Related Manuals for Granville-Phillips Convectron 275 series
Summary of Contents for Granville-Phillips Convectron 275 series
- Page 1 Series 275 Granville-Phillips Convectron ® ® Vacuum Gauge Bridge Amp PC Board with Analog Output Signal Instruction Manual Instruction manual part number 275331 Revision D - November 2016...
- Page 2 ® ® Vacuum Gauge Bridge Amp PC Board with Analog Output Signal Customer Service / Technical Support: MKS Pressure and Vacuum Measurement Solutions MKS Instruments, Inc., Granville-Phillips Division ® 6450 Dry Creek Parkway Longmont, Colorado 80503 USA Tel: 303-652-4400 Fax: 303-652-2844 Email: mks@mksinst.com...
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Page 3: Table Of Contents
Table of Contents Chapter 1 Safety Instructions ..............5 1.1 Safety Introduction . - Page 4 Notes: Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 5: Chapter 1 Safety Instructions
NOTE: These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact MKS, Granville-Phillips Division at the address on page 2 or the back cover of this instruction manual. -
Page 6: Damage Requiring Service
1 Safety Instructions Do not substitute parts or modify instrument. Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by Granville−Phillips for service and repair to ensure that safety features are maintained. -
Page 7: Overpressure Conditions
1 Safety Instructions 1.3 Overpressure Conditions Series 275 Gauges should not be used above 1000 Torr (1333 mbar, 133 kPa, 19 psi) true pressure. Series 275 instruments are furnished calibrated for N . They also measure the pressure of air correctly within the accuracy of the instrument. -
Page 8: System Grounding
If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required. -
Page 9: Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new Granville-Phillips Products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the complete and exclusive warranty for MKS, Granville-Phillips Division products. This document may be located on our web site at www.mksinst.com, or may be obtained by contacting... - Page 10 1 Safety Instructions Notes: Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 11: Chapter 2 Specifications
Chapter 2 Specifications 2.1 General Specifications • Do not use the Convectron Gauge or control electronics in an area of high vibration, extreme shock, or an environment that exceeds +50 °C during operation. • Do not use the Convectron Gauge to measure pressures of explosive gases. •... -
Page 12: Convectron Gauge Dimensions
2 Specifications 2.3 Convectron Gauge Dimensions Figure 2-1 Convectron Gauge Dimensions Table 2-2 Fitting/Flange Dimensions Fitting Description Dimension H 1/8 NPT pipe thread 1/8 NPT pipe thread / 6.4 cm (2.52 in.) 1/2 inch compression fitting 1/2 inch tubulation VCR-type female fitting 1/4 inch VCR-type female 7.2 cm (2.83 in.) fitting (standard) -
Page 13: Bridge Amplifier Pc Board
2 Specifications 2.4 Bridge Amplifier PC Board Figure 2-2 Bridge Amplifier PC Board Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331... - Page 14 2 Specifications Notes: Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 15: Chapter 3 Installation
Chapter 3 Installation 3.1 Install the Convectron Gauge For proper operation above about 1 Torr, install Convectron gauges with the gauge axis horizontal. To minimize pressure indication errors, avoid installing the Convectron gauge where it will vibrate. Vibration causes convection cooling of the sensor and will cause the pressure indication to be high. For proper operation of the module above 1 Torr, orient the module so the axis is horizontal (see Figure 3-1). -
Page 16: Grounding
3 Installation Figure 3-1 Recommended Convectron Gauge Installation 3.1.2 Grounding Improper grounding could cause product failure, property damage, or serious personal injury. To reduce the risk of product failure, property damage, or serious personal injury, follow ground network requirements for the facility. Maintain all exposed conductors at Earth ground. -
Page 17: Install The Bridge Amplifier Pc Board
3 Installation Figure 3-2 Ground Wire Attached to the Convectron Gauge 3.2 Install the Bridge Amplifier PC Board Install the bridge amplifier PC board in your existing enclosure. Dimensions are given in Figure 3-3. Figure 3-3 Convectron Gauge Bridge Amplifier PC Board Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331... -
Page 18: Install The Interconnect Cable
3 Installation 3.2.1 Install the Interconnect Cable Connect the cable between the bridge amplifier PC board and the Convectron Gauge. See Figure 3-4. Connect +12 Vdc power to the PCB (pins 13, 14, and 15). See Figure 3-4. Connect the analog output wires to monitor pressure output (pins 11 and 12). Figure 3-4 Convectron Gauge to Bridge Amplifier Interconnect Cable Series 275 Convectron Gauge Bridge Amp PC Board... - Page 19 3 Installation Figure 3-5 Convectron Gauge Bridge Amplifier Schematic Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
- Page 20 3 Installation Notes: Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 21: Chapter 4 Operation
Chapter 4 Operation 4.1 Theory of Operation –4 The module measures gas pressures from 1 x 10 Torr to 1000 Torr. Vacuum chamber pressure is measured by a convection-enhanced Pirani heat-loss gauge. The Convectron Gauge operates like a standard Pirani gauge, which employs the principle of a Wheatstone bridge to convert pressure to voltage, but uses convection cooling to enable accurate –4 pressure measurement, when properly calibrated, from 10... -
Page 22: General Precautions
4 Operation As vacuum chamber pressure decreases, the number of molecules in the vacuum chamber and the resulting heat loss from the sensing wire also decrease. Temperature and R resistance therefore increase. The increased resistance through R causes the bridge to become unbalanced and a voltage to develop across the null terminals. -
Page 23: Preparing For Convectron Gauge Operation
4 Operation 4.4 Preparing For Convectron Gauge Operation Install pressure limiting devices calibrated to a level that the vacuum system can safely withstand. In addition, install pressure relief valves or rupture disks that will release pressure at a level considerably below the maximum safe pressure level of the system. Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause... - Page 24 designed for Convectron Gauges to translate pressure readings for gauges made by other manufacturers. Their geometry is very likely different and dangerously high pressures may be produced even at relatively low pressure indications. Figures 4-2 through 4-7 show the true pressure vs. the indicated pressure for eleven commonly used gases.
