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ZYGO KMS-310 Supervisor Manual

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KMS-310/400
Supervisor's Manual
October 1998
Zygo Corporation
Advanced Imaging Systems
650 North Mary Avenue
Sunnyvale, CA 94086
Telephone: (408) 434-1000
Fax: (408) 434-0759

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  • Page 1 KMS-310/400 Supervisor's Manual October 1998 Zygo Corporation Advanced Imaging Systems 650 North Mary Avenue Sunnyvale, CA 94086 Telephone: (408) 434-1000 Fax: (408) 434-0759...
  • Page 2 Tel: 408-434-1000 Fax: 408-434-0759 http://www.zygo.com Copyright © 1998 by Zygo Corporation. All rights reserved. Contents of this publication may not be reproduced in any form without written permission from the copyright owner. KMS-310/400 is a trademark of Zygo Corporation. Notice The information contained in this document is subject to change without notice.

  • Page 3: Table Of Contents

    System Control ..............................3-16 Image Input ................................. 3-16 Image Processing ..............................3-16 Image Measurement ............................3-17 CHAPTER 4: USER INTERFACE ..........................4-1 ................................... 4-2 VERVIEW Modes of Operation ............................... 4-2 Screen Components .............................. 4-2 ..............................4-4 OFTWARE ONTROLS KMS-310/400 Supervisor's Manual...
  • Page 4 Using the Keypad ..............................4-4 Keypad/Keyboard Key Equivalents ........................4-7 Hot Keys ................................4-7 ............................4-10 OFTWARE RGANIZATION Standby Screen ..............................4-11 Supervisor Master Menu ............................. 4-12 Measure Screen ..............................4-14 Statistics Menu ..............................4-16 ID Information Menu ............................4-18 Select Program Menu ............................
  • Page 5 FASTSURF ................................. 6-55 FF_SET ................................6-56 FF_WIN ................................6-56 FINDSURF ................................6-56 FOCUSFAST ............................... 6-57 FOCUSIMG ................................. 6-57 GETMOTCNTS ..............................6-57 GETPOS ................................6-57 GETSTOP ................................6-58 GETTEXT ................................6-58 GETVAR ................................6-58 GETWIN ................................6-59 GET_MOT_Z ............................... 6-60 KMS-310/400 Supervisor's Manual...
  • Page 6 GET_Z ................................. 6-60 GO_ORIGIN ................................ 6-60 GOSTOP ................................6-61 GRABSTAT ................................. 6-61 GSPAWN ................................6-61 INCLUDE ................................6-62 IDINFO ................................6-63 JUMP .................................. 6-64 LINE ..................................6-64 LOADCALIB ................................ 6-64 LOADCF ................................6-65 LOADPROG ................................ 6-65 LOADSUBM ................................ 6-65 LOCKOUT ................................6-66 LOGMEASURE ..............................
  • Page 7 UPDATE ................................6-99 XHAIR ................................6-100 Z_MOVE ................................6-100 Z_REL ................................6-100 CHAPTER 7: OPERATION ............................7-1 ................................... 7-2 VERVIEW ..................7-4 CCESS AND XIT THE UPERVISOR ASTER CREEN Access the Supervisor Master Menu Screen ......................7-4 KMS-310/400 Supervisor's Manual...
  • Page 8 Return to Standby Screen ............................. 7-6 Exit to DOS ................................7-7 ..............................7-8 ET UP A ROGRAM Access the Select Program Screen ........................7-9 Open an Existing Program ..........................7-10 Copy an Existing Program ..........................7-11 Create a New Program ............................7-12 Delete a Program ..............................
  • Page 9 Health Hazard Data ............................. A-13 Reactivity Data ..............................A-15 Spill and Disposal Procedures ..........................A-15 Protective Equipment ............................A-15 Storage and Handling Precautions ........................A-16 Transportation Data and Additional Information ....................A-16 GLOSSARY .................................. G-1 INDEX ..................................... I-1 KMS-310/400 Supervisor's Manual...
  • Page 10 viii Contents...

  • Page 11: Chapter1: About This Manual

    About This Manual Intended Audience Manual Organization Conventions Contacting Technical Support...

  • Page 12: Intended Audience

    This manual is written for users with a thorough understanding of measurement and inspection analysis concepts and terms. This manual can be used by those unfamiliar with the KMS-310/400 system as a learning tool, and by experienced users as a reference.

  • Page 13: Conventions

    Keys you press on the keyboard are shown in brackets, such as [ESC], [ENTER] or [space bar]. Issuing commands by holding down the first key and pressing the second key are shown as [key1] + [key2], such as [ALT] + [PRINTSCRN]. KMS-310/400 Supervisor's Manual...

  • Page 14: Contacting Technical Support

    Contacting Technical Support For technical assistance, contact your Zygo Service or Applications Engineer at (408) 434-1000. For information on your system options, or to purchase additional options or site licenses, contact your Zygo Sales Representative or Zygo Corporate Sales. Chapter 1: Introduction...

  • Page 15: Chapter 2: Safety Precautions

    Safety Precautions Machine Safety Labels Objective Anti-Crash Protection Light Source Safety Isopropyl Alcohol Safety Mercury Safety Machine Ergonomic Features...

  • Page 16: Machine Safety Labels

    Machine Safety Labels This section provides a general explanation of the different warning and caution labels used on the KMS-310/400 system, as well as a description and location for each specific warning and caution label on the system. Important note: Read the operating instructions carefully and completely before operating the KMS-310/400 system.

  • Page 17: Safety Label Locations

    Safety Label Locations This section provides a location and detailed explanation for each caution and warning label on the KMS-310/400, including those found on the: automated stage halogen transmitted light source Hg-Xe power supply...
  • Page 18 Automated Stage Safety Labels The automated stage warning labels are shown in Figure 2-1. Figure 2-1. Automated Stage Warning Labels Alerts you to a potential pinch-point in this area. Alerts you to a potential pinch-point in this area. Alerts you to a potential pinch-point in this area.
  • Page 19 Figure 2-4. Hamamatsu Hg-Xe Power Supply Safety Label Never turn on the power if the lamp is not installed. If you do, you are in danger of being electrocuted. Make sure the light source power supplies are turned off before replacing the lamp. KMS-310/400 Supervisor’s Manual...
  • Page 20 Mercury Xenon Lamphouse Safety Labels The KLH-1 mercury xenon lamphouse safety labels, located on the main lamphouse and fiber-optic units, are shown in Figures 2-5 and 2-6. Figure 2-5. Mercury Xenon Lamphouse Safety Labels (Main Lamphouse Unit) Make sure light source power supplies are turned off before attempting to replace the lamp.
  • Page 21 Do not stare directly into the beam path of any light source. Figure 2-8. Metal Halide Lamphouse and Power Supply Safety Labels (Side) Refer to the KMS-310/400 Maintenance Manual before servicing. Uninsulated dangerous voltage within the lamphouse enclosure posing a risk of electric shock.
  • Page 22 Uninsulated dangerous voltage within the lamphouse enclosure poses a risk of electric shock. Refer to the KMS-310/400 Maintenance Manual before servicing. Figure 2-11. Electronics Tower Safety Labels (Back) This symbol alerts you to the presence of 220VAC within the tower enclosure.
  • Page 23 Figure 2-13. Transparent Electrical Shock Guard Safety Label Alerts you to the presence of 115VAC within the unit enclosure. (The clear plastic shield in front of this warning is intended to protect you from accidental electrical shock.) KMS-310/400 Supervisor’s Manual...

  • Page 24: Objective Anti-Crash Protection

    Objective Anti-Crash Protection To avoid crashing an objective on the KMS-310/400 system, perform the following procedure during initial system setup or after performing preventive maintenance: With the main menu displayed, select Use the 100X or 50X magnification objective to focus on the highest (upmost) feature of the image.

  • Page 25: Light Source Safety

    Light Source Safety This section provides safety information for the following KMS-310/400 light sources: mercury xenon lamphouse halogen light box metal halide light box halogen lamphouse mercury lamphouse xenon lamphouse Mercury Xenon Lamphouse The KLH-1 mercury xenon lamphouse is equipped with a safety interlock feature.

  • Page 26: Metal Halide Light Box

    Take the following precautions when working in and around the xenon lamphouse: Use a hex wrench to remove the HMX-4 xenon lamphouse from the K2 module. This feature helps prevent unnecessary access and IR/UV. Never stare into the light source. KMS-310/400 Supervisor’s Manual 2-12...

  • Page 27: Isopropyl Alcohol Safety

    Vapor explosion hazard indoors, outdoors or in sewers. Some may polymerize (P) explosively when heated or involved in a fire. Runoff to sewer may create fire or explosion hazard. Containers may explode when heated. Many liquids are lighter than water. KMS-310/400 Supervisor’s Manual 2-13...

  • Page 28: Emergency Response

    Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. Always stay away from the ends of tanks. For massive fire, use unmanned hose holders or monitor nozzles. If impossible, withdraw from area and let fire burn. KMS-310/400 Supervisor’s Manual 2-14...
  • Page 29 Wash skin with soap and water. Keep victim warm and quiet. Effects of exposure (inhalation, ingestion or skin contact) to substance may be delayed. Ensure that medical personnel are aware of the material(s) involved and take precautions to protect themselves. KMS-310/400 Supervisor’s Manual 2-15...

  • Page 30: Mercury Safety

    When any large container is involved in a fire, consider initial evacuation for 500 meters (1/3 mile) in all directions. Use extinguishing agent suitable for type of surrounding fire. Fire Do not direct water at the heated metal. KMS-310/400 Supervisor’s Manual 2-16...
  • Page 31 In case of contact with substance, immediately flush skin or eyes with running water for at least 20 minutes. Keep victim warm and quiet. Ensure that medical personnel are aware of the material(s) involved, and take precautions to protect themselves. KMS-310/400 Supervisor’s Manual 2-17...

  • Page 32: Machine Ergonomic Features

    Machine Ergonomic Features Table 2-6 lists ergonomic features for key KMS-310/400 components. Table 2-6. KMS-310/400 Ergonomic Features KMS-310/400 Ergonomic Features Component Monitor arm lifts base of monitor 8"-13.25" above the Adjustable monitor table top. Monitor arm extends and retracts 10.25".

  • Page 33: Chapter 3: System Overview

    System Overview Product Overview Subsystem Overview Functional Overview...

  • Page 34: Product Overview

    Figure 3-1. KMS-310/400 System Critical Dimension Measurement and Inspection System The KMS-310/400 system is a completely automated measuring system. It consists of measurement electronics, a confocal optics module, and a computer- controlled programmable 8"...

  • Page 35: Product Applications

    Product Applications The KMS-310/400 can be used to measure the geometry edge features on: semiconductor photomasks thin film magnetic heads metal-in-gap magnetic heads standard heads wafers other types of measurements System Configurations The KMS-310/400 can be purchased in any of the following configurations:...

  • Page 36: Subsystem Overview

    Subsystem Overview The KMS-310/400 consists of the following subsystems: electronic controls subsystem optical display subsystem mechanical subsystem Electronic Measurement Subsystem The electronic measurement subsystem (Figure 3-2) consists of: an electronics control unit a power control panel computer system and controls software Figure 3-2.
  • Page 37 Electronics Control Unit All electronic and electrical controls for the KMS-310/400 system are located in the electronics control unit (Figure 3-3), including: system power supply (CE marked) AC power terminal block and sequencer X-Y-Z motion control unit rotary-encoded power control unit;...
  • Page 38 Power On This switch is the master control switch for the Switch entire system. It controls power to all subsystems within the KMS-310/400 system. (The lamp power supply must be turned on separately before applying power to the system.) Reset switch This switch resets the entire system and reboots the computer.
  • Page 39 Weitek 4167 numeric coprocessor socket seven 16 bit and one 32 bit AT-compatible expansion slots LIM EMS 4.0 support one serial and one parallel communication ports onboard battery eight motherboard expansion slots (five are used for KMS-310/400 system control) KMS-310/400 Supervisor's Manual...
  • Page 40 Video images from the microscope and the graphical user interface are displayed on the monitor at 60 Hz in a noninterlaced flicker format. The keypad is the primary means of operating the KMS-310/400 system, from program setup to stage positioning and measurement. Only alphanumeric entries cannot be made with the keypad.

