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TELEDYNE
HASTINGS
INSTRUMENTS
INSTRUCTION MANUAL
MODEL 2002
VACUUM GAUGE
I S O 9 0 0 1
C E R T I F I E D

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  • Page 1 TELEDYNE HASTINGS INSTRUMENTS INSTRUCTION MANUAL MODEL 2002 VACUUM GAUGE I S O 9 0 0 1 C E R T I F I E D...
  • Page 2 By this manual, protection provided By the equipment man be impaired. Hastings Instruments reserves the right to change or modify the design of its equipment without any obligation to provide notification of change or intent to change. Page 2 of 38...
  • Page 3: Table Of Contents

    Table of Contents GENERAL INFORMATION............................4 1.1.................................. 4 EATURES 1.2. 2002 S .............................. 4 ODEL ENSORS 1.3. 2002 C ........................... 4 ODEL ONTROL 1.4................................. 5 PECIFICATIONS INSTALLATION................................6 2.1............................. 6 ECEIVING NSPECTION 2.2................................6 UICK TART 2.3.
  • Page 4: General Information

    7 decades of vacuum from 1x10-4 to 1000 Torr. This instrument is a new design approach based on over 50 years of experience by Hastings Instruments with well-known and widely used thermal conduction vacuum measurement techniques. The Model 2002 is designed for quick, easy installation and will provide the user with long lasting, trouble free, accurate vacuum measurement.
  • Page 5: Specifications

    board is also available. The Model 2002 instrument accepts an external TTL level "Remote Zero" to zero the instrument when another instrument (e.g. an ion gauge) indicates that the pressure is less than 1x10-5 Torr. The standard analog output is linear per decade directly corresponding to the control unit’s display. The Model 2002 comes calibrated for nitrogen.
  • Page 6: Installation

    If your vacuum environment is highly contaminated or has unique fitting requirements, a Hastings filter or special adapter may be needed. Please contact the Hastings Instruments Sales Department for assistance in your system configuration.
  • Page 7: Control Unit Installation

    2.4. Control Unit Installation • Environment: • Indoor use • Altitude up to 2000 meters • Operating temperature range from 50 to 400C • Maximum relative humidity: 80% for temperatures up to 310C decreasing linearly to 50% relative humidity at 400C •...
  • Page 8: Front Panel Operation

    3. Front Panel Operation 3.1. Overall Functional Description The front panel of the control unit is shown in Figure 3.1. The four circular blue buttons are used for the selection of display readout and the input of data. The green data field displays the data as determined by mode selection.
  • Page 9: Run Mode

    The Model 2002 measures pressure that spans more than seven decades. In order to easily display these readings, Hastings Instruments has employed scientific notation. In scientific notation, the mantissa (the fixed point part) is multiplied by some power of 10 (given by the exponent).
  • Page 10: High And Low Set Point Modes

    This will not correct the calibration if the tube has become contaminated or damaged. This reset will not affect the gas selection, units or setpoints. Also see unit’s mode for default calibration restoration. 3.3. High and Low Set Point Modes The Model 2002 provides TTL outputs for process control.
  • Page 11 An important point to be noted is the fact that after the adjustment, the new calibration coefficient is only in temporary memory. If the instrument were unplugged at this point, it would revert back to the original displayed value upon restarting. Place the Model 2002 back in the RUN mode to store all of the current calibration coefficients in permanent memory.
  • Page 12: Gas Mode

    3. Place the instrument in the CAL mode, then simultaneously press the UP and DOWN switches to bypass the interlock. The CAL light will start to flash indicating that the calibration mode has been activated. 4. Press the ZERO switch once if below 6x10-5 Torr otherwise use the UP and DOWN switch to adjust the display of the Model 2002 to match the pressure indicated by the reference.
  • Page 13: Units Mode

    TABLE 1 Gas Mode Displayed Number 0.0………………………..Nitrogen 0.1…………………...……..Argon 0.2…………………...…….Helium 0.3………………...…Water Vapor 0.4………………..……..Custom light will now flash. Use the UP and DOWN switches to individually select the desired code. Return the Model 2002 to the RUN mode. Note: Factory calibration is performed using nitrogen only. Displayed pressure measurements using other gases are based on established gas thermal conductivity data.
  • Page 14: Rear Panel Description

