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Omron F3M-S Series Quick Start Manual page 3

Silicon wafer mapping senso

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F3M-S
Specifications Table
- - continued from previous page
Part number
Weight (packed state)
Material
Material
Optical axis
Case
Cable
Accessories
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.
J AUTOMATIC TEACHING FUNCTION
F3M-S6j and F3M-S8j
Power indicator
RUN/TEACH mode selector Teaching indicator
Teaching button
F3M-S12j
RUN/TEACH mode selector
Teaching button
F3M-S625
F3M-S626
Approx. 110 g
Polycarbonate
ABS
Vinyl-insulated, bending type
Spacer and instruction manual
Warning indicator
Power indicator
Teaching indicator
Warning indicator
F3M-S825
F3M-S826
The remote or manual automatic teaching of the F3M-S is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, translucent dummy wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers
(except F3M-S12j).
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.
J ANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
The F3M-S has an answer-back function to warn the user about
setting errors and a self-diagnostic function (except F3M-S626
and F3M-S826) to warn the user about operational errors.
Answer-back Function: Normal or error teaching output turns
ON.
Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.
4
F3M-S
F3M-S1213
F3M-S1225
Approx. 200 g
Approx. 300 g
ABS, aluminum (alumite
treated/clear finish)
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Instruction manual

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