  • Page 41: Optical Display Subsystem

    The optical display subsystem (Figure 3-6) consists of: a confocal optics module a charged coupled device (CCD) camera and frame grabber microscope optics illumination hardware Figure 3-6. Optical Display Subsystem confocal optics module camera and frame grabber microscope optics KMS-310/400 Supervisor's Manual...
  • Page 42 Confocal Optics Module The confocal optics module (Figure 3-7) contains a spinning Nipkow disk (with two sizes of pinholes) and a manual lever for switching between the brightfield, confocal 1, and confocal 2 positions. For brightfield operation with transmitted light applications, the Nipkow disk is moved out of the optical path, yielding a conventional microscope.
  • Page 43 40 (with a minimum value of 0). Each frame of information that is gathered by the frame grabber board is summed to the preceding frame by the value you assign during program setup. Once the image is summed, it is displayed on the VGA monitor. KMS-310/400 Supervisor's Manual 3-11...
  • Page 44 The KMS-310/400 uses two wide-field 10X eyepieces. Both eyepieces have rubber eyecups (for eyeglass wearers) and a 20.0 mm field-of-view capability (index). You can adjust the focus, angle and width of the eyepieces to suit your vision.
  • Page 45 The KMS-310/400 uses one of three different lamps: xenon, mercury or metal halide (Figure 3-10). All of these lamps come with an associated power supply.

  • Page 46: Mechanical Subsystem

    Motorized Stage The KMS-310/400 system uses an advanced low profile, 8 in. x 8 in. stage. Individual servomotors drive precision zero backlash lead screws over the entire travel range. Travel range for reflected systems is 8 in. and 6.5 in. for reflected/transmitted systems.
  • Page 47 This stand allows the screen position to be adjusted for comfort and individual preferences. The ergonomic features of this stand help minimize fatigue while working the system. To adjust the monitor position grip the front handle, then lift and push. KMS-310/400 Supervisor's Manual 3-15...

  • Page 48: Functional Overview

    Functional Overview This section provides an overview of the process used by the KMS-310/400 to capture, process, display and measure edge features. System Control All system operations are controlled through the software graphical user interface, including optical and mechanical operations, system and program setup, and execution of measurement.

  • Page 49: Image Measurement

    Image Measurement The KMS-310/400 software analyzes the profile (waveform) for each line of pixels (video scan line), detecting the relative intensity of each pixel as a function of gray level. Each scan line is individually looked at for the threshold, based on the peak white and minimum black levels and the resulting measurement.
  • Page 50 Detection Threshold The detection threshold is calculated as the percent called out of the maximum minus the minimum light intensity, as detected for each measurement window. The selected edge from the previous calculation is used for the measurement calculations. If there is an edge below the requested percent for detection, the window ignores this portion and continues to scan in the direction requested for the first edge that satisfies all requirements specified (such as edge number, edge detection percentage, axis and direction of scan).

  • Page 51: Chapter 4: User Interface

    User Interface Overview Software Controls Software Organization...

  • Page 52: Overview

    Modes of Operation The KMS-310/400 has two modes of operation: production and supervisor mode. These two modes provide different levels of system control and are organized differently. Fab operators use the production mode menus to measure, record and store substrate test data.
  • Page 53 Figure 4-1. Key Software Elements KMS-310/400 Supervisor's Manual...

  • Page 54: Software Controls

    310/400 system. It contains 11 keys, a joystick for control of the stage's X- and Y-axis, and a thumbwheel for fine focus. You can control all system functions, except alphanumeric data entry, with the keypad. Figure 4-2. KMS-310/400 Keypad SYSTEM POWER KMS 310/400 TURRET...
  • Page 55 These four keys are used to move from one icon or keys button to another on the various screens. They are used to change the measurement window's position and size, and to perform other functions once they have been selected. KMS-310/400 Supervisor's Manual...
  • Page 56 Table 4-1. Keypad Component Functions (Part 2 of 2) Figure 4-2 Key/Control Function Callout Focus The thumbwheel is used to control the Piezo for up/down fine focus movement of the substrate (viewed thumbwheel through the eyepieces or on the monitor). By carefully moving the THUMBWHEEL, you can control the Piezo to its full (manual) resolution capabilities of 0.01 microns to ±15 microns (20...

  • Page 57: Keypad/Keyboard Key Equivalents

    Turret CW (high mag) 'P' (either capital or small letter) Hot Keys Many commonly used KMS-310/400 system commands can be executed with a hot key shortcut. Table 4-3 lists Measure screen hot keys and their functions. Table 4-4 lists script hot keys and their functions.
  • Page 58 Table 4-3. Measure Screen Hot Keys (2 of 2) Hot Keys Action From Measure Screen [ALT] + [t] Spawn to DOS to edit scripts, copy from other files or directly edit a file and return to the Measure screen. [ALT] + [u] Select fast focus type as edge-specific or confocal surface.
  • Page 59 Perform manual column focus. Using this arrow on keyboard command will move the substrate towards the [F9] objective (lower column). arrow on keyboard Perform manual column focus. Using this command will move the substrate away from the [F10] objective (raise column). KMS-310/400 Supervisor's Manual...

  • Page 60: Software Organization

    Software Organization This section provides an overview of the KMS-310/400 Supervisor Mode's software organization (Figure 4-3). Each of the elements in Figure 4-3 are discussed in greater detail in subsequent sections of this chapter. Figure 4-3. KMS-310/400 Software Map Measure screen...

  • Page 61: Standby Screen

    Standby Screen The KMS-310/400 system displays the Standby screen (Figure 4-4) when the system is first turned on or when idle. This is the entry screen for both supervisor and production mode. To display the Supervisor Master Menu screen from the Standby screen, select Supervisor and press [SELECT].

  • Page 62: Supervisor Master Menu

    Supervisor Master Menu The Supervisor Master Menu screen (Figure 4-5) is used to enter all submenus in production mode. Supervisor Master Menu screen menu selections, along with their uses, are listed in Table 4-6. Figure 4-5. Supervisor Master Menu Screen 4-12 Chapter 4: User Interface...
  • Page 63 Select this menu item to display the System Setup window. Save Program Select this menu item to save the program. Exit to DOS Select this menu item to exit to DOS. Standby Screen Select this menu item to return to the Standby screen. KMS-310/400 Supervisor's Manual 4-13...

  • Page 64: Measure Screen

    Measure Screen The Measure screen (Figure 4-6) is used to perform measurement functions. Uses for each of the Measure screen icons are listed in Table 4-7. To display the Measure screen: From the Supervisor Master Menu Screen, highlight the Measure icon. Press [SELECT].
  • Page 65 AMPS Press [SELECT] to run, pause, go to, restart, or exit a scripts script routine you typed in, or one that has been previously saved. KMS-310/400 Supervisor's Manual 4-15...

  • Page 66: Statistics Menu

    Statistics Menu If this option is set up and saved in Supervisor Mode, measurement data automatically collected with each measurement is displayed in the Statistics window (Figure 4-7). Uses for each of the Statistics window buttons are listed in Table 4-8. To display the Statistics window: From the Supervisor Master Menu screen, highlight the Statistics icon.
  • Page 67 Remove only the last reading taken from the statistics calculations. Print Place all statistics data onto the hard disk or send it to a printer or host computer, depending on the setup created in Supervisor mode. Exit Return to the Supervisor Master Menu Screen. KMS-310/400 Supervisor's Manual 4-17...

  • Page 68: Id Information Menu

    ID Information Menu Use the ID Information window (Figure 4-8) to enter your name (or a number for production tracking purposes), information regarding the device you are measuring, or other device identification data. Uses for each of the ID Entry screen buttons are listed in Table 4-9.
  • Page 69 Current Log File Enter the filename using the following format: Lfmmddyy.XXX [LF = logfile name, mm = month, dd = day, yy = year, XXX = program number]. Exit Return to the Supervisor Master Menu screen. KMS-310/400 Supervisor's Manual 4-19...

  • Page 70: Select Program Menu

    Select Program Menu The Select Program window (Figure 4-9) is used to create a new program, open an existing program for modification, copy an existing program, or delete an existing program. Uses for each of the Select Program buttons are listed in Table 4-10.
  • Page 71 Exit Return to the Supervisor Master Menu screen. When you exit the Select Program window, the program selected in the [OPEN] button is in use. KMS-310/400 Supervisor's Manual 4-21...

  • Page 72: Data Map Menu

    Data Map Menu The Data Map window (Figure 4-10) is used to display measurement data in graphic form. Once the data is displayed, you may also edit individual values within the display. Uses for each of the Data Map screen selections are listed in Table 4-11.
  • Page 73 Select [EDIT] to edit a data map value. Select [ESCAPE] to save editing changes. Target Set the target number. Delta - Set the Delta value. Delta + Set the Delta+ value. Exit Return to the Supervisor Master Menu screen. KMS-310/400 Supervisor's Manual 4-23...

  • Page 74: Program Setup Menu

    Program Setup Menu Use the Program window (Figure 4-11) to select the correct measurement program. The Program window lists the programs in the order they were used, from top to bottom. Uses for each of the Program Setup screen buttons are listed in Table 4-12.
  • Page 75 Halogen lamp is Toggle the Halogen lamp on and off. transmitted Number of frames to Set the number of frames to gather data (limit 32). gather data Exit Return to the Supervisor Master Menu screen. KMS-310/400 Supervisor's Manual 4-25...

  • Page 76: Sequence Setup Menu

    Sequence Setup Menu The Sequence Setup window (Figure 4-12) is used to display measurement data in numerical form. Once the measurement data is displayed, you can edit individual values within the display or change the method of measurement. When an item is selected, the selection box adjacent to the item turns from white to black.
  • Page 77 Select the method of calculation for data output as mean, min or max. Limits Toggle the limits selection on or off to set the minimum and maximum limits. Exit Return to the Sequence Setup window subscreen. KMS-310/400 Supervisor's Manual 4-27...

  • Page 78: Operator Lockouts Menu

    Operator Lockouts Menu The Operator Lockouts window (Figure 4-13) is used to tag program setup functions for restricted use. Any function selected in the Operator Lockout menu will have a black diagonal line across it in the production mode Measure screen and be unavailable for use by operators.
  • Page 79 Toggle the Continuous Measure selection on and off to block or enable operator access to this function. Toggle the Gather Stats selection on and off to block or Gather Stats enable operator access to this function. Exit Return to the Supervisor Master Menu screen. KMS-310/400 Supervisor's Manual 4-29...

  • Page 80: Calibrate Menu

    Calibrate Menu The Calibrate window (Figure 4-14) is used to calibrate the system when it is first set up. If the confocal and brightfield methods are both used for measurement, each objective must be calibrated for both of these microscopes. Uses for each button in the Calibrate window are listed in Table 4-15.
  • Page 81 Calibrate system to standard. Press [Calibrate] to display the Calibration Controls dialog box in the Calibration subscreen. Save Calculate and save data to a hard disk log file. Exit Return to the Supervisor Master Menu screen. KMS-310/400 Supervisor's Manual 4-31...

  • Page 82: System Setup Menu

    System Setup Menu The System Setup window (Figure 4-15) is used to modify screen display colors, change your supervisor access code and assign objective positions on the turret. Uses for each button in the System Setup window are listed in Table 4-16. When an item is selected, the selection box adjacent to the item turns from white to black.
  • Page 83 [EXIT] to return to the System Setup window. Post Turret Toggle the Post Turret Move Fast Focus on and off to select or Move deselect this option. Fastfocus Exit Return to the Supervisor Master Menu window. KMS-310/400 Supervisor's Manual 4-33...

  • Page 84: Save Program Menu

    Save Program Menu The Save Program window is used to save a program (Figure 4-16). Uses for each Save Program window selection are listed in Table 4-17. To display the Save Program window: 1. From the Supervisor Master Menu screen, highlight the Save Program icon. 2.

  • Page 85: Exit To Dos

    Table 4-18. Exit to DOS Window Selections Button Function Cancel Cancel the command and return to the Supervisor Master Menu screen. Save Save program and system settings and exit to DOS. Exit Exit to a DOS window without saving your work. KMS-310/400 Supervisor's Manual 4-35...

  • Page 86: Return To Standby Selection

    Return to Standby Selection Use this selection to return to the Standby Screen (Figure 4-18). Uses for the Standby Screen selections are listed in Table 4-19. To return to the Standby screen: From the Supervisor Master Menu screen, select the Standby Screen icon. Press [SELECT].

