Vacuum System Components - Agilent Technologies 7000 Triple Quadrupole GC/MS Maintenance Manual

Vacuum System Components

The parts of the vacuum system are:
• Foreline (rough) pump
• High-vacuum turbo pump
• Front and rear analyzer chambers
• Collision cell cover
• Side plates (analyzer doors), and front and rear end plates
• Vacuum seals
• Calibration valve and vent valve
• Vacuum control electronics
• Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Ion vacuum gauges
Analyzer chamber
GC/MS interface
Turbo pump
Turbo pump
cooling fan
To foreline pump
Figure 19 Major vacuum system components
Troubleshooting and Maintenance Manual
6
Vacuum System
131