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Agilent Technologies 5DX Service Manual

Automated x-ray inspection system
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$JLOHQW 7HFKQRORJLHV
Agilent 5DX Service Guide
5DX
Tr…vr†Ã"
Manual Version A
Revision Number
June 26, 2000 11:25 am

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Summary of Contents for Agilent Technologies 5DX

  • Page 1 $JLOHQW 7HFKQRORJLHV Agilent 5DX Service Guide Tr…vr†Ã" Manual Version A Revision Number June 26, 2000 11:25 am...
  • Page 2 5DX Series 3 Emergency Shut Down Procedure In the event of a disaster or system emergency, shut down the 5DX by pressing one of the Emergency Stop Buttons, as shown in the figure below. Emergency Stop Button X-ray On Indicator...
  • Page 3 LIMITED TO, THE IMPLIED WARRANTIES OF NONINFRINGEMENT, MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. Agilent Technologies shall not be liable for errors contained herein, nor for direct, indirect, general, special, incidental or consequen- tial damages in connection with the furnishing, performance, or use of this material.
  • Page 4 AGILENT PRODUCT DURATION OF WARRANTY Agilent 5DX AXI System and Accessories1 (One) Year Agilent warrants Agilent hardware, accessories and supplies against defects in materials and workmanship for the period specified above. If Agilent receives notice of such defects during the warranty period, Agilent will, at its option, either repair or replace products which prove to be defective.
  • Page 5 You have only those rights provided for such Software and Documentation by the applicable FAR or DFARS clause or the Agilent standard software agreement for the product involved. Agilent 5DX Service Guide...
  • Page 6 The Agilent 5DX System utilizes an X-ray Tube operating at 160 kilovolts, 100 microamps shielded within the lead cabinet. The tube is rated for continuous duty operation with beam filtration of 0.07 inches Beryllium and 0.010 inches stainless steel.
  • Page 7 Alternating current (ac). typically connects to the equipment’s metal frame. Indicates the field wiring terminal Direct current (dc). that must be connected to earth ground before operating the equipment — protects against electrical shock in case of fault. Agilent 5DX Service Guide...
  • Page 8 REMOVE POWER and do not use the product until safe operation can be verified by service-trained personnel. If necessary, return the product to a Agilent Technologies Sales and Service Office for service and repair to ensure that safety features are maintained.
  • Page 9 IEC 1010-1 (1990) Incl. Amend 1 (1992)/EN61010-1 (1993) CSA C22.2 #1010.1 (1992) UL 3111 April 1, 1996 Loveland Quality Manager European Contact: Your local Agilent Technologies Sales and Service Office or Agilent Technologies GmbH, Department HQ-TRE, Herrenberger Straße 130, D-71034 Böblingen (FAX: +49-7031-143143). Agilent 5DX Service Guide...
  • Page 10 Electromagnetic Compatibility Requirements 5DX Series 3 Electromagnetic Compatibility Requirements This product complies with EN 55011 (CISPR 11) Group 1, Class A for conducting emissions. The product exceeds the EN55011 (CISPR 11) Group 1, Class A limit for radiated emissions by less than 10 dB when measured on a test site at a distance of 30 meters. Therefore, some site preparations may have to be done in order to comply with the Class A limit in the frequency range of 30 MHz to 1 GHz for radiated emissions at 30 meters from the exterior wall of a building in which the equipment is installed.
  • Page 11 Figure 2: Emergency Stop Locations The Emergency Stop Buttons are located on either side of the 5DX System Main Cabinet just above the input or output barriers. When either Emergency Stop Button is pressed it will immediately interrupt the switched system power. The Emergency Stop Button will lock in the power off position and remain in the locked position until released with the Emergency Stop release key.
  • Page 12 Emergency Stop 5DX Series 3 Warranty and Regulatory Data...

  • Page 13: Table Of Contents

    1. Introduction and Overview What’s in the Agilent 5DX Service Guide? ....... .1-2 What’s New With the Series 3? .
  • Page 14 Agilent 5DX System Training ........
  • Page 15 Panel Handling Subsystem Introduction ........5-2 Agilent 5DX Panel Handling Configurations ......5-4 Panel Handling Modes .
  • Page 16 5DX Series 3 XYZ Stage Panel Conveyor Assemblies ......5-20 XYZ Stage Panel Conveyor Belts ........5-22 Motion Control Assembly .
  • Page 17 Expansion Chassis ...........9-3 Agilent 5DX Service Guide...
  • Page 18 5DX Series 3 10. Maintenance Introduction ............10-2 Maintenance Activity Conventions .

  • Page 19: Introduction And Overview

    In this chapter... This chapter describes the following topics: What’s in the Agilent 5DX Service Guide?, 1-2 What’s New With the Series 3?, 1-3 What is the 5DX Automated X-ray Inspection System?, 1-4 Overview, 1-7 Tr…vr†Ã" Figure 1-1: 5DX Series 3 System...

  • Page 20: What's In The Agilent 5Dx Service Guide

    The section or chapter titled Safety Summary describes necessary precautions that should be taken by personnel that work in close proximity to the 5DX System as well as the safety features of the 5DX. Detailed descriptions and diagrams for each subsystem are provided in the following sections of this manual, including: •...

  • Page 21: What's New With The Series 3

    5DX Series 3 What’s New With the Series 3? What’s New With the Series 3? The Agilent 5DX Series 3 includes the following upgrades and changes from the Series II/2L: • Panel Handling and motion control have been redesigned. •...

  • Page 22: What Is The 5Dx Automated X-Ray Inspection System

    (256 gray scale) processing. The 5DX System is capable of a testing a single or double-sided board or a panel of boards with an area of up to 455 x 455mm (17.5 x 17.5 inches).
  • Page 23 5DX Series 3 What is the 5DX Automated X-ray Inspection System? Figure 1-2 illustrates the X-ray geometry for Transmissive X-ray Imaging and X- ray Laminography in a 3-dimensional imaging plane. 7UDQVPLVVLYH ;UD\ ,PDJLQJ ;UD\ /DPLQRJUDSK\ X-RAY SOURCE DEFECT $ERYH WKH 3ODQH...

  • Page 24: The 5Dx System Process

    Figure 1-3: Test Process Flow Chart The PCA is loaded into the 5DX. For the 5DX to correctly test the solder joints, the PCA has to be aligned. A surface map is made to compensate for variations in the manufacturing process. The solder joints are measured and these measurements are analyzed by the algorithms to determine if they pass or fail.

  • Page 25: 5Dx Overview

    (PHUJHQF\ 6WRS %XWWRQ DQG ;UD\ %XWWRQ DQG ;UD\ 2Q ,QGLFDWRU 2Q ,QGLFDWRU 2XWHU %DUULHU GRANITE BASE ,QQHU %DUULHU 5RWDU\ 6FLQWLOODWRU $VVHPEO\ 9DF,RQ 3XPS 3RZHU 6XSSO\ ;UD\ ,PDJH &DPHUD Figure 1-4: Agilent 5DX System Main Cabinet (Internal Assemblies) Agilent 5DX Service Guide...

  • Page 26: Electronics Bay

    5DX Overview 5DX Series 3 Electronics Bay The electronics bay, shown in the following figures, contains the 5DX System control, communications and processing equipment. Front View The front view, shown in Figure 1-5 identifies the units housed within the electronics bay. Note that in the figure below, the electronics bay is shown without the front door.
  • Page 27 Figure 1-6: 5DX Series 3 Electronics Bay (Rear View) Caution The ac accessory outlets are for Agilent Technologies installed accessories ONLY. Plugging any other equipment into these accessory outlets may cause damage to either the device or the 5DX. Agilent 5DX Service Guide...

  • Page 28: Subsystems Of The Agilent 5Dx System

    5DX Overview 5DX Series 3 Subsystems of the Agilent 5DX System The 5DX System consists of several subsystems. These subsystems provide the overall system functions. A heirarchical diagram is shown in Figure 1-7. X-ray Tube HV/XRAY HV Power Supply Controller...

  • Page 29: Safety Interlock Subsystem

    The Safety Interlock Subsystem prevents the X-ray, Laser and Motion Driver assemblies from operating in the event that any access panel is open. The Safety Interlocks are used to prevent injury to personnel, the 5DX System and printed circuit assemblies under test...

  • Page 30: Panel Handling Subsystem

    Combined, the System Controller and Expansion Chassis provide the necessary hardware I/O connections to operate the 5DX System. The System Controller controls the 5DX System operations. Interaction is provided by the User Interface. The System Controller contains the Frame Grabber PCA, the Transceiver PCA, the floppy and hard disk drives, the DAT tape unit and the CD-ROM drive.

  • Page 31: User Interface

    The User Interface will be covered in this guide for the purpose of performing diagnostics only. See the 5DX User Guide for additional information concerning the User Interface.
  • Page 32 5DX Overview 5DX Series 3 1-14 Introduction and Overview...

  • Page 33: Safety Summary

    In this chapter... This chapter describes the following topics: Safety Summary, 2-2 Warnings, 2-3 Emergency Stop, 2-4 Emergency Procedures, 2-6 X-ray Safety, 2-8 X-ray Safety, 2-10 High Voltage Safety, 2-11 Laser Safety, 2-14 Additional Information, 2-14 Agilent 5DX Service Guide...

  • Page 34: Safety Summary

    All users should be aware of the following areas of safety: • Emergency Stop — How to shut off the 5DX Main Cabinet in an emergency situation. •...

  • Page 35: Warnings

    WARNING There is a service key that can be used to override motion control interlocks for diagnostic purposes. NEVER place any body part (hand, arm, etc.) or any other object inside the 5DX when this override is enabled. This machine is classified as a Class I Laser Product containing a Class IIIB Laser Subsystem, with an output of 780 nM <5 mW.

  • Page 36: Emergency Stop

    127( The AC “Mains” power disconnect is a circuit breaker installed by the end user and is to be located within 15 feet of the 5DX System Power Distribution Unit (PDU). Local codes and needs will define the accessibility, configuration, and size of this disconnect. This disconnect will disconnect all power to the 5DX System.
  • Page 37 Push down the Emergency Stop Button, or toggle the AC “Mains” Disconnect in an emergency situation. The Emergency Stop Button locks OFF when pushed. Tr…vr†Ã" View from the front of the 5DX System. Figure 2-2: Emergency Stop Locations Agilent 5DX Service Guide...