  • Page 87: Chapter 5: System Setup

    System Setup Overview Configure Illumination Settings Define Calibration Parameters Define System Options Set Objective Parfocality and Parcentricity Adjust Autofocus Parameters...

  • Page 88: Overview

    Overview This chapter provides detailed instructions for setting up the KMS-310/400 software in supervisor mode. Note: For an overview of the Supervisor software screens, screen components and software controls, refer to Chapter 4: User Interface. This chapter is organized into the following sections (Figure 5-1): Overview, which provides an overview of the chapter's organization and procedures contained in each of the chapter's sections.
  • Page 89 Figure 5-1. Chapter 5 Overview Configure illumination settings Set up the transmitted condensor Set up transmitted illumination Adjust illumination control Adjust focus control Define calibration parameters Select calibration parameters Calibrate the microscope Calibrate horizontal settings Calibrate vertical settings Configure single-point calibration Save calibration settings Define system options Display the System Setup window...

  • Page 90: Configure Illumination Settings

    Configure Illumination Settings This section provides the following procedures for configuring and adjusting illumination settings: set up the transmitted condensor set up transmitted illumination adjust illumination controls Set Up the Transmitted Condenser You can set up the transmitted condensor in one of two ways: Method 1: Visually set up the transmitted condensor using the ocular eyepieces, or Method 2: Set up the transmitted condensor using the CONDENSR.SCR...
  • Page 91 Close down the aperture so it is completely visible in the ocular eyepieces at 10X (Figure 5-2). Figure 5-2. Aperture in Ocular View and Focus Aperature partially closed while Aperture completely closed while viewing in the oculars. Image of viewing in the oculars. Image of aperture is out of focus.
  • Page 92 Open the aperture to slightly overfill the 10X objective (Figure 5-3) once the focus is found. This is accomplished by rotating the aperture knob (the front knob on the transmitted assembly) counterclockwise. Figure 5-3. Aperture Open to Overfill. Aperture completely open while viewing in the oculars.
  • Page 93 Load the CONDENSR.SCR script using the Script icon (Figure 5-4). Figure 5-4. CONDENSR.SCR Script //:CONDENSR.SCR //:THIS SCRIPT IS DESIGNED TO ASSIST WITH THE FOCUS OF THE CONDENSER //:THE SCRIPT WILL ASK THE USER TO SET A MEASURE WINDOW ON A SECTION //:A FEATURE.

  • Page 94: Set Up Transmitted Illumination

    Set Up Transmitted Illumination This section provides instruction for setting up the transmitted illumination controls in order to maximize the illumination signal while minimizing noise. The basic steps required to set up transmitted illumination include: setting illumination power (percent illumination) adjusting camera gain (KMS-400RT system only) configuring the electronics (frame grabber) controller for gain, offset and analog gain...
  • Page 95 10. Repeat steps 5-7 for each objective. 11. To save illumination settings for the KMS-310: Press [ESCAPE] to exit the Illumination submenu. Press [ESCAPE] to exit the Measurement screen and return to the Master Menu.

  • Page 96: Adjust Illumination Controls

    Select Set Objective in the Illumination menu and press [ENTER]. Press [ESCAPE] to exit the Illumination menu. Press [ESCAPE] to exit the Measurement screen and return to the Supervisor Master Menu screen. Select Save Program and press [ENTER]. 13. To copy illumination settings to new or other programs: Return to the Supervisor Master Menu screen and select the Select Program button.
  • Page 97 Adjustment Method 1 To adjust illumination control using method 1: From the Measure screen, highlight the icon and press [SELECT]. The Illumination subscreen is displayed (Figure 5-7). Figure 5-7. Illumination Subscreen Press [SELECT] until XX GAIN is displayed. Use the arrow keys to set the top portion of the vertical rectangle so that it is black, does not bounce into red, and so that the top curve of the image intensity profile is not flattened (saturated).

  • Page 98: Adjust Focus Control

    Adjust Focus Control If the substrate is visible through the microscope or on the monitor, but is not in focus, some adjustments may be required. This section provides instructions for adjusting both coarse and Piezo fine focus settings. Both coarse and Piezo fine focus adjust the focus offsets between objectives.
  • Page 99 Adjust the Piezo Fine Focus To adjust the Piezo fine focus: To move the objective (down) closer to the substrate, rotate the keypad thumbwheel in the up direction. To move the objective (up) away from the substrate, rotate the keypad thumbwheel in the down direction.

  • Page 100: Define Calibration Parameters

    Define Calibration Parameters You should calibrate the system during initial setup. This section provides instructions for configuring system calibration settings and includes the following procedures: Select calibration parameters Calibrate the microscope Calibrate horizontal settings Calibrate vertical settings Configure single-point calibration Save calibration settings If you plan on performing measurements with both confocal and brightfield microscopes, you will need to calibrate each objective for both of these...

  • Page 101: Select Calibration Parameters

    Select Calibration Parameters To display the Calibration screen and select calibration parameters: From the Supervisor Master Menu screen, highlight Calibrate and press [SELECT]. The Calibration screen is displayed (Figure 5-10). Figure 5-10. Calibration Screen To change the highlighted default name, press [SELECT] and type in the name and serial number of your standard.

  • Page 102: Calibrate Horizontal Settings

    Enter the size of the microscope aperture that is to be used for all measurements in this program. Press [SELECT] or [ESC] to set the new aperture. Calibrate Horizontal Settings To calibrate the horizontal settings: In the Standard Horizontal section of the Calibrate screen, highlight the Pitch field and press [SELECT].

  • Page 103: Configure Single-Point Calibration

    Configure Single-point Calibration This section provides instructions for configuring single-point calibration and includes the following procedures: Set the illumination Disable submicron multipoint calibration Set up the measurement window Calibrate the system to standard Set the Illumination To set illumination and check single-point mode status: Place the measurement gauge (or standard) on the stage.
  • Page 104 Set Up the Measurement Window This section provides a procedure for setting up the measurement window using any of the following three different line width standard masks: Roger K Sherman (RKS) NIST SRM 473 NIST SRM 475 To set up the measurement window with the Roger K Sherman (RKS) line width standard mask: Center the “L”...
  • Page 105 To set up the measurement window with the NIST SRM 473 line width standard mask: Center the fiducial line of target 5D on the Y-axis. Adjust the measurement windows so that they are no higher or lower than the fiducial mark on the right side of the pitch (Figures 5-12 and 5-13).
  • Page 106 To set up the measurement window with the NIST SRM 475 line width standard mask: Center the fiducial line of Target 5 on the Y-axis. Adjust the measurement windows so that they are no higher or lower than the fiducial mark on the right side of the pitch (Figures 5-14 and 5-15).
  • Page 107 Calibrate the System to Standard To calibrate the system to standard: From the Calibration screen, highlight the Calibrate button and press [SELECT]. The Calibration Control submenu is displayed. Highlight the icon and recall Window 1. Highlight the icon and move the Measure window as shown in Figure 5-16.

  • Page 108: Save The Calibration Settings

    From the Measure screen press [MENU]. Select Line in the calibration submenu. Make sure that the correct edges are for LINE (Figure 5-16). Set the scan direction using the standards listed in Table 5-2. 10. From the Measure screen highlight the icon and press [SELECT].

  • Page 109: Define System Options

    Define System Options In addition to prgam setup options, several other system options can be configured from the Supervisor Master Menu screen. This section provides procedures for changing: system colors your access code turret objective assignments Display the System Setup Window To display the System Setup window: From the Supervisor Master Menu screen, highlight System Setup and press [SELECT].

  • Page 110: Set Map Colors

    Set Map Colors To change map colors: From the System Setup screen, highlight Color Map and press [SELECT]. The Color Map subscreen is displayed (Figure 5-18) below the System Setup screen. Figure 5-18 Color Map Subscreen Select the color from the palette that you want to change, highlight the Color button, press [SELECT] and use the arrow keys adjacent to the Color button to move the cursor under the color you want to change.

  • Page 111: Change Your Supervisor Access Code

    Change your Supervisor Access Code To change your supervisor access code: From the System Setup screen, highlight New Code and press [SELECT]. The Access Code Subscreen is displayed (Figure 5-19) at the bottom of the System Setup screen. Figure 5-19. Access Code Subscreen To change the access code, select New Code and type the name of the new code using any combination of uppercase and lowercase letters.
  • Page 112 To change the magnification of the objective that will be located in this turret position: Select the turret position (1 thru 5) to be changed, type in the new magnification value and press [SELECT] to set the new value. Press [ESC] to undo the change in value. Repeat the previous steps for each turret position to be changed.

  • Page 113: Set Objective Parfocality And Parcentricity

    Set Objective Parfocality and Parcentricity This section provides procedures to set the parfocality and parcentricity of either the AMS or KMS system regardless of the version of software on the system. When the user has completed this procedure the system should maintain focus and image location when moving from one objective to the next.
  • Page 114 Set the lower z-limit for the 50X objective: Select [Set Z Limit]. Use the arrow keys to adjust the z-column. Place the z-column at a lower limit of approximately 100 microns past focus (200 for ELWD). Rotate the objective toward the substrate while still above focus. Press [ESCAPE] to set the lower z-limit.

  • Page 115: Adjust Autofocus Parameters

    Adjust Autofocus Parameters This section provides procedures for: setting column autofocus setting the Piezo using the autofocus algorithm Set Column Autofocus Before setting column autofocus parameters, make sure: Z is positioned inside the range of the autofocus search for the expected focus position.
  • Page 116 To set column autofocus: Position the start of the column autofocus (Figure 5-22). Figure 5-22. Z Positioning During Autofocus Focus Time Start the move to C' = ½ range offset from start. Speed allows an average of one focus reading every step in nanometers. (The direction of the move minimizes the effects of backlash.) Note: Range and step can be changed with the script command FF_SET (FF_SET:20000 100) or manually with the hidden command [Alt] + [f].

  • Page 117: Set Piezo Autofocus Algorithm

    Set Piezo Autofocus Algorithm To set the Piezo using the autofocus algorithm (Figure 5-23): Figure 5-23. Piezo Autofocus Algorithm Pass 1 Pass 2 Pass 3 Starting Final position position 2*step swing stepsize = 7.324 nm stepsize = 'step' range/2 stepsize = 110 nm Complete a first pass (pass 1).
  • Page 118 Complete a second pass (pass 2). Scan from p1-swing through p1_swing for the best focus position (p2). To do this, take a focus reading at every user-specified step. Use Table 5-3 and the following definitions to complete the first pass (p2): Swing: initial position at start of the autofocus procedure Step: user-specified parameter p2: best focus position...

  • Page 119: Chapter 6: Creating Automated Scripts

    Creating Automated Scripts Overview Script Creation Script Locator Script Commands...

  • Page 120: Overview

    Scripts are a series of system instructions saved to file that can be recalled later to automate the measurement process. Most KMS-310/400 functions can be automated using a variety of Zygo-supplied and customized scripts. With scripts, you can automate any or all measurement routines for the KMS-310/400.
  • Page 121 CALL: command puts a return address on the stack to indicate where to RETURN: to. The stack will overflow if more CALL:s are made without a corresponding RETURN: statement. A maximum of 32 calls may be imbedded within a subroutine. KMS-310/400 Supervisor's Manual...
  • Page 122 The only means for branching execution is with the Vxx parameter in the commands that pass control off to another portion of the script. The variable is usually generated with a MATH: function. The MATH: function is a simple assignment function with the following format: MATH:Vxx=VxyOpVxz The Op value can be any one of the symbols shown in Table 6-1.
  • Page 123 MATRIXSET: command, or merely modify elements, you will need to MATRIXWRITE: to save the values. The data remains in memory until you execute a MATRIXCLOSE: command. This releases the Vhandle and the memory used by the matrix file while it was in memory. KMS-310/400 Supervisor's Manual...
  • Page 124 For example, this can help a script to determine the number of iterations of measurements, all under operator control. Debugging Aids The KMS-310/400 scripting language offers several features to make debugging, including the: DEBUG: command OPMARK: command...

