTION! Be careful during manipulations with the measuring head: the probe tip is extremely fragile. Avoid any physical contact with it to prevent damage to the probe. After the sample is set on the sample holder of the scanning stage and the probe is installed in the measuring head, perform the following: 1.
  • Page 57 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Fig. 4-9. Fixing the measuring head using the spring 1 – micrometer screws; 2 – hook for the spring 4. Use the m icrometer screws 1 to move th e measuring head till the tip of the probe comes into the region of interest above the sample.

  • Page 58: Search For Resonance Frequency

    Chapter 4. Measurement Procedure NOTE. Before landing, the probe is positioned at a big distance from the sample surface (up to several millimeters). Therefore there is no need (and sometimes possibility) to focus the objective onto the probe tip. It would be enough to locate the light spot from the probe at the center of the field of vision.
  • Page 59 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual NOTE. The probe oscillation amplitude is one of the parameters that can significantly influence the quality of sample surface images measured. To get images with higher resolution and to exert “softer” pressure on the sample, it is desirable to operate the probe at small oscillation amplitudes.
  • Page 60 Chapter 4. Measurement Procedure - Leave the generator output signal frequency, , with no change Frequency (as set by default). c. On the panel of parameters of the synchronous detector Lock-In - Set the synchronous detector gain coefficient equal to 10; Gain - Set the preamplifier gain coefficient equal to 10.

  • Page 61: Setting The Signal Tune_Fork Initial Level

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 4.9. Setting the signal Tune_Fork initial level Set an initial value for the signal within 10÷15 nA by varying the am plitude of Tune_Fork the generator output signal (parameter ), preamplifier gain coefficient (parameter...
  • Page 62 Chapter 4. Measurement Procedure Landing Settings Fig. 4-16. Dialog window 6. Trigger the landing procedure (button Wait till the procedure is complete. The level of the signal changes to the level Tune_Fork and the m essage « » appears in the inform ation window Set Point, ...

  • Page 63: Setting Of The Photomultiplier Module Parameters

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Fig. 4-18. Noise generation The generation can be eliminated by taking the following measures: − Decrease the feedback loop gain coefficient ( FB Gain − Increase the parameter Set Point − Disable the feedback loop. D ecrease the gain coefficient...
  • Page 64 Chapter 4. Measurement Procedure b. Select the driving voltage from the panel of main parameters and set it equal PMT1 to 0 V (Fig. 4-20). Fig. 4-20 2. The output signal from the photom ultiplier ( ) is re quired to b e availab le f or reading from the oscilloscope window.

  • Page 65: Scanning

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 4.12. Scanning 4.12.1. Setting of Scanning Parameters Shear Force Microscopy 1. Open the window of s canning param eters (button on the panel of m ain operations). 2. Select the option from the m enu...
  • Page 66 Chapter 4. Measurement Procedure Scan Setup Fig. 4-25. Dialog window Near-field Optical Microscopy 1. Open the w indow of scanning param eters (button on the panel of Main Operations). 2. Select the method from the drop-down list (list of scanning m ethods) of SNOM Mode the control panel (Fig.
  • Page 67 Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual Scan Setup Fig. 4-28. Dialog window When operating in the “Transm ission Mode” w ith the Z-scann er, f ine f ocus of the objective with respect o f the sam ple surface ca n be achiev ed by m eans of this scanner.

  • Page 68: Triggering Of Scanning

    Chapter 4. Measurement Procedure 4.12.2. Triggering of Scanning Open the shutter of the photomultiplier before starting scanning. Click the button to trigger scanning. This enables line-by-line scanning of the sample. In the case of ShFM scanning, the monitor will display a window with an image of surface topography contained in it (signal ).

  • Page 69: Methods Of Improving Image Quality

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 4.12.3. Methods of Improving Image Quality The following param eters exert significant in fluence on the quality of surface im ages obtained during scanning: the scanning veloci ty, m agnitude of probe-sample interaction...

  • Page 70: Saving Of Measurement Results

    File → Save 2. A dialog window will appear. Choo se a fold er to store the data (by def ault, it is th e folder C:\Program Files\NT-MDT\Nova). 3. Type in a filename and save it with the extension *.mdt.

  • Page 71: Termination Of Measurements

    Solver SNOM. Scanning Near-Field Optical Microscope. Instruction Manual 6. Termination of Measurements To termination of measurements, perform the following steps: 1. Open the feedback loop (button 2. Take the probe away from the sample. Proceed as follows: a. Switch to the...

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