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Ulvac R Series Instruction Manual

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REFRIGERATOR UNIT
Instruction Manual
R series
RM10T / RM20T / RM50T / RM80T / RM120ET
RS series
RMS10T / RMS50T / RMS80T / RMS150T
Export Control Policy
When applying a refrigerator to a cryocooler for optical sensors,
the cryocooler falls under row 6.A.2.d.2 of the control list
established by The Wassenaar Arrangement, which is equal to row
10(2) of appended table 1 of Japan's Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.
ULVAC CRYOGENICS INCORPORATED
D/N.ME10X80E, 2023JU14

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  • Page 1 REFRIGERATOR UNIT Instruction Manual R series RM10T / RM20T / RM50T / RM80T / RM120ET RS series RMS10T / RMS50T / RMS80T / RMS150T Export Control Policy When applying a refrigerator to a cryocooler for optical sensors, the cryocooler falls under row 6.A.2.d.2 of the control list established by The Wassenaar Arrangement, which is equal to row 10(2) of appended table 1 of Japan’s Export Trade Control Order.
  • Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
  • Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
  • Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.
  • Page 6 When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    Startup and Cooldown ......................4-2 Normal Operation ......................4-2 Shutdown Procedures .......................4-3 Disconnecting Flexible Hose ...................4-4 Storage ..........................4-5 Handling of Hazardous Materials ..................4-5 MAINTENANCE ············································································ 5-1 5.1. Scheduled and Unscheduled Maintenance ...............5-1 5.2. Charging Helium Gas .......................5-3 5.3. Helium Circuit Decontamination ..................5-6 ULVAC CRYOGENICS INCORPORATED...
  • Page 10 Table of Contents APPENDICES Troubleshooting ··············································································· A-1 Flexible Hose ·················································································· B-1 Principles of Refrigerator Operation ····················································· C-1 Typical Performance Curve ································································ D-1 Cooldown Characteristics ·································································· E-1 Dimensional Drawings ······································································ F-1 ULVAC CRYOGENICS INCORPORATED...
  • Page 11 Figure C-3 Single stage Refrigerator ................TABLES Table 1-1 Standard Specifications ................ 1-3 Table 5-1 Recommended Maintenance Intervals and Parts to be Replaced ..5-2 Table A-1 Fault Diagnosis ..................A-2 Table A-2 Operating Log ..................A-3 ULVAC CRYOGENICS INCORPORATED...
  • Page 12 Table of Contents This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 13: Safety Instructions