  • Page 38: Emergency Procedures

    Once de-energized, the X-ray Tube emits no radiation. After a disaster that may have resulted in damage to the 5DX System shielding, an X-ray Safety Test of the 5DX must be performed prior to placing it back in operation. Consult the Agilent Response Center before attempting to return the 5DX System to operation.
  • Page 39 5DX Series 3 Emergency Procedures X-ray Control Off Button Figure 2-3: Location of X-ray Control Off Button Agilent 5DX Service Guide...

  • Page 40: X-Ray Safety

    There are a variety of natural and man-made emissions that are classified as radiation. X-rays are included in most definitions. It should be noted that the 5DX System will not produce X-rays unless power is specifically provided to the X-ray Tube, and will cease immediately upon removal of power. In addition, it should be noted that the 5DX System is not designed to admit humans.

  • Page 41: Definition Of A Cabinet X-Ray System

    The 5DX System is certified to produce not more than 0.5 millirem per hour at a distance of 5 cm from the machine surface. Agilent warrants that the 5DX System meets all Federal Regulations regarding a Cabinet Radiography Systems.

  • Page 42: X-Ray Safety

    X-ray Safety Precautions • Do not attempt to defeat the Safety Interlocks. The Safety Interlocks are designed to prevent operation of the 5DX System if the access panels are not in place. • Do not substitute any shielding panels.

  • Page 43: Safety Requirements

    X-ray Tube Mount. High Voltage Safety The 5DX System has no exposed high voltage potentials. High voltages are contained within subsystems, and should only be accessed by Agilent personnel. WARNING This product produces High Voltage potentials. Do not attempt to open any part of the product.

  • Page 44: Power Distribution Unit (Pdu)

    5DX Series 3 Power Distribution Unit (PDU) The 5DX System is powered by line voltage alternating current (ac) of 200 to 415 volts, at 50 or 60 Hertz (cycles), three phase. Prior to distribution to the subsystem modules, this supply voltage is transformed to the appropriate voltage levels for the various components.
  • Page 45 WARNING There is a service key that can be used to override motion control interlocks for diagnostic purposes. NEVER place any body part (hand, arm, etc.) or any other object inside the 5DX when this override is enabled. Agilent 5DX Service Guide...

  • Page 46: Laser Safety

    Interlock. Do not attempt to operate the laser with the access panels open. The 5DX System uses a solid-state laser to perform a Surface Map of the panel. This laser has an output of less than 5 mW (milliwatt) at 780 nm (nanometers, or 10-9 meters).

  • Page 47: Agilent 5Dx System Training

    5DX Series 3 Additional Information Agilent 5DX System Training Agilent strongly recommends the “Agilent 5DX System Service Course” as a prerequisite for maintaining optimal safety standards and performing system servicing. The “Agilent 5DX System Service Course” and the “Agilent 5DX System Operations Course”...
  • Page 48 Additional Information 5DX Series 3 2-16 Safety Summary...

  • Page 49: Safety Interlock Subsystem

    Safety Interlock Subsystem In this chapter... This chapter describes the following topics: Overview, 3-2 Safety Interlock Controller, 3-3 Safety Interlocks, 3-6 Safety Interlock Locations, 3-7 Safety Interlock Switches, 3-8 Safety Interlock Chains, 3-10 Operator Control Console, 3-14 Agilent 5DX Service Guide...

  • Page 50: Overview

    Overview 5DX Series 3 Overview The Safety Interlock Subsystem provides the Agilent 5DX System with an automated integral security system, designed to safeguard personnel from accidental exposure to X-rays, laser light emissions and mechanical operations. The Safety Interlock Subsystem is comprised of the following components: •...

  • Page 51: Safety Interlock Controller

    The E7200-66538 controller has a link to the safety valve. (E7200-66538) Figure 3-1: Safety Interlock Controller The Safety Interlock Controller contains two sets of Light Emitting Diodes (LEDs). There is a set for normal operation and a set for diagnostics. Agilent 5DX Service Guide...

  • Page 52: Normal Operation Leds

    Safety Interlock Controller 5DX Series 3 Normal Operation LEDs • DC Power — When +12 volts dc is present, this green LED will be lit. • Chain 1 — When the +12 volts dc safety interlocks on Chain 1 are closed, this green LED is lit.
  • Page 53 Return the 5DX System to production status by putting the Service Switch in the Normal position. The Normal position is indicated by the white rectangle on the silkscreen.

  • Page 54: Watchdog Timer

    Safety Interlocks 5DX Series 3 Watchdog Timer 127( This feature has not been implemented yet. There are two jumpers on the Safety Interlock Controller. If either of these jumpers is cut, then the Watchdog Timer may trip and shut down X-rays.

  • Page 55: Safety Interlock Locations

    Figure 3-2 Figure 3-7 for locations): • All 5DX System Main Cabinet access panels: • Two sliding access panels located on the lop of the Main Cabinet • Three sets of side access panels, one set on the front, one set on the right side, and one set on the rear •...

  • Page 56: Safety Interlock Switches

    Safety Interlock Switches 5DX Series 3 Safety Interlock Switches There are different types of safety interlock switches within the 5DX System. The type of switch used depends on the application. The sliding access panels use a switch as shown in Figure 3-4.
  • Page 57 The interlocks for the inner barrier (shutter) assembly are shown in Figure 3-7. This is as viewed from the front of the 5DX. The pins are on the right barrier half in each case and the contact blocks are on the left. Contact Block...

  • Page 58: Safety Interlock Chains

    Safety Interlock Chains 5DX Series 3 Safety Interlock Chains The Safety Interlock switches on the Inner Barrier and the Outer Barrier are in parallel. This allows either Outer Barrier to be open when the Inner Barrier is closed, or to have the Inner Barrier open when the Outer Barriers are closed.
  • Page 59 E7200-07952 — Pin Block - goes on the Right Half of the Inner Barrier. • E7200-07953 — Contact Block - goes on the Left Half of the Inner Barrier. Contact Block Pin Block Figure 3-9: Inner Barrier’s Safety Interlock Agilent 5DX Service Guide 3-11...
  • Page 60 Safety Interlock Chains 5DX Series 3 Outer Barrier Safety Interlocks There are two different Safety Interlocks on the Outer Barrier. The locations of the Safety Interlocks are shown in Figure 3-10. The Primary Safety Interlock contains a Contact Block and a Pin Block, as...
  • Page 61 5DX Series 3 Safety Interlock Chains Pin Block Contact Block Figure 3-11: Outer Barrier’s Primary Safety Interlock Plunger Switch Figure 3-12: Outer Barrier’s Secondary Safety Interlock Agilent 5DX Service Guide 3-13...

  • Page 62: Operator Control Console

    Operator Control Console The Operator Control Console provides the user to machine interface that permits operation of the 5DX System. The Operator Control Console provides key control of the hi voltage power supply. The buttons are for enabling or disabling the high voltage power supply.

  • Page 63: Adjusting The Safety Interlocks On The Inner Barrier

    For ease in performing this procedure, use the Stage Movement Controls to move the XYZ Stage Assembly so it is centered in the X direction and at the minimum Y position. The rails should be spaced as far apart as possible. Agilent 5DX Service Guide 3-15...
  • Page 64 Operator Control Console 5DX Series 3 Procedure 1. Select Utilities and press Enter. 2. Select Service and press Enter. 3. Select Panel Handling and press Enter. 4. Select Hardware Control and press Enter. 5. Press 0 (the letter) to put the Hardware Status and Control in Output Mode.
  • Page 65 Inner Barrier halves will hold the Gap Adjuster in place. 23. At this point the ohmmeter should show an open condition. 24. Move the test leads for the ohmmeter to 1 and 6. Again, the ohmmeter should show an open condition. Agilent 5DX Service Guide 3-17...

  • Page 66: Adjusting The Outer Barrier's Primary Safety Interlock

    Operator Control Console 5DX Series 3 25. Remove the Gap Adjuster. To do this, gently pull back on the Inner Barrier half and remove the Gap Adjuster. Guide the Inner Barrier half back into position. 26. Unplug the cable from the Cable Adapter.
  • Page 67 Power Supply to prevent movement of the XYZ Stage Assembly during this procedure. 6. Disconnect the input line for the 5DX System main air. 7. Open both sliding access panels. 8. Attach the test leads for the ohmmeter to the test points on the Primary Safety...
  • Page 68 Operator Control Console 5DX Series 3 9. Set the ohmmeter to the resistance mode. 10. Using a T-10 Torx driver, loosen the two screws indicated in Figure 3-14 holding the Pin Block. 127( The positioning of the Primary Gap Adjuster is very important. If the...
  • Page 69 12. Push down on the Pin Block. 13. Verify that the Outer Barrier is in the closed position and that the ohmmeter indicates zero resistance. 14. Using a T-10 Torx driver, tighten the two screws holding the Pin Block. Agilent 5DX Service Guide 3-21...
  • Page 70 18. Disconnect the test leads of the ohmmeter from the Primary Safety Interlock Contact Block. 19. Close all sliding access panels. 20. Reconnect the 5DX System’s main air input line. 21. Restart the User Interface and run Startup. Turn on the Motion Driver Power Supply when instructed to do so.

  • Page 71: Adjusting The Outer Barrier's Secondary Safety Interlock

    Required Tools • Secondary Gap Adjuster (E7200-07967), shown in Figure 3-18 • 9/16-inch open-end wrench • T-10 Torx driver • Ohmmeter with clip style test leads Lower Slot Higher Slot Button Figure 3-18: Secondary Gap Adjuster Agilent 5DX Service Guide 3-23...
  • Page 72 Power Supply to prevent movement of the XYZ Stage Assembly during this procedure 6. Disconnect the input line for the 5DX System main air. 7. Open both sliding access panels. 8. Using a 5/64-inch hex wrench, remove the two screws holding the Switch, as...
  • Page 73 Switch Test Points Figure 3-19: Secondary Safety Interlock 10. Attach the test leads of the ohmmeter to the test points on the Switch as shown Figure 3-19. 11. Set the ohmmeter to the resistance mode. Agilent 5DX Service Guide 3-25...
  • Page 74 Operator Control Console 5DX Series 3 12. Insert the button of the Secondary Gap Adjuster into the end of the shroud as shown in Figure 3-20. Refer to Figure 3-18 for identification of the button. Figure 3-20: Secondary Gap Adjuster Placement for Setting Shroud Position 13.
  • Page 75 21. Insert the higher slot of the Secondary Gap Adjuster between the Switch and the Plunger as shown in Figure 3-22. To do this, push up on the Outer Barrier and insert the Secondary Gap Adjuster between the Switch and the Plunger. Agilent 5DX Service Guide 3-27...
  • Page 76 Operator Control Console 5DX Series 3 The open end of the Secondary Gap Adjuster fits around the Plunger. Allow the Outer Barrier to close. Figure 3-22: Secondary Gap Adjuster Placement Using Higher Slot 22. Verify that the ohmmeter reads an open condition.

