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SRS Labs UGA100 Operation Manual And Programming Reference

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Operation Manual and
Programming Reference
Universal Gas Analyzers
UGA100, UGA200, UGA300
Stanford Research Systems
·
Revision 1.6
Feb., 2018

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  • Page 1 Operation Manual and Programming Reference Universal Gas Analyzers UGA100, UGA200, UGA300 Stanford Research Systems · Revision 1.6 Feb., 2018...
  • Page 2 Certification Stanford Research Systems certifies that this product met its published specifications at the time of shipment. Warranty This Stanford Research Systems product is warranted against defects in materials and workman- ship for a period of one (1) year from the date of shipment. Service For warranty service or repair, this product must be returned to a Stanford Research Systems authorized service facility.

  • Page 3: Table Of Contents

    Contents Safety ....Symbols ....Checklist ....Materials List .

  • Page 4: Safety

    Safety Warning Hazardous voltages, capable of causing injury or death, are present in this instrument. Use extreme caution whenever the top back and the bottom covers of the instrument are removed. Always unplug the unit while removing those covers. Ventilation The UGA system requires forced air cooling to operate at a reason- able temperature.
  • Page 5 Symbols on SRS products Symbol Description Protective bonding terminal Alternating current Caution - risk of electric shock Frame or chassis terminal Caution - refer to accompanying documents Earth (ground) terminal Battery Fuse On (supply) Off (supply) UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...

  • Page 6: Checklist

    Checklist Open the box(es) and inspect all components of the UGA system. Report any damage to Stanford Research Systems immediately. Compare the contents of the shipping boxes against your original order and the checklist below. Report any discrepancies to Stan- ford Research Systems immediately.

  • Page 7: Materials List

    Materials List SRS receives many requests for information about corrosion compatibility. It is our policy not to state the compatibility of our system with various corrosive environments. We simply cannot test the myriad combinations of environments that our customers use. We do provide a list of all the materials exposed to the gas being introduced into the system.

  • Page 8: Specifications

    Specifications Inlet Type capillary: available in stainless steel, PEEK, and glass lined plastic Flowrate 1 to 10 milliliter per minute at atmospheric pressure Response time <200 ms Pressure selectable from 1 X 10 bar to 1 bar Mass Spectrometer Type quadrupole Detector Faraday cup (FC) &...
  • Page 9 General Startup time 5 minutes from full stop Max. Ambient Operating 35 °C Temperature Power requirement either 110 V / 60 Hz or 220 V / 50 Hz (not field selectable) less than 600 W total Dimensions 28 cm H x 30 cm W x 65 cm D ( 11 in H x 12 in W x 26 in D ) without Handles 33 cm H x 35 cm W x 67.5 cm D (13 in H x 14 in W x 27 in D) with Handles...
  • Page 10 viii UGA Series Universal Gas Analyzers Stanford Research Systems...

  • Page 11: Quick Start

    Quick Start Quick Start This section will describe a quick start procedure for operating the UGA and getting air analysis data from a remote PC through Ether- net connection. If you find any damage to the UGA, do not proceed and call SRS at the number below.
  • Page 12 Quick Start • Unscrew the Ultra-Torr fitting and remove the pin (see photo). • Use the pin holder to the right to store the pin. • Insert your capillary into the Ultra-Torr fitting and tighten. • Replace the panel. UGA control through a remote PC •...
  • Page 13 Quick Start • Start the UGA software. The startup window depends on the operating system of the PC. If the software starts with the blank window as shown below, click ‘Main’ menu and select ‘New UGA’ item. (See the following pic- ture.) Then the ‘UGA1’...
  • Page 14 Quick Start • Click ‘OK’ button. • Click on the ‘Main’ tab, and select ‘Connect’. The following ‘Con- nectorDialog’ window will appear. If no instrument name or ID is visible under the connector immediately, hit ‘Update’ button sev- eral times to see the available resource. •...
  • Page 15 Quick Start xiii Start Analog Scan • When the Current Mode indicator shows the ready state, launch RGA software by clicking the ‘Launch RGA’ button. The RGA soft- ware automatically connects to RGA through UGA. • From the RGA software, click the filament button on the toolbar to activate the ionizer.
  • Page 16 Quick Start • Stop the scan. • If you plan to sample atmospheric pressure gas, be sure you fol- lowed the directions under the previous section, “Capillary Con- nection”. • Next, return to the UGA control software and prepare for atmo- spheric sampling.
  • Page 17 Quick Start • The system will read approximately 1.5 Torr at the bypass line, and 5 X 10 Torr for the mass spectrometer chamber if you use the provided capillary. • In the RGA software, start scan again by clicking the ‘GO’ but- ton.
  • Page 18 Quick Start UGA Series Universal Gas Analyzers Stanford Research Systems...
  • Page 19 Chapter 1 UGA Basics In This Chapter This chapter gives the fundamental information on using the Universal Gas Analyzer (UGA) series. Introduction ....1–2 Configuration ....1–6 Front panel .

  • Page 20: Introduction

    1 –  UGA Basics 1.1 Introduction Universal Gas Analyzer (UGA) series instruments are modern mass spectrometers designed for the analysis of light gases. The three systems, 100, 200 and 300, differ only in the mass range they can detect. A quadrupole mass spectrometer (also called a residual gas analyzer or RGA) performs the task of analyzing the gas.
  • Page 21 UGA Basics 1 –  sives can dramatically shorten the usable life of the RGA filament and the TP. The UGA systems can be considered as two main subsystems: gas handling and the analyzer. The analyzer is the quadrupole mass spectrometer, which can only operate in high vacuum.
  • Page 22 1 –  UGA Basics a remote computer. The user can directly control all the pumps, valves and heaters from the front panel. A convenient display al- lows menu-driven operation. A capacitance manometer, Pirani gauge, and an ion gauge monitor the status of the system contin- uously and this data is available on the front panel.
  • Page 23 UGA Basics 1 –  RGA, three gauges, two solenoid valves, heaters and the insulating cabinet, power supplies, and even the multiple capillary inlet valve – fit inside an enclosure of 12”(W) X 11”(H) X 25”(L). The system is designed to run in either horizontal or vertical orientation (See figure 1-2).