  • Page 125: Script Command Types

    The first parameter is the starting pattern “register” and the second is the number of points to execute. The number of points can be one or more, depending on how many REC_PT:s you defined. At this point, the software has the edge positions KMS-310/400 Supervisor's Manual...
  • Page 126 stored in the associated pattern registers. To get this information you must RP_READ: it into a variable. For example, the following is a typical sequence of script commands to perform a pattern rec: BOX:150 300 500 350 2 (Draw a box to show window) RP_WIN:150 300 500 350 (Define the window) RECPT:0 0 1 1 50 (define the rec_pt’s) RECPT:1 0 1 2 50...
  • Page 127 Piezo to measure from the best focus. If you want to turn this feature off, execute the AF_STAT:0 command. This will turn off the autofocus default setting. If you want to set nonstandard range, swing or step values, execute the AF_SET: command. This command requires parameter settings for range, swing and step. KMS-310/400 Supervisor's Manual...

  • Page 128: Matrix File Input And Output

    Matrix File Input and Output Matrix files are a convenient method of inputting and outputting scripts. They are comma-delimited text (ASCII) files and have a dimension of X columns and Y rows used with the MATRIX commands. For this reason, a matrix file is a rectangular array of integers and can be quite useful for both input (as coordinates of measurement sites) and output (as a set of measurements).
  • Page 129 JUMP:V15 EXITSCAN MOVEPOLZ:V02 V03 PAUSE:2 CALL:1 MEASURE PRINT:"% ",V88 LOOP:1 NEXTPOS MARK:EXITSCAN RETURN: The last RETURN: command returns control to the calling code, which then performs a MATRIXCLOSE: command to free the memory used by the matrix. KMS-310/400 Supervisor's Manual 6-11...
  • Page 130 Matrix Output Matrix files can be used to output data in a format that can be placed directly into any other program that can import CSV (Comma Separated Value) or Matrix format files (such s Excel). This enables you to reduce a series of measurements to a MATRIX and then easily import them into an analysis program.
  • Page 131 Once this sample script is finished, there will be three matrix files in the C:\300LC directory. Each of these files will be a 10x10 CSV format file with data series in columns and ready for export. KMS-310/400 Supervisor's Manual 6-13...

  • Page 132: Script Creation

    Script Creation Overview The basic steps you will take to create a script include: Plan the script. Locate edge features. Set up align and deskew parameters for the mask. Set up planarity for the mask. Obtain substrate information. Move to the features to be measured. Call the measurement subroutine.

  • Page 133: Set Up Align And Deskew For The Mask

    (since it is easy to add sites to a matrix file) and other data tags to be stored in the matrix file (such as index or die numbers) to identify the feature/site being measured. KMS-310/400 Supervisor's Manual 6-15...

  • Page 134: Call The Measurement Subroutine

    Call the Measurement Subroutine Finally, call the measurement subroutine to perform the measurement. The results will then be printed directly to the logfile or returned for formatting. Several measurements can be executed per site. In this case, the data can be arranged by column in the logfile. Suggested Order of Script Sequence The suggested order for script subroutines is as follows: Align, deskew (and planarize the mask)

  • Page 135: Example Script

    000-099 - BASE SCRIPT 100-199 - ALIGNMENT PROCEDURE 200-299 - MATRIX INPUT / OUTPUT / COUNTERS 300-399 - STAGE MOVEMENT 400-499 - PATTERN RECOGNITION 500-599 - SEQUENCE / MEASUREMENT / STATISTICS 600-699 - GENERAL MATH >700 - OPEN KMS-310/400 Supervisor's Manual 6-17...
  • Page 136 //:BASIC ORDER OF EXECUTION PLATE ID / LOGFILE OPENING ALIGNMENT PROCEDURE MOVE TO FIRST FEATURE CENTER FEATURE AND PATTERN RECOGNITION CONSTRUCT MEASUREMENT WINDOWS AND MEASURE OUTPUT MEASUREMENTS END SCRIPT //:************************************************************** //:OPENS IDINFO SCREEN, PRINTS INFORMATION TO NAMED LOGFILE //:TURNS PRINTER ON //:TURNS STATISTICS ON AND CLEARS REGISTERS IDINFO:O IDINFO:P...
  • Page 137 MATH: V411=240-V411 MATH: V411=V411*50 //: CENTERING MOVE IN 0.1UM RESOLUTION RELMOVE_NM: V410 V411 RETURN: MARK: URCROSS //:PATTERN RECOGNITION FOR MEASUREMENT RP_WIN: 230 150 410 330 BOX: 230 150 410 330 2 RECPT: 1 0 1 1 50 KMS-310/400 Supervisor's Manual 6-19...
  • Page 138 RECPT: 2 0 0 1 50 RECPT: 3 1 1 1 50 RECPT: 4 1 0 1 50 RP_EXEC: 1 4 RP_READ: 1 V401 RP_READ: 2 V402 RP_READ: 3 V403 RP_READ: 4 V404 BUILDING X AXIS MESUREMENT BOX //: X COORDINATES MATH: V421=V401-60 MATH: V422=V402+60 //:Y COORDINATES...
  • Page 139 PRINT: "Y Measurement=%", V540 RETURN: MARK: PRINTX PRINTSTR: " X Axis - Avg= %, Max=%, Min=%, 3 StDev=%, n=%", V531,V532,V533,V535,V534 PRINT: RETURN: MARK: PRINTY PRINTSTR: "Y Axis - Avg= %, Max=%, Min=%, 3 StDev=%, n=%", V541,V542,V543,V545,V544 PRINT: RETURN: KMS-310/400 Supervisor's Manual 6-21...

  • Page 140: Script Locator

    Script Locator Use the Script Locator reference tables in this section to find the location within this chapter for definitions of specific script commands. If you know the name of the script command, use Table 6-2 to identify a page number within this chapter for specific information about the command.
  • Page 141 Piezo position (units are .001 um) 6-60 GO_ORIGIN Move stage to 'polar' origin. 6-60 GOSTOP Go to GOSTOP number Vstop. 6-60 GRABSTAT Acquisition of video images 6-61 GSPAWN Execute DOS command with parameter while in 6-61 graphics mode. KMS-310/400 Supervisor's Manual 6-23...
  • Page 142 Table 6-2. Alphabetical Summary List of Commands (Part 3 of 8) Script Name Function Page Number INCLUDE Insert a script segment from an existing file 6-62 IDINFO Manipulate input to log file. 6-63 JUMP Jump forward to MARKER. 6-64 LINE User defined screen graphic to draw a line 6-64 LOADCALIB...
  • Page 143 Move to 'polar' x/y @ 0.1 um resolution (in 6-79 aligned + deskewed space). MOVEPOLZ Move to 'polar' x/y coordinates with Z 6-79 compensation in 0.1 um resolution. MOVEPOLZ_NM Move to 'polar' x/y coordinates with Z 6-80 compensation in 0.1 um resolution. KMS-310/400 Supervisor's Manual 6-25...
  • Page 144 Table 6-2. Alphabetical Summary List of Commands (Part 5 of 8) Script Name Function Page Number MSR_DEFAULT Value for RESULTS if there is an error in the 6-80 measure MSR_ERROR Gets flag for sequence Vseq. (0:none,1:+,2:- 6-81 ,3:?,4:user abort) MSR_STATS Set collector for gathering of standard 6-81 measurement statistics (max=10).
  • Page 145 6-91 RETURN Return from CALLed subroutine. 6-92 RP_DISPLAY For DEBUG purposes; shows RP_WIN summed 6-92 data RP_EXEC Vstart Vcnt ;Vstart=Vptnum Do Ptrn Rec fr Point 6-92 Vstart for Vcnt Points. Executes RECPT command for pattern recognition KMS-310/400 Supervisor's Manual 6-27...
  • Page 146 Table 6-2. Alphabetical Summary List of Commands (Part 7 of 8) Script Name Function Page Number RP_READ Get result from pattern recognition search. 6-92 RP_WIN Vx1 Vy1 Vx2 Vy2; (upper left, lower right). Set 6-92 pattern recognition window. Defines area of search for edge detection pattern recognition routine.
  • Page 147 Page Number UPDATE Update the realtime display. 6-99 XHAIR Draw cross in center of screen 6-100 Z_MOVE PIEZO move to Z axis position in nanometers 6-100 Z_REL PIEZO move Z nanometers relative to current 6-100 position KMS-310/400 Supervisor's Manual 6-29...

  • Page 148: Listings By Function

    Listings by Function This section lists script commands by functional category. Comment and Debug Commands These commands are used to comment and debug. Table 6-3. Comment, Debug, and Ramfree Commands Script Name Functional Category Page Number COMMENT Text to end of line 6-50 Text comment;...
  • Page 149 Get statistics for a sequence window/collector with 6-96 1-sigma output. STATMSR3 Get statistics for a sequence window/collector with 6-97 3-sigma output. STATS Satistics operation command. Used to turn on/off, 6-97 print, clear or ask for operator input KMS-310/400 Supervisor's Manual 6-31...
  • Page 150 SEQ Commands The SEQ command functions are used to set up a measurement. An edge is defined within each of two windows for up to 10 separate measurements. Table 6-5. SEQ Commands Script Name Functional Category Page Number SEQEDGE Vseq Vvin Vaxis Vdir Vedge Vth 6-93 SEQNAME Vseq "text string"...

  • Page 151: Stage, Column, And Optical Positioning And Turret Command

    Table 6-8. Stage, Column, and Optical Positioning Turret Commands Script Name Functional Category Page Number TURRET Vposition 6-98 Move turret to position 1-5. TURRETFF Turns fast focus on/off after each turret move 6-99 TURRETPOS Read current turret position. 6-99 KMS-310/400 Supervisor's Manual 6-33...

  • Page 152: Illumination Values Commands

    Illumination Values Commands Gain and offset are video image amplification and contrast values; lamp is the brightness of the variable Halogen lamp, if present. Table 6-9. Illumination Values Commands Script Name Functional Category Page Number GETWIN Get screen position of measure window. 6-59 LUMAUTO Adjusts system illumination to approximate...

  • Page 153: Z-Axis Position Commands: Piezo Stack

    Get the motor position (not scales!) in um. 6-57 GET_MOT_Z 6-60 Get motor z in NnumZ (0.001 mm units). MOT_Z_MOVE 6-77 Move to motor z (0.001 mm units). MOT_Z_REL 6-78 Move relative motor z (0.001 mm units). KMS-310/400 Supervisor's Manual 6-35...

  • Page 154: Y-Axis Position Commands: Stage Motors

    X-, Y-Axis Position Commands: Stage Motors These commands allow the user to control positioning of X-axis and Y-axis using the stage motors. Units 1 um Resolution 0.2 um Typical error 1 um Polar-Mask Coordinate Movement Commands These commands allow the user to manage polar-mask coordinate movements. Table 6-12.
  • Page 155 POSMOVE_NM Move stage to non-aligned x/y coordinates in 0.1 6-88 um resolution. RELMOVE V_x V_y 6-90 Move relative position V_x V_y. RELMOVE_NM Move stage a relative x/y distance from current 6-90 position in 0.1 um resolution. KMS-310/400 Supervisor's Manual 6-37...

  • Page 156: Planarization Commands

    Specialty Commands These commands allow the user to manage edges. Table 6-14. Specialty Commands Script Name Functional Category Page Number EDGES Optional command to measure oblique features 6-53 EDGEPOS Optional command to measure relative position of 6-53 two edges EDGEROUGHNESS Optional command to measure edge roughness 6-54 STATEDGE...

  • Page 157: Operator Interface Commands

    Count x,y Display screen MENU Nnum, "title", item, item 6-76 Offers operator list of buttons with labels itemized; returns button chosen in Nnum. Button texts are separated by commas. Optional title must be in quotes ("..."). KMS-310/400 Supervisor's Manual 6-39...
  • Page 158 Table 6-16. Operator Interface Commands (Part 2 of 2) Script Name Functional Category Page Number MESSAGE "Text string" 6-77 Place text string on screen. OPERATOR "Text instruction" 6-81 Give control to operator until ESC key is pressed. PAUSE Vseconds 6-86 Pause for V seconds for inspection or other reason.

  • Page 159: Data Output Matrix Commands

    Nnumhandle V_x V_y Nnum 6-74 Set MATRIX value X, y to value Vnum. MATRIXVALUE Nnumhandle V_x V_y Nnum 6-74 Read MATRIX value x, y into Nnum. MATRIXWRITE Nnumhandle "file.ext" 6-75 Write MATRIX file values as file.ext. KMS-310/400 Supervisor's Manual 6-41...

  • Page 160: Log File Commands

    Log File Commands These commands allow the operator to manage log files. Table 6-18. Log File Commands Script Name Functional Category Page Number CLOCK Used to record DOS clock 6-50 [Vmth Vdy Vyr]/T[Vhr Vmn Vsc]; P=log DATE+TIME,D=DATE/T=TIME to Vnums GETTEXT Get a text string from the user and send to log file.