    Refrigerator Unit Instruction Manual Safety Instructions This chapter describes information for using the refrigerator safely. Before designing a cryostat or other equipment incorporating refrigerators or before using the refrigerators, read this section carefully and understand the content for safe use of the refrigerator. 1.
  • Page 14 For example, purge of pump or dilution of exhaust duct with inert gas corresponds to it. Customers are requested to take appropriate safety measure planning for managing the refrigerator operation according to an equipment and process where it will be adopted. ULVAC CRYOGENICS INCORPORATED...
  • Page 15 Refrigerator Unit Instruction Manual Table 1 Combustion range and detonation range of major gases (Volume percentage against air) Molecular Specific Boiling Combustion Detonation Weight Gravity Point Range Range Vol. % Vol. % 0℃, 1atm Hydrogen 2.016 0.070 20.3 4.0-75.0 18.3- 59 Carbon 28.01 0.970...
  • Page 16 When pumping flammable or explosive gas(es), refer to “5. Shutdown and warm up refrigerator after pumping flammable, explosive, or combustion enhancing gas” and take appropriate safety measures. ULVAC CRYOGENICS INCORPORATED...
  • Page 17 Refrigerator Unit Instruction Manual 4. When pumping oxygen The mixed gas of oxygen and flammable gas is very dangerous. Oxygen is the gas that enhances combustion. Use the refrigerator after confirming the safety precautions or measures when pumping the mixture of oxygen and flammable gas into the vacuum chamber.
  • Page 18 Eliminate ignition factor. Insure that there are no sources of ignition (refer to ② “3. When pumping flammable or explosive gases” in Safety Instruction) on the vacuum chamber side during suspended or being warmed up. ULVAC CRYOGENICS INCORPORATED...
  • Page 19 Refrigerator Unit Instruction Manual ③ Be sure to use metallic pipes for the roughing system and exhaust lines in order to prevent generation of static electricity. Ground the pipes with the grounding resistance of 100Ω or less. Refrigerator Outside Dilution inert gas Pressure gauge Pressure relief valve （such as N...
  • Page 20 ☆ If the refrigerator is used to pump corrosive gases, periodic pressure proof test is recommended. ☆ULVAC CRYOGENICS INC. executes the pressure proof test of the cylinder by increasing the gas pressure to 1.5 times as high as the operating pressure.
  • Page 21 Refrigerator Unit Instruction Manual 8. Assembly and disassembly of Refrigerator The refrigerator contains high-pressure and high-pure helium gas. When disassembling your refrigerator, please contact our Service Engineering Division or the nearest customer support center first for technical assistance. If you will perform maintenance or disassembly of the refrigerator by yourself, take the following special precautions for maintenance or disassembly of the refrigerator.
  • Page 22 ① Grounding conductor (earth wire) must be connected (D-class grounding with the ground resistance of 100 Ω or less.). Install a ground-fault interrupter at power supply of the compressor unit. ③ Do not connect other equipment to the same ground-fault interrupter for the ④ refrigerator system. S-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 23 Refrigerator Unit Instruction Manual 11. Contact us immediately when the self- sealing coupling is loosened. When working with a self-sealing coupling, the connection may be accidentally loosened or loosened by co-rotation. In such cases, the refrigerator may encounter faults due to helium leakage or air invasion, resulting in serious failure such as abnormal noise or refrigerator motor malfunction.
  • Page 24 Safety Instructions This page intentionally left blank. S-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 25: Disposal Consideration

    Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 26 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 27: Introduction

    Our refrigeration system can be applied to a broad range of applications including equipment for high-temperature superconducting or semiconductor, cryostats for optical measurement, turbo molecular pumps or diffusion pumps, applications in vacuum technology and much more. ULVAC CRYOGENICS INCORPORATED...

  • Page 28: Figure 1-1 Typical Diagram Of Refrigeration System

    (*2) Refer to “Compressor Unit Instruction Manual” for cooling water requirements. No cooling water line in the air-cooling type compressor unit. (*3)Be sure to use three-phase type compressor unit for three-phase type cold head. Figure 1-1 Typical Diagram of Refrigeration System ULVAC CRYOGENICS INCORPORATED...

  • Page 29: Specifications

    “T” in the model name indicates “Three-Phase” type. Three-phase type cold heads require three-phase type compressor units. Table 1-1 Standard Specifications RM10T RM20T RM50T RM80T RM120ET R series (*4) Refrigeration 50Hz 10W / 77K 30W / 77K 55W / 77K 80W / 77K 110W / 77K...
  • Page 30 C10T C30VRT C30MVRT C30PVRT Note 1: The figures in the table shows the number of refrigerator unit that one compressor unit can run. Note 2: Refer to Appendix D for the combinations which guarantee standard refrigeration capacity. ULVAC CRYOGENICS INCORPORATED...

  • Page 31: Inspection

     When purchasing a refrigerator unit only, one carton will be delivered. Content Quantity Carton Refrigerator Unit Refrigerator Unit Instruction Manual 2.2. Cold Head Inspection Remove the refrigerator unit from shipping carton and make sure that there is no damage or dent on the body, connectors, and cylinders. ULVAC CRYOGENICS INCORPORATED...
  • Page 32 Inspection This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Installation

     Vacuum gauge for low vacuum ：Used to measure the pressure inside the vacuum chamber ranging from atmospheric pressure to 0.1Pa.  Vacuum gauge for high vacuum ：Used to measure the pressure below 0.1Pa. Ionization gauge is recommended. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Installing Refrigerator Unit To Vacuum System