  • Page 24: Configuration

    1 –  UGA Basics Figure 1-3. Front Panels 1.2 Configuration 1.2.1 Front Panel There are two front panels on the UGA: the upper panel and the lower panel. The upper panel has two holes: one for capillary con- nection, and another for a DB9 connector which connects the cap- illary heating control cables (heater power and thermocouple ca- bles).

  • Page 25: Rear Panel

    UGA Basics 1 –  Figure 1-4. Rear Panels 1.2.2 Rear Panel On the rear panel (also in two parts), there are a main power AC socket, an electrical ground knob, and a fan for the power distribu- tion PCB on the rear upper panel. There are two BNC connectors - an analog output and a user interlock.

  • Page 26: Top Front Components

    1 –  UGA Basics Figure 1-5a. Top Front Components 1.2.3 Top Front Components In Fig. 1-5a, the main chamber is shown. It consists of a sample line set, a cubic chamber, an RGA analyzer, a chamber heater (CHA), and a thermocouple. The sample line set is composed of 1/8”-Ultra- Torr connector, sample valve (SV), 40 mm pinhole (50 mm pinhole for Option #3) port, bypass valve (BV), and bypass line.
  • Page 27 UGA Basics 1 –  Figure 1-5b. Top Front Area after the heat insulating box is installed Ultra-torr connection set Sample heating jacket Sample line heater Figure 1-5c. Picture of the sample line heating assembly UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...

  • Page 28: Bottom Components

    1 – 10 UGA Basics 1.2.4 Top Rear Components This area contains all the power supply related components: RGA ECU, a main power supply, an auxiliary power supply, and a power distribution PCB. (Fig. 1-6) Power Distribution PCB Main PS RGA ECU Figure 1-6.Components configuration at top rear Aux PS...
  • Page 29 UGA Basics 1 – 11 ing line, part of bypass line, Main control PCB, Auxiliary control PCB, Ion gauge control PCB, TP control PCB, a speaker, and a TP cooling fan. On the elbow, a heater for system baking is attached. The elbow area is surrounded with an insulating box.

  • Page 30: Covers

    1 – 1 UGA Basics 1.2.6 Covers There are 3 covers; Top front cover, Top back cover, and Bottom cover. (Fig. 1-8) If Option #1 is ordered, a different Top front cover will be used. This optional cover has a slot for multi capillaries con nection.

  • Page 31: Options & Sample Heater Accessory

    UGA Basics 1 – 1 1.3 Options & Sample heater accessory There are three system options for the UGA. Multiple inlet valve option (Option #1), Vacuum purging vent valve option (Option #2), and Hydrogen specified TP upgrade (Option #3). The first two options can be ordered separately and installed by the user.

  • Page 32: Hydrogen Pumping Specified

    1 – 1 UGA Basics The vent valve is installed on the Turbo molecular pump. (See Fig. 1-7b.) For the case of Option #3, it is installed at the roughing line and a 150 mm pinhole tube is in the way before the valve to control the amount of a venting gas input flow.
  • Page 33 UGA Basics 1 – 1 Fig 1-9. Capillary with heater. The connector for heater power and TC is also shown. Figure 1-10. Components for sample line heating in O100HC UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...
  • Page 34 1 – 1 UGA Basics In order to change or connect the capillary for this accessory, follow the procedure below. • Pop off the front upper panel and take out completely. • Disconnect the heater power and TC cable from the connectors on the front insulating box if a heated capillary was connected.(See Fig.
  • Page 35 UGA Basics 1 – 1 Figure 1-12. Final shape of Heated capillary connection UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...
  • Page 36 1 – 1 UGA Basics UGA Series Universal Gas Analyzers Stanford Research Systems...
  • Page 37 Chapter 2 Guide to Operation In This Chapter This chapter gives the user detailed information on controlling the UGA (Universal Gas Analyzer) Series. Introduction ....2–3 Front Panel Operation.

  • Page 38: Options And Sample Heater Accessory

    2 – 2 Guide to Operation Advanced Operation ... 2–4 Interlocks ....2–4 User Interlock Input ..2–5 Diaphragm Pump Tuning .

  • Page 39: Introduction

    Guide to Operation 2 –  2.1 Introduction The UGA can be in one of six modes (5 states,  function): OFF, READY, IDLE, INDIVIDUAL, BAKE, and LEAK TEST. Each state can be reached from the other state with some restric- tions.

  • Page 40: Control Keypad

    2 –  Guide to Operation This keypad shows the status of components by illuminating LED’s. When a component is in the process of changing state, the LED will blink while the UGA microprocessor verifies it is safe to actuate the component. Note that the status keypad has several grey rectangular buttons associated with the components in the UGA. These buttons are shortcuts to menus that will be shown on the display of the control keypad which is beside the status keypad.
  • Page 41 Guide to Operation 2 –  Fig. 2-2. The Control Keypad Display device The display serves two functions. It presents system information, and allows the user to enter menu driven commands. The default function is the information display. You can select a different dis- play (pressures, temperatures, etc.) using the menu system; there- fore we refer to a “selected display”...
  • Page 42 2 –  Guide to Operation Enter button In the menu, this button confirms the selection of a state, a param- eter, or a submenu item. System Error LED This red LED will be lit when the system has a fatal error. An ac- companying error message is shown on the display. A fatal error refers to an error condition that is preventing the UGA from con- tinuing to operate.

  • Page 43: Front Panel Menu System

    Guide to Operation 2 –  2.2.2 Front-Panel Menu System 2.2.2.1 Entering the Menu System You can toggle between the menu system and the selected display using the “Level-up” button. To enter the menu system, push the “Level-up” button on the control keypad. To leave the menu sys- tem, push the “Level-up” button again from the top menu. Whenever the user makes a change from the control menu, the dis- play changes from the menu system to the selected display.

  • Page 44: Automatic Versus Manual

    2 –  Guide to Operation The end branch of each control menu tree is a state change menu. The UGA indicates a state change menu by showing the current state with an asterisk (*). To change the state, move the cursor to the desired state and push the “Enter” button. The detailed menu tree is summarized in Appendix A.