  • Page 161: Script Flow Commands

    Perform math on values or variables. Operation (op) may be +, -, *, /, <, >, or =. QUIT End script execution and restart. 6-89 RETURN Return from subroutine. 6-92 START Jump to start of script. 6-96 KMS-310/400 Supervisor's Manual 6-43...

  • Page 162: Edge Detection Pattern Recognition Commands

    Edge Detection Pattern Recognition Commands These commands allow the operator to locate edges within window similar to the way the measurement specification works (selecting an edge at a threshold level). Up to 10 recognition points may be specified, as well as the window within which to locate the points.

  • Page 163: Autofocus Commands

    Table 6-23. Find Surface Commands Script Name Functional Category Page Number FASTSURF Find surface in confocal mode. 6-55 FINDSURF Nzpos 6-56 Return Piezo position at end of routine in variable Nzpos. KMS-310/400 Supervisor's Manual 6-45...

  • Page 164: Fast Focus Commands

    Fast Focus Commands Fast focus routines are designed to find an image quickly (usually an autofocus is done prior to measurement). Intensity-based focus routines scan the range, searching for the peak intensity. Fast focus can also use the edge derivative for detecting focus instead of the peak image intensity.

  • Page 165: Column Focus Command

    Table 6-25. Column Focus Command Script Name Functional Category Page Number FOCUSIMG Vsets Vtype 6-57 Seek peak focus using column (minimum step is 100 nm). If Vsets, uses FF_SET values; if Vtype, uses edge contract; otherwise uses peak intensity (confocal). KMS-310/400 Supervisor's Manual 6-47...

  • Page 166: Script Commands

    Script Commands This section provides detailed information for all script commands. Script commands are listed in alphabetical order. AF_EXEC FUNCTION Executes autofocus. Uses the current SEQWIN to autofocus, utilizing the current settings in AF_SET: for Range Swing and Step Searches through RANGE nanometers (within Piezo range) for the best focus.

  • Page 167: Align

    MARKER Calls the subroutine MARKER if Vnum is nonzero. Can be used in conjunction with the MATH: command to perform conditional execution of subroutines OPTIONS EXAMPLE SCRIPT CALL:V67 SITESCAN RELATED SCRIPTS MARK; LOOP; JUMP; MARK; MENU KMS-310/400 Supervisor's Manual 6-49...

  • Page 168: Clearpic

    CLEARPIC FUNCTION CLEARPIC: erase the displayed picture Removes the picture displayed on the screen; mostly used by TIC internally for debugging purposes OPTIONS EXAMPLE SCRIPT CLEARPIC: RELATED SCRIPTS PICSHOW CLOCK FUNCTION CLOCK: P/D[Vmth Vdy Vyr]/T[Vhr Vmn Vsc]; P=log DATE+TIME, D=DATE/T=TIME to Vnums Allows time and date information to be manipulated under script control, as well as logging it to the logfile OPTIONS...

  • Page 169: Debug

    (and/or mask holder) on the stage (Figure 6-1). EXAMPLE SCRIPT ORIGIN: RELMOVE:130000 0 XHAIR: MENU: V99 ALIGN TO XHAIR DESKEW: RELATED SCRIPTS ALIGN, ORIGIN, MASK_ORIGIN Figure 6-1. Deskew Pint Deskew Point Align Point Stage X KMS-310/400 Supervisor's Manual 6-51...

  • Page 170: Edges

    EDGES FUNCTION EDGES: Vhndl Vlines [Vslope1 Vslope2 Vdistance] Store x,y positions into matrix with optional slope of edges Vhandl is variable to be used for the matrix handle (20 max handles). Vlines is the variable where the number of scan lines is returned.

  • Page 171: Edgepos

    SEQEDGE:1 0 0 0 1 35 SEQEDGE:1 1 0 0 2 35 EDGEPOS: V50 V47 V48 V49 MATRIXCLOSE: V50 RELATED SCRIPTS MATRIXWRITE, MATRIXVALUE, EDGES (Figure 6-3) Figure 6-3. Matrix Edge Position edge 1 center edge 2 KMS-310/400 Supervisor's Manual 6-53...

  • Page 172: Edgeroughness (Edger)

    EDGEROUGHNESS (EDGER) FUNCTION EDGEROUGHNESS - statistics on two edges EDGEROUGHNESS: Vhndl V1min V1max V1stddev V2min V2max V2stddev Vhndl variable for the matrix handle (20 max matrices opened at once) V1min variable for minimum X/Y nanometers, edge 1 V1max variable for maximum X/Y nanometers, edge 1 V1stddev variable for standard deviation nm x 1000, edge 1 V2min variable for minimum X/Y nanometers, edge 2 V2max variable for maximum X/Y nanometers, edge 2...

  • Page 173: End

    FASTSURF: [Vnano]; Refine surface +/-(Vnano/2) ->use FF_WIN.(Vnano dflt = 3000) Vnano - range to search (in nm) Uses FF_WIN Resolves surface (best) in range of Vnano nanometers. Machine MUST be in confocal mode. EXAMPLE SCRIPT FASTSURF:10000 RELATED SCRIPTS FOCUSFAST; FINDSURF; FOCUSIMG KMS-310/400 Supervisor's Manual 6-55...

  • Page 174: Ff_Set

    FF_SET FUNCTION FF_SET: Vrange Vstep; units are in nm Vrange - range to focus through (nm) Vstep - stepsize (nm) Sets range and step for the FOCUS commands FOCUSFAST and FOCUSIMG will search through the range selected to find the best focus (either surface or edge ) within the range.

  • Page 175: Focusfast

    Puts stage position (from scales) in VnumX and VnumY Allows script reading of stage position in absolute scale coordinates OPTION: GETPOS_NM:VnumX VnumY output in 0.1 um resolution EXAMPLE SCRIPT GETPOS:V12 V13 RELATED SCRIPTS GETMOTCNTS; GETPOS; GET_MOT_Z; GET_Z; POSPOL KMS-310/400 Supervisor's Manual 6-57...

  • Page 176: Getstop

    GETSTOP FUNCTION Vstopnum Vx Vy [Valigned] get (aligned) coordinates of STAGE STOP EXAMPLE SCRIPT GETSTOP: 20 V10 V11 RELATED SCRIPTS GOSTOP; SETSTOP GETTEXT FUNCTION GETTEXT: “prompt” [“default text”] Get a text string from the user and output it to the log file Allows a means for the user to annotate the log file while a script is running.

  • Page 177: Getwin

    GETWIN: 0 V21 V22 V23 V24 PRINT: “Coordinates of Window 0, Upper-Left = % %”, V21, PRINT: “Coordinates of Window 0, Lower-Right = % %”, V23, Figure 6-6. Display Screen Coordinates of Measurement Windows Upper-Left Lower-Right KMS-310/400 Supervisor's Manual 6-59...

  • Page 178: Get_Mot_Z

    GET_MOT_Z FUNCTION GET_MOT_Z: VnumZ (units are .001 um) Gets column position in nm and stores it in the variable VnumZ Allows the script to be able to read the column position. Mostly useful for setting the Piezo stack to certain position for consistent Z-depth measurement readings.

  • Page 179: Gostop

    Allows the script to execute DOS commands (run batch files, copy and delete files, etc.) while under script control; useful for automating data transfer with the KMS EXAMPLE SCRIPT GSPAWN: "delete logfile.log" RELATED SCRIPTS SPAWN: KMS-310/400 Supervisor's Manual 6-61...

  • Page 180: Include

    INCLUDE FUNCTION INCLUDE - merge script code from other SCRIPT files. INCLUDE: “filename” The script code from “filename” will be inserted at the location where the INCLUDE script command is located. LIMITATIONS The total size of the script with includes cannot exceed 65,000 bytes.

  • Page 181: Idinfo

    EXAMPLE SCRIPT IDINFO: O allows operator to set ID information and filename IDINFO: P print ID information to logfile PRINT: “PITCH = %”, V03 prints value in V03 to logfile (assumes no printer) RELATED SCRIPTS PRINT, PRINTSTR KMS-310/400 Supervisor's Manual 6-63...

  • Page 182: Jump

    JUMP FUNCTION JUMP: Value MARKER If Value then jump FORWARD to MARKER in script Allows conditional branching and execution in the script; used with MATH: commands to control the flow of the script. EXAMPLE SCRIPT MATH:V66=8 MATH:V67=V66<10 JUMP:V67 MAKE_IT_HAPPEN RELATED SCRIPTS MATH: LOOP: MARK: CALL LINE FUNCTION...

  • Page 183: Loadcf

    Program Setup and Program Save in the main menu. OPTIONS EXAMPLE SCRIPT MATH: V1200=1 LOADSUBM “MULTIPT\HORZCLR.DAT” load the calibration file MEASURE: V1200 EXIT: RELATED SCRIPTS LOADPROG; LOADCALIB; LOADCF KMS-310/400 Supervisor's Manual 6-65...

  • Page 184: Lockout

    LOCKOUT FUNCTION LOCKOUT: Value ; [0|1] Locks an operator out of ESCaping script processing Allows the script author to control access to breaking out of script processing; useful to ensure measurement integrity EXAMPLE SCRIPT LOCKOUT: 1 LOGMEASURE FUNCTION LOGMEASURE: Value Value toggles the logging of measurement data to the logfile.

  • Page 185: Lumauto

    Writes the illumination values in SEQWIN 0 (0-255) into filename as a comma-separated value file, which can then be imported into a spreadsheet for graphing or other data analysis EXAMPLE SCRIPT LUMDUMP:"Window0.csv" RELATED SCRIPTS METER, SEQWIN, LUMAVG KMS-310/400 Supervisor's Manual 6-67...

  • Page 186: Lummark

    LUMMARK FUNCTION Sets default values for illumination contrast when used with LUMATUO EXAMPLE SCRIPTS LUMSET: L30 G32 O52 C20 S8 LUMMARK: MESSAGE: "SET ILLUMINATION" OPERATOR: LUMMARE: RELATED SCRIPTS LUMSET; LUMREAD; LUMAUTO LUMREAD FUNCTION LUMREAD: [OVoffset] [GVgain] [LVlamp] [AVanalog gain] [CVcamera gain] [SVshutter speed] Reads the current illumination values into the respective variables.

  • Page 187: Mapmenu

    Set mask coordinates origin MASK_ORIGIN: [VX Stage coordinates, nanometers, at which mask 0,0 should be set Establishes the position at which the mask x-y coordinates are 0,0. OPTIONS ORIGIN EXAMPLE SCRIPT MASK_ORIGIN: 65000300 65000150 RELATED SCRIPTS ORIGIN KMS-310/400 Supervisor's Manual 6-69...

  • Page 188: Mask_Plane: X

    MASK_PLANE FUNCTION MASK_PLANE - Planarize the mask MASK_PLANE: X Given mask positions and an assumed [approximate] mask origin, the system moves to each x-y point in turn. At each point the operator should bring the feature into focus and refine the positioning.

  • Page 189: Mark

    Divide < less than > greater than Sine Cosine SQRT Squareroot & Allows script processing of various mathematical operations; most often used to set conditions for the branching commands EXAMPLE SCRIPT MATH:V27=V26<10 RELATED SCRIPTS METER, SEQWIN KMS-310/400 Supervisor's Manual 6-71...

  • Page 190: Matrixclear

    MATRIXCLEAR FUNCTION MATRIXCLEAR Free memory for all matrices opened by the MATRIXOPEN command Provides ability to free memory allocated to all opened matrices. This command should be used with caution. When this command is executed, memory is freed and all matrix handles become invalid.

  • Page 191: Matrixclose

    Filename of matrix file (max 10 chars) EXAMPLE SCRIPT sample.mtx 39, 12 0, 45 88, 9 -3, 15 MATRIXOPEN: V80 2 4 “sample.mtx” MATRIXSET: V80 1 3 17 MATRIXWRITE: V80 “output.mtx” MATRIXCLOSE: V80 output.mtx 39, 12 0, 45 17, 9 -3, 15 KMS-310/400 Supervisor's Manual 6-73...