  • Page 77: Power Subsystem

    Supply, 4-17 VacIon Pump Power Supply, 4-17 X-ray High Voltage Power Supply, 4-18 Emergency Stop Buttons and X-Ray Indicators, 4-20 Long Term Shutdown For the Agilent 5DX System, 4-22 Startup Procedure For the Agilent 5DX System, 4-24 Agilent 5DX Service Guide...

  • Page 78: Overview

    Overview 5DX Series 3 Overview The Power Subsystem supplies all of the operating voltages to the various parts of the Agilent 5DX System. The power subsystem, shown in Figure 4-1, provides ac and dc power to the 5DX System. $&...
  • Page 79 X-ray High Voltage Power Supply — provides -160 kilovolts dc power to the X-ray Tube for generation of the electron beam. The Emergency Stop Buttons shut down all switched power in the 5DX System. The following procedures involve many of the Power Subsystem components, and are also included in this chapter: •...

  • Page 80: Power Distribution Unit

    Power Distribution Unit The Power Distribution Unit (PDU) receives AC “Mains” Power and distributes it to the 5DX System. The PDU adjusts factory power to meet the 5DX System operating voltage requirements. The PDU has a power switch used to remove all...

  • Page 81: Input Specifications

    5DX Series 3 Power Distribution Unit A brief discussion of the PDU and how it relates to the 5DX System is provided. For additional information on the E1135C Power Distribution Unit, refer to the manual for it (E1135-90001). Input Specifications The Power Distribution Unit (PDU) is designed to accept world wide input power.

  • Page 82: Unswitched Output Terminals

    Auxiliary Outlets at the Rear of the E1135C PDU Unswitched Output Terminals Unswitched power is energized when the 5DX System is connected to AC “Mains” Power. This unswitched power is only removed if the AC “Mains” Power is switched off, not when the PDU On/Off Switch is turned off. With the E1135C PDU all power is removed if the main breaker (“lock out/tag out”) switch is set to...

  • Page 83: High/Low Line Monitoring/Protection

    PDU may shut off again. The intent of the Low Line Circuit is to protect the 5DX System from damage since a low line drop-out may cause the control circuitry of the 5DX System to lose data and communication with the XYZ Stage Assembly.

  • Page 84: Pdu Circuit Breakers And Fuses

    0.5 amperes at 250 volts ac that provide protection and power to the control circuitry of the PDU. There are two additional input terminals fused at 10 amperes at 250 volts ac that provide protection and unswitched power to the 5DX System.

  • Page 85: Wiring Diagrams

    /DVHU 'LVSODFHPHQW 6HQVRUV 0RWLRQ &RQWURO $VVHPEO\ 2SWLRQDO /DVHU /DVHU  %DFN RI 3'8 9$& 6ZLWFKHG 7KLV ILJXUH VKRZV UHODWLYH SRVLWLRQLQJ RI WKH FRPSRQHQWV ZLWKLQ WKH (OHFWURQLFV %D\ IURQW YLHZ Figure 4-4: Electronics Bay AC Power Diagram (E1135C) Agilent 5DX Service Guide...
  • Page 86 Wiring Diagrams 5DX Series 3 Figure 4-5 shows how the ac power is distributed from the PDU to the components in the Main Cabinet. 9ROWV $& 6ZLWFKHG ;UD\ 2XWOHWV 7RZHU )DQ 9DF,RQ 3XPS 3RZHU 6XSSO\ ;UD\ +LJK 9ROWDJH 3RZHU 6XSSO\...
  • Page 87 Table 4-2: Power Options for 3 Phase Wye (with neutral) POWER Volts AC Phase Freq. OPTION 220/308 230/400 240/415 Figure 4-7 shows the wiring input to the E1135C PDU and the outlet wiring for the mobile workstation table and the expansion chassis. Agilent 5DX Service Guide 4-11...
  • Page 88 Wiring Diagrams 5DX Series 3 ( 0RQLWRU DQG VSHDNHUV  ([SDQVLRQ &KDVVLV LL1 LL2 NEU G 10A 10A $& 0DLQV Figure 4-7: Input and External Unswitched Output Wiring for the PDU 4-12 Power Subsystem...
  • Page 89 +LJK 9ROWDJH 3RZHU 6XSSO\ 2XWOHWV LQ WKH (OHFWURQLFV %D\ IRU )RFXV &RLO 3RZHU 6XSSO\ /RZ 9ROWDJH 3RZHU 6XSSO\ 'LJLWDO ,2 DQG ( %D\ IDQV Figure 4-8: PDU Wiring for Options 0ED, 0EF, 05D, 05C, 05H and 0E6 Agilent 5DX Service Guide 4-13...
  • Page 90 Wiring Diagrams 5DX Series 3 0DLQ &DELQHW *1' *51<(/ *51<(/ *51<(/ 3'8 2XWOHWV %/8( %/8( &% &% &% &% &% &% &% &% &% &% %/8( %/8( 9ROWV $& 6ZLWFKHG *51<(/ 2XWOHWV LQ WKH 0DLQ &DELQHW IRU *51<(/ ;UD\ 7RZHU )DQ 9DF,RQ 3XPS 3RZHU 6XSSO\ DQG 9ROWV $&...

  • Page 91: Low Voltage Assembly

    The Focus Coil Power Supply is an Agilent E3615. This power supply is capable of delivering +20 volts dc at 3 amperes maximum. The Focus Coil Power Supply is used in a constant current mode to power the Focus Coils in the X-ray Tube Assembly. Agilent 5DX Service Guide 4-15...
  • Page 92 Focus Coil Power Supply 5DX Series 3 3RZHU &RUG Power One Power Supply (N7200-66220) Focus Coil Power Supply (T3615A) These two power supplies are on the Low Voltage Power Supply Tray. Wiring information for both is on a label affixed to the rear of the tray.

  • Page 93: Vacion Pump Power Supply

    There are no user serviceable parts inside the VacIon Pump Power Supply. The VacIon Pump Power Supply is located under the Main Cabinet on the 5DX System frame. The VacIon Pump Power Supply provides the required voltages for the VacIon Pump.

  • Page 94: X-Ray High Voltage Power Supply

    X-ray High Voltage Power Supply 5DX Series 3 X-ray High Voltage Power Supply WARNING There are high voltages inside of the X-ray High Voltage Power Supply and running through the High Voltage Cable. There are no User serviceable parts inside of the X-ray High Voltage Power Supply. Do Not attempt to open or otherwise service this item.
  • Page 95 5DX Series 3 X-ray High Voltage Power Supply P08000 AC INPUT 120V-, 50/60Hz P08002 HOST P08004 ENABLE/INTLK P08003 X-RAY UNIT Figure 4-11: X-ray High Voltage Power Supply Connectors Agilent 5DX Service Guide 4-19...

  • Page 96: Emergency Stop Buttons And X-Ray Indicators

    Emergency Stop Button will lock in the power off position and remain in the locked position until released with the Emergency Stop release key. See the Power Subsystem chapter of the Agilent 5DX Series 3 Service Guide for a step-by-step procedure for restoring system power after an Emergency Stop procedure has been performed.
  • Page 97 X-ray Tube Electronics. When the light is ON, X-rays are active. When the light is OFF, X-rays are inactive. X-ray On Indicator Emergency Stop Button (Locking Switch) Emergency Stop Release Keys Tr…vr†Ã" Emergency Stop Button locks when pressed Figure 4-12: Emergency Stop Locations Agilent 5DX Service Guide 4-21...

  • Page 98: Long Term Shutdown For The Agilent 5Dx System

    5. Press the Esc key to return to the System Access menu. 6. Select Quit from 5DX from the System Access menu and press Enter. and press Enter. This will close the window. 7. At the prompt, type exit 8.
  • Page 99 12. Power off the Power Distribution Unit located at the rear of the Electronics Bay. 13. If the 5DX System is being powered down for servicing it is recommended that Lock-Out, Tag-Out Procedures are followed. WARNING Safety Interlocks should NOT be defeated under any circumstances.

  • Page 100: Startup Procedure For The Agilent 5Dx System

    Startup Procedure For the Agilent 5DX System 5DX Series 3 Startup Procedure For the Agilent 5DX System The Startup procedure is the recommended method of bringing the 5DX System up to an operational level. An overview of the steps is shown in Figure 4-14.
  • Page 101 5DX Series 3 Startup Procedure For the Agilent 5DX System 2. The Power Distribution Unit (PDU) provides ac power to the 5DX System. Turn on the PDU by moving the switch to the on position. The PDU is located at the back of the Electronics Bay, as shown in Figure 4-15.
  • Page 102 Startup Procedure For the Agilent 5DX System 5DX Series 3 6. Type a valid user name and password to log on to the 5DX System. 7. The User Interface and Image Window will automatically load. 8. The 5DX Logon dialog box will appear. Type a valid user name and press Enter.
  • Page 103 15. Press the X-ray Control ON button on the Operator Control Console. If X-rays have been off for an extended period of time, then the 5DX System will perform a COLD start. The 5DX will proceed to configure itself to System Ready status.

  • Page 104: Recover From An Emergency Stop

    The status of the XYZ Stage Assembly is unknown if an Emergency Stop has occurred. To avoid damage to 5DX System components, restart the 5DX Software. 8. Double click the 5DX Reset desktop icon. If this icon is not present, type at the command prompt and press Enter. sysstat -kall 9.
  • Page 105 Operation! Press Any Key to Continue Figure 4-19: Warning Dialog Box 13. The 5DX Logon dialog box will appear. Type a valid user name and press Enter. 14. Select Startup from the System Access menu and press Enter. 15. Select Automatic Startup and press Enter.

  • Page 106: System Status Beacon

    The System Status Beacon is permanently attached to the top of the Electronics Bay as shown in Figure 4-20. The System Status Beacon is used to visually indicate the operating condition of the 5DX System. • Red Lamp— Not ready for panel test. •...

  • Page 107: Panel Handling Subsystem

    Panel Handling Subsystem In this chapter... This chapter includes the following topics: Panel Handling Subsystem Introduction, 5-2 Agilent 5DX Panel Handling Configurations, 5-4 SMEMA Interface Standards, 5-6 Panel Handling Subsystem Components, 5-13 X-ray Cabinet and Barriers, 5-14 XYZ Stage Assembly, 5-16...