  • Page 45: Base Pressures

    Guide to Operation 2 –  11. Push the “Turbo Pump” button on the status keypad. Turn on the Tubormolecular Pump (TP) with the control keypad. The TP speed can be checked in the TP display. Push the up or down arrow button to see the TP information during the pressure display. Watch the turbo pump speed on the TP display. Wait until the TP reaches full speed (8 kRPM).

  • Page 46: Manual Venting Procedure

    2 – 10 Guide to Operation UGA Settings Case Pressure ranges RP idle General Ready state RP : < .0 Torr TP full speed BP : maximum read- IG on ing (0 Torr) RGA on IG : < .0 x 0-6 Torr RP idle Atmospheric gas in- RP : <...

  • Page 47: System Bake

    Guide to Operation 2 – 11 is set to be off, the vent valve can be turned on manually by pusing RP button and selecting the vent valve (VV) there. (Refer to the pages 2-4 & 2-6 of this chapter.) If VV is not installed, wait until the TP stops completely to open the chamber. 2.2.2.7 Manual Sleeping Procedure Note that this procedure can be accomplished automatically simply by pushing the yellow “Sleep” button on the control keypad. This...

  • Page 48: Leak Test

    2 – 12 Guide to Operation Push the “Level-up” button to enter the main menu of UGA. Select “System Bake”. Select “Bake Time”. Set the baking time in hours (2-00) and press the enter key. Select “Bake Temperature”. Select “Elbow”. Use the arrow keys to set the elbow bake-out temperature (40 - 20 °C) and press the enter key.
  • Page 49 Guide to Operation 2 – 1 Leak test Procedure Push the “Level-up” button to enter the main menu of UGA. Select “Leak test”. Select “Mass Selection” Use the control keypad arrow keys to choose the mass (in AMU) and press the enter key. Select “Audio Volume” Select the desired volume level and press the enter key. Select “ElectronMultipler”...
  • Page 50 2 – 1 Guide to Operation 2.2.3.2 Vent Valve On the front panel, click the Roughing Pump button to enter the RP control menu tree. The last item is the vent valve. Choose “Close” or “Open” as desired. When “Open” is selected, initially the UGA opens the valve for  second, then closes the valve. After 40 seconds, the UGA will open it again for a minute to vent the system.
  • Page 51 Guide to Operation 2 – 1 As can be seen in the table, CM and PG readings (BP and RP dis- play respectively) are critical for UGA operation. If either of these gauges is malfunctioning, the UGA is not operable. If an interlock activates, an error message is produced.
  • Page 52 2 – 1 Guide to Operation completely. By using this BNC connection with a user’s external equipment, the UGA can be safely shut down if an emergency oc- curs. 2.2.4.3 Diaphragm Pump Tuning SRS has already set default values for the power consumed by the diaphragm pumps.