    Please contact us when you need to change the orientation.  Keep sufficient space for maintenance when installing the refrigerator unit. “A” Dimensions shown in Figure 3-1 is recommended. R250 (Unit：mm) RM10T RM20T RM50T RM80T RM120ET RMS10T RMS50T RMS80T RMS150T Figure 3-1 Installation and Maintenance Space ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Connecting Roughing Pump

    Check the helium gas pressure on the compressor unit. If the pressure is higher than the specified value, release the helium gas by opening the gas charge valve slowly. If the pressure is lower than the specified value, charge helium gas as described in Section 5.2 in this manual. ULVAC CRYOGENICS INCORPORATED...

  • Page 36: Figure 3-2 Connecting Flexible Hose

    Tighten with a Hold with a wrench. wrench. ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N･m. Figure 3-2 Connecting Flexible Hose ULVAC CRYOGENICS INCORPORATED...

  • Page 37: Connecting Electrical Cables

    ・Do not connect the compressor unit power cable until all connections have been made between the components and the exhaust system. Connect the cold head power cable from the compressor unit to the refrigerator unit. Connect the input power cable from the compressor unit to its power source. ULVAC CRYOGENICS INCORPORATED...
  • Page 38 Installation This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 39: Operation

    When rough pumping has finished, close the roughing valve.（The residual gas inside vacuum chamber will be condensed on cryogenically cooled surfaces as the cold head cools down and thereby the pressure is down to 10 to 10 Pa.） ULVAC CRYOGENICS INCORPORATED...

  • Page 40: Startup And Cooldown

    ③Pressure inside vacuum chamber is too high. Normal Operation The refrigerator unit can be operated without operators. Please record the operating data on operating logs during normal operation regularly. Refer to corresponding instruction manuals for the operating pressure of the compressor unit. ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Shutdown Procedures

    However, when using different heaters, make sure to take measures to keep the temperature lower than 70°C such as using temperature controller, overheat alarm function, or by controlling the operating time. ULVAC CRYOGENICS INCORPORATED...

  • Page 42: Disconnecting Flexible Hose

    Refer to Section 5.3 for detail. Hold with a Loosen the nut spanner. with a spanner. Loosen the union nut using two spanners and disconnect the flexible hose by hand. Figure 4-1 Disconnecting Flexible Hose ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Storage

    ◆If you have to pump toxic or corrosive gases, obtain proper instructions from a safety supervisor. ◆When transporting refrigerators which have been used to pump dangerous substances, clearly indicate the of content of such substances. ◆Handle dangerous materials in accordance with applicable laws and regulations. ULVAC CRYOGENICS INCORPORATED...
  • Page 44 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Maintenance

    Item code Helium charging adapter kit A700B5101000 (Regulator, Charging hose 2.4M, Charging adopter) <Items independently available> Regulator (for helium gas) A700A5101700 Charging hose 2.4M A700A5101800 Charging adapter A700B5101100 － － Helium gas (with purity of 99.999% or above) ULVAC CRYOGENICS INCORPORATED...
  • Page 46 °C °C not exceed 70 If the cold head is heated over 50 during regeneration repeatedly, more frequent maintenance is required since the displacer may deteriorate faster than usual. ULVAC CRYOGENICS INCORPORATED...

  • Page 47: Charging Helium Gas

    Turn the regulator handle counterclockwise until the helium stops flowing. CAUTION If the bottle valve is opened ignoring the above procedures (1), the air between the regulator and the bottle valve diffuses into the helium bottle and lowers the purity of helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 48 The pressure relief valve in the compressor is set to work at 2.5MpaG. 6. Close the charge valve after charging helium gas. 7. Close the regulator and remove the charging hose from the charge inlet. ULVAC CRYOGENICS INCORPORATED...
  • Page 49 Refrigerator Unit Instruction Manual Front Panel Low Pressure High Pressure Charging Hose Bottle Valve Remove the front panel. Regulator Charging Flexible Hoses Valve Helium Gas Bottle Figure 5-1 Charging Helium Gas ULVAC CRYOGENICS INCORPORATED...

