Outline; Structure; Dimensions - Omron D6F-PH User Manual

1. Outline

This User's Manual note is intended to demonstrate how to use and interface with Omron's
MEMS differential pressure sensor(D6F-PH). It should be noted that this document is intended
to supplement the datasheet, which should be referenced when using the sensor.

2. Structure

Fig.1 shows the internal cross-section view of the MEMS differential pressure sensor
(D6F-PH). Air will flow from one inlet and out the other passing over the MEMS flow chip
surface. The MEMS chip is able to measure the airflow as air passes over the chip.
Fig.1 the internal cross-section view of MEMS differential pressure sensor (D6F-PH)

3. Dimensions

D6F-PH MEMS Differential pressure Sensor User's Manual (A288)
Inlet
Flow Sensor chip
フローセンサチップ フローセンサチップ
Fig.2 Outline dimensions of D6F-PH
Substrate
基板 基板
2