  • Page 53: Remote Operation

    Guide to Operation 2 – 1 2.3 Remote Operation 2.3.1 Overview The software controls the whole UGA system and provides many data acquisition modes, which should fulfill the needs of most us- ers. This user manual discusses those aspects of the instrument that are relevant to controls of UGA and data acquisition from the RGA.
  • Page 54 2 – 1 Guide to Operation Installation of UGA control & RGA software Insert the provided CD into the CD driver. The setup program for UGA control software will be launched automatically. If not, explore the CD and double click the file ‘UGASetup.exe’.
  • Page 55 Guide to Operation 2 – 1 2.3.3 Connection to a PC In order to use this program, at least one UGA must be connected to the PC. There are two ways to connect the UGA to a PC; TCP/IP Ethernet or an RS232 serial connection. In this section, we provide step-by-step instructions for setting up communication.
  • Page 56 2 – 20 Guide to Operation • Follow the same procedure for the “Gateway” item. • Push the “Level-up” button several times to escape the menu tree and enter the display mode. From the RS232 connection; After UGA control software is connected through the RS232 serial port, the TCP/IP parameters (IP address, Subnet Mask, Gateway, User ID, and Password) can be typed in from the software using the ‘Wizard’...
  • Page 57 Guide to Operation 2 – 21 Fig. 2-5. Screenshot of the ‘Network’ tab in the ‘Wizard’ dialog box. • Click the ‘Security’ tab, type in User ID and Password. Fig. 2-6. Screenshot of the ‘Security’ tab in the ‘Wizard’ dialog box.
  • Page 58 2 – 22 Guide to Operation Now the UGA is ready to connect through TCP/IP Ethernet connection. • Launch UGA control program. • Make sure an Ethernet cable is connected between the UGA and a PC. If the connection is active, the yellow LED will be lit on the RJ45 connector.
  • Page 59 Guide to Operation 2 – 2 Fig. 2-8. Screenshot of the ‘User Info’ box for TCP/IP connection. • Type in the proper IP Address, User ID, and password (the same ones set in the UGA). Then click ‘Apply’. The ‘connection settings’ dialog box should have the information typed in.
  • Page 60 2 – 2 Guide to Operation • Make sure the TCP/IP connection is enabled. • Click the ‘OK’ button. This will close the Settings dialog box. • In the ‘Main’ menu, select ‘Connect’. The following ‘ConnectorDialog’ window will appear. Fig. 2-0. Screenshot of UGA control software after selecting ‘Connect’ in the ‘Main’ menu. The available TCP/IP connector is shown •...
  • Page 61 Guide to Operation 2 – 2 Fig. 2-2. Screenshot of UGA control software after proper TCP/IP Ethernet connection. On the title bar, the connection status is shown. Now a user can explore the program by clicking each item on the graph. Refer to the next section (Menus and Displays) for detailed information.
  • Page 62 2 – 2 Guide to Operation 2.3.3.2 RS232 Serial Connection The communication between UGA and a PC through RS232 serial connection is possible with two different baud rates: 28800 and 38400. The baud rate of 38400 is for a general COM port commu- nication between UGA and a PC.
  • Page 63 Guide to Operation 2 – 2 In the ‘Connection Settings’ dialog box, choose the ‘Serial’ tab. Verify that the serial resource is enabled (as shown above). Match the baud rate with UGA setting. Click ‘OK’. Click on the ‘Main’ menu, and select ‘Connect’. If the resources are not shown immediately, click ‘Update’ several times. Fig. 2-4. Screenshot of UGA control software after selecting ‘Connect’...
  • Page 64 2 – 2 Guide to Operation Fig. 2-5. Screenshot of UGA control software after proper serial connection. In the title bar, the connection status is shown. 2.3.4 Menus and Displays The UGA control program is Windows based software written in the C# language using .NET framework. The main user interface window is composed of several areas - Title bar, Menu bar, Mes- sage sub-window, Log sub-window, etc as seen in Fig.
  • Page 65 Guide to Operation 2 – 2 Fig. 2-6. Section indications of UGA control software window. The name for each numbered section is written below.  : Main title bar 2 : Menu bar 3 : UGA instrument number tap 4 : Message board 5 : Log board 6 : RGA software launch button 7 : State indicators for components and options 8 : Operations and displays sub-window 9 : Auto control buttons...
  • Page 66 2 – 0 Guide to Operation Main title bar This bar has the same functions as a normal windows application, such as Title on the left, window control icons on the right. The title also indicates connection status. Menu bar There are two menus on the bar;...
  • Page 67 Guide to Operation 2 – 1 ‘close UGA’ closes the opened control panel. ‘Quit’ submenu closes the program. ‘Instrument Settings’ submenu will open a following pop up dialog box (Fig. 2-18) called Settings. In this box, there are six submenus; Logging, Graph, Bake, Heaters, Units, and Misc. After changing values in this window, click the ‘OK’ button to save the data. Fig. 2-18. Screenshot of the ‘Settings’ dialog box showing the ‘Logging’ tab The ‘Logging’ tab contains all the logging conditions for UGA con- trol as shown above;...
  • Page 68 2 – 2 Guide to Operation Fig. 2-19. Screenshot of the ‘Connection Settings’ dialog box showing the ‘Log Dir’ tab The ‘Graph’ tab controls the options for displaying pressure and temperature data on the Operations and displays sub-window (#8 on Fig. 2-6). If a user checks ‘Dock View’ after selecting some items from the left box, the related data graph will be shown in the sub-window (#8). The graphs will be displayed with the setting interval time. The selected data will be recorded in the data log file,...
  • Page 69 Guide to Operation 2 –  Fig. 2-20 Screenshot of the ‘Instrument Settings’ dialog box showing the ‘Graph’ tab Fig. 2-21. Screen shot of the ‘Settings’ dialog box showing the ‘Bake’ tab UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...
  • Page 70 2 –  Guide to Operation The ‘Bake’ tab contains the parameter settings for the System Bake; System bake time and Baking temperatures of Elbow and Cham- ber. The baking time can be 2 to 00 hours. Each temperature can be set from 0 to 20 C. Setting 0 C means the system will not turn on heaters even heater-on command is selected.
  • Page 71 Guide to Operation 2 –  Fig. 2-23. Screenshot of the ‘Settings’ dialog box showing the ‘Unit’ tab Fig. 2-24. Screenshot of the ‘Settings’ dialog box showing the ‘Misc’ tab In the ‘Misc’ tab, several display items can be selected. ‘Elapsed Time’ shows the period of a UGA state. When the state is changed, it starts a new period. UGA Series Universal Gas Analyzers Phone: (408)744-9040 www.thinkSRS.com...
  • Page 72 2 –  Guide to Operation UGA instrument number tap The UGA control software can control up to 5 UGA’s or UGALT ‘s or UGAPM’s units at the same time. Each control panel is indexed by number eg. UGA, UGA2, UGA3, UGA4, and UGA5. Message board In the Message board, all error and warning messages are shown.
  • Page 73 Guide to Operation 2 –  State indicators for components and options The present states of all the components and options are indicated by LED graphics. If it is lit, the item is on or open. If off, the item is off or closed. If blinking, the item is in transition. The number be- side the ‘Ion Gauge’ text indicates which filament the ion gauge is using now. There are two filaments in an ion gauge. The filament can be selected from the UGA front panel or from the operation window of UGA control software. If the LED for Multiple Inlet is green, it means the valve is installed.
  • Page 74 2 –  Guide to Operation In the Operation tab, there is a component list. The compo- nents are listed under the Manual head. The staus of present state is also written beside each component. The list of IG indicates the current filament used. By clicking the component name, a control bar will appear as shown in the exampe above (‘Turbo Pump’ here). After selecting the desired state, the user should confirm it by click- ing the ‘Apply’ button. By double clicking the component name, the action will be locked as shown for ‘Sample Heat’...
  • Page 75 Guide to Operation 2 –  Launching RGA software from within UGA control software • Check that the connection is established • Check that the RGA is on. If not, turn it on by clicking the ‘RGA’ item in the operation window. Check here Fig.
  • Page 76 2 – 0 Guide to Operation Launching RGA software as a stand-alone application from the Windows (Through RS232 serial connection or Ethernet connection) Through RS232 connection • On Front panel confirm Baud rate is set to 28800. If not, set it. • Check RGA status from the front panel. If RGA is not on, bring UGA to ready state.
  • Page 77 Guide to Operation 2 – 1 Fig. 2-29 Screenshot of RGA connection setting dialog for Ethernet. • Click ‘Add’ button then new data input dialog box will appear (Fig. 2-30). Fig. 2-30. Screenshot of Ethernet data input dialog in RGA.exe • Type in the same network settings as the settings in UGA and click ‘OK’. The port value should be 88 for the UGA. • Click ‘OK’ again to confirm the Ethernet settings. • Click the connection button ( ). The dialog box as seen in Fig.
  • Page 78 2 – 2 Guide to Operation Fig. 2-3. Screenshot of RGA connection dialog box for Ethernet. • Select the proper Ethernet address (in this example, it is 72.25.28.4). • Click the ‘Connect’ button and close the dialog box. • You can now start gas analysis. 2.3.6 Options and Sample Heater accessory 2.3.6.1 Multiple inlet valve The UGA control software shows the present valve position in the...
  • Page 79 Guide to Operation 2 –  Fig. 2-32. Screenshot of Mutiple inlet valve control. The present position is displayed in the component state section and also the operation sub-window. 2.3.6.2 Vent valve In the UGA control software, click the vent valve (Fig. 2-33). Choose the appropriate action menu item;...
  • Page 80 2 –  Guide to Operation Fig. 2-33. Screenshot of the Vent valve control on the UGA control software. 2.3.6.3 Hydrogen pumping specified TP With the option 3 of UGA, a normal TP will be replaced with an upgraded TP, which is specialized for pumping low mass mol- ecules, like H2.
  • Page 81 Chapter 3 Remote Programming In This Chapter This chapter discusses remote programming of the UGA. 3. Introduction ... 3–3 Communication via RS232 ..3–3 Communication via Ethernet ..3–3 Command format .
  • Page 82 Query commands ... 3–5 ZQID? ..... 3–5 ZQFV? ..... 3–5 ZQSN? .

