ZYGO KMS-310 Manuals

Manuals and User Guides for ZYGO KMS-310. We have 1 ZYGO KMS-310 manual available for free PDF download: Supervisor Manual

ZYGO KMS-310 Supervisor Manual

ZYGO KMS-310 Supervisor Manual (304 pages)

Brand: ZYGO | Category: Microcontrollers | Size: 2.74 MB

Table of Contents

Table of Contents
3
Chapter1: about This Manual

11
- Intended Audience
  12
- Manual Organization
  12
- Conventions
  13
  - Cautions
    13
  - Tips
    13
  - Typographical and Keyboard Conventions
    13
- Contacting Technical Support
  
  14
Chapter 2: Safety Precautions

15
- Machine Safety Labels
  16
  - Caution and Warning Symbols
    16
  - Safety Label Locations
    17
- Objective Anti-Crash Protection
  24
- Light Source Safety
  25
  - Mercury Xenon Lamphouse
    25
  - Halogen Light Box
    25
  - Metal Halide Light Box
    26
  - Halogen Lamphouse
    26
  - Mercury Lamphouse
    26
  - Xenon Lamphouse
    26
- Isopropyl Alcohol Safety
  27
  - Potential Hazards
    27
  - Emergency Response
    28
- Mercury Safety
  30
  - Potential Hazards
    30
  - Emergency Response
    30
- Machine Ergonomic Features
  32
Chapter 3: System Overview

33
- Product Overview
  34
  - Script Routines
    34
  - Product Applications
    35
  - System Configurations
    35
  - Frame Grabber
    35
  - Data Output
    35
- Subsystem Overview
  36
- Functional Overview
  48
  - System Control
    48
  - Image Input
    48
  - Image Processing
    48
  - Image Measurement
    49
Chapter 4: User Interface

51
- Overview
  52
  - Modes of Operation
    52
  - Screen Components
    52
- Software Controls
  54
  - Using the Keypad
    54
  - Keypad/Keyboard Key Equivalents
    57
  - Hot Keys
    57
- Software Organization
  60
  - Standby Screen
    61
  - Supervisor Master Menu
    62
  - Measure Screen
    64
  - Statistics Menu
    66
  - ID Information Menu
    68
  - Select Program Menu
    70
  - Data Map Menu
    72
  - Program Setup Menu
    74
  - Sequence Setup Menu
    76
  - Operator Lockouts Menu
    78
  - Calibrate Menu
    80
  - System Setup Menu
    82
  - Save Program Menu
    84
  - Exit to DOS
    85
  - Return to Standby Selection
    86
Chapter 5: System Setup

87
- Overview
  88
- Configure Illumination Settings
  90
- Define Calibration Parameters
  100
  - Select Calibration Parameters
    101
  - Calibrate the Microscope
    101
  - Calibrate Horizontal Settings
    102
  - Calibrate Vertical Settings
    102
  - Configure Single-Point Calibration
    103
  - Save the Calibration Settings
    108
- Define System Options
  109
  - Display the System Setup Window
    109
  - Set Map Colors
    110
  - Change Your Supervisor Access Code
    111
  - Change Objective Assignments on the Turret
    111
- Set Objective Parfocality and Parcentricity
  113
- Adjust Autofocus Parameters
  115
  - Set Column Autofocus
    115
  - Set Piezo Autofocus Algorithm
    117
Chapter 6: Creating Automated Scripts