  • Page 108: Panel Handling Subsystem Introduction

    5DX System. A cut-away side view, as shown in Figure 5-1, shows how a panel moves through the 5DX when in Flow Through or Pass Back modes of operation. Figure 5-1 also shows the Inner Barrier in the closed position.
  • Page 109 XYZ Stage Conveyor Belts. The Panel Clear Sensor detects the outgoing panel and the Inner Barrier closes. After the Inner Barrier is closed, the Outer Barrier is opened. When the panel passes the Panel Clear Sensor, the Outer Barrier closes. Agilent 5DX Service Guide...

  • Page 110: Agilent 5Dx Panel Handling Configurations

    Panels, based on SMEMA compliant signaling events. Panels are loaded and unloaded from the same side of the 5DX. The panels may loaded and unloaded on either the left or the right side of the 5DX depending on customer requirements.
  • Page 111 SMEMA compliant signaling events. Panels are loaded in one side of the 5DX and unloaded from the opposite side of the 5DX. The Agilent 5DX Series 3 System can be configured as follows: •...

  • Page 112: Configuring A System For Right To Left Flow Through

    This option adds a middle rail to the system which provides the ability to load and unload two panels at a time. With the middle rail installed, the 5DX can be configured to load a single panel or dual panels. For additional information about this feature, see Appendix A in the 5DX User Guide.
  • Page 113 The SMEMA Electrical Equipment Interface Standard is a set of specifications to establish a minimum requirement that the equipment must meet. These specifications included the electrical interface requirements to provide the proper movement of printed circuit assemblies through the production line. Agilent 5DX Service Guide...

  • Page 114: Communication Signals

    5DX is the upstream equipment. In some cases, the upstream equipment can actually be the conveyor system or an accumulator. In a production line, the machine that a panel goes to after leaving the 5DX is the downstream equipment.
  • Page 115 5DX. • TRO — Transfer Request Output — The 5DX forces this signal low when it is ready to accept the panel from the upstream equipment. 5DX is ready to...
  • Page 116 The signals between the 5DX System and the downstream equipment are as follows: • SRO — Send Request Output — The 5DX forces this signal low when it is ready to send a panel to the downstream equipment. • TRI — Transfer Request Input — The downstream equipment forces this signal low when it is ready to accept the panel from the 5DX.

  • Page 117: Smeama Connections Through The Digital I/O Assembly

    (SRI) Upstream System Panel In Available equipment forces Available this signal low when it is ready to send a panel to the 5DX. Transfer Request ODC 6 TRO 5DX Ready to SMEMA TRO - The 5DX forces this Output (TRO)

  • Page 118: Panel Handling Subsystem Components

    Function Name I/O Bit Description Description Untested Panel ODC 20 Front Panel Signals: SMEMA UPO - The 5DX uses this Output (UPO) UPO Untested Panel Untested Panel signal to indicate Output that the panel being sent has not been tested.

  • Page 119: Panel Handling Subsystem Components

    The following components and assemblies make up the Panel Handling Subsystem: X-ray Cabinet and Barriers, 5-14 XYZ Stage Assembly, 5-16 Motion Control Assembly, 5-28 Motion Controller PCI Cards, 5-38 Digital I/O Assembly, 5-42 Panel Handling Software, 5-51 Agilent 5DX Service Guide 5-13...

  • Page 120: X-Ray Cabinet And Barriers

    The 5DX System X-ray cabinet uses movable barriers to contain the X-radiation. Depending on the configuration of the 5DX system, the X-radiation at all times is contained by either: the outer cabinet with the outer barriers or the inner cabinet with the inner barrier.

  • Page 121: Inner Cabinet And Inner Barrier

    X-rays, Laser, and Servo Module components will be disabled. In Figure 5-7, the cross-hatched area is the portion of the Main Cabinet defined as the inner cabinet area. The inner barrier is in the closed position. ,QQHU %DUULHU Figure 5-7: Inner cabinet area Agilent 5DX Service Guide 5-15...

  • Page 122: Xyz Stage Assembly

    XYZ Stage Assembly 5DX Series 3 XYZ Stage Assembly The XYZ Stage Assembly is a precision computerized positioning table that provides the movements required to position a panel for inspection. This includes movements in the X-Axis, Y-Axis and Z-Axis. The XYZ Stage Assembly holds and moves the panel from point to point, so that each area of the panel is successively brought into view.

  • Page 123: X-Axis And Y-Axis Servomotors

    • XYZ Stage Panel Conveyor Assemblies — Provides the means for transporting the panel in and out of the 5DX System. The XYZ Stage Conveyor Assemblies are made up of the XYZ Stage Conveyor Rails, Belts and Motors, and the Auto Width Adjust Motors.
  • Page 124 XYZ Stage Assembly 5DX Series 3 The X-Axis and Y-Axis Servomotors receive their drive signals from the Servo Modules located in the Motion Control Assembly and their control signals from Motion Controller PCI #1. X-Axis and Y-Axis Servomotor <$[LV 6HUYRPRWRU <$[LV 6HUYRPRWRU...

  • Page 125: Z-Axis Stepper Motors

    Z-Axis zero or home position. Z-Axis Stepper Motors =$[LV 6WHSSHU 0RWRUV XYZ Stage Assembly Top Down View showing the locations of the Z-Axis Stepper Motors. Figure 5-10: Z-Axis Stepper Motors Agilent 5DX Service Guide 5-19...

  • Page 126: Xyz Stage Panel Conveyor Assemblies

    5DX Series 3 XYZ Stage Panel Conveyor Assemblies All of the panel movement into and out of the 5DX System is accomplished by the Panel Conveyor Assemblies. The Panel Conveyor Assemblies for the 5DX Series 3 System are comprised of the following components: •...
  • Page 127 Assembly. The Panel-in-Place Sensor is an input to the Digital I/O Assembly and can be monitored by running Utilities > Service > Panel Handling > Hardware Control from the 5DX menu and checking the input bits indicated in Table 5-2.

  • Page 128: Xyz Stage Panel Conveyor Belts

    XYZ Stage Assembly 5DX Series 3 Table 5-2: XYZ Stage Panel Conveyor Motors Output Bit Hardware Status and Control Digital I/O Assembly Number Description Description XYZ Stage Belts On/Off Enable XYZ Stage Belts Belt Direction Reversed/Forward Reverse Belt Direction XYZ Stage Panel Conveyor Belts There are two Panel Conveyor Belts within the XYZ Stage Assembly.
  • Page 129 Modules located in the Motion Control Assembly and their control signals from Motion Controller PCI #2. Automatic Width Adjust Motors $XWRPDWLF :LGWK $GMXVW 0RWRUV XYZ Stage Assembly Top Down View showing the locations of the Automatic Width Adjust Motors. Figure 5-13: Automatic Width Adjust (AWA) Motors Agilent 5DX Service Guide 5-23...
  • Page 130 The Panel-in-Place sensor is an input to the Digital I/O Assembly and can be monitored by running Utilities > Service > Panel Handling > Hardware Control from the 5DX menu and checking the input bit indicated in Table 5-3.
  • Page 131 The Panel Mechanical Stop Actuator is driven by an output from the Digital I/O Assembly and can be activated by running Utilities > Service > Panel Handling > Hardware Control from the 5DX menu and selecting the output bit as indicated in Table 5-4.
  • Page 132 5DX Series 3 Panel Clear Sensors There are two to four Panel Clear Sensors within the Main Cabinet. If the 5DX has a middle rail installed, there will be four panel clear sensors. Otherwise, there should only be two. The Panel Clear Sensors are positioned close to the movable barriers.
  • Page 133 The red light on the sensor amplifier should be on when no panels are present. If it in not on, verify that the amplifier switches are set as shown in Figure 5-15. The green light on the sensor amplifier is for stability, and it is not used by the 5DX. Agilent 5DX Service Guide 5-27...

  • Page 134: Motion Control Assembly

    Motion Control Assembly 5DX Series 3 Motion Control Assembly The Motion Control Assembly located in the Electronics Bay provides the controls for moving the X-Axis, Y-Axis, Z-Axis, Rotary Axis, and provides the Auto Width Adjustment of the rails in the XYZ Stage Assembly.

  • Page 135: Motion Control Diagnostic Access Module

    Service Key is installed. Serious damage could occur due to the moving parts. Tools should not be placed in or on top of the 5DX while the Service Key is installed. Damage to the 5DX could occur due to tools coming in contact with moving parts.
  • Page 136 The Service Key for the Diagnostic Access Panel should only be used by trained service professionals. It should only be connected to the Diagnostic Access module while you are troubleshooting or performing specialized service on the 5DX. It should never remain connected during normal 5DX operation. Diagnostic LEDs •...
  • Page 137 Y2 SERVO FAULT Fault LEDs X DIR Y1 DIR R SERVO FAULT Z STEP CONTROLLER ABORT AWA STEP X STEP Y1 STEP Y2 STEP R STEP Service Key Connector Figure 5-17: Motion Control Diagnostic Access Module Agilent 5DX Service Guide 5-31...

  • Page 138: Servo Modules

    Motion Control Assembly 5DX Series 3 Servo Modules There are four Servo Modules as follows: • one for the X-Axis Servomotor, • two for the Y-Axis Servomotors, • and one for the Rotary Servomotor. The Servo Modules are each identical, but they have been programmed to amplify the unique signals for the associated motor.

  • Page 139: Backplane

    All replacement Servo Modules will be sent from the factory unprogrammed. The Servo Module must be programmed after it is installed. A module can be reprogrammed for troubleshooting purposes. For information on programming Servo Modules, see the Repair and Replace Procedure in the 5DX Service Quick Reference Guide. Backplane...

  • Page 140: Motion Enable Control

    In the event that a problem is detected, a detailed software message will display on the 5DX monitor. The Servo Modules are placed in a disabled state and the individual motor relays physically disconnect power to the Servomotor from the associated Servo Module until the source of the problem is resolved.

  • Page 141: Motor Relay Control

    Ã Ã Ã @ Ã Ã Q Ã A Ã Ã  Ã  Ã S Ã Ã 9 Ã 9 Ã 9 Ã @ Ã Figure 5-19: Diagnostic LEDs on the Motor Relay Control Agilent 5DX Service Guide 5-35...
  • Page 142 Servo Module and possible causes. • Controller Fault LED - Illuminates when communication with the 5DX Main Controller or Motion Controllers fails or is intentionally disabled. For example, this will illuminate when the controller or the expansion chassis is powered down.
  • Page 143 The states represented by these LEDs are also available in the Hardware Status and Control software. To view the current states, select Panel Handling > Hardware Control from the Service menu. Select the Fault Sensors tab. Agilent 5DX Service Guide 5-37...