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Page 25: Examples
4 Operation 4.5.1 Examples Example 1 – Maximum safe indicated pressure. Assume a given vacuum system will withstand an internal pressure of 2000 Torr or 38.7 psia. For safety, you wish to limit the maximum internal pressure to 760 Torr during the backfilling process. Assume you wish to measure the pressure of Freon 22. - Page 26 4 Operation Figure 4-2 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 10 Torr. Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
- Page 27 4 Operation Figure 4-3 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 1000 Torr. Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
- Page 28 4 Operation Figure 4-4 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 1000 Torr. Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
- Page 29 4 Operation Figure 4-5 Convectron Gauge Indicated vs. True Pressure Curve; to 10 mbar. Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
- Page 30 4 Operation Figure 4-6 Convectron Gauge Indicated vs. True Pressure Curve; to 1000 mbar. Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 31: Analog Output Voltage Signal
4 Operation Figure 4-7 Convectron Gauge Indicated vs. True Pressure Curve; to 1000 mbar. 4.6 Analog Output Voltage Signal The analog output voltage signal provides a specific voltage at specific pressures as illustrated in Figure 4-8. Use the pin numbers 11 and 12 of the connector on the bridge amplifier PC board (see Figure 3-4) to use the voltage signal. - Page 32 4 Operation Figure 4-8 Analog Output Voltage Signal Series 275 Convectron Gauge Bridge Amp PC Board Instruction Manual - 275331...
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Page 33: Chapter 5 Service And Maintenance
If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required. -
Page 34: Damage Requiring Service
5 Service and Maintenance 5.2 Damage Requiring Service Disconnect this product from the power source and refer servicing to Qualified Service Personnel if any the following conditions exist: • The gauge cable, power-supply cord, or the analog out cord is damaged. •... -
Page 35: Troubleshooting And Repair
5 Service and Maintenance 5.3 Troubleshooting and Repair 5.3.1 Symptoms and Possible Causes Table 5-1 General Symptoms/Possible Causes. Symptom Possible Causes Solution Output voltage = 0 V 1. The +12 Vdc power supply is 1. Repair or replace the power faulty. -
Page 36: Convectron Gauge Calibration
5 Service and Maintenance 5.3.2 Convectron Gauge Calibration An atmospheric pressure calibration is performed on the Convectron Gauge using N at the factory before the gauge is shipped. The factory calibration sets the atmospheric calibration point for N 760 Torr. Periodic resets of the vacuum chamber calibration point improve the accuracy and repeatability of the Convectron Gauge. -
Page 37: Cleaning A Contaminated Convectron Gauge
5 Service and Maintenance 5.3.4 Cleaning a Contaminated Convectron Gauge The fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can be dangerous to health if inhaled. Only use these solvents in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment. -
Page 38: Baking The Vacuum Chamber With The Convectron Gauge Attached
5 Service and Maintenance 5.3.5 Baking the Vacuum Chamber with the Convectron Gauge Attached Bakeout temperature of the Convectron Gauge must not exceed 150 C (302 Bake the process chamber at the desired temperature for the desired time. The Convectron gauge tube must not exceed 150 Allow the system to cool to ambient temperature and reconnect the cable to the Convectron Gauge. - Page 39 .ction manual part number 275173 Revision A - August 2012...
- Page 40 ® ® Vacuum Gauge Bridge Amp PC Board with Analog Output Signal Customer Service / Technical Support: MKS Pressure and Vacuum Measurement Solutions MKS Instruments, Inc., Granville-Phillips ® Division 6450 Dry Creek Parkway Longmont, Colorado 80503 USA Tel: 303-652-4400 Fax: 303-652-2844 Email: mks@mksinst.com...
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