Ulvac YTP70A-D Manuals

Manuals and User Guides for Ulvac YTP70A-D. We have 1 Ulvac YTP70A-D manual available for free PDF download: Instruction Manual

Ulvac YTP70A-D Instruction Manual

Ulvac YTP70A-D Instruction Manual (55 pages)

Turbo-molecular-pump Pumping system

Brand: Ulvac | Category: Water Pump | Size: 2.13 MB

Table of Contents

About Safety Notation
4
- Meaning of Symbol Marks
  4
- Types and Display Position on Warning Labels
  5
- Warranty Clause
  6
  - Warranty Product
    6
  - Warranty Coverage
    6
  - How to Respond
    6
  - Disclaimer
    7
  - Others（Warranty Clause
    7
- About this Manual
  7
- Table of Contents
  9
1 For Safe Use

11
- Handling the Machine
  11
- Acceptance /Transport / Storage
  12
  - Acceptance
    12
  - Transportation
    13
  - Storage
    13
- Installation and Operation
  13
- Disposal
  14
- Protective Equipment
  14
- Dangerousness Inherent to the Machine and Safety Measures
  14
  - Intake and Exhaust of Dangerous Gasses and Substances
    14
  - Long-Distance Transportation
    15
  - Electric Shock
    15
  - High Temperature
    15
  - Burst
    16
2 Product Summary

17
- Features
  17
- Use
  17
- Names and Works on each Section
  18
- Explanation on Touch Panel Operation Screen
  20
  - Initial Screen
    20
  - Main Screen
    20
  - VAC Screen
    21
  - Menu Screen
    22
  - Delay Timer Setting Screen
    22
  - P1 Setting Screen
    23
  - P2 Setting Screen
    23
  - Etc.1／Etc.2 Screen
    24
  - FIL Screen
    26
  - DEG Screen
    26
  - Alarm Pop-Up Screen
    27
  - Numeric Key Screen
    27
3 Installation

28
- Before Installation
  28
- Unpacking
  30
  - Cautions on Unpacking
    30
  - Check Following to Unpacking
    30
- Transport
  32
  - Transportation by Pallet Truck
    32
- Piping and Wiring
  33
  - Intake and Exhaust Piping
    33
  - Gas Purge
    34
- Electric Wiring
  35
4 Operation

36
- Cautions on Operation
  36
- Preparation for Operation
  37
  - Check Items before Operation
    37
- Startup and Stop Operation Method
  38
  - Startup and Stop
    38
  - External Interlock
    39
- Connecting G-TRAN
  40
  - Setting of G-TRAN
    40
5 Maintenance and Inspection

46
- Daily Inspection
  46
- Inspection after Prolonged Storage
  46
- Overhaul
  46
6 Troubleshooting

47
7 Specification

50
- Performance Specification
  50
- External Dimensional Drawing
  51
Appendix

52
- Main Replacement Parts
  52

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