  • Page 83: Introduction

    Remote Programming 3 – 3 3.1 Introduction The UGA may be controlled via either Ethernet interface or RS-232 interface remotely. See the chapter 2 of this manual for how to get connected. 3.1.1 Communication via RS-232 The UGA uses a DB9 connector for serial communications. The female DB9 connector on the UGA is configured as a DCE (transmit on pin 2, receive on pin 3) device and supports CTS/RTS hardware handshaking.

  • Page 84: Command Syntax

    3 –  Remote Programming processed by UGA main controller, and the other is the RGA com- mand set which is processed by RGA controller. A command start- ing with a ‘Z’ is handled by the UGA main controller, and a com- mand starting with other characters is handled the RGA controller.

  • Page 85: Commands

    Remote Programming 3 –  Do NOT send ( ) or { } as part of the command. For example, the command sequence ZPTB(?) i {, j} is used as follows. ZPTB, 05 Set the bake temperature for the chamber heater () to ZPTB?  Query the bake temperature for the chamber heater ().

  • Page 86: Zmsp

    3 –  Remote Programming ZMSP Stop The ZMSP command initiates STOP mode. Turn off all the components according to the automated STOP sequence. Example ZMSP begins STOP mode. Errors and warnings ZMSP should work in any condition. Sleep ZMSL The ZMSL command initiates SLEEP mode. It puts the UGA to IDLE state from READY state.

  • Page 87: Zmbk (?) {I

    Remote Programming 3 –  ZMBK (?) {i} System Bake mode The ZMBK i command turns the system bake mode Off (i=0) or On (i=1). The ZMBK? command returns whether the system bake mode is On or Off. Example ZMBK  starts the system bake. ZMBK? returns the state of the Bake mode, On(1) or Off(0). Errors and warnings The command is ignored if any of these conditions are true. Warning “Leak Test ON” Warning 51 “Pressure Check off”...

  • Page 88: Components Control Commands

    3 –  Remote Programming 3.2.2 Components control commands Bypass pump Off/On ZCBP (?) {i} The ZCBP i command turns the bypass pump Off (i=0) or On (i=1). The ZCBP? query returns whether the bypass pump is Off (0), On (1), turning on (3 or 4), or turning off (6 or 7). Example ZCBP  Turns the bypass pump On. ZCBP? Returns the state of the bypass pump. Errors and warnings The command is ignored if any of these conditions are true. ZCBP 0 : Warning “Bypass valve OPEN”...

  • Page 89: Zctp (?) {I

    Remote Programming 3 –  Warning “Sample valve OPEN” Warning “Rough pressure HIGH” ZCTP (?) {i} Turbo pump Off/On/Idle The ZCTP i command turns the turbo pump Off (i=0), On(i=1), or Idle(i=2). The ZCTP? query returns whether the turbo pump is Off (0), On (1), Idle (2), turning on (3, 4 or 5), turning off (6 or 7), or turning idle (8, 9 or 10), or in Error state (2). Example ZCTP  Turns the turbo pump On. ZCTP? Returns the state of the turbo pump. Errors and warnings The command is ignored if any of these conditions are true.

  • Page 90: Zcbv (?) {I

    3 – 10 Remote Programming ZCBV (?) {i} Bypass valve Off/On The ZCBV i command turns the bypass valve Closed (i=0) or Open (i=1). The ZCBV? query returns whether the bypass valve is Closed (0), Open (), turning open (3 or 4), turning closed (6 or 7). Example ZCBV  Opens the bypass valve. ZCBV? Returns the state of the bypass valve. Errors and warnings The command is ignored if any of these conditions are true.

  • Page 91: Zcrg (?) {I

    Remote Programming 3 – 11 ZCSV  : Warning 32 “Bypass valve CLOSED”, when ZPAS is off Warning “System Bake On” Error “SV too high” ZCRG (?) {i} RGA Off/On The ZCRG i command turns the RGA Off (i=0) or On (i=1). The ZCRG? query returns whether the RGA is Off (0), On (1), in the leak test mode (2), turning on (3 or 4), turning off (6 or 7), or going into the leak test mode (8 or 9). Example ZCRG  Turns the RGA On.

  • Page 92: Zcvv

    3 – 12 Remote Programming ZCIG 0 Error 78 “IG off failed” ZCIG  Warning “Turbo not ready” Error 74 “IG unexpected off” Error “IG voltage” Error “IG emission” Error “IG too high” ZCIG 2 Warning “Turbo not ready” ZCVV (?) {i} Vent valve Off/On The ZCVV i command turns the vent valve Off (i=0), or On (i=1). The ZCVV? query returns the current vent valve state.

  • Page 93: Zcpc

    Remote Programming 3 – 13 Errors and Warnings The command is ignored if any of these conditions are met. ZCPC  Warning “System Bake ON” Warning “AUTO sequence ON” ZCHT (?) {i} Heaters Off/Bake Heaters On/Sample Heaters On The ZCHT i command turns heaters Off (i=0), the bake heater(s) On (i=1), or the sample heater(s) On(i=2). The ZCHT? query return the current heater state.