  • Page 50: Helium Circuit Decontamination

    (See Figure 5-2.) NOTE: It is important to remove the flexible hoses right after shutdown in order to prevent the diffusion of impurities that have been coagulated in the refrigerator unit, resulting in lowering the purity of helium gas. ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Figure 5-2 Disconnecting Flexible Hoses

    Reduce the pressure in the refrigerator unit and the flexible hoses to a level of 0.3MPaG by opening the valve(V1) of the charging adaptor. （Ｖ１） （Ｖ２） Refrigerator Cable Helium （Ｖ３） Charging Adaptor Figure 5-3 Connecting Helium Gas Charging Adaptor ULVAC CRYOGENICS INCORPORATED...
  • Page 52 Figure 5-4. A roughing pump with the pumping speed of 20L/min or more and the ultimate pressure of 10Pa or less is recommended. For rough pumping, dry pumps that are free from oil back-flow are recommended. ULVAC CRYOGENICS INCORPORATED...
  • Page 53 After the pressure reaches below the atmospheric pressure, the valve (V3) can be fully opened. Therefore, monitor the pressure of the roughing pump head with an appropriate pressure gauge. The maximum allowable pressure for ULVAC’s small oil-sealed rotary pump and drypump is 0.01MPaG.

  • Page 54: Figure 5-5 Cryopump Decontamination Procedures (2)

    By taking the helium gas in and out 25 times, the purity of helium gas within the refrigerator unit and the flexible hose should be increased. Turn OFF the refrigerator unit. Charge helium gas to the refrigerator unit and the flexible hose up to the fill pressure of the compressor unit. 5-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 55 12. Confirm that the pressure gauge of the compressor unit indicates the specified pressure. If not, charge helium gas through the charging valve of the compressor unit, or adjust the pressure by discharging the helium gas. 13. Restart the refrigerator unit. ULVAC CRYOGENICS INCORPORATED 5-11...

  • Page 56: Figure 5-6 Connecting Flexible Hoses

    Maintenance Refrigerator Cable Power Cable Flexible Hoses Cooling Water IN Cooling Water Figure 5-6 Connecting Flexible Hoses 5-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 57: Troubleshooting

    Appendix A TROUBLESHOOTING Cold head trouble shooting procedures are shown in Table A-1. When you need more technical advice, please contact us. Our contact information is listed on “Service Network” at the end of this instruction manual. ULVAC CRYOGENICS INCORPORATED...

  • Page 58: Table A-1 Fault Diagnosis

    Cold head is making contaminated. procedures as described in irregular noise and Section 5.3. ２）Mechanical defects of cold head vibration. Contact us. ３）Incorrect input power source. Check the motor type of cold head and the input power. ULVAC CRYOGENICS INCORPORATED...
  • Page 59 Table A-2 Operating Log COLD HEAD S/N DATE REFRIGERATION COMPRESSOR S/N NAME SYSTEM ROOM OPERATING LOG TEMP. ℃ POWER Ｖ× φ TIME Compressor Unit Cryopump Remarks Temperature Pressure Return Cur- Cooling Date Time Supply rent water (mV) MPa(gage) MPa(gage) L/min ULVAC CRYOGENICS INCORPORATED...
  • Page 60 Troubleshooting This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 61: Flexible Hose

    ・ Avoid twisting the flexible hoses especially when making continuous bending piping. ・ When storing, keep away from water and salt to prevent corrosion. Do not put heavy things on flexible hoses. ULVAC CRYOGENICS INCORPORATED...
  • Page 62 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 63: Principles Of Refrigerator Operation

    The G-M cycle is very efficient and reliable which operates at slow speed and gives a little damage to the seal used inside cold head. In this Chapter, the refrigeration cycle with mechanical driving system employed by ULVAC CRYOGENICS INC has been explained.
  • Page 64 Moreover, differential pressure is not applied to seals on the 1st stage and 2nd stage and thus the load to the seal is small, achieving higher reliability and durability. ULVAC CRYOGENICS INCORPORATED...