119
- Overview
  120
  - Script Features
    120
  - Script Command Types
    125
  - Matrix File Input and Output
    128
- Script Creation
  132
  - Overview
    132
  - Plan the Script
    132
  - Locate Feature Edges
    132
  - Set up Align and Deskew for the Mask
    133
  - Set up Planarity for the Mask
    133
  - Obtain Substrate Information
    133
  - Move to Features to be Measured
    133
  - Call the Measurement Subroutine
    134
  - Suggested Order of Script Sequence
    134
- Example Script
  135
- Script Locator
  140
  - Listing by Alphabetical Order
    140
  - Listings by Function
    148
  - Comment and Debug Commands
    148
  - Stage, Column, and Optical Positioning and Turret Command
    151
  - Illumination Values Commands
    152
  - Z-Axis Position Commands: Piezo Stack
    153
  - Z-Axis Position Commands: Column Motor
    153
  - Y-Axis Position Commands: Stage Motors
    154
  - Planarization Commands
    156
  - Operator Interface Commands
    157
  - Data Output Matrix Commands
    159
  - Log File Commands
    160
  - Script Flow Commands
    161
  - Edge Detection Pattern Recognition Commands
    162
  - Bitmap/Image Pattern Recognition Commands
    162
  - Autofocus Commands
    163
  - Find Surface Command
    163
  - Fast Focus Commands
    164
  - Column Focus Command
    165
- Script Commands
  166
  - Af_Exec
    166
  - Af_Set
    166
  - Af_Stat
    166
  - Align
    167
  - Box
    167
  - Call
    167
  - Clearpic
    168
  - Clock
    168
  - Comment
    168
  - Debug
    169
  - Deskew
    169
  - Edges
    170
  - Edgepos
    171
  - Edgeroughness (Edger)
    172
  - End
    173
  - Erase
    173
  - Exit
    173
  - Fastsurf
    173
  - Ff_Set
    174
  - Ff_Win
    174
  - Findsurf
    174
  - Focusfast
    175
  - Focusimg
    175
  - Getmotcnts
    175
  - Getpos
    175
  - Getstop
    176
  - Gettext
    176
  - Getvar
    176
  - Getwin
    177
  - Get_Mot_Z
    178
- Get_Z
  178
- Go_Origin
  178
- Gostop
  179
- Grabstat
  179
- Gspawn
  179
- Include
  180
- Idinfo
  181
- Jump
  182
- Line
  182
- Loadcalib
  182
- Loadcf
  183
- Loadprog
  183
- Loadsubm
  183
- Lockout
  184
- Logmeasure
  184
- Loop
  184
- Lumauto
  185
- Lumavg
  185
- Lumdump
  185
- Lummark
  186
- Lumread
  186
- Lumset
  186
- Mapmenu
  187
- Mask_Origin
  187
- Mask_Plane: X
  188
- Mark
  189
- Math
  189
- Matrixclear
  190
- Matrixclose
  191
- Matrixopen
  191
- Matrixset
  192
- Matrixvalue
  192
- Matrixwrite
  193
- Measure
  194
- Measure_Algorithm
  194
- Menu
  194
- Message
  195
- Meter
  195
- Mot_Z_Move
  195
- Mot_Z_Rel
  196
- Movepol
  196
- Movepol_Nm
  197
- Movepolz_Nm
  198
- Msr_Default
  198
- Msr_Error
  199
- Msr_Stats
  199
- Operator
  199
- Opmark
  200
- Origin
  200
- Patrec_Find
  201
- Patrec_Get
  202
- Patrec_Save
  203
- Patrec_Show
  203
- Pause
  204
- Picshow
  204
  - Picture
    204
  - Picturetiff
    204
  - Picturevga
    204
  - Planecalc
    205
  - Planept
    205
  - Posmove
    205
  - Posmove_Nm
    206
  - Pospol
    206
  - Pospol_Nm
    206
  - Print
    206
  - Printer
    206
  - Printstr
    207
  - Prognum
    207
  - Quit
    207
  - Recall
    207
  - Recpt
    208
  - Relmove
    208
  - Relmove_Nm
    208
  - Rel_Pol_Nm
    209
  - Rel_Polz
    209
  - Rel_Polz_Nm
    209
  - Result
    209
  - Return
    210
  - Rp_Display
    210
  - Rp_Exec
    210
  - Rp_Read
    210
  - Rp_Win
    210
  - Seqedge
    211
  - Seqname
    212
  - Seqoutput
    212
  - Seqwin
    212
  - Setstop
    213
  - Showpic
    213
  - Silent
    213
  - Sitename
    213
  - Spawn
    213
  - Start
    214
  - Statedge
    214
  - Statmsr
    214
  - Statmsr3
    215
  - Stats
    216
  - Text
    216
  - Time
    216
  - Turret
    216
  - Turretff
    217
  - Turretpos
    217
  - Update
    217
  - Xhair
    218
  - Z_Move
    218
  - Z_Rel
    218
Chapter 7: Operation

219
- Overview
  220
  - Screen
    222
  - Access the Supervisor Master Menu Screen
    222
  - Return to Standby Screen
    224
  - Exit to DOS
    225
- Set up a Program
  226
  - Access the Select Program Screen
    227
  - Open an Existing Program
    228
  - Copy an Existing Program
    229
  - Create a New Program
    230
  - Delete a Program
    230
  - Define Program Parameters
    231
  - Set Operator Lockouts
    232
  - Set up Measurement Sequences
    234
  - Set up the Measurement Window
    236
  - Select Measurement Options
    243
  - Set up the Measurement Axis
    244
- Measure
  246
  - Access the Production Menu
    246
  - Load a Plate
    247
  - Select a New Program (Optional)
    250
  - Change ID Entries (Optional)
    251
  - Clear Statistics (Optional)
    252
  - Measure in Manual Mode
    253
  - Measure in Semi-Auto Mode
    256
  - Measure (Auto Mode)
    259
- Manage Measurement Data
  260
  - Manage Statistics
    261
  - Manage ID Entries
    262
  - Configure a Data Map
    263
Chapter 8: Maintenance

268
- Overview
  268
  - Preventive Maintenance Schedule
    268
  - Maintenance Procedures Overview
    270
- Lamp
  270
- Stage Maintenance
  285
  - Level the Floating Table
    285
  - Level the Piezo Fine Focus
    286
  - Adjust the Mask Holder Guide Rails
    286
  - Set the Column Stops
    288
  - Maintenance
    288
  - Check Air Filters
    289
  - Check Fans
    290
- System Cleaning
  291
  - Wipe down the System
    291
  - Clean the Ocular Eyepieces and Condenser
    291
Chapter 9: Error Messages

293
- Messages
  294
- Messages
  295

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