  • Page 94: Zcvl

    3 – 1 Remote Programming Errors and warnings The command is ignored if any of these conditions are true. Error “No Mux detected” ZCVL (?) {i} Speaker volume The ZCVL i command set the speaker volume to Off (i=0), Low (i=1), Medium (i=2), or High (i=3). The ZCVL? query returns the current speaker volume. Example ZCVL  Sets the speaker volume to Low. 3.2.3 State Query commands Component states ZBST?
  • Page 95 Remote Programming 3 – 1 ZBCT? Components changed The ZBCT? query returns the component change state bits. This returns only the bits (defined above in the ZBST command) that have changed either from Off to On or from On to Off and also either from Closed to Open or from Open to clsoed, since the ZBCT query was last issued. ZBTT? Components in transition The ZBTT? query returns the component transition bits. If a bit is set, it indicates the corresponding component is in transition either from Off to On, or from On to Off and also either from Closed to Open or from Open to Closed.
  • Page 96 3 – 1 Remote Programming ZQMC? MAC address The ZQMC? query returns the Ethernet media access control (MAC) address of the unit. The numbers are 6 bytes in the hexadecimal format. Example ZQMC? Return the MAC address. ZQAD? i Pressures The ZQAD? i query returns a pressure reading corresponding to the following index.
  • Page 97 Remote Programming 3 – 1 ZQTA? Elbow temperature The ZQTA? query returns the elbow temperature in degrees Celcius. Chamber temperature ZQTB? The ZQTB? query returns the chamber temperature in degrees Celcius Sample inlet temperature ZQTC? The ZQTC? query returns the sample inlet line temperature in degrees Celcius.
  • Page 98 3 – 1 Remote Programming 3.2. Parameter setting commands Parameters changed with the following commands are saved in EEPROM, preserved even after power off, and loaded into system when UGA starts again next time. Bypass pump on-power ZPBO (?) {i} The ZPBO i command sets the bypass pump on- power to a value from 30 % (i=30) to 100 % (i=100).
  • Page 99 Remote Programming 3 – 1 ZPIP (?) {i.i.i.i} IP address The ZPIP i.i.i.i command sets the Internet Protocol (IP) address of the instrument. The ZPIP? query returns the current IP address setting. The parameter change is immediately effective all the time. This means if it is changed, the current Ethernet communication will stop.

  • Page 100: Zpnm (?) {@S

    3 – 20 Remote Programming Example ZPGW 92.68.. Sets the IP default Gateway to 92.68... Errors and Warnings The command is ignored if the following error is issued after the command input. ZPGW i.i.i.i Warning “Bad parameter” ZPNM (?) {@s} TCP/IP login name The ZPNM @ABC command sets the login name of the instrument to ABC for the TCP/IP connection.

  • Page 101: Zpdu (?) {I

    Remote Programming 3 – 21 Examples ZPPW @SRSUGA Sets the password to SRSUGA ZPPW @ Clears the password. With blank login name and password, a user can log into the instru- ment by typing carriage returns only. Errors and Warnings The command is ignored if the following error is issued after the command input.

  • Page 102: Zppu (?) {I

    3 – 22 Remote Programming ZPPU (?) {i} Pressure unit The ZPPU i command sets the pressure unit used for the front panel display:Torr(i=0), Pa(i=1), mbar(i=2), or bar(i=3). The ZPPU? query returns the current pressure unit for the display. This unit selection has NO effect on the unit used by the ZQAD command. ZPAV (?) {i} Automatic vent valve The ZPAV i command turns the automatic vent valve option Off (i=0) or On (i=1). The ZPAV? query returns...

  • Page 103: Zpbt (?) {I

    Remote Programming 3 – 23 ZPBT (?) {i} System bake time The ZPBT command sets and queries the system bake time in hours. It can be set between 2 and 00 hours. The system bake mode will be on for this system bake time, and then will be t urned off.

  • Page 104: Zpdf

    3 – 2 Remote Programming For for the elbow heater and the chamber heater, range is from 0 to 20, and the default value is 05. For sample line heater and capil- lary heater the range is from 0 to 00, and the default value is 80. If a set value for a heater is 0, the heater stays off during the sample mode, and it is not tested for its faulty conditions.
  • Page 105 Chapter 4 UGA Error Messages This chapter lists and explains all the error messag- In This Chapter es displayed on the UGA. Introduction ....4–2 Error messages .

  • Page 106: Introduction

    4 –  UGA Error Messages Introduction The UGA reports various errors as they are detected. When an error is detected, a message is shown on the front panel display and the error is logged for retrieval over the remote interface. Users must also check for RGA head errors.

  • Page 107: Error Messages

    UGA Error Messages 4 –  4.2 Error Messages 4..1 Communication Error Messages  – 8 Reserved “Invalid Command”, The command string does not start with a valid command name. “Incomplete Command”, The command string ends without a ? or a parameter. “Illegal Command”, Either a set only command was issued as a query or a query only command was issued as a set.
  • Page 108 4 – 4 UGA Error Messages “RGA on network”, When TCP/IP connection is open, the serial communication cannot talk to RGA. “Command buffer full”, The UGA received too many commands to process before time critical operations occur. Some of the commands are rejected.

  • Page 109: Warning Error Messages

    UGA Error Messages 4 –  4.. Warning Error Messages “Bypass pump OFF”, The bypass valve is not allowed to open, when the roughing pump is not off (i.e. on or idle) and the bypass pump is off. Reserved “Bypass valve CLOSED”, The sample valve is not allowed to open, when the roughing pump is not off and the bypass valve is CLOSED.
  • Page 110 4 –  UGA Error Messages “Turbo pump running”, The roughing pump is not allowed to turn off, when the turbo pump is not off. “Turbo not ready”, The RGA, the ion gauge, or the bake heater is not allowed to turn on, when the turbo pump is not on nor idle.
  • Page 111 UGA Error Messages 4 –  “AUTO sequence ON”, Pressure Interlock Option is not allowed to change during one of the automatic sequences: start, sleep, and stop. “Interlock triggered”, The user interlock on the back panel is triggered to stop the system.