    4. Rear Panel Description A schematic of the rear panel of the Model 2002 control unit is shown in Figure 4.2 ( Rear Panel Figure). The transducer is connected to the control unit via an female 9-pin “D” connector on the rear panel. An I/O cable can be connected via a male 9-pin “D”...
  • Page 15 If the analog output voltage is being used in a data acquisition system, the following formulas can be used to calculate pressure. EXP=INT (2*V)-6 MANT=1+18*V-9*(EXP+6) Pressure (Torr)=Mant x 10 Therefore, Note that the INT function simply returns to the first digit in a number. Examples: INT (2.56) = 2 INT (9.87) = 9...
  • Page 16: Ttl Outputs

    4.3. TTL Outputs TTL outputs are provided for process control. High and Low set points are entered on the front panel (see Section 3.4) and TTL signals are generated on the I/O cable in the following manner: 1. When the pressure as indicated by the Model 2002 is above the High set point, the High signal line (pin #3) will be set to a TTL high level (+5 VDC).
  • Page 17 Analog 0-10V OPTION SENSOR CONNECTOR BOARD CONNECTOR Pin# Connection Pin# Connection Sensor Analog Out 1 (1024 Torr) High Bridge (sense) Analog Out 1 (1024 Torr) Shield Bridge-Power Analog Out 1 (1024 Torr) Low Reference Common Common (sense) Piezo / Memory Analog Out 2 (1000 mTorr) Low +12 VDC Analog Out 2 (1000 mTorr) High...
  • Page 18: Theory Of Operation

    5. Theory of Operation The Model 2002 transducer is comprised of two very different sensors which provide a span of measurement extending from 1000 Torr down to less than 1x10-4 Torr. The piezoresistive device is a direct force sensor which provides pressure indication from 1000 Torr down to less than 1 Torr. The thin film Pirani device is a thermal conductivity sensor that provides pressure indication from 100 Torr down to less than 1x10-4 Torr.
  • Page 19 To insure temperature invariance, ⎛ ⎞ ⎜ ⎟ ⎝ ⎠ ⎛ ⎞ − ⎜ ⎟ Therefore ⎝ ⎠ This requires for any change in sensitivity to be countered by an equal but opposite change in applied voltage. The temperature compensation is a network of temperature dependent resistive components and fixed temperature compensation current source compensation, TCR = -TCS.
  • Page 20: Pirani Sensor

    5.2. Pirani Sensor Figure 5.3a shows a thin film Pt resistive element on a one micron thick Si continuous membrane surrounded by a thin film Pt reference resistor on a Si substrate. The membrane is heated to a constant 8 above ambient temperature that is monitored by the substrate resistor.
  • Page 21 Since the first two losses are essentially constant at high vacuum for a given sensor, we can measure these losses and subtract them from the input power which leaves only the rate of heat transmission through the gas (E In the viscous flow regime, the Eg loss is directly dependent on the thermal conductivity of the gas (Kg), the surface area of the membrane, the differential temperature and is inversely proportional to distance between the membrane and the lid.
  • Page 22: Dual Sensor Operation

    ambient temperature pressure surface area of the heated portion of the membrane For nitrogen at a pressure of 760 Torr and a temperature of 20°C the mean free path (l) is less than 1 x 10-7 meters and is inversely proportional to pressure. Since the thermal transfer distance (Dx) is a few micrometers, this sensor will remain in the molecular flow regime at a much higher pressure (10 Torr) than is typical for a thermal vacuum gauge.
  • Page 23: Communications Option Board

    6. Communications Option Board Both RS-232 and RS-485 communication interface boards are available as an option for the Model 2002. The communication option boards allow data to be output to a host computer with the appropriate interface. Connection to the RS-232 or RS-485 communication interface boards are via a 9 pin D-subminiature female connector.
  • Page 24: Interface Connector Pin Assignments For Rs-232

