Wentworth Technology Pegasus S200 Installation And Operation Manual

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Wentworth
Laboratories
Pegasus Probe
Installation and Operation
Issue 2.0, December 2003
The Leader in
ProbeAbility

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Summary of Contents for Wentworth Technology Pegasus S200

  • Page 1 Wentworth Laboratories Pegasus Probe Installation and Operation Issue 2.0, December 2003 The Leader in ProbeAbility ™...
  • Page 3: All Rights Reserved

    Wentworth Laboratories Copyright notice © Wentworth Laboratories Limited, 2002-2003. ALL RIGHTS RESERVED This document is copyrighted by Wentworth Laboratories Limited. No part of this manual may be reproduced or transmitted in any form, by any means (electronic, photocopying, recording, or otherwise) without the prior written permission of Wentworth Laboratories Limited.
  • Page 5 Wentworth Laboratories PEGASUS Operating and Service Manual PEGASUS PROBE - DESCRIPTION The Pegasus Probe was designed for use as a single probe with integrated edge sensor. There are eight mounting positions that can be used for a combination of Pegasus Probes and Inkers.
  • Page 6 Wentworth Laboratories PEGASUS Operating and Service Manual Radial, tangential and height adjustment of the Adjustable Pegasus Probe is easily achieved using the thumbwheels. To achieve optimum probe contact with the device, the amount of probe force required to break the edge sense contact can be adjusted. Replacement of the probe needle is quick and easily achieved without the requirement for adhesives or any special tools.
  • Page 7: Specification

    Wentworth Laboratories PEGASUS Operating and Service Manual SPECIFICATION Fixed Pegasus Probe Adjustment Radial – 12mm coarse Tangential - +/- 3mm Height – 6mm Probe Needle Size – 0.5mm diameter ( 0.020”) Probe Force – from 3g upwards Probe Management – Sprung loaded retention of the probe needle Optional 45°...
  • Page 8: Installation

    Wentworth Laboratories PEGASUS Operating and Service Manual INSTALLATION The Fixed Pegasus Probe can be installed in any of 4 locations. It is attached using the two mounting screws shown in Figure 2. These screws also provide the means of achieving the coarse radial adjustment.
  • Page 9: Fixed Pegasus Probe Height Adjustment

    Wentworth Laboratories PEGASUS Operating and Service Manual Fixed Pegasus Probe Height Adjustment Ensure the Pegasus Probe connector is plugged in to number one edge sensor socket at the rear of the prober, and a needle has been placed in the needle holder Run the Probe Height facility on the prober to set the Gross and Fine heights.
  • Page 10: Setting The Adjustable Pegasus Probe

    Wentworth Laboratories PEGASUS Operating and Service Manual Setting the Adjustable Pegasus Probe If a device has more than one pad, or if multi-die probing is required, the Adjustable Pegasus Probe can be used in addition to the Fixed Pegasus Probe. Mount the Adjustable Pegasus Probe/s in the desired remaining positions and insert the needles.
  • Page 11: Cable Managment

    Wentworth Laboratories PEGASUS Operating and Service Manual Cable Managment Cable management is important to the performance of the Pegasus Probe. The cable from the tester should be attached directly to the connector provided on the side of the Pegasus Probe body and anchored to the side of the body as shown. Connecting the tester cable directly to the needle can influence the performance of the Pegasus Probe, which may be detrimental to the quality of probe mark.
  • Page 12 Wentworth Laboratories PEGASUS Operating and Service Manual Fig 7. Cable Management Clamps Cable clamps are provided on the underside of both sides of the platform to guide the tester and edge sense cables to the rear of the prober. (Fig.7/8) Fig 8.
  • Page 13: Adjustment And Operation

    Wentworth Laboratories PEGASUS Operating and Service Manual ADJUSTMENT & OPERATION Sprung Loaded Needle Clamp Fig 9. Probe Needle Holder The probe needle is inserted into the probe holder by pulling the sprung loaded clamp back towards the Pegasus Probe body (Fig. 9) and inserting the needle through the exposed hole from the underside.
  • Page 14 Wentworth Laboratories PEGASUS Operating and Service Manual Probe Contact Adjustment Several parameters can be adjusted within the S200 and Pegasus Probe configuration to obtain the desired probe mark/ throughput conditions. These are listed below: • Probe Contact Force • S200 Contact Enhancement Parameter •...
  • Page 15 Wentworth Laboratories PEGASUS Operating and Service Manual 4.1.1 Contact Force Adjustment Contact Force Adjustment Screw Figure 10. The contact force adjustment screw is on the left hand side of the probe holder housing. By rotating this screw either clockwise or counter clockwise will increase or decrease the contact force.

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