Table Of Contents - Balzers QMG421C Operating Instructions Manual

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Table
of
contents
1.
Important information
5
4.
Description
11
1,1
About these
operating instructions
5
4.1 Basic
concept 11
1.2
Safety information
5
4.2 Front
panel
13
1.3
Protection from static electricity
5
4.2.1 Display
14
4.2.1.1
Measured value output
(Measure display)
14
1.4 Explanation of symbols
5 4.2.1.2
Parameter entry (Setup display)
15
1.5 Validity
5
4.2.3
Contrast
16
4.2.4
Number
pad
16
2.
Introduction
6
5.
Operation 17
2,1
Features
6
5.1
Initial start
up
17
2.2 System overview
6
5.1.1 Mains power
connection 17
2.2.1
System components
in the
400 family
6
5.1.2 Configuration entries
17
2.2.2 System components
in the
125 family
6
5.1.4
Optimizing the emission current limit values
18
2.2.3
Options 8
5,1.5
Aligning the quadrupole electronics
18
2.2.4 Expansion units
8 5.1.6
After adjustments to the measuring system
or
component replacement
18
3.
Installation
9
5.2 Function groups
19
3
1
Mains power connection
9
5.2.1
<channels>
function group
20
5.2.L1 <select>
function
20
3.2 Options
to
the OC 421
9
5.2,1.2 <detect>
function
20
5.2.1.3 <mass> function 21
3.2.1
Installing
/
removing optional
boards
9
5.2.1.4
<amplif>
function
21
3.3
Additional
modules
9
5.2.1,5
<aux> function 21
3.3.1 Installing
and
removing modules
9
5.2.1.6 <output>
function
22
5.2.1,7
<trip>
function
22
3.4 Installing the QMS
in
a
19" rack 10
5.2.1.8
<integ>
function 23
3.5 Setting>
up>
the OMS>
as
a
bench
unit
10
5.2.2
<general>
function group
24
5.2.2.1 <
dildo> function 24
3.6 Periphery
components
10
5.2.2.2
<config>
function
24
.
5.2.2.3 <error>
function
25
3.7
Cabimg
10
5.2.3
<ion source> function group
26
3.8
Special
applications
10
6.2,3,1 <emiss>
function 26
5.2.3.2
<
v1...v6>
function
26
3.8.1 Test sockets
10
5.2.3.3 <v7...>
function 27
3.8.2 <ctrl>
multipoint connector 10
5,2.4 <operation>
function group
28
3,8.3 <AO>
connector 10
5.2.4.1 <sem
hv>
function
28
3.8.4 <RS232> and<LAN>
connectors 10
5.2.4.2 <ionsrc>
function
28
5.2.4.3 <cycle>
function 29
5.2.4.4
<sem>
function
29
5.2,4.5 <filam>
function
29
5.2.4.6 <run/halt> function 30
5.2.5
Parameters
31
2
Table
of
conten
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oMs421eg.opm