  • Page 65: Figure C-2 Principle Of G-M Cycle Operation

    1 cycle P-V diagram W=∮PdV －P Figure C-2 Principle of Volume of Expansion Chamber G-M Cycle Operation 1st Displacer 1st Seal Regenerator Expansion chamber LOAD 2nd Displacer 2nd Seal Expansion chamber Regenerator LOAD Figure C-3 Two-stage Cold Head ULVAC CRYOGENICS INCORPORATED...
  • Page 66 Principles of refrigerator operation This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Typical Performance Curve

    RM20T Refrigerator Unit .............. D-3 RM50T Refrigerator Unit .............. D-4 RM80T Refrigerator Unit .............. D-5 RM120ET Refrigerator Unit ............D-7 RMS10T Refrigerator Unit ............D-9 RMS50T Refrigerator Unit ............D-10 RMS80T Refrigerator Unit ............D-11 RMS150T Refrigerator Unit ............D-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 68: Rm10T Refrigerator Unit

    Performance Curve 1. RM10T Refrigerator Unit (RM10T+C10T 50Hz) 2ND STAGE HEAT LOAD(W) 1ST STAGE HEAT LOAD（W) 1ST STAGE TEMPERATURE(K) RM10T Typical Refrigeration Capacity(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Rm20T Refrigerator Unit

    Refrigerator Unit Instruction Manual 2. RM20T Refrigerator Unit (RM20T+C30VRT 50Hz) 2ND STAGE HEAT LOAD(W) 1ST STAGE HEAT LOAD（W) 1ST STAGE TEMPERATURE(K) RM20T Typical Refrigeration Capacity(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 70: Rm50T Refrigerator Unit

    Performance Curve 3. RM50T Refrigerator Unit (RM50T+C30VRT 50Hz) 2ND STAGE HEAT LOAD(W) 1ST STAGE HEAT LOAD（W) 1ST STAGE TEMPERATURE(K) RM50T Typical Refrigeration Capacity(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Rm80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 4. RM80T Refrigerator Unit (R80RT+C30PVRT,RM80T+C30PVRT 50Hz) (RM80T+C30PVRT 50Hz) ２段ステージ熱負荷(W) 2ND STAGE HEAT LOAD (W) １段ステージ熱負荷(W) 1ST STAGE HEAT LOAD (W) 1段ステージ温度 （Ｋ） 1ST STAGE TEMPERATURE (K) RM80T Typical Refrigeration Capacity(50Hz) ULVAC CRYOGENICS INCORPORATED...
  • Page 72 Performance Curve (R80RT+C30PVRT,RM80T+C30PVRT 60Hz) (RM80T+C30PVRT 60Hz) ２段ステージ熱負荷(W) 2ND STAGE HEAT LOAD (W) １段ステージ熱負荷(W) 1ST STAGE HEAT LOAD (W) 1段ステージ温度 （Ｋ） 1ST STAGE TEMPERATURE (K) RM80T Typical Refrigeration Capacity(60Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Rm120Et Refrigerator Unit

    Refrigerator Unit Instruction Manual 5. RM120ET Refrigerator Unit (RM120ET+30PVRT 50Hz) 2ND STAGE HEAT LOAD (W) 1ST STAGE HEAT LOAD (W) 1ST STAGE HEAT LOAD (W) 1ST STAGE TEMPERATURE (K) RM120ET Typical Refrigeration Capacity (50Hz) ULVAC CRYOGENICS INCORPORATED...
  • Page 74 Performance Curve (RM120ET+C30PVRT 60Hz) 2ND STAGE HEAT LOAD (W) 0 40 1ST STAGE HEAT LOAD (W) 1ST STAGE TEMPERATURE (K) RM120ET Typical Refrigeration Capacity (60Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 75: Rms10T Refrigerator Unit

    Refrigerator Unit Instruction Manual 6. RMS10T Refrigerator Unit (RMS10T+C10T) 60Hz 50Hz 1ST STAGE TEMPERATURE(K) RMS10T Typical Refrigeration Capacity ULVAC CRYOGENICS INCORPORATED...