  • Page 112: Critical Error Messages

    4 –  UGA Error Messages 4.. Critical Error messages “Heater initialize”, Heater temperature settings are not initialized in time, probably due to miscommunication between the main control board and the auxiliary control board. “Elbow Heater T/C”, The thermocouple sensor attached on the elbow is an open circuit.
  • Page 113 UGA Error Messages 4 –  Reserved “IG voltage”, () No power on the ion gauge controller board. (2) The selected IG filament is burnt. (3) The ion gauge failed to maintain the grid voltage. This condition turns off the ion gauge. “IG emission”, The ion gauge failed to maintain the emission current.
  • Page 114 4 – 10 UGA Error Messages “AUX comm. error”, Communication between the main control board and the auxiliary control board did not work properly at least for a second. “Main board reset”, When the main control board powers up, the auxiliary control board reports that the turbo pump is on.
  • Page 115 UGA Error Messages 4 – 11 “BP too high”, () The sample line pressure did not reach .5 Torr in 2 minutes with the sample valve closed. (2) The sample line pressure did not reach 5 Torr in 2 minutes when the sample line was pumping without TP on.
  • Page 116 4 – 1 UGA Error Messages Error 111 – 120 These error conditions are detected by the turbo pump controller. Once one of these errors occurs, the UGA must be power cycled to clear the error. “TP current”, Turbo pump controller output current exceeded 5 A. “No TP connected”, No turbo pump is connected to the controller.
  • Page 117 Chapter 5 Calibration and Input Design In This Chapter This chapter discusses procedures to help the user make accurate measurements with the UGA. Sever- al sections are devoted to calibration and correcting procedures. The last sections discuss specific design for the pressure reduction. 5. Mass Spectrometry Basics .

  • Page 118: Mass Spectrometry Basics

    5 –  Calibration and Input Design 5.1 Mass Spectrometry Basics The RGA can perform both qualitative and quantitative analysis of the gases in a vacuum system. Obtaining spectra with the RGA is very simple. Interpreting the spectra, that is, understanding what the spectra is trying to tell you about your vacuum system requires some work.

  • Page 119: Partial Pressure Measurement

    Calibration and Input Design 5 –  Once all the peaks have been labeled, the next step is to identify the residual gases that have produced the spectrum. A knowledge of the recent history of your system may provide very valuable clues as to the possible gases that may be residuals in the vacuum chamber.
  • Page 120 5 –  Calibration and Input Design formalism presented assumes multiple gas analysis, but is equally valid for single gas measurements. Please consult the suggested references for details and examples of these procedures. The entire mathematical formalism used to derive the partial pres- sures of a mixture based on a single mass spectrum is based on one assumption: The total spectrum is a linear combination of the spectra of the...
  • Page 121 Calibration and Input Design 5 – 5 = ∑ Since all gases have more than one peak in their fragmentation pattern, the number of peaks (M) in a real spectrum is generally larger than the number of gases (g). As a result, the system of equa- tions (3) usually has more equations than unknowns.

  • Page 122: Partial Pressure Sensitivity Factors

    5 –  Calibration and Input Design 5.1.3 Partial Pressure Sensitivity Factors The partial pressure sensitivity of the RGA to a gas g, S , is defined as the ratio of the change (H-H ) in principal mass peak height to the corresponding change (P-P ) in total pressure due to a change in partial pressure of the particular gas species.
  • Page 123 Calibration and Input Design 5 –  During these measurements it is very important to insure that the partial pressures of all other gases in the system are small enough so that they may be neglected. The sensitivity factors calculated can only be applied to situations where the RGA is used with the same operating parameters.

  • Page 124: Single Gas Measurement Example

    5 –  Calibration and Input Design for details on the automated tuning procedures built into the RGA Windows program. Also see the Sensitivity and Electron Multiplier Tuning sections of the RGA Tuning Chapter for more general infor- mation. The Table mode of RGA Windows offers scaling factors for all of its channels eliminating the limitations imposed by the single sensitiv- ity factor on multiple partial pressure calculations.

  • Page 125: Calibration

    Calibration and Input Design 5 –  The peak value, I , can be extracted from a spectral scan or mea- sured directly using the single mass measurement mode of the RGA. For example, a 0 amp peak value corresponds to 9.8 × 0 Torr of Ar.

  • Page 126: Effect Of Total Pressure

    5 – 10 Calibration and Input Design The following sections of this chapter describe several procedures designed to assure that all the calibration conditions described above are satisfied prior to a set of partial pressure measurements. All tuning procedures can be executed from RGA Windows soft- ware.

  • Page 127: Operating Off The Design Pressure

    Calibration and Input Design 5 – 11 where S is the speed of the pump. The speed of the diaphragm pump varies with throughput according to its characteristic curve, referred to as a speed curve. The speed curve is not linear. Because the pump has an ultimate vacuum it can achieve, the intercept of the curve is not even zero.

  • Page 128: Total Pressure And Composition

    5 – 1 Calibration and Input Design its the lowest pressure at the outlet of the capillary, typically to 0.5 mbar. This pressure is the only operating limit; below it gas would flow out of the RGA. With respect to measurements, operating the outlet of the capillary near the ultimate vacuum of the diaphragm pump is inadvisable.

  • Page 129: Calibration Of Partial Pressure

    Calibration and Input Design 5 – 1 for these gasses are at 44 and 28. Referring to the library in the software shows that nitrogen produces a peak at masses 28 and 4 that are 93% and 6% of the partial pressure and that carbon dioxide produces peaks at masses 44 &...
  • Page 130 5 – 1 Calibration and Input Design be set to report ion currents, most users will need to measure par- tial pressure at the inlet of the capillary. To convert between the two, the partial pressure reported by the software is calculated by the formula: pressure reduction factor ×...

  • Page 131: Initial Calibration

    Calibration and Input Design 5 – 15 5.2.1 Initial Calibration Initially, a default value is stored in the RGA for its sensitivity factor. This factor is displayed by selecting the “Head|Get Head Info...” menu item in the software. This value was determined at the fac- tory using a reference ion pressure gauge.

  • Page 132: Basic Recalibration

    5 – 1 Calibration and Input Design 5.2.2 Basic Recalibration Some situations will require recalibration of the instrument. For example: • aging of the diaphragm pump and ionizer filament • small changes in the total pressure at the capillary inlet •...

  • Page 133: Calibration For Multiple Operating Conditions 5-7

    Calibration and Input Design 5 – 1 The instrument is now recalibrated. Note that the new sensitivity factor is only correct when used with .RGA files that contain the matching pressure reduction factor. This procedure can be repeat- ed frequently to make minor adjustments to the overall sensitivity factor.

  • Page 134: Calibration With Fixed Reservoir

    5 – 1 Calibration and Input Design ECU is already connected to another window, disconnect from that window first). The software will now be ready to make measure- ments. It is worth restating that the pressure reduction factor is only ac- curate when used with the matching RGA sensitivity factor.

