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JEOL JFC-1100 User Instructions page 2

Fine coat ion sputter

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Routine sample coating
Use gloves to handle the samples in order to avoid contamination of your sample and of the chamber.
1. Connect the power cord to the electricity plug.
2. Open the chamber and place the sample(s) on the sample holder (Fig.1).
3. Set the knobs and controls on the panel as follows:
POWER
HV SWITCH
HV CONTROL
VACUUM CONTROL
IMPORTANT: rotate the knobs slowly.
4. Set the POWER switch to ON (the lamp lights up).
5. After about 3 minutes, set the HV switch to DC (the lamp lights up).
6. Gradually turn the HV CONTROL knob clockwise until the voltmeter indicates 400–500 V (the
knob is positioned at 2/3 and the ammeter indicates less than 2 mA).
NOTE: If the ammeter reading is over 2 mA, it indicates a lack of vacuum degree. In this case,
turn off the HV switch and continue evacuation for a while.
7. Rotate the VACUUM knob counterclockwise until the ammeter indicated 5–10 mA at a voltage
reading from 1200 V (the knob is positioned at 7.5/8). The interior of the bell jar turns light red,
indicating that coating is under way (not easy to see in our instrument due to the layers of
coating in the glass and illumination in the room).
8. Continue coating for 5–7 minutes. This gives sufficient coating for microscopy.
9. Set the HV CONTROL knob to 0.
10. Set the HV switch OFF (the lamp goes off).
11. Turn the VACUUM knob fully clockwise.
12. Set the POWER switch to OFF (the lamp goes off). Air leaks into the bell jar with a hissing
sound (which lasts for about 40 seconds).
13. Open the chamber and remove your sample(s).
14. Close the chamber and disconnect the power cord from the electricity plug.
Fig. 1: How to mount specimens for coating.
OFF
OFF
0
10

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