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Wentworth
Laboratories
PEGASUS Operating and Service Manual
3.2
Fixed Pegasus Probe Height Adjustment
Ensure the Pegasus Probe connector is plugged in to number one edge sensor socket at the
rear of the prober, and a needle has been placed in the needle holder
Run the Probe Height facility on the prober to set the Gross and Fine heights.
Should it be required, the platform can be raised and lowered using the Platform adjusting
micrometer at the rear of the prober.
Platform Height Adjustment
Fig.3 Platform height adjustment
The best electrical isolation is achieved when the probe holder is 4.5mm from the
substrate.
Probe Holder
Chuck Plate
4.5mm
Figure 4. Optimum Working Distance Setting
5
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