    6.1.1. Interface Connector Pin Assignments for RS-485 (Full duplex-4 wire)(Jumper position 2-3). PIN MNEMONIC SIGNAL DESCRIPTION Transmit + Differential data signal levels to the RS-485 bus Transmit - Receive + Differential data signal levels to the RS-485 bus Receive - 6.1.2.
  • Page 25 S<CR> ................ 00044<CR> Transmit Turnaround Delay T<CR> ............Comm Delay: 6<CR> Transmit Selected Units U<CR> ................Torr<CR> Transmit Software Version# V<CR>........Hastings Instruments - Model 2002 ..........Version 1.60 - (07-02-2002)<CR> Parameter Modification Commands Command Description Format Valid Range: Modify High Set point H={m.dd}E{+e}<CR>...
  • Page 26 Notes: The setpoints may also be entered as a decimal number, e.g. [H=760.99<CR>] will be same as entering [H=7.6099E+2<CR>] . When inputting setpoint data, it should be entered in the same Units of Pressure as the presently selected Units of Measurement (i.e. Torr, mbar or Pascal). The data is only checked to be a valid number with a one digit exponent before being accepted.
  • Page 27 Reset / Restore Commands Command Description Format Notes: Escape <Esc>...............Reset Command Buffer ..................(Ignore prior Input) Software Reset /R<CR> ................ Reinitialize Software Restore Factory Defaults /#<CR> ........Restore Calibration Register Default Values Set Zero /0 <CR>..........Store Present Pressure as Instrument ..........
  • Page 28: Relay Interface Option Board

    7. Relay Interface Option Board The relay interface board is available as an option for the Model 2002. Additionally, relays may be added to either the Digital option Board (RS-232 or RS-485) or to the Analog option Board (0-10 Volts or 4-20mA). In either case the relays operate independently of the other options.
  • Page 29: 20 Ma Interface Option Board

    8. 4-20 mA Interface Option Board The Relay option board in the Model 2002 operates off of the set points defined by the user and programmed into the Model 2002 microprocessor. For more information about configuring these set points refer to Section 3 of this manual. The 4-20 mA interface board is available as an option for the Model 2002.
  • Page 30: Operation

    8.2. Operation The 4-20 mA output option board provides dual channel current output linearly proportional to the HPM 2002’s pressure reading. The first channel corresponds to the higher pressure range (0-1024 Torr). The second channel corresponds to the lower pressure range (0-1000mTorr). The equations below give the output currents for a given pressure: ⎛...
  • Page 31: 10V Interface Option Board

    9. 0-10V Interface Option Board The 0-10 V interface board is available as an option for the Model 2002. This board provides dual voltage channels linearly proportional to the HPM 2002’s pressure reading. Please note that use of the Model 2002 with this option requires a CPU with firmware version 1.6 or later for proper operation.
  • Page 32 The 0-10V output option board, provides voltage outputs proportional to the HPM-2002 pressure reading. The first channel corresponds to the higher-pressure range (0-1024) Torr). The second channel corrresponds to the lower pressure range (0-1000mTorr). The equation below gives the output voltage for a given pressure.
  • Page 33: Troubleshooting Guide

    10. Troubleshooting Guide Symptom: Power on - No display activity. Action: 1. Check for proper AC voltage at the outlet. 2. Ensure that the AC power cord connectors are firmly seated in their sockets. (at the outlet and at the instrument.) 3.
  • Page 34: Warranty

    11.1. Warranty Repair Policy Hastings Instruments warrants this product for a period of one year from the date of shipment to be free from defects in material and workmanship. This warranty does not apply to defects or failures resulting from unauthorized modification, misuse or mishandling of the product.
  • Page 35: Diagrams And Drawings

    12. Diagrams and Drawings Page 35 of 38 149-072011 Model 2002 Vacuum Gauge...
  • Page 36 Page 36 of 38 149-072011 Model 2002 Vacuum Gauge...
  • Page 37 Model 2002 Outline Dimensions Page 37 of 38 149-072011 Model 2002 Vacuum Gauge...
  • Page 38 Page 38 of 38 149-072011 Model 2002 Vacuum Gauge...

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