  • Page 144: Motion Controller Pci Cards

    Motion Controller PCI Cards 5DX Series 3 Motion Controller PCI Cards The Motion Controller PCI cards provide the control signals for the Servo Modules for the purpose of panel positioning in the X-Axis, Y-Axis and Z-Axis directions. There are two Motion Controllers (Motion Controller PCI 1 and Motion Controller PCI 2) that are located in the Expansion Chassis within the Electronics Bay.
  • Page 145 3&, EXV 0RWLRQ &RQWUROOHU 3&,  0RWLRQ 3URILOH 6WHS DQG 'LUHFWLRQ 6HUYR 0RGXOH 3RVLWLRQ DQG 3RVLWLRQ (UURU 'ULYH &XUUHQW (QFRGHU &RXQWV 0RWRU 0HFKDQLFDO 4XDGUDWXUH &RQQHFWLRQ (QFRGHU 4( Figure 5-21: X-Axis and Y-Axis Closed Loop Diagram Agilent 5DX Service Guide 5-39...
  • Page 146 Motion Controller PCI Cards 5DX Series 3 Z-Axis control There are four Z-Axis Stepper Motors connected together electrically. All four Z- Axis Stepper Motors are driven by one Stepper Driver. The Stepper Driver is controlled by a single channel on Motion Controller PCI #1. The Z-Axis is...

  • Page 147: Motion Controller Pci 2

    5HTXHVW IURP 6\VWHP &RQWUROOHU 3&, EXV 0RWLRQ &RQWUROOHU 3&,  0RWLRQ 3URILOH 6WHS DQG 'LUHFWLRQ 6HUYR 3RVLWLRQ DQG 0RGXOH 3RVLWLRQ (UURU 'ULYH &XUUHQW 4XDGUDWXUH (QFRGHU 4( 0RWRU 0HFKDQLFDO &RQQHFWLRQ Figure 5-23: Rotary-Axis Closed Loop Diagram Agilent 5DX Service Guide 5-41...

  • Page 148: Digital I/O Assembly

    Digital I/O Assembly 5DX Series 3 Automatic Width Adjust control There are two Automatic Width Adjust (AWA) motors that are connected together electronically. They are both driven by the AWA Stepper Driver in the Motion Control Assembly. The Stepper Driver is controlled by a single channel on Motion Controller PCI #2.
  • Page 149 5DX Series 3 Digital I/O Assembly • Output Direct Current Relays — Handles the output signals for the Panel Clamps, and solenoids. • Motor Relays — Drives the belt motors for the XYZ Stage Assembly. Agilent 5DX Service Guide 5-43...
  • Page 150 Digital I/O Assembly 5DX Series 3 Input Direct Current Relays The Input Direct Current Relays handle the input signals from the sensors in the Panel Handling Subsystem Assemblies and SMEMA inputs from other process equipment. These inputs are converted to a digital zero or one and passed onto the System Controller for processing.
  • Page 151 Right Outer Panel Transport: Right The sensor is The sensor is Barrier Clear Clear/Blocked Panel clear. blocked. Optical Sensor Front Laser Lights/Lasers: Front The laser is The laser is Ready Laser Ready/Not Ready ready. not ready. Agilent 5DX Service Guide 5-45...
  • Page 152 Digital I/O Assembly 5DX Series 3 Table 5-7: Input Direct Current Relay Assignments Digit Description of Hardware Status and LED ON LED OFF al I/O Input Control Indicates Indicates Middle Rail Panel Transport: Right There is a There is no...
  • Page 153 SMEMA SRO - SMT Communication: The 5DX is The 5DX is Panel Out SMEMA SRO Panel ready to send not ready to Available from 5DX Available is a panel to the send a panel False/True downstream to the equipment. downstream equipment.
  • Page 154 Digital I/O Assembly 5DX Series 3 Table 5-8: Output Direct Current Relay Assignments Digit Description of Hardware Status and LED ON LED OFF al I/O Output Control Indicates Indicates SMEMA GBO - SMT Communication: The panel the The panel the...
  • Page 155 Rear SMEMA SMT Communication: The panel the The panel the Rear Panel Signal GPO 5DX is 5DX is Good Panel Out is sending has sending has False/True passed failed inspection. inspection. Agilent 5DX Service Guide 5-49...
  • Page 156 Digital I/O Assembly 5DX Series 3 Motor Relays The motor relays are controlled by Output Direct Current Relays. There are two motor relays as follows: • K1 — Controls the belt motor direction • K2 — Controls the XYZ Stage belt motor...

  • Page 157: Panel Handling Software

    3. Move the stage to the zero height position Using this application with the hardware in any other state could cause severe damage the 5DX system and/or severe damage to a panel in the system. From the Service menu, select Panel Handling > Hardware Control to access the utility.
  • Page 158 Panel Handling Software 5DX Series 3 Figure 5-24: Hardware Status and Control 5-52 Panel Handling Subsystem...

  • Page 159: Pneumatic Subsystem

    Pneumatic Subsystem This chapter describes the following topics: Introduction, 6-2 Pneumatic Subsystem Components, 6-3 Agilent 5DX Service Guide...

  • Page 160: Introduction

    Introduction 5DX Series 3 Introduction The Pneumatic Subsystem provides a computer-controlled air supply used to operate the following components: • Panel Clamps — There are two panel clamps on the XYZ Stage Assembly. Pneumatics are used to actuate the panel clamps that hold the panel in place while it is under test.

  • Page 161: Pneumatic Subsystem Components

    Main Safety Valve, 6-6 Internal Manifold, 6-7 Inner Barrier, 6-8 Barrier Operation, 6-11 Adjusting the Air Cylinder, 6-14 Other Inner Barrier Components, 6-15 Adjustment/Replacement of the Inner Barrier Encoder, 6-16 Setting the Positions for the Encoder, 6-20 Agilent 5DX Service Guide...

  • Page 162: Pneumatic Gauge, Regulator, And Filter Assembly

    To minimize the danger of flying fragments in the event of plastic bowl failure do not remove the metal guard when the 5DX System is in use. Warranties void if 5DX System is used without bowl guard! Certain compressor oils, chemicals, solvents, paints and fumes can cause the plastic bowl to fail.
  • Page 163 (110 psi) Emergency Stop Solenoid Connection Pressure Regulator Pressure Gauge (0-160 Air (Out) Automatically Emergency Purged Filter Stop Exhaust Trap (Air Dump) Assembly with Metal Contaminant Blow Out Figure 6-1: Pneumatic Gauge, Regulator and Filter Assemblies Agilent 5DX Service Guide...

  • Page 164: Main Safety Valve

    Pneumatic Subsystem Components 5DX Series 3 Main Safety Valve This valve provides low pressure air to the Inner Barrier’s Air Cylinder which puts the Inner Barrier in the open position. In this position, the XYZ Stage Assembly can move without hitting the Inner Barrier.

  • Page 165: Internal Manifold

    Each of the three barriers have their own air valves located near the barrier position. 2SHQ )URP 0DLQ 0DQLIROG 2XWOHW &ORVH 5LJKW %RDUG 6WRS %RDUG &ODPS /HIW %RDUG 6WRS Figure 6-3: Stage Air Controller Agilent 5DX Service Guide...

  • Page 166: Inner Barrier

    Pneumatic Subsystem Components 5DX Series 3 Inner Barrier The inner barrier consists of two assemblies which when open allow X-rays within the entire main cabinet. When the inner barrier is closed, X-rays are limited to within the X-ray tower only.
  • Page 167 6FUHZV   IRXU SODFHV RQ HDFK DVVHPEO\ 7ZR RI WKH VFUHZV IRU HDFK EDUULHU DVVHPEO\ DUH DFFHVVHG E\ UHPRYLQJ WKH VKLHOGLQJ WKH RWKHU WZR DUH DFFHVVDEOH YLD WKH VOLGLQJ DFFHVV SDQHOV Figure 6-5: Inner Barrier Assemblies Agilent 5DX Service Guide...
  • Page 168 Pneumatic Subsystem Components 5DX Series 3 Shown in Figure 6-6 are the inner barrier assemblies (photo) and their various components. 3QHXPDWLF &\OLQGHU $LU 9DOYH (QFRGHU 6DIHW\ ,QWHUORFNV Figure 6-6: Inner Barrier Assemblies Dual safety interlocks are used to ensure safety. There are two contact blocks and two pin blocks on either barrier assembly The contact blocks are placed on the left half of the inner barrier.

  • Page 169: Barrier Operation

    Table 6-1: Monitoring the Status or Input Bits Input Bit Description Input Bit Number Left Outer Barrier Closed Left Panel-In-Place Switch Engaged Right Outer Barrier Closed Right Panel-In-Place Switch Engaged Left Outer Barrier Open Right Outer Barrier Open Agilent 5DX Service Guide 6-11...
  • Page 170 Caution System Damage may occur if pneumatic pressure is removed from the Agilent 5DX System and the XYZ Stage Assembly is moved manually when not at the Z-down position. When pneumatic pressure is removed from the 5DX System, the Inner Barrier’s Air Cylinder will lose pressure and the Inner Barrier will drop below the bottom of the X-ray Tube.
  • Page 171 X-ray Tube, will raise this Inner Barrier half and push it towards the other half. Turning the collar counter-clockwise will lower this Inner Barrier half and pull it away from the other half. Agilent 5DX Service Guide 6-13...

  • Page 172: Adjusting The Air Cylinder

    Pneumatic Subsystem Components 5DX Series 3 Adjusting the Air Cylinder 1. At the Command Prompt, type cshtr and press Enter. This command closes the Inner Barrier. 2. At the Command Prompt, type auto and press Enter. This will start the User Interface.

  • Page 173: Other Inner Barrier Components

    One of the key components of the Inner Barrier assembly is the Encoder. The encoder ensures that the Inner Barrier is in the correct position (it works in conjunction with the Safety Interlocks. To adjust or replace the encoder, the following is provided: Agilent 5DX Service Guide 6-15...

