Zeiss AURIGA Compact Crossbeam Manuals

Manuals and User Guides for Zeiss AURIGA Compact Crossbeam. We have 1 Zeiss AURIGA Compact Crossbeam manual available for free PDF download: Instruction Manual

Zeiss AURIGA Compact Crossbeam Instruction Manual (164 pages)

Brand: Zeiss | Category: Desktop | Size: 3 MB

Table of Contents
3
About this Manual
7
Safety Instructions in this Manual
8
Typographical Conventions
9
Definition of Terms
10
Safety
11
Intended Use
11
Prevention of Accidents and of Improper Use
13
Safety Summary
14
Hazards Related to Personal Injury
14
Hazards Not Related to Personal Injury
17
Safety Equipment
18
Safety Devices
18
Protective Cover Panels
18
Interlock System
18
ON/OFF Switch
19
EMO Box with Main Switch
19
EMO Button
20
Main Shut-Off Valves
20
Safety Labels and Labels
21
At the Front of the Workstation
21
At the Rear of the Workstation
22
At the Rear of the Electron Optical Column
23
Inside the Workstation
23
Material Safety Data Sheets
23
Safety Instructions for Handling Precursors (with GIS Upgrade Only)
24
Description
25
Overview
25
Workstation
26
Gas Injection System (GIS) Upgrade
27
Multi GIS
27
Single GIS
27
Charge Compensation Upgrade
28
Charge Compensator
28
Five-Channel GIS with Integrated Charge Compensation
28
Control Elements
29
Smartsem ® User Interface
29
Dual Joystick
30
Optional Control Panel
31
Principle of Operation
32
Vacuum System
32
Specimen Stage
33
Electron Optics (GEMINI ® Column)
34
Ion Optics (FIB Column)
36
Imaging Modes
38
Signal Detection
39
In-Lens Detector
40
SE2 Detector
41
Inlensduo Detector (Optional)
42
SESI Detector (Optional)
43
Specification
44
Workstation
44
FIB Column
46
Installation Requirements
47
Options
49
Airlock
49
Customer Service
49
Transport and Storage
51
Transport
51
Storage
52
Installation
53
Operation
55
Switching on the Workstation
55
Starting the Smartsem
56
User Interface
56
Finding Your Way in the Smartsem
58
User Interface
58
Showing or Hiding Toolbars
58
Showing or Hiding the Data Zone
59
Showing a Full Screen Image
59
Docking Panels
60
Opening the Panel Configuration Bar
62
SEM Operation
63
Obtaining a First Image
63
Preparing the Sample Holder
64
Loading the Specimen Chamber
65
Locating the Specimen
69
Switching on the Electron Gun
70
Switching on the EHT
71
Generating an Image
73
Optimising the Image
75
Saving the Image
79
Finishing the Work Session
81
Setting Detection Parameters
82
Selecting a Detector
82
Using the SE2 Detector
83
Electron Beam Deposition or Etching (with GIS Upgrade Only)
83
Heating the Reservoirs
84
Depositing or Etching with the Electron Beam
85
Crossbeam ® Operation
86
Preparing the Workstation
86
Getting Started
86
Adjusting Tilt Eucentricity
87
Switching on the Ion Beam (FIB)
88
Setting the Coincidence Point
93
Milling for Depth
94
Selecting Milling Conditions
94
Starting the Milling Procedure
97
Recording Images During Milling
99
Gas Assisted Deposition: Platinum (with GIS Upgrade Only)
100
Heating the Platinum Reservoir
100
Outgassing the Platinum Reservoir (Only with Five-Channel GIS)
102
Selecting Deposition Conditions
105
Starting the Deposition Procedure
107
Setting Detection Parameters
110
Using the SESI Detector (Optional)
110
Adjusting a FIB Probe Current at High Kv (30 Kv)
112
Overview
112
Adjusting a Low Probe Current (Pa)
114
Adjusting a High Probe Current (Na)
116
Optimising a High Probe Current (Na)
118
Adjusting Beam Shift Correction
121
Using the Help Functions
124
Calling the Smartsem ® Help
124
Printing Help Texts
124
Bringing Help Texts to the Foreground
124
Calling the Context-Sensitive Help
125
Searching for a Topic
125
Using the Step-By-Step Guides
126
Getting Started
126
Frequently Used Operation Sequences
126
Calling the Short Cuts Help
127
Showing Information about Smartsem
128
Version History
128
About Smartsem
128
Closing the Smartsem ® User Interface
129
Logging off
129
Exiting
129
Switching off the Workstation as a Matter of Routine
130
Changing to STANDBY Mode
130
Changing to off Mode
131
Switching off in an Emergency
132
Switching on Again after an Emergency off
132
Switching off the Workstation Completely
134
Maintenance and Repair
135
Maintenance Work
135
Maintenance Intervals
135
Change of Consumables and Chemicals
136
Troubleshooting
137
Overview
137
Chamber
139
Initialising the Stage
139
Replacing the Chamber Door Seal
139
Column
141
Baking Ot the Gun Head
141
Ion Source (Workstation with FIB)
144
Checking the Lifetime
144
Regenerating by Heating
144
Power Circuit
147
Checking the Circuit Breakers
147
Shutdown and Disposal
151
Putting the Workstation out of Operation
151
Disposal
151
Disposing of Solid Waste (Consumables)
151
Disposing of the Workstation
152
Parts and Tools
153
Important Consumables
153
Important Spare Parts
154
Tools and Accessories
154
Abbreviations
155
Glossary
157
Declaration of Conformity
159
Index
161

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