  • Page 192: Matrixset

    MATRIXSET FUNCTION MATRIXSET - Set a value into an opened matrix MATRIXSET: Vhndl Vx Vy Vnum Sets a value into a matrix cell OPTIONS Vhandl Script variable, V00-V99 used in the MATRIXOPEN as the handle Matrix column, 1-dimx, matrix cell address Matrix row, 1-dimy, matrix cell adress Vnum Value to be placed into matrix cell...

  • Page 193: Matrixwrite

    0, 45 88, 9 -3, 15 MATRIXOPEN: V80 2 4 “sample.mtx” MATRIXSET: V80 1 3 17 MATRIXWRITE: V80 “output.mtx” MATRIXCLOSE: V80 output.mtx 39, 12 0, 45 17, 9 -3, 15 RELATED SCRIPTS MATRIXOPEN; MATRIXSET; MATRIXCLEAR; MATRIXCLOSE KMS-310/400 Supervisor's Manual 6-75...

  • Page 194: Measure

    MEASURE FUNCTION MEASURE: Vpause Measure and pause for Vpause (default =1) seconds afterwards Actually initiates a mesaurement on the currently active sequence window setup EXAMPLE SCRIPT MEASURE:1 RELATED SCRIPTS SEQWIN; MSR_STATS; MSR_DEFAULT; MSR_ERROR; RESULT MEASURE_ALGORITHM FUNCTION MEASURE_ALGORITHM: Type Vaaa, Vbbb, Vccc, Vddd, Veee TYPE=AVERAGE Vaaa=MIN THRESHOLD...

  • Page 195: Message

    CALL:V85 DECREASE LOOP:V85 CHECK CALL:V86 INCREASE LOOP:V86 CHECK LUMREAD:GV44 OV45 RELATED SCRIPTS LUMREAD: LUMSET: RP_WIN MOT_Z_MOVE FUNCTION MOT_Z_MOVE:V_z Moves the column to position V_z in .001 um units EXAMPLE SCRIPT MOT_Z_MOVE:40192 RELATED SCRIPTS MOT_Z_REL; Z_MOVE; Z_REL KMS-310/400 Supervisor's Manual 6-77...

  • Page 196: Mot_Z_Rel

    MOT_Z_REL FUNCTION MOT_Z_REL:V_z Allows the script to position the column relative to the current position EXAMPLE SCRIPT GET_Z:V29 MATH:V39=V29-9500 MOT_Z_REL:V39 PAUSE:2 Z_MOVE:9500 PAUSE:1 RELATED SCRIPTS MOT_Z_MOVE, GET_Z, GET_MOT_Z MOVEPOL FUNCTION MOVEPOL:V_x V_y Move to stage position V_x , V_y in the aligned/deskewed coordinate system.

  • Page 197: Movepol_Nm

    MARK:NEXTPOS MATH:V01=V01+1 MATRIXVALUE:V00 1 V01 V02 MATRIXVALUE:V00 2 V01 V03 MATRIXVALUE:V00 3 V01 V04 MATRIXVALUE:V00 4 V01 V05 MATRIXVALUE:V00 5 V01 V06 MATH:V15=V02=0 JUMP:V15 EXITSCAN OVEPOLZ:V02 V03 PAUSE:2 CALL:1 POLELOCATION RELATED SCRIPTS MOVEPOL; RELMOVE; REL_POL; REL_POLZ KMS-310/400 Supervisor's Manual 6-79...

  • Page 198: Movepolz_Nm

    MOVEPOLZ_NM FUNCTION MOVEPOLZ_NM: V_x V_y Move to stage position V_x , V_y in the aligned/deskewed and planarized coordinate system. Nanometer resolution (100nm = .1 micron); essentially yields one more digit of stage accuracy, to .1 micron EXAMPLE SCRIPT MARK:SITESCAN MATH:V01=0 MARK:NEXTPOS MATH:V01=V01+1 MATRIXVALUE:V00 1 V01 V02...

  • Page 199: Msr_Error

    Pauses script processing and allows the operator to perform some manual control; displays the optional message that can be used to instruct the operator as to what task needs to be performed EXAMPLE SCRIPT OPERATOR: "Align and focus" RELATED SCRIPTS MESSAGE; MENU KMS-310/400 Supervisor's Manual 6-81...

  • Page 200: Opmark

    OPMARK FUNCTION OPMARK: MARKER Label for CALL, JUMP, LOOP and operator’s ‘GOTO OPMARK’ OPMARK’s are seen in the GOTO menu under the script processing icon; allows a handy way to test a subroutine without running the entire script EXAMPLE SCRIPT OPMARK:TEST_POLE_MEASUREMENT RELATED SCRIPTS CALL;...

  • Page 201: Patrec_Find

    MATH: V201 = 240 //Center pixel y MATH: V202 = 200 //width of rectangle MATH: V203 = 300 //height of rectangle PATREC_FIND: V200 V201 V203 V204 “MYMOD.BMP” //BMP format //search limited area EXIT: RELATED SCRIPTS PATREC_GET, PATREC_SAVE,PATREC_SHOW KMS-310/400 Supervisor's Manual 6-83...

  • Page 202: Patrec_Get

    PATREC_GET FUNCTION PATREC_GET - retrieve results pattern match PATREC_GET: Vcenterx Vcentery Vscore Vcenterx The x pixel position of the center of the pattern Vcentery The y pixel position of the center of the pattern Vscore Matching score as a percentage Retrieve the results from the last PATREC_FIND.

  • Page 203: Patrec_Save

    “.TIF” are defined to have models in the TIF format. Files with any other extension are not valid at this time. OPTIONS EXAMPLE SCRIPT MATH: V01=1 //sequence #1 RECALL: V01 PATREC_SHOW: V1200 EXIT: RELATED SCRIPTS PATREC_FIND, PATREC_GET, PATREC_SAVE KMS-310/400 Supervisor's Manual 6-85...

  • Page 204: Pause

    PAUSE FUNCTION PAUSE: Vseconds Pauses Vseconds number of seconds. Useful to make sure that the stage is steady before making readings or doing pattern recognition. EXAMPLE SCRIPT PAUSE:7 PICSHOW FUNCTION PICSHOW:Vx Vy “Filename” Loads image file “Filename” and displays it on the screen with the top left corner at Vx,Vy EXAMPLE SCRIPT PICSHOW:40 100 “image.bmp”...

  • Page 205: Planecalc

    EXAMPLE SCRIPT PLANEPT:1 RELATED SCRIPTS PLANECALC: POSMOVE FUNCTION POSMOVE:V_x V_y Move the stage to V_x V_y in unaligned microns. Micron resolution EXAMPLE SCRIPT POSMOVE:61232 -36917 RELATED SCRIPTS POSMOVE_NM: POSPOL: POSPOL_NM: KMS-310/400 Supervisor's Manual 6-87...

  • Page 206: Posmove_Nm

    POSMOVE_NM FUNCTION POSMOVE_NM: V_x V_y Move the stage to V_x V_y in unaligned nanometers; actually moves in 1/10 micron ( or 100 nm) steps on the stage. EXAMPLE SCRIPT POSMOVE_NM:61232 -36917 RELATED SCRIPTS POSMOVE_NM: POSPOL: POSPOL_NM: POSPOL FUNCTION POSPOL: V_x V_y Get mask position into V_x V_y in aligned microns;...

  • Page 207: Printstr

    Terminate script execution and reset to beginning. EXAMPLE SCRIPT QUIT: RELATED SCRIPTS END: EXIT: RECALL FUNCTION RECALL: Vnumber [Vx Vy] Recall setup 0-9 from program, at offset Vx, Vy. EXAMPLE SCRIPT RECALL:5 V27 V30 RELATED SCRIPTS SEQWIN KMS-310/400 Supervisor's Manual 6-89...

  • Page 208: Recpt

    RECPT FUNCTION RECPT:Vpt Vaxis Vdir Vedge Vthresh Vpt = [0-9], Vaxis = [0 = Horiz, 1 = Vert], Vdir = [0 = neg, 1 = pos], Vedge = [1-99] , Vthresh = [% threshold] EXAMPLE SCRIPT RP_WIN:150 300 500 350 RECPT:0 0 1 1 50 RECPT:1 0 1 2 50 RP_EXEC:0 2...

  • Page 209: Rel_Pol_Nm

    0.1 micron. EXAMPLE SCRIPT REL_POLZ_NM:-1300 3400 RELATED SCRIPTS POSMOVE: POSPOL: MOVEPOLZ:REL_POL: REL_POLZ RESULT FUNCTION RESULT:Vmsr Vnum Gets the last measurement result from Vmsr and stores it in Vnum EXAMPLE SCRIPT RESULT:1 V87 RELATED SCRIPTS MEASURE: MSR_DEFAULT:, MSR_STATS: KMS-310/400 Supervisor's Manual 6-91...

  • Page 210: Return

    RETURN FUNCTION RETURN: RETURN’s from a CALLed subroutine. Resumes execution at the statement following the CALL statement that transferred control. EXAMPLE SCRIPT RETURN: RELATED SCRIPTS CALL:, JUMP:, LOOP: RP_DISPLAY FUNCTION RP_DISPLAY: [0|1] 0 = Do not save data; 1 = Save data For TIC debugging use.

  • Page 211: Seqedge

    Figure 6-8 is an example of a sequence edge number script. RELATED SCRIPTS SEQWIN; RECALL Figure 6-8. Example of a Sequence Edge Number Script SEQEDGE: 7 0 0 1 3 30 Window 0 Edge 3 from Positive 1 Horizontal measure start of Window 0 KMS-310/400 Supervisor's Manual 6-93...

  • Page 212: Seqname

    SEQNAME FUNCTION SEQNAME:Vseq[0-9] “Text String” Set name of measure sequence Vseq EXAMPLE SCRIPT SEQNAME:1 “X-Axis Measurement” RELATED SCRIPTS SEQWIN:, SEQEDGE: SEQOUTPUT FUNCTION SEQOUTPUT - select measurement output type SEQOUTPUT: Vseq Voutput_type Vseq Sequence (0-9) Voutput_type Measurement output type (0-2) 0 = mean 1= min 2= max Selects the measurement output type for a sequence...

  • Page 213: Setstop

    EXAMPLE SCRIPT SITENAME:"Pole Location" RELATED SCRIPTS SEQNAME SPAWN FUNCTION SPAWN:command [parameters] Execute DOS command with parameters. Can be used to run a DOS mode batch file for data transfer issues. EXAMPLE SCRIPT SPAWN:COPYIT.BAT RELATED SCRIPTS GSPAWN: KMS-310/400 Supervisor's Manual 6-95...

  • Page 214: Start

    START FUNCTION START: Restarts the script from the beginning EXAMPLE SCRIPT START: RELATED SCRIPTS END: EXIT: QUIT: STATEDGE FUNCTION STATEDGE:Vedge[0|1] Vmax Vmin Vavg Vcnt Vsdev Measure edge statistics STATMSR FUNCTION STATEDGE:Vreg[1-10] Vmax Vmin Vavg Vcnt Vsdev Get statistics for measurement register Vreg EXAMPLE SCRIPT STATMSR:1 V10 V11 V12 V13 V14 RELATED SCRIPTS...

  • Page 215: Statmsr3

    /select collector #2 SEQWIN: V3298 1 100 100 200 200 SEQWIN: V3298 0 125 125 175 175 MEASURE: 3 STATMSR3 V3298 V12 V13 V14 V15 V16 MESSAGE: “3 SIGMA STD DEV = %”, V16 EXIT: RELATED SCRIPT STATMSR KMS-310/400 Supervisor's Manual 6-97...

  • Page 216: Stats

    STATS FUNCTION STATS - functions for measurement statistics Register[s] STATS: D|O|P|C|0|1 User control of statistics registers 0-9. Discard, Operator, Print, Clear, 0:off, 1:on OPTIONS DiscardO Operator menu Print statistics for stat registers 0-9 Clear stat registers RELATED SCRIPTS MSR_STATS, STATMSR TEXT FUNCTION TEXT:Vx Vy Vcolor “String”...

  • Page 217: Turretff

    Reads current turret position and returns the value to the variable Vnum. EXAMPLE SCRIPT TURRETPOS: V300 MATH: V301=V300=3 CALL: V301 100X_MEASURE RELATED SCRIPTS TURRET, TURRETFF UPDATE FUNCTION UPDATE: Updates the realtime display information EXAMPLE SCRIPT UPDATE: RELATED SCRIPTS ERASE; CLEARPIC KMS-310/400 Supervisor's Manual 6-99...