  • Page 174: Adjustment/Replacement Of The Inner Barrier Encoder

    Removal of the Encoder Arm Bracket Nut will result in the clearance adjustment being changed. This may cause problems with the Inner Barrier’s movement. 1. Shut down the 5DX System. a. Select System Access and press Enter. b. Select Shutdown and press Enter.
  • Page 175 Figure 6-11 that secure the Encoder Bracket. Retain the screws for later use. Remove the Encoder, Encoder Bracket, and Encoder Arm. Encoder Bracket Screws Encoder Bracket Encoder Screw Figure 6-11: Removing the Encoder Bracket Screws Agilent 5DX Service Guide 6-17...
  • Page 176 Pneumatic Subsystem Components 5DX Series 3 3. Using a 1/6-inch hex wrench, remove the two screws indicated in Figure 6-12 that secure the Encoder Cover. Retain the Encoder Cover and screws for later use. Encoder Cover Screws Figure 6-12: Removing the Encoder Cover Screws 4.
  • Page 177 14. Using a 5/32-inch hex wrench, reinstall the two screws removed in on page 6-17. 15. The Encoder position needs to be set. Refer to the Setting the Positions for the Encoder procedure on page 6-20. Agilent 5DX Service Guide 6-19...

  • Page 178: Setting The Positions For The Encoder

    Pneumatic Subsystem Components 5DX Series 3 Setting the Positions for the Encoder 1. In a Command Prompt window, type ca and press Enter. 127( The setting of @Mach_bLoaderLess in machine.cfg determines which version of the Hardware Status and Control to run.
  • Page 179 10. At the Command Prompt, type shtrpos and press Enter. Figure 6-15 is a sample output from shtrpos. The data in bold represents the Left and Right Inner Barriers’ positions respectively. C:\5DX\R52\DRIVERS>lotest -rTPXZ;UI1; note: GALIL2.EXE CxObj server is running. sending "TPXZ;UI1;"... in message: -0000000165, 0000000189<CR><LF>:: NO_ERROR, command duration=17 ms.
  • Page 180 Pneumatic Subsystem Components 5DX Series 3 19. Locate the following lines and set to the positions recorded: @Mach_LeftInnerBarrierOpen @Mach_LeftInnerBarrierClosed @Mach_RightInnerBarrierOpen @Mach_RightInnerBarrierClosed Using the information in Figure 6-15 Figure 6-16, the values would be: @Mach_LeftInnerBarrierOpen173 @Mach_LeftInnerBarrierClosed-165 @Mach_RightInnerBarrierOpen-182 @Mach_RightInnerBarrierClosed189 20. Press Alt-w to save the file.
  • Page 181 Surface Map Subsystem In this chapter... This chapter describes the following topics: Overview, 7-2 XYZ Panel Orientation (Loaded), 7-2 Surface Map, 7-5 Surface Map Subsystem Components, 7-6 Agilent 5DX Service Guide...

  • Page 182: Surface Map Subsystem

    Map Subsystem Components. XYZ Panel Orientation (Loaded) The first step after loading the panel into the 5DX System is to identify the orientation of the panel on the XYZ Stage Assembly. Optical Encoders provide the X and Y panel orientation in reference to the X-Axis and Y-Axis servomotors to the nearest nanometer (10 meter).

  • Page 183: Panel Alignment

    Movement Error — Failure to achieve the requested move location when compared with the actual settled position of the panel (exceeding acceptable tolerances). In this instance the normal flow of the 5DX System is suspended and an exception is generated. The system will then issue a “retry” for two attempts before generating an error report and stopping further testing.
  • Page 184 XYZ Panel Orientation (Loaded) 5DX Series 3 The 5DX System default Field of View (FOV) is (±400 X ±400 mils). The default FOV is compared with a ±100 mils diameter through-hole solder joint as shown in Figure 7-1. Tolerance is able to vary without substantially affecting system accuracy.

  • Page 185: Surface Map

    Laminographic process, the target will produce an extremely narrow field of focus. When the image of the tungsten target is clearly focused and stable, the distance from the laser to the panel is Agilent 5DX Service Guide...

  • Page 186: Surface Map Subsystem Components

    Surface Map Subsystem Components 5DX Series 3 considered to be adjusted to the ideal Plane of Focus. Confirmation is accomplished once at the FOV and from then on the adjustments for other FOV settings (for example, 200, 320, 650 and 800) are determined by adding or subtracting a predetermined offset value to acquire the correct panel positioning data.
  • Page 187 Camera Detector Laser Array XYZ Stage Assembly Motion Control Drives Ethernet Driver Laser Point Frame Grabber VGA Video Motion Ctrl #2 Motion Ctrl #1 X-ray Scan Controller / Data Bus Figure 7-3: Laser Signal Flow Diagram Agilent 5DX Service Guide...

  • Page 188: Laser Theory Of Operation

    Surface Map Subsystem Components 5DX Series 3 Laser Theory of Operation To develop a Surface Map of a panel reference point, the Laser measures the panel surface by finding the linear displacement (actual location) of the small point of projected laser light. The laser spot is imaged by a miniature lens built into the sensor.

  • Page 189: Laser View Camera

    ENABLE INPUT (-) CHECK LD RMT LASER DIODE REMOTE INTERLOCK DARK BRIGHT FAR NEAR POWER SENSOR LD RMT (-) LASER DIODE REMOTE INTERLOCK (-) ZERO ADJ. TERMINAL FUNCTION FRAME GROUND AC TERMINALS Figure 7-6: Laser Displacement Sensor Agilent 5DX Service Guide...

  • Page 190: Panel View Camera

    Charged Coupled Device (CCD) Camera, which operates on 12 volts dc. The Panel View Camera is used to view a panel during Surface Map setup, and to verify the orientation of the panel inside the 5DX System. CS MOUNT TUBE EXT.

  • Page 191: Imaging Subsystem

    Imaging Subsystem In this chapter... This chapter describes the following topics: Overview, 8-2 Image Generation Process, 8-3 Image Acquisition Process, 8-6 Image Analysis, 8-8 Imaging Subsystem Components, 8-9 Agilent 5DX Service Guide...

  • Page 192: Overview

    Overview 5DX Series 3 Overview The Imaging Subsystem consists of all the components required to generate, acquire and analyze solder joints on a panel. A panel may consist of many components requiring approximately 100 to 400 different views to analyze the solder joints.

  • Page 193: Image Generation Process

    ;UD\ 6FDQ 5RWDWLRQ 3ULQWHG &LUFXLW $VVHPEO\ ;<= 6WDJH $VVHPEO\ 5RWDU\ 6FLQWLOODWRU $VVHPEO\ 5RWDWLRQ 6FLQWLOODWRU 5RWDU\ 6FLQWLOODWRU $VVHPEO\ 0LUURUV /HDGHG *ODVV :LQGRZ 5RWDU\ 0RWLRQ 6HUYRPRWRU &RQWUROOHU  'LJLWDO 5RWDU\ ;UD\ ,PDJH &DPHUD (QFRGHU ([WHUQDO 7ULJJHU Figure 8-1: Image Generation Agilent 5DX Service Guide...
  • Page 194 FOV loaded into the X-ray Scan Controller. The accelerated electrons in the Electron Beam hit the X-ray Target and generates X-rays. When an image is being generated within the Agilent 5DX, X-ray Laminography is the process being used. X-ray Laminography is a process that allows the areas that are not in the Plane of Focus to be averaged out.
  • Page 195 X-rays, resulting in a darker image, where as, the substrate of the panel allows most the X-rays to pass resulting in a lighter image. The Scintillator converts the X-rays into visible light generating the image of the panel. Agilent 5DX Service Guide...

  • Page 196: Image Acquisition Process

    Image Acquisition Process 5DX Series 3 Image Acquisition Process The image that was generated during the Image Generation Process needs to be captured for analysis. There are many things happening simultaneously during the acquisition of an image. For example, the Interface Card is holding the External...
  • Page 197 The System Controller then sends a signal to the Interface Card to begin a Frame Acquisition Cycle. The Interface Card activates the External Trigger Pulse allowing the X-ray Image Camera to gather an image. The image data gathered by the X-ray Image Camera is sent to the Frame Grabbers. Agilent 5DX Service Guide...

  • Page 198: Image Analysis

    These algorithms are used to analyze the characteristics of the solder joints contained within the image data. Refer to the Agilent 5DX User Guide for more information on panel programming, thresholds and algorithms.

  • Page 199: Imaging Subsystem Components

    • System Controller — Analyzes the image data based on the panel program. • Agilent 5DX Software — The program that creates the panel program and provides the utilities for setting up the thresholds within the algorithms. System Controller A complete discussion of the System Controller can be found in the chapter titled, System Controller.

  • Page 200: X-Ray Scan Controller

    Agilent 5DX and the Scintillator is pointing to the rear of the Agilent 5DX is considered to be true home. This position is derived by adding an offset count to the Reference Home position.
  • Page 201 A second sine wave is generated as the Y deflection data increase and decreases. A graphical representation of the resultant X-Axis deflection and the Y-Axis deflection is shown in Figure 8-6. Agilent 5DX Service Guide 8-11...
  • Page 202 Imaging Subsystem Components 5DX Series 3 Y-Axis Quadrant 4 Quadrant 1 ;$[LV 1HJDWLYH ;$[LV 3RVLWLYH <$[LV 3RVLWLYH <$[LV 3RVLWLYH X-Axis Quadrant 3 Quadrant 2 ;$[LV 1HJDWLYH ;$[LV 3RVLWLYH <$[LV 1HJDWLYH <$[LV 1HJDWLYH 3RVLWLYH X-Axis 1HJDWLYH 3RVLWLYH Y-Axis 1HJDWLYH Figure 8-6: Deflection Signals The magnitude of the deflection is defined by the values of the FOV’s look-up...
  • Page 203 The Electron Beam is deflected such that is matches the circumference of the Dump Ring. The generated X-ray emissions are blocked by the Dump Ring. This greatly reduces the amount of X-ray exposure or radiation dose to a panel under test. Agilent 5DX Service Guide 8-13...
  • Page 204 Imaging Subsystem Components 5DX Series 3 Fields of View (Banks 1-3) The Slice image is only a small portion of the panel under test. The Field of View (FOV) represents the area size in mils of the slice image. Figure 8-8 shows how the size of the image changes with respect to the FOV.
  • Page 205 X-ray Tube. Contact the Agilent Response Center regarding ANY changes to the X-ray parameters. The 5DX System is a certified cabinet X-ray system, that has been factory set to conform with Government Regulations concerning health and safety...
  • Page 206 Imaging Subsystem Components 5DX Series 3 The X-ray Tube Assembly contains a variety of components that result in the generation of X-rays. Figure 8-9 shows the components of the X-ray Tube Assembly. X-ray Tube Electronics Pressure Gauge Cathode Filament X-ray Tube Dielectric...
  • Page 207 127( As the bias voltage applied to the Control Grid is increased, less electrons are emitted from the Cathode. The inverse is true when the bias voltage applied is decreased. Agilent 5DX Service Guide 8-17...
  • Page 208 Focus Coil — The Focus Coil electromagnetically concentrates the electron beam before it strikes the X-ray Target. The Focus Coil receives power from the Focus Coil Power Supply located in the Electronics Bay of the 5DX System. The Focus Coil Power Supply is a precision current-controlled power source that supplies the Focus Coil with 15-20 volts dc at 1-3 amperes of conditioned power.
  • Page 209 50 psi. If the dielectric pressure falls below 40psi then X-rays are automatically shut down. 50 psi LED Indicator 40 psi Contacts 40 psi LED Indicator 50 psi Contacts Current Loop Pressure Transducer Analog Output Connection Figure 8-10: X-ray Tube Dielectric Pressure Sensor Agilent 5DX Service Guide 8-19...