  • Page 76: Rms50T Refrigerator Unit

    Performance Curve 7. RMS50T Refrigerator Unit (RMS50T+C30VRT) 60Hz 50Hz 1ST STAGE TEMPERATURE(K) RMS50T Typical Refrigeration Capacity D-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 77: Rms80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 8. RMS80T Refrigerator Unit (RMS80T+C30PVRT) 60Hz 50Hz １ST STAGE TEMPERATURE(K) RMS80T Typical Refrigeration Capacity ULVAC CRYOGENICS INCORPORATED D-11...

  • Page 78: Rms150T Refrigerator Unit

    Performance Curve 9. RMS150T Refrigerator Unit （RMS150T+C30PVRT） 60Hz 50Hz １ST STAGE TEMPARATURE Ｋ RMS150T Typical Refrigeration Capacity D-12 ULVAC CRYOGENICS INCORPORATED...
  • Page 79 RM20T Refrigerator Unit ............... E-3 RM50T Refrigerator Unit ............... E-4 RM80T Refrigerator Unit ............... E-5 RM120ET Refrigerator Unit ............E-7 RMS10T Refrigerator Unit ............. E-9 RMS50T Refrigerator Unit ............E-10 RMS80T Refrigerator Unit ............E-11 RMS150T Refrigerator Unit ............E-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 80: Cooldown Characteristics

    Cooldown Characteristics 1. RM10T Refrigerator Unit (RM10T+C10T 50Hz) Roughing pressure 1.3 Pa at no heat load present 1ST STAGE 2ND STAGE TIME(min） RM10T Typical Cooldown Time(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 81: Rm20T Refrigerator Unit

    Refrigerator Unit Instruction Manual 2. RM20T Refrigerator Unit (R20R+C30V 50Hz) (RM20T+C30VRT 50Hz) 粗引き圧力 0.1 Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・Cold Head alone 2段ステージ 2ND STAGE 1段ステージ 1ST STAGE 時 間(min) TIME (min) RM20T Typical Cooldown Time(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 82: Rm50T Refrigerator Unit

    Cooldown Characteristics 3. RM50T Refrigerator Unit (R50R+C30 50Hz) (RM50T+C30VRT 50Hz) 粗引き圧力 0.1 Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・Cold Head alone 2段ステージ 2ND STAGE 1段ステージ 1ST STAGE 温 度（Ｋ) TIME (min) RM50T Typical Cooldown Time(50Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 83: Rm80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 4. RM80T Refrigerator Unit (R80RT+C30PVRT,RM80T+C30PVRT 50Hz) (RM80T+C30PVRT 50Hz) 粗引き圧力0.1Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・Cold Head alone ２段ステージ 2ND STAGE １段ステージ 1ST STAGE 時間 min TIME (min) RM80T Typical Cooldown Time (50Hz) ULVAC CRYOGENICS INCORPORATED...
  • Page 84 Cooldown Characteristics (R80RT+C30PVRT,RM80T+C30PVRT 60Hz) (RM80T+C30PVRT 60Hz) 粗引き圧力0.1Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・Cold Head alone ２段ステージ 2ND STAGE １段ステージ 1ST STAGE 時間 min TIME (min) RM80T Typical Cooldown Time(60Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 85: Rm120Et Refrigerator Unit

