Ulvac RM120ET Manuals

Manuals and User Guides for Ulvac RM120ET. We have 1 Ulvac RM120ET manual available for free PDF download: Instruction Manual

Ulvac RM120ET Instruction Manual

Ulvac RM120ET Instruction Manual (104 pages)

REFRIGERATOR UNIT

Brand: Ulvac | Category: Refrigerator | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
Introduction
27
General
27
Figure 1-1 Typical Diagram of Refrigeration System
28
Specifications
29
Table 1-1 Standard Specifications
29
Inspection
31
Shipping List
31
Cold Head Inspection
31
Installation
33
Auxiliary Equipment
33
Installing Refrigerator Unit to Vacuum System
34
Figure 3-1 Installation and Maintenance Space
34
Connecting Roughing Pump
35
Connecting Refrigerator Unit to Compressor Unit (Connecting Flexible Hose)
35
Figure 3-2 Connecting Flexible Hose
36
Connecting Electrical Cables
37
Operation
39
Prior to Startup
39
Installing Testing Sample
39
Rough Pumping
39
Startup and Cooldown
40
Normal Operation
40
Shutdown Procedures
41
Disconnecting Flexible Hose
42
Figure 4-1 Disconnecting Flexible Hose
42
Storage
43
Handling of Hazardous Materials
43
Maintenance
45
Scheduled and Unscheduled Maintenance
45
Charging Helium Gas
47
Helium Circuit Decontamination
50
Figure 5-2 Disconnecting Flexible Hoses
51
Figure 5-5 Cryopump Decontamination Procedures (2)
54
Figure 5-6 Connecting Flexible Hoses
56
Troubleshooting
57
Table A-1 Fault Diagnosis
58
Flexible Hose
61
Principles of Refrigerator Operation
63
Figure C-2 Principle of G-M Cycle Operation
65
Typical Performance Curve
67
RM10T Refrigerator Unit
68
RM20T Refrigerator Unit
69
RM50T Refrigerator Unit
70
RM80T Refrigerator Unit
71
RM120ET Refrigerator Unit
73
RMS10T Refrigerator Unit
75
RMS50T Refrigerator Unit
76
RMS80T Refrigerator Unit
77
RMS150T Refrigerator Unit
78
Cooldown Characteristics
80
RM10T Refrigerator Unit
80
RM20T Refrigerator Unit
81
RM50T Refrigerator Unit
82
RM80T Refrigerator Unit
83
RM120ET Refrigerator Unit
85
RMS10T Refrigerator Unit
87
RMS50T Refrigerator Unit
88
RMS80T Refrigerator Unit
89
RMS150T Refrigerator Unit
90
Dimensional Drawings
92
RM10T Refrigerator Unit
92
RM20T Refrigerator Unit
93
RM50T Refrigerator Unit
94
RM80T Refrigerator Unit
95
RM120ET Refrigerator Unit
96
RMS10T Refrigerator Unit
97
RMS50T Refrigerator Unit
98
RMS80T Refrigerator Unit
99
RMS150T Refrigerator Unit
100
Service Network
101

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