  • Page 210: Rotary Scintillator Assembly

    Imaging Subsystem Components 5DX Series 3 Rotary Scintillator Assembly 127( There are no serviceable parts inside the Rotary Scintillator Assembly. Return the Rotary Scintillator Assembly to Agilent for repair or for replacement. The Rotary Scintillator Assembly does not include the Rotary Servomotor...
  • Page 211 The X-rays emitted by the X-ray Tube Assembly, pass through the panel under test and hit the Scintillator. As these particles pass through the Scintillator, the radio luminescent material becomes excited and illuminates, producing an X-ray Laminography image. Agilent 5DX Service Guide 8-21...
  • Page 212 Imaging Subsystem Components 5DX Series 3 Mirrors Inside the Rotary Scintillator Assembly is a periscope style mirror assembly, as shown in Figure 8-11. The mirrors reflect the Slice image such that the image may be captured by the stationary X-ray Image Camera.
  • Page 213 X-ray Scan Controller to indicate that the Rotary Scintillator Assembly is at the Reference Home position. Area enlarged to show detail. Scintillator Home Flag Rota- tional OPTICAL SENSOR Scintillator Home Optical Sensor Figure 8-13: Scintillator Home Optical Sensor Agilent 5DX Service Guide 8-23...

  • Page 214: Interface Card

    Flag attached to the Rotary Scintillator Assembly, this indicates that the Rotary Scintillator Assembly is at the Reference Home position. The True Home position is when the Rotary Scintillator Assembly is perpendicular to the front of the 5DX System and the Scintillator is pointing towards the back of the 5DX System.

  • Page 215: Frame Grabbers

    5DX Series 3 Imaging Subsystem Components Frame Grabbers There are two Frame Grabber cards installed in the 5DX. The main board is the same; however, the piggy-back boards are different. The piggy-back board determines the Frame Grabber functions. • Analog Frame Grabber — The Panel View Camera and the Laser Camera(s) output analog images.
  • Page 216 Imaging Subsystem Components 5DX Series 3 The X-ray Image Camera contains a high resolution charge coupled device, along with and internal amplifier and an A/D converter. The image area is a square 2048 pixels by 2048 pixels wide. The X-ray Image Camera’s two binning modes are...
  • Page 217 The X-ray Image Camera receives power from the Camera Power Supply. The binning mode and gain control are provided by the The person responsible for the day-to-day tasks of keeping the 5DX software running efficiently. Their responsibilities include: controlling software updates, adding and removing users, managing system security, archiving and backup, configuring the 5DX, and recovering from an Emergency Stop..
  • Page 218 Imaging Subsystem Components 5DX Series 3 8-28 Imaging Subsystem...

  • Page 219: System Controller

    System Controller In this chapter... This chapter describes the following topics: Overview, 9-2 System Controller, 9-2 Expansion Chassis, 9-3 Agilent 5DX Service Guide...
  • Page 220 Overview 5DX Series 3 Overview The Electronics Bay contains the 5DX System Controller and the Expansion Chassis. These two components interact and provide the signals for operating the 5DX System. The System Controller receives its ac power from the Expansion Chassis.

  • Page 221: Expansion Chassis

    Service Guide. • Analog Frame Grabber — A complete discussion of the Analog Frame Grabber is in the Imaging Subsystem chapter of the HP 5DX Series II Service Guide. • Motion Controller PCI #1 — A complete discussion of Motion Controller #1 is provided in the Panel Handling Subsystem chapter of the 5DX Service Guide.
  • Page 222 Expansion Chassis 5DX Series 3 Slot numbers Figure 9-1: Expansion Chassis Rear View The specific slots have the following boards in them: 1. Receive 2. Digital Frame Grabber 1 3. Digital Frame Grabber 2 4. Analog Frame Grabber 5. Interface Card Cable 6.
  • Page 223 ISA (industry standard architecture) providing faster communications between devices. Caution Do Not attempt to move the Electronics Bay while more than one tray is pulled out, or a door is open and a tray is out. Agilent 5DX Service Guide...
  • Page 224 Expansion Chassis 5DX Series 3 System Controller...

  • Page 225: Maintenance

    Maintenance In this chapter... Introduction, 10-2 Preventative Maintenance (PM) Checklist, 10-4 General Maintenance, 10-7 Electronics Bay Maintenance, 10-15 Main Cabinet Maintenance, 10-22 Software Diagnostics, 10-42 Agilent 5DX Service Guide 10-1...

  • Page 226: Introduction

    There are two types of 5DX maintenance: preventative maintenance and repair maintenance. Preventive maintenance (PM) is performed periodically on a fully-operational system to prolong its operational condition. This chapter contains all the 5DX preventative maintenance procedures. Repair maintenance is performed on an as-needed basis to restore a faulty system to operational condition.

  • Page 227: Maintenance Activity Conventions

    Prerequisite: Tasks that need to be performed prior to performing the procedure. Special Notes: Any addition information. Information: Helpful information will be placed here, as well as, where to look for related information. Procedure: The steps required to perform the specified periodic maintenance procedure. Agilent 5DX Service Guide 10-3...

  • Page 228: Preventative Maintenance (Pm) Checklist

    Table 10-4, “Software Diagnostics,” on page 6 In order to keep a record of the PM performed on each 5DX System, print the tables and use as them as a checklist for each PM session. Store these records in the Service Log Book.
  • Page 229 Inspect the XYZ Stage Conveyor Belts page 10-30 Monthly Inspect Left and Right PIP Sensor Flags page 10-31 Monthly Lubricate the XYZ Stage Lead Screws and page 10-33 Rails Monthly Clean and Inspect the Rotary Scintillator page 10-36 Shield Agilent 5DX Service Guide 10-5...
  • Page 230 Preventative Maintenance (PM) Checklist 5DX Series 3 Table 10-3: Main Cabinet Maintenance Check Page Frequency Description Number Monthly Check the Auto Width Adjust page 10-37 Monthly Clean and Inspect the Main Cabinet page 10-39 Semiannually Lubricate XYZ Stage Rail Cars...

  • Page 231: General Maintenance

    Estimated Time: Ten minutes Required Items: None Prerequisite: The 5DX System needs to be powered up and running. The User Interface needs to be running. Special Notes: The System Status Beacon on most 5DX Systems will only contain three lights: red, amber and green.
  • Page 232 13. Select Close from the File menu to exit the Hardware Status and Control program. 14. If a lamp fails to illuminate, replace the bulb using the Status Beacon Bulb remove and replace procedure outlined in the 5DX Service Quick Reference Guide. 10-8...

  • Page 233: Check X-Ray High Voltage Power Supply Status

    127( The purpose of this procedure is to monitor the X-ray High Voltage Power Supply in order to determine if changes have occurred in any of the parameters, thereby indicating a possible failure. Information: None Agilent 5DX Service Guide 10-9...
  • Page 234 6. If your system has a printer connected, press Shift and the Print Screen Key on the keyboard. This will print the information displayed on the User Interface Monitor. If there is no printer connected to the 5DX System, then perform the following steps to capture the information for printing on another computer.

  • Page 235: Check X-Ray Tube Dielectric Pressure

    2. Select Service Menu and press Enter. 3. Select X-ray and press Enter. 4. Select HV Power Status and press Enter. 5. The 5DX X-ray Subsystem Monitor window will appear. Monitor the reading of the dielectric pressure shown in Figure 10-3.
  • Page 236 General Maintenance 5DX Series 3 Dielectric Pressure Window Figure 10-3: Agilent 5DX X-ray Subsystem Monitor Window 6. If the pressure reading is less than 50 psi call the Agilent Response Center. 7. Press Esc to return to the User Interface.

  • Page 237: Check The Panel View Camera Light

    5DX Series 3 General Maintenance Check the Panel View Camera Light Maintenance Frequency: Monthly Estimated Time: Ten minutes Required Items: None Prerequisite: None Special Notes: None Information: Figure 10-4: Image Window Agilent 5DX Service Guide 10-13...
  • Page 238 If the Panel View Camera Lights are On, but there is still no image, then replace the light using the Panel View Camera Light remove and replace procedure outlined in the 5DX Service Quick Reference Guide. 8. Select Close from the File menu to exit the Hardware Status and Control program.

  • Page 239: Electronics Bay Maintenance

    Required Items: Service Log Book (used to compare readings) Prerequisite: The 5DX System needs to be powered up and running. Special Notes: The Focus Coil Power Supply is located in the Electronics Cabinet in the Low Voltage Power Supply assembly.
  • Page 240 Electronics Bay Maintenance 5DX Series 3 Information: Low Voltage Power Supplies (Focus Coil Supply visible through window) 127( The Electronics Bay is shown without the front door. Figure 10-5: Focus Coil Power Supply 10-16 Maintenance...
  • Page 241 AC outlet. • Focus Coil current has changed. 5. If the Focus Coil Power Supply current reading is correct, return the system to normal operation. Run automatic startup if the system shutdown was run. Agilent 5DX Service Guide 10-17...

  • Page 242: Clean All Filters And Fans

    Discharge. To avoid damage to devices wear an anti-static wriststrap when working on the Electronics Bay. Information: Cooling fans and filters are located throughout the 5DX System refer to Figure 10-6 Figure 10-7 for locations. The filters should be cleaned according to schedule (at a minimum) or whenever excessive dirt has collected.
  • Page 243 6. Close and secure the X-ray Tube Tower access panel. Air Filter accessed from top of tower Air Cooling Fan X-ray Tube Tower Access Panel Key (5/16-inch hex key) Figure 10-6: Main Cabinet (Cooling Fan) Agilent 5DX Service Guide 10-19...
  • Page 244 Electronics Bay Maintenance 5DX Series 3 Fan And Filter Cleaning (Electronics Bay) To inspect all cooling fans for proper operation, proceed as follows: 1. Locate the following fan and filter assemblies as shown in Figure 10-7. • Top of the Electronics Bay •...
  • Page 245 Cooling Fans Front Rear One fan located behind the Laser display unit Two fans located behind the PDU 127( The Electronics Bay is shown without the front or rear doors. Figure 10-7: Electronics Bay Cooling Assemblies Agilent 5DX Service Guide 10-21...