  • Page 135: Correcting For Multiple Species

    Calibration and Input Design 5 – 1 The background spectrum is correctly measured with the sample valve closed and the bypass valve closed. When the bypass valve is open, the background pressure at the chamber is rising due to the backstreaming through the bypass valve. However, the back- streaming components will be flushed out when the sample valve is open.
  • Page 136 5 – 0 Calibration and Input Design The RGA would have to know what species was causing the ion current at each mass. As an example: is ion current at a m/z of 6 caused by a fragment of H O (O ), a fragment of O , or O...

  • Page 137: Pressure Reducing Inlet

    Calibration and Input Design 5 – 1 without condensing. Without a heat input, a gas will cool as it ex- pands through a capillary and pressure reduction aperture (accord- ing to its Joule-Thompson coefficient). In the UGA system, the ab- solute pressure difference across the aperture is small and the flow rate is small;...
  • Page 138 5 –  Calibration and Input Design If only the first goal where important a single stage pressure reduc- tion would be suitable. For example, about 50 cm of 50 mm capillary would perform the re- quired pressure reduction. In a single stage design, all the gas that enters the capillary is delivered to the spectrometer chamber.

  • Page 139: Flow Calculations

    Calibration and Input Design 5 –  materials commonly used in gas chromatography. The following sections discuss details of the flow of the sample gas within the instrument. 5.3.1 Flow Calculations The pressure and flowrate of the sampled gas can be calculated with simple formulas.
  • Page 140 5 –  Calibration and Input Design Fig. 5-. Schematic of key components of system. For this example there are four points at which the pressure is un- known, P , and P . Applying equation  between each pair of points will yield a set of equations to solve.
  • Page 141 Calibration and Input Design 5 – 5 where again the large pressure drop allows the approximation to be used. Lastly, the turbo pump is an active component that is char- acterized by sample where S is the speed of the pump and has the same units as conduc- tivity (liter s ).

  • Page 142: Diaphragm Pump

    5 –  Calibration and Input Design Equations 2 to 5 completely describe the system. Solution of the entire set would determine all the unknowns, except that there are more unknowns than equations. Typically, the inlet pressure is known and the desired pressure at the spectrometer is known leav- ing 5 unknowns.

  • Page 143: Turbo Pump

    Calibration and Input Design 5 –  A measured speed curve for the diaphragm pump is shown in the Figure 5-3. The speed is the volumetric flowrate at that pressure. Because mechanical pumps have much lower flowrates than turbo pumps, the speed is usually expressed in volume per minute. A pressure of 2 mbar is a typical operating point for the UGA, which means the pump speed is .8 liter min .

  • Page 144: Capillary Design

    5 –  Calibration and Input Design small region of pressures, which determine the operating range of the system. Fig. 5-4. Representative speed curves for two pumps. The speed values have been scaled to show both pumps on the same graph. The pressure is the ex- haust of turbo and the inlet of the diaphragm pump.

  • Page 145: Length & Bore

    Calibration and Input Design 5 –  can achieve the same flowrate and pressure drop. Capillaries are available in several materials. The factors affecting the choice of capillary are: • inlet pressure • required response time • distance to sample point •...
  • Page 146 5 – 0 Calibration and Input Design quence, this strong dependence means the standard manufactur- ing tolerances on bore diameters will cause more uncertainty than the formula itself. A typical 0.005 inch bore capillary might have a ±0% tolerance. While it is reasonable that the bore could vary from 0.0045 to 0.0055 inch, this uncertainty causes the conductivity to vary by about ±40%.

  • Page 147: Materials And Fittings

    Calibration and Input Design 5 – 1 As an example, consider a capillary for atmospheric pressure and an capillary exit pressure of  mbar. From the speed curve for the diaphragm pump, the throughput, Q, is 2.5 × 0 mbar liter s = P x S) and the required conductivity is 2.5 ×...

  • Page 148: Extensions

    5 –  Calibration and Input Design side diameter of plastic capillaries is not round enough to make a good seal to metal ferrule. Graphite ferrules in a metal fitting are a better choice. The graphite will conform to any irregularities in the surface of the capillary.

  • Page 149: References

    Calibration and Input Design 5 –  5.4 References General RGA information Dawson, “Quadrupole Mass Spectrometery and Its Applications”, AIP Press, NY, 995. Drinkwine and D. Lichtman, “Partial Pressure Analyzers and Anal- ysis”, AVS Monograph Series published by the Education Commit- tee of the American Vacuum Society Basford et.
  • Page 150 5 –  Calibration and Input Design Multiple linear regression analysis algorithms William H. Press, et. al., 992, Numerical Recipes in C, The Art of Scientific Computing, Second Edition, Cambridge Univ. Press, sec- tion 5.4, page 67. Bevington, P.R., 1969, Data Reduction and Error Analysis for the Physical Sciences, New York, McGraw-Hill, Chapters 8-9.

  • Page 151: Appendix A Uga Menu Table

    Appendix A –  Appendix A UGA Menu Table (* The bold value is the factory default value.) Top level 2nd level 3rd level 4th level 5th level 6th level Leak Test Off : Stop Leak test & go to the selected display On : Start Leak test &...
  • Page 152 Appendix A –  Top level 2nd level 3rd level 4th level 5th level 6th level Controls Sample Valve Close : Close the sample valve & go to the selected display (continue...) Open : Open the sample valve & go to the selected display Auto Sample Valve Select a state (Off, On) &...

  • Page 153: Appendix B Uga State Diagram

    Appendix A –  Appendix B UGA State Diagram The state diagram is shown below. Each arrow means a state can be reached from the state which an arrow starts. For example, BAKE state (12) can be reached from READY, IDLE, INDIVIDUAL, and OFF. And LEAK TEST function can be reached only from READY, not from any other states.

  • Page 154: Appendix C Calibration Log

    Appendix A –  Appendix C Calibration Log for RGA SRS serial number ___________ In the table below are the results of the calibration of the inlet and capillary. The factor is entered in the pressure reduction factor dialog box (under the Utilities menu) in the RGA software. Al- though the RGA software will store the value for you, a written record is recommended.

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