Related Manuals for Omron F3M-S
Summary of Contents for Omron F3M-S
- Page 1 Mapping Sensor F3M-S Increased 13-stage/25-stage batch mapping throughput. Stability detection of SIC dummy wafer contributes to cost reduction. AB-287 Downloaded from Elcodis.com electronic components distributor...
- Page 2 Automatic Teaching Saves Setting Time Re- Trans-parency mote Teaching Available The F3M-S allows the mapping of cassettes that have both The F3M-S has an automatic teaching function that ensures silicon wafers and glass wafers. Furthermore, the F3M-S ac- easy output adjustments within a minimal time.
- Page 3 ABS, aluminum (Alumite coating, Case rial clear finish) Cable Vinyl-insulated, bending type Accessories Spacer and instruction manual Instruction manual * Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details. AB-289 Downloaded from Elcodis.com electronic components distributor...
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Page 4: Output Circuit Diagram
TEACH 0.5~2.5s OPEN Pushed teaching button Answer back function Teaching indicator The remote or manual automatic teaching of the F3M-S is possi- (orange) ble with the following two sensitivity settings: Caution indicator (red) AB-290 Downloaded from Elcodis.com electronic components distributor... -
Page 5: Dimensions (Unit: Mm)
Vinyl insulated Vinyl insulated bending type Flat cord bending type Flat cord Width: 38.1, Pitch: 1.27 Width: 38.1, Pitch: 1.27 (19/0.08 dia.) 30 (19/0.08 dia.) 30 Connector OMRON Connector OMRON 98.6 98.6 XG4E-3031 XG4E-3031 Teaching button Caution indicator (red) Teaching button... - Page 6 19.6 19.5 19.6 19.5 Optical axis Optical axis P = 10 P = 10 10 x 13 = 130 10 x 25 = 250 Connector OMRON Connector OMRON XG4A-3034 XG4A-3034 14.4 14.4 Optical axis Optical axis Optical axis Optical axis...