  • Page 246: Main Cabinet Maintenance

    BNC-to-Banana Plug Adapter Service Log Book (used to compare readings) Prerequisite: The 5DX System needs to be powered up and running. Special Notes: The VacIon Power Supply is located under the Main Cabinet at the rear of the 5DX System. 10-22 Maintenance...
  • Page 247 Low Voltage Assembly DO NOT Focus Coil ADJUST! Power Supply Digital I/O Assembly Motion Driver Assembly Motion Driver Power Supply 127( The Electronics Bay is shown without the front door. Figure 10-8: Focus Coil Power Supply Agilent 5DX Service Guide 10-23...
  • Page 248 Main Cabinet Maintenance 5DX Series 3 VacIon Power Supply 1. Check the VacIon Power Supply to verify that the green power light is on. 2. Connect one end of a BNC test cable to the J0400 on the back of the VacIon Power Supply.
  • Page 249 Current LED is not illuminated on the Focus Coil Power Supply. • Focus Coil current has changed. Otherwise, return the 5DX System to operation. 1 . 0 E - 0 4 1 . 0 E - 0 5 1 . 0 E - 0 6 1 .

  • Page 250: Check The System Air Pressure/Low Pressure Regulator

    Main Cabinet Maintenance 5DX Series 3 Check the System Air Pressure/Low Pressure Regulator Maintenance Frequency: Monthly Estimated Time: Ten minutes Required Items: None Prerequisite: None Special Notes: None Information: None Procedure: 1. Locate the Pneumatic Gauge, Regulator and Filter Assembly at the rear of the Main Cabinet.

  • Page 251: Inspect The Laser Camera Lights

    Confirm and Adjust menu of the User Interface and may also be required to correct the Surface Map to Plane of Focus correlation. Repeat this procedure for each laser installed in the system. Information: None Agilent 5DX Service Guide 10-27...
  • Page 252 8. If either Laser Camera Light fails to operate, replace it using the Laser Camera Light remove and replace procedure outlined in the 5DX Service Quick Reference Guide. 9. Close the access panel and restore X-ray power.

  • Page 253: Inspect Main Cabinet Cables

    None Procedure: To detect potential damage to the connectors or insulation without affecting production use of the 5DX System, proceed as follows: 1. Inspect the wiring harness for pinched or damaged cables (especially at the access panels and chassis intersections).

  • Page 254: Inspect The Xyz Stage Conveyor Belts

    2. Check for wear or fraying of the belts. 3. If a belt in the Main Cabinet is worn, replace it using the XYZ Stage Conveyor Belt remove and replace procedure outlined in the 5DX Service Quick Reference Guide. 10-30...

  • Page 255: Inspect Left And Right Pip Sensor Flags

    4. Visually check the PIP flags for excessive wear or bending of the flag. If any of the flags are bent or worn, replace them using the PIP Sensor Flag remove and replace procedure outlined in the 5DX Service Quick Reference Guide. 127( Systems with the middle rail installed have two additional PIP sensors mounted on the middle rail.
  • Page 256 Main Cabinet Maintenance 5DX Series 3 5. Using the thickness gauge, check the gap between the XYZ Stage conveyor belt to the bottom edge of flag. Adjust the gap as required. a. Loosen the two screws that hold the flag in place.

  • Page 257: Lubricate The Xyz Stage Lead Screws And Rails

    • Extend the Z-Axis to the fully upward position. This is accomplished by using the axis control screen from the System Controller. • Shutdown the 5DX System. Follow the Long Term Shutdown For the Agilent 5DX System procedure in Chapter 4, Power Subsystem to ensure you shut it down correctly.
  • Page 258 Main Cabinet Maintenance 5DX Series 3 Information: 3DQHO,Q3ODFH 6HQVRU <$[LV 6HUYRPRWRU <$[LV 6HUYRPRWRU <$[LV /HDG 6FUHZ <$[LV /HDG 6FUHZ %HDULQJ %HDULQJ <$[LV /HDG 6FUHZ <$[LV /HDG 6FUHZ ;$[LV /HDG 6FUHZ %HDULQJ =$[LV 6WHSSHU 0RWRUV <$[LV /HDG 6FUHZ %HDULQJ <$[LV /HDG 6FUHZ...
  • Page 259 Y-Axis rails and remove the excess. 15. Apply a small amount of grease to each of the four Z-Axis slide rails. 16. Check the rail locking set screws for each of the Z-Axis rails to ensure they are tight. Agilent 5DX Service Guide 10-35...

  • Page 260: Clean And Inspect The Rotary Scintillator Shield

    Glass cleaner • #2 Phillips screwdriver • Standard hex wrench set Prerequisite: • Shutdown the 5DX System. Follow the Long Term Shutdown For the Agilent 5DX System procedure in Chapter 4, Power Subsystem to ensure you shut it down correctly.

  • Page 261: Check The Auto Width Adjust

    In the following procedure, the requested width is specified as 12000 mils (12 inches). Ideally, the panel width should measure 12.030 inches at the rails. However, as long as the measurement falls in the range of 12.020 to 12.030 inches it is acceptable. Information: None Agilent 5DX Service Guide 10-37...
  • Page 262 Main Cabinet Maintenance 5DX Series 3 Procedure: 1. select Utilities > Panel Handling > Home Rails from the 5DX menu and press Enter. 1. Select Manual Load and press Enter. 2. Press Enter to accept the default value of 12000 for the panel width.

  • Page 263: Clean And Inspect The Main Cabinet

    • Clean, lint-free and non-abrasive cleaning wipes • #2 Phillips screwdriver Prerequisite: • Shutdown the 5DX System. Follow the Long Term Shutdown For the Agilent 5DX System procedure in Chapter 4, Power Subsystem to ensure you shut it down correctly.

  • Page 264: Lubricate Xyz Stage Rail Cars

    • Extend the Z-Axis to the fully upward position. This is accomplished by using the axis control screen from the System Controller. • Shutdown the 5DX System. Follow the Long Term Shutdown For the Agilent 5DX System procedure in Chapter 4, Power Subsystem to ensure you shut it down correctly.

  • Page 265: Replace The Xyz Stage Conveyor Belts

    Main Cabinet Maintenance Replace the XYZ Stage Conveyor Belts Maintenance Frequency: Semiannually Estimated Time: Ten minutes Information: Follow the replacement procedure outlined in the 5DX Service Quick Reference Guide. Replace the Conveyor Belt Motor Control Relays Maintenance Frequency: Semiannually Estimated Time: Ten minutes Information: Follow the replacement procedure outlined in the 5DX Service Quick Reference Guide.

  • Page 266: Software Diagnostics

    Software Diagnostics 5DX Series 3 Software Diagnostics Check the Inner Barrier Encoders Maintenance Frequency: Monthly Estimated Time: Five minutes Required Items: None Prerequisite: Position the main stage Z axis to the load/unload position. (Approximately 400mil inches.) From the Calib directory, copy the machine.cfg file to machine.bak.

  • Page 267: Run Position Repeatability Test

    Run Position Repeatability Test Maintenance Frequency: Monthly Estimated Time: Five minutes Required Items: 5DX Confirmation and Adjustment Panel Prerequisite: The 5DX Confirmation and Adjustment Panel must be loaded. Special Notes: None Information: None Procedure: 1. Select XYZ Stage > Position Repeatability from the Service menu and press Enter.

  • Page 268: Run Resolution Test

    Information: The procedure described below is a manual test for the 400 FOV only. Agilent recommends that you run the automated resolution tests procedure by selecting Utilities > Toolbox from the User Interface menu. The Agilent 5DX Toolbox contains fully automated Confirmation and Diagnostic tests that provide a simple pass or fail indication.

  • Page 269: Run X-Ray Safety Test

    Agilent Response Center and schedule an appointment to complete this procedure. Run the Confirmation and Adjustment Procedures Maintenance Frequency: Semiannually Special Notes: See Chapter 8 of the 5DX System Administration Guide for instructions on running Confirmation and Adjustment procedures. Backup the Hard Drive Maintenance Frequency: Semiannually Special Notes: See Chapter 3 of the 5DX System Administration Guide for instructions on backing up the 5DX hard drive.
  • Page 270 Software Diagnostics 5DX Series 3 10-46 Maintenance...
  • Page 271 AcquisitionTheory of Operation Digital I/O Assembly Analysis Input Direct Current Relays 5-44 Generation Process Motor Relays 5-50 Generation Theory of Operation Output Direct Current Relays 5-46 Imaging Subsystem Components Image Acquisition Components Image Analysis Components Agilent 5DX Service Guide Index-1...
  • Page 272 5DX Series 3 Image Generation Components Inspect Left and Right PIP Sensor Flags System Controller 10-31 Overview Inspect Main Cabinet Cables 10-29 Inner Barrier 5-2, 5-3, 5-15, 6-6, 6-12, 6-13, Inspect the Laser Camera Lights 10-27 6-15, 6-22, 10-42 Inspect the XYZ Stage Conveyor Belts...
  • Page 273 2-9, 2-10, 2-12, 2-14, 3-6, 4-15, 4-23, Components 4-26, 4-29, 6-10, 6-15, Adjusting the Air Cylinder 6-14 Chains 3-10 Adjustment/Replacement Inner Barrier Adjusting the Outer Barrier’s Primary Encoder 6-16 Safety Interlock 3-18 Barrier Operation 6-11 Agilent 5DX Service Guide Index-3...
  • Page 274 5DX Series 3 Adjusting the Outer Barrier’s Surface Map Secondary Safety Interlock 3-23 Components Adjusting the Safety Interlocks on the Laser Inner Barrier 3-15 Laser Theory of Operation Inner Barrier Safety Interlocks 3-11 Laser View Camera Outer Barrier’s Primary Safety...
  • Page 275 X-Axis and Y-Axis Servomotors 5-17 Z-Axis Stepper Motors 5-19 XYZ Stage Panel Conveyor Belts Panel Clamps 5-25 Panel Clear Sensors 5-26 Panel Mechanical Stop Actuator 5-25 Panel-in-Place Sensor 5-24 Stage Automatic Width Adjust Motor 5-23 Agilent 5DX Service Guide Index-5...
  • Page 276 5DX Series 3 Index-6...

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