  • Page 218: Xhair

    XHAIR FUNCTION XHAIR:[0|1] Toggles the display of the cross hair at the center of the display. EXAMPLE SCRIPT XHAIR:1 RELATED SCRIPTS LINE; BOX Z_MOVE FUNCTION Z_MOVE: Vz Moves the piezo to Vz in nanometers. EXAMPLE SCRIPT Z_MOVE:13000 RELATED SCRIPTS Z_REL: MOT_Z_MOVE:, MOT_Z_REL Z_REL FUNCTION Z_REL:Vz...

  • Page 219: Chapter 7: Operation

    Operation Overview Access and Exit the Supervisor's Menu Set up a Program Measure Manage Measurement Data...

  • Page 220: Overview

    Overview This chapter provides detailed instructions for using the KMS-310/400 software in supervisor mode. Note: For an overview of the supervisor software screens, screen components and software controls, refer to Chapter 4: User Interface. This chapter is organized into the following sections (Figure 7-1): Overview, which provides an overview of the chapter's organization and procedures contained in each chapter section.
  • Page 221 Load a plate Select a new program (optional) Change ID entries (optional) Clear statistics (optional) Measure in manual mode Measure in semi-auto mode Measure in auto mode Manage measurement data Manage statistics Manage ID entries Configure a data map KMS-310/400 Supervisor's Manual...

  • Page 222: Screen

    Exit to DOS Access the Supervisor Master Menu Screen In idle mode, the KMS-310/400 system displays the Standby screen (Figure 7-2). When the system is first turned on, Production is highlighted as the default selection. Both production and supervisor software modes are accessed from this screen.
  • Page 223 Production Mode of operation for each program. For this reason, an access code is required when entering the Supervisor Mode. This code is initially assigned by Zygo but may be changed by the user. Figure 7-3. Supervisor Access Code Screen.

  • Page 224: Return To Standby Screen

    2. Type in your access code and press [SELECT]. The Supervisor Master Menu screen is then displayed (Figure 7-4). Figure 7-4. Supervisor Master Menu Screen Return to Standby Screen To return to the Standby screen: From the Master Menu screen, select Standby Screen. The Return to Standby Screen subwindow is displayed below the Current Program window (Figure 7-5).

  • Page 225: Exit To Dos

    Figure 7-6. Exit to DOS Screen To return to the Supervisor Master Menu screen, select Cancel or press [ESC]. To save changes and exit to DOS, select Save. To exit to DOS without saving changes, select Exit. KMS-310/400 Supervisor's Manual...

  • Page 226: Set Up A Program

    Set up a Program This section provides instructions for creating a measurement program. You can create a new program or copy an existing program and make modifications. This section provides procedures for: accessing the Select Program window opening an existing program copying an existing program creating a new program deleting a program...

  • Page 227: Access The Select Program Screen

    To sort programs by previous usage or program number, select SORT BY and choose a method of sorting. Use the PageUp and PageDn commands to display different pages of the program list. Figure 7-7. Select Program Menu Screen KMS-310/400 Supervisor's Manual...

  • Page 228: Open An Existing Program

    Open an Existing Program To select and open an existing program: With the Select Program window displayed, select Open. Highlight the number associated with the desired program. The selected program id displayed at the top of the Program Menu window with the number highlighted.

  • Page 229: Copy An Existing Program

    Highlight the number of the program you want to copy and press [SELECT]. Enter a new program name for the copy you made. Press [ESC] to return to the Program menu. Figure 7-10. Program Menu Window KMS-310/400 Supervisor's Manual 7-11...

  • Page 230: Create A New Program

    Create a New Program To create a new program: From the Program Menu screen, select Create. The Destination Program subwindow is displayed (Figure 7-11). A new program is opened at the top of the list and is named with the current date and time. Initially, the program contains system default information, which is changed as you perform the remaining setup procedures.

  • Page 231: Define Program Parameters

    Multi-Point File Name field and press [SELECT]. To select the Measurement Units, highlight either the Microns or Microinches button and press [SELECT]. To force a part ID at every measurement, toggle on that selection. KMS-310/400 Supervisor's Manual 7-13...

  • Page 232: Set Operator Lockouts

    To include Illumination info in the Save/Recall windows, toggle on that selection. When you select the Illumination info in SAVE/RECALL windows option, different values can be saved into the 10 window setups. To select the Terse data output for measure logging, toggle on that selection. To send logged data to the printer too, toggle on that selection.
  • Page 233 Note: When the Measure screen is entered while in production mode, any icon or button that has been locked out will have a black diagonal line through it and is not functional. To return to the Supervisor Master Menu, select Exit and press [SELECT], or press [ESC]. KMS-310/400 Supervisor's Manual 7-15...

  • Page 234: Set Up Measurement Sequences

    Set up Measurement Sequences To set up a measurement sequence: From the Supervisor Master Menu screen, select Sequence Setup. The Measurement Sequence Setup window is displayed (Figure 7-14). This screen lists the window setups that must be saved using the Save/Recall icon in the Measure screen during program setup.
  • Page 235 Measure screen and save the program in the Supervisor Master Menu screen before exiting the program. These two steps must be done regardless of whether the measurement sequence setup is saved before or after the window setup in the Measure screen. KMS-310/400 Supervisor's Manual 7-17...

  • Page 236: Set Up The Measurement Window

    Set Up the Measurement Window This section provides instructions for setting up and selecting program measurement window options, and consists of the following procedures: Adjust window control Setting the window position Superimposing windows Separating windows Creating butted windows Set window size Set window thresholds Set window edges Save window configuration...
  • Page 237 To adjust window control: From the Supervisor Master Menu screen, select Measure. The Measure window is displayed (Figure 7-16). Figure 7-16. Measure Screen Press [SELECT] when the , or is highlighted. KMS-310/400 Supervisor's Manual 7-19...
  • Page 238 Set the Window Position When you position the two windows, the middle (center scan line) of the windows (horizontal or vertical) must overlay the object to be measured. This center scan line is used to draw the image intensity profile at the bottom of the screen. To position the windows: From the Measure screen, highlight the icon and press [SELECT].
  • Page 239 16 percent. For other devices, such as phase-shift photo resist coated masks, both thresholds should be the same percentage, since the substrates are symmetrical. Note: Before setting the thresholds, you must set focus, illumination, window position and window size. KMS-310/400 Supervisor's Manual 7-21...
  • Page 240 To set window thresholds: From the Measure screen, select the icon and press [SELECT]. The Threshold Icon subscreen is displayed with both displayed at the top right corner of the screen. Use the arrow keys to set the thresholds based on which edges you want to detect (from 0 to 100 percent).
  • Page 241 To save the window setup: 1. From the Measure screen, with the cursors indicating the proper line, highlight the icon and press [SELECT]. The Save/Recall Icon subscreen is displayed (Figure 7-21). Figure 7-21. Save/Recall Icon Subscreen KMS-310/400 Supervisor's Manual 7-23...
  • Page 242 In the submenu highlight the number you want to assign the setup to and press [SELECT]. Highlight the Name text field, type a name for the window setup and press [ESC]. To save the setup, select Save in the submenu and press [SELECT]. The window setup (including position, size, edges, threshold, illumination and measurement axis) is now saved as the number you just selected and can be recalled at any time by highlighting the number and selecting Recall.

  • Page 243: Select Measurement Options

    Autofocus must be turned on to ensure accurate or repeatable measurements can be made. Select Printer to send the measurement data to the hard disk, printer or a host computer. Select Statistics to make measurement statistics available for viewing after a program has been run. KMS-310/400 Supervisor's Manual 7-25...

  • Page 244: Set Up The Measurement Axis

    This Statistics selection is only necessary for repetitive measurements on a single substrate or group of substrates. Select Script to choose a script routine. The last script run and residing in the Program Setup screen will be involved if this option is selected.
  • Page 245 To change the axis from horizontal to vertical, or from vertical to horizontal: From the Measure screen, highlight the icon and press [SELECT] to toggle the axis between vertical and horizontal. Press either the right or left arrow key to exit the icon. KMS-310/400 Supervisor's Manual 7-27...

  • Page 246: Measure

    To access the Production main menu: 1. With the Standby screen displayed (Figure 7-25), select Production and press [SELECT]. Figure 7-25. KMS-310/400 Standby Screen 7-28 Chapter 7: Operation...

  • Page 247: Load A Plate

    To load a plate onto the stage: Position the mask so with the titles right side up (chrome side up). Grab the right side of the mask with either a mask pick or your hand. KMS-310/400 Supervisor's Manual 7-29...
  • Page 248 Align the mask with the mask holder so that the right side of the mask lines up with the right side of the mask holder (Figure 7-27). Figure 7-27. Loading a Plate on the Stage Pressure Pin Insert Mask Mask Holder Gently push the mask to the left so that the round pressure pin (in the upper left corner of the mask holder) is pushed out of the way.
  • Page 249 (Figure 7-28). Caution: To avoid injury due to pinch points on the stage, exercise caution when loading the plate onto the stage. Figure 7-28. Loading a Mask into the Stage Guard Rails Insert mask holder KMS-310/400 Supervisor's Manual 7-31...

  • Page 250: Select A New Program (Optional)

    Select a New Program (Optional) The program used for the last measurement is displayed at the bottom of the Production Main Menu screen. If you want to continue using this program, you do not need to perform the steps in this section. Perform the steps in this section only if you want to select a new measurement program.

  • Page 251: Change Id Entries (Optional)

    To change information displayed in a text field: Highlight the desired information. Press [SELECT]. Enter new data in the text field. Press [SELECT] a second time. When you are done, highlight the [EXIT] button and press [SELECT]. KMS-310/400 Supervisor's Manual 7-33...

  • Page 252: Clear Statistics (Optional)

    Clear Statistics (Optional) If the statistics option has been set up in Supervisor mode, measurement data is automatically collected each time a measurement is made. You can use this feature to: view data from previous measurements print measurement data to a file discard the latest measurement statistics zero (clear) all measurement values To clear statistics from a previous measurement:...

  • Page 253: Measure In Manual Mode

    The objective currently in position will be displayed along the upper right portion of the screen. Use the joystick to drive the stage to a target image. Use the Focus keys to bring the image into focus. KMS-310/400 Supervisor's Manual 7-35...
  • Page 254 Use the turret keys to rotate the turret to the measurement objective (normally 100X). Use the focus thumbwheel to bring the image into focus. Size the Measurement Box If the measurement box is not sized correctly (Figure 7-33): Figure 7-33. Correct Measurement Box Size This measurement box is sized correctly because it will easily overlap both...
  • Page 255 Note: If illumination settings require adjustment, consult with an engineer before making any adjustments. Illumination settings are very involved and Zygo recommends that you not change illumination settings without first consulting an engineer.

  • Page 256: Measure In Semi-Auto Mode

    To check illumination settings: 1. View the illumination bar along the lower left portion of the screen (Figure 7-35). 2. Make sure the tabs on the illumination bar are not red. 3. If the tabs are not red, proceed to the next section to measure feature edges. If the tabs along the illumination bar are red, consult with an engineer.
  • Page 257 (or the thumbwheel) to bring the location into focus. Select Go-Stop Locations To select Go-Stop locations: 1. Highlight the icon and press [SELECT]. The Go-Stop Location dialog box is displayed (Figure 7-37). Figure 7-37. Go-Stop Location Dialog Box KMS-310/400 Supervisor's Manual 7-39...
  • Page 258 Highlight the Go-Stop location number on the keypad and press [SELECT]. Highlight ALIGN and press [SELECT]. Highlight SAVE and press [SELECT] Highlight GO and press [SELECT]. Drive the stage to the deskew point. Highlight SKEW and press [SELECT]. Highlight SAVE and press [SELECT]. Move to each consecutive Go-Stop location and save the coordinates by highlighting SAVE and pressing [SELECT].

  • Page 259: Measure (Auto Mode)

    The Script File Name? dialog box is displayed (Figure 7-39) Figure 7-39. Script File Name? Dialog Box Enter the script name you want to run. Press [SELECT]. Follow the screen prompts to perform an automatic measurement. KMS-310/400 Supervisor's Manual 7-41...

  • Page 260: Manage Measurement Data

    Manage Measurement Data In this section, procedures are provided for the options on the Supervisor Master Menu screen (Figure 7-40) that are not used for program setup. These options are: Statistics ID Entry Data Map Figure 7-40. Supervisor Master Menu Screen 7-42 Chapter 7: Operation...

