Description Of The Vacion Pump - Agilent Technologies VacIon Plus 150 Instruction Manual

Description of the VacIon Pump

The Agilent VacIon Plus 150 pumps are ion pumps and are available
in three types:
They operate in the pressure range from 10
Virtually all gases and vapors can be pumped successfully with the
ion pump. The pumping speed will vary depending on the system
pressure, the gas type, and the applied operating voltage. The latter
can be optimized using Agilent controllers to achieve the lowest
possible operating pressure.
The VacIon Plus StarCell pump allows starting from as high as 5x10
mbar, because ions are prevented from bombarding the system and
pump walls at starting pressures, and have high speed for inert gases.
The VacIon Plus Diode and Noble Diode pumps require a lower
starting pressure (i.e. 10
The tantalum in the Noble Diode pump enhances the noble gas
pumping capacity, although it somewhat reduces the high getterable
gas pumping speed that the standard diode pump provides.
The VacIon Plus StarCell is the latest variation of the Triode
configuration. Its patented design makes this ion pump the only one
that can handle a high amount of Noble Gases (better than Noble
Diode and Triode) and Hydrogen (comparable to the Diode).
A positive polarity, high voltage supply is required to operate Diode
and Noble Diode pumps. A negative polarity high voltage supply is
required to operate StarCell pumps since the anode is grounded and
the cathode is held at negative potential.
The inlet ConFlat flange is a 6" (NW 100).
Fig. 3 shows the VacIon Plus 150 pump, Fig. 4 shows the main
assemblies of the pump.
VacIon Plus 150 pumps Instruction Manual
StarCell
Noble Diode
Diode
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Description of the VacIon Pump

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mbar).
87-900-102-01 (E)
Technical Information
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to below 10 mbar.
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