  • Page 261: Manage Statistics

    To send all statistics data to the hard disk, a printer or host computer (depending on how you set up the system in Supervisor Mode), select Print. To return to the Supervisor Master Menu screen select Exit, or select [ESC] at anytime. KMS-310/400 Supervisor's Manual 7-43...

  • Page 262: Manage Id Entries

    Manage ID Entries Use the ID Information screen to enter your name (or a number for production-tracking purposes), information regarding the device you are measuring, or other device identification data. To enter information into the ID Entry screen: From the Master Menu screen, highlight the ID Information button and press [SELECT].

  • Page 263: Configure A Data Map

    From the Master Menu screen, highlight the Data Map button and press [SELECT]. The Data Map Screen is displayed (Figure 7-43). To change the displayed file name, type a new name in the highlighted field and press [SELECT]. Figure 7-43. Data Map Screen KMS-310/400 Supervisor's Manual 7-45...
  • Page 264 To set the count of the X- and Y-axis for the graph, type in new X and Y values in the Count fields and press [SELECT]. To set the values in the graph, highlight Plot and press [SELECT]. To change the displayed statistics scale, type a new value in the Stat scale field and press [SELECT].
  • Page 265 14. To return to the Supervisor Master Menu screen select Exit, or you can select [ESC] at anytime. 15. Highlight Save and press [Select] when prompted by the system. The system will return to the Supervisor Master Menu screen with the Measure button highlighted. KMS-310/400 Supervisor's Manual 7-47...
  • Page 266 7-48 Chapter 7: Operation...
  • Page 267 Maintenance Overview Lamp Replacement and Alignment Stage Maintenance Electronics Cabinet Maintenance System Cleaning...

  • Page 268: Chapter 8: Maintenance

    Overview This chapter provides a blank Preventive Maintenance Schedule to be used in planning and tracking periodic preventive maintenance of the KMS-310/400 system, as well as step-by-step procedures for each recommended maintenance activity. This section provides a blank Preventive Maintenance Schedule, and lists maintenance procedures provided in subsequent sections of this chapter.
  • Page 269 Check slip clutch and torque set screws to specifications. Perform stage repeatability check. 9,000 Remove the K2IND motor and return to factory for adjustment, cleaning, Hours and parts lubrication. 15,000 Have factory representative replace lead screws and align stage. Hours KMS-310/400 Supervisor's Manual...

  • Page 270: Maintenance Procedures Overview

    Maintenance Procedures Overview Maintenance procedures provided in subsequent sections of this chapter are listed in Table 8-2. Table 8-2. Maintenance Procedures Locator Type of Maintenance Maintenance Procedure Location Lamp replacement and Visually check the lamps. page 8-5 alignment Align the transmitted condenser. page 8-5 Replace the transmitted quartz halogen page 8-7...

  • Page 271: Visually Check Lamps

    Place the photomask on the stage with the chrome side up. Focus the system on an edge of a chrome feature. Move the chrome edge to the edge of the oculars. Set the illumination to minimize eye stress. KMS-310/400 Supervisor's Manual...
  • Page 272 Turn the front knob on the transmitted light assembly to its mechanical stop (Figure 8-1). Figure 8-1. Transmitted Light Assembly Knobs transmitted light assembly knob Close down the aperture so it is completely visible in the oculars at 10X (Figure 8-2). Figure 8-2.
  • Page 273 Turn the knob on the transmitted assembly at 10X until the object is slightly over-filled (Figure 8-3). Figure 8-3. Aperture Open to Over-fill Aperture completely open while viewing in the oculars. Image outside of ocular circle is not visible to the eye Set the illumination at 50X and 100X. KMS-310/400 Supervisor's Manual...

  • Page 274: Replace The Transmitted Quartz Halogen Lamp

    Replace the Transmitted Quartz Halogen Lamp To replace the transmitted quartz halogen lamp: Loosen the latch screw at the top of the lamp housing. Lift the lid up and back to expose the interior of the lamp housing. Slip the lamp up and out of the lamp mount (Figure 8-4). Figure 8-4.

  • Page 275: Replace The Transmitted Metal Halide Lamp

    Slide the lid forward slightly and lift straight up and off of the housing. Caution: To avoid damage to the lamp, always wear gloves when removing or installing lamps. If you touch the glass surface with your bare hands, clean the lamp with alcohol and a clean cloth. KMS-310/400 Supervisor's Manual...
  • Page 276 Unplug the lamp connector (Figure 8-6). Figure 86. Metal Halide Lamp Housing (Interior) lamp connector wing nuts spring clips Loosen the two wing nuts holding the lamp in place. Unfasten the two spring clips holding the lamp in place. Remove the lamp from the lamp housing. Install the new lamp.

  • Page 277: Replace And Align The Confocal Klh-1 Lamphouse

    Remove the lamp housing unit from its stand by turning the housing release knob counterclockwise and pulling back on the lamp housing unit (Figure 8- Figure 8-7. KLH-1 Lamp Housing Unit Lamp housing unit Lamp housing stand Housing release knob Lamp housing screws KMS-310/400 Supervisor's Manual 8-11...
  • Page 278 Remove the two lamp housing screws and swing the lamp housing cover up and out of the way (Figure 8-8). Figure 8-8. KLH-1 Lamp Housing Interior Lamp housing cover Lamp socket screws Lamp socket housing KLH-1 lamp bulb Caution: To avoid damage to the lamp, always wear gloves when removing or installing lamps.
  • Page 279 Note: The lamp is keyed so that the bottom is larger than the top. When reinstalling the lamp housing back onto the stand, make sure the lamp wire is turned to the side. KMS-310/400 Supervisor's Manual 8-13...
  • Page 280 Align the Confocal KLH-1 Lamphouse To align the confocal KLH-1 lamphouse (Figure 8-10): Figure 8-10. KLH-1 Lamphouse Adjustment Knobs Vertical lamp adjustment knob Horizontal lamp adjustment knob Lamp condenser adjustment knob Use the horizontal lamp knob on the lamphouse to bring the scan line just into view at the bottom of the screen.

  • Page 281: Replace And Align The Confocal Nikon Hmx 3/4 Lamphouse

    Replace and Align the Confocal Nikon HMX 3/4 Lamphouse Note: Confocal Nikon HMX 3/4 lamps are used by the KMS-310 only. This procedure assumes that the Nikon HMX 3/4 lamp is mounted on a K2 module with a phase telescope installed on the ocular lenses.
  • Page 282 With the interior of the lamp housing door exposed, loosen the fixed clamp knob (Figure 8-13). Figure 8-13. Nikon HMX 4 Lamp Housing Door and Bulb Housing door hinges Fixed clamp knob Flexible clamp knob Bulb tip Loosen the flexible clamp knob. Hold the bulb tips and pull the bulb straight out of the lamp housing door.
  • Page 283 Use horizontal, vertical and condenser knobs to center the primary lamp's cathode and diode in the field of view. Power up the lamp. Remove one of the eyepieces and replace it with the phase telescope. Position the aperture diaphragm at position 1. KMS-310/400 Supervisor's Manual 8-17...
  • Page 284 Focus the phase telescope on the blades of the aperture diaphragm. Note: Do not change the focus for the phase telescope once it has been set. If you use the phase telescope for this microscope only, it will not be necessary to refocus once you remove it.

  • Page 285: Stage Maintenance

    Make sure the metal collar sits above the table leg by 1/4 to 3/8 in. Make sure all system cables are suspended from the wall or ceiling by a flexible strap. Vibration can be induced when if the cables touch the wall, or if they are moved. KMS-310/400 Supervisor's Manual 8-19...

  • Page 286: Level The Piezo Fine Focus

    Adjust Table Flotation To adjust table flotation: To adjust the flotation and height of the table, use the three red lever knobs to raise or lower the height of the three table corners. Recheck the position of the table and each corner to ensure they are horizontal.
  • Page 287 10. Align the rear target by tapping the guide rail in either direction. 11. Repeat steps 6-10 at 50X and 100X. 12. Once the stage has been aligned to within 5-10 microns back to front, tighten the two hold-down screws on the left guide rail. KMS-310/400 Supervisor's Manual 8-21...

  • Page 288: Set The Column Stops

    13. Test the alignment by removing and replacing the mask into the holder, replacing the mask holder onto the stage, then find the same targets and test alignment. Tip: Use Go-Stops to store at least the two front and rear locations. This will make it much easier to remove and replace the mask for checking repeatability because the same locations used to check alignment will be much easier to find.

  • Page 289: Check Air Filters

    Check Air Filters To check and replace the electronics tower air filters (Figure 8-18): Roll out the electronics tower from the side of the KMS-310/400. Caution: Make sure you do not pull any cables or wires when rolling out the electronics tower.

  • Page 290: Check Fans

    Use the seven screws to reinstall the electronics tower side panel. Return the tower to its position on the side of the KMS-310/400. Check Fans To check the fans (Figure 8-19): Roll out the electronics tower from the side of the KMS-310/400.

  • Page 291: System Cleaning

    Do not move the column safety adjustment wheel when cleaning the column. Clean the Ocular Eyepieces and Condenser When wiping down the ocular eyepieces and condenser, keep in mind the following guidelines: 1. Use methyl alcohol or other approved optics cleaning solutions. KMS-310/400 Supervisor's Manual 8-25...
  • Page 292 8-26 Chapter 8: Maintenance...

  • Page 293: Chapter 9: Error Messages

    Error Messages System Error Messages Script Error Messages...

  • Page 294: Messages

    System Error Messages This section provides an explanation for common KMS-310/400 system error messages. Table 9-1 lists common system error messages. For each error message, this table provides a definition and suggested course of action to correct the problem. Table 9-1. System Error Messages...

  • Page 295: Messages

    Script Error Messages This section provides an explanation for common KMS-310/400 script error messages. Table 9-2 lists common KMS-310/400 script error messages. For each error message, this table provides a definition and suggested course of action to correct the problem.
  • Page 296 Table 9-2. Script Error Messages (part 2 of 2) Error Message Meaning Corrective Action Matrixwrite Syntax error in setting up the 1. Check the MATRIXOPEN Error MATRIX commands. command for errors in the named path. (No spaces are An incorrect handle may have allowed in the path.) been called for called for in a given MATRIXWRITE...
  • Page 297 Glossary...
  • Page 298 align. To put into proper relative position or orientation. anomaly (ies). An occurrence on a substrate judged to be unexpected. Something abnormal, incongruous or inconsistent. Once an anomaly is reviewed, it may be classified as a defect. aperture diaphragm. An iris that controls depth of field and contrast. binary photomask.
  • Page 299 A measurement dimension that utilizes similar slopes of line and space pair features to initiate the calibration of a line width measurement system. pixel. Industry standard term for the most basic element of a digital image. KMS-310/400 Supervisor's Manual...
  • Page 300 planarization. Process used to geometrically level the photomask or reticle using software. This enables the KMS system to maintain a coarse focus across much of the surface of the photomask or reticle. process steps. 1. The individual steps required to create a complete process to make a semiconductor device.
  • Page 301 Electronics cabinet maintenance Auto mode, 7-41 Air filter checks, 8-23 ID entry changes, 7-33 Fan checks, 8-24 Manual mode, 7-35 Error messages Plate loading, 7-29 Script error messages, 9-3 Production menu access, 7-28 System error messages, 9-2 KMS-310/400 Supervisor's Manual...
  • Page 302 Program selection, 7-32 Semi-auto mode, 7-38 Statistics clearing, 7-34 Safety precautions Measurement program options, 7-25 Ergonomic features, 2-18 Measurement program sequences, 7-16 Isopropyl alcohol, 2-13 Mechanical subsystem Light source safety, 2-11 Antivibration table, 3-15 Machine labels, 2-2 Microscope mounting stand and column, 3-15 Mercury, 2-16 Monitor stand, 3-15 Objective anti-crash protection, 2-10...
  • Page 303 Technical support, 1-4 Hot keys, 4-7 Transmitted condensor, 5-4 Keyboard/keypad equivalents, 4-7 Keypad usage, 4-4 Transmitted condensor alignment, 8-5 Modes of operation, 4-2 Transmitted illumination, 5-8 Screen components, 4-2 Transmitted metal halide lamp replacement, 8-9 Software overview, 4-10 KMS-310/400 Supervisor's Manual...
  • Page 304 Index...

This manual is also suitable for:

Kms-400

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