    Refrigerator Unit Instruction Manual 5. RM120ET Refrigerator Unit (RM120ET+C30PVRT 50Hz) Roughing Pressure 0.1Pa No load, Cold head alone 1ST STAGE 2ND STAGE 時間(min) TIME (min) RM120ET Typical Cooldown Time (50Hz) ULVAC CRYOGENICS INCORPORATED...
  • Page 86 Cooldown Characteristics (RM120ET+C30PVRT 60Hz) Roughing pressure; 0.1Pa No load, Cold head anole 1ST STAGE 2ND STAGE 時間(min) TIME (min) RM120ET Typical Cooldown Time (60Hz) ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Rms10T Refrigerator Unit

    Refrigerator Unit Instruction Manual 6. RMS10T Refrigerator Unit (RMS10T+C10T) Roughing pressure 0.1 Pa at no heat load present 50Hz 60Hz TIME(min） RMS10T Typical Cooldown Time ULVAC CRYOGENICS INCORPORATED...

  • Page 88: Rms50T Refrigerator Unit

    Cooldown Characteristics 7. RMS50T Refrigerator Unit (RMS50T+C30VRT) (RS50+C30) 粗引き圧力　 0.1 Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・Cold Head alone 50Hz 60Hz 時　間(min） TIME (min) RMS50T Typical Cooldown Time E-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Rms80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 8. RMS80T Refrigerator Unit (RS80T+C30PV) (RMS80T+C30PVRT) 粗引き圧力 0.1Pa Roughing Pressure: 0.1Pa 無負荷時・冷凍機単体 No Load・with 2kg cryopanel 50Hz 60Hz 時間(min) TIME (min) RMS80T Typical Cooldown Time ULVAC CRYOGENICS INCORPORATED E-11...

  • Page 90: Rms150T Refrigerator Unit

    Cooldown Characteristics 9. RMS150T Refrigerator Unit (RMS150T+C30PVRT) Roughing Pressure: 0.1Pa No Load・with 3kg cryopanel 50Hz 60Hz 段温度 時間 ( min) TIME (min) RMS150T Typical Cooldown Time E-12 ULVAC CRYOGENICS INCORPORATED...
  • Page 91 RM20T Refrigerator Unit ·············································· F-3 RM50T Refrigerator Unit ·············································· F-4 RM80T Refrigerator Unit ·············································· F-5 RM120ET Refrigerator Unit ·········································· F-6 RMS10T Refrigerator Unit ············································ F-7 RMS50T Refrigerator Unit ············································ F-8 RMS80T Refrigerator Unit ············································ F-9 RMS150T Refrigerator Unit ········································ F-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 92: Dimensional Drawings

    Dimensional Drawings 1. RM10T Refrigerator Unit φ39.7 φ76.2 φ53.9 RM10T REFRIGERATOR φ152.4 φ97 147.7 (199.9) O-RING GROOVE I.D. (223.8) ULVAC CRYOGENICS INCORPORATED...

  • Page 93: Rm20T Refrigerator Unit

    Refrigerator Unit Instruction Manual 2. RM20T Refrigerator Unit φ57 φ89 φ63.6 φ152.4 RM20T REFRIGERATOR φ152.4 φ101 147.7 (199.9) O-RING GROOVE I.D. (223.8) ULVAC CRYOGENICS INCORPORATED...

  • Page 94: Rm50T Refrigerator Unit

    Dimensional Drawings 3. RM50T Refrigerator Unit φ57 φ89 φ63.5 φ152.4 RM50T REFRIGERATOR φ152.4 φ101 147.7 O-RING GROOVE I.D. (199.9) (223.8) ULVAC CRYOGENICS INCORPORATED...

  • Page 95: Rm80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 4. RM80T Refrigerator Unit φ57 φ108.8 (φ90.2) φ152.4 RM80T REFRIGERATOR φ152.4 φ110 195.2 O-RING GROOVE I.D. (247.4) (281.5) ULVAC CRYOGENICS INCORPORATED...

  • Page 96: Rm120Et Refrigerator Unit

    Dimensional Drawings 5. RM120ET Refrigerator Unit φ57 φ108.8 (φ90.2) φ152.4 RM120ET REFRIGERATOR φ152.4 φ110 195.2 O-RING GROOVE I.D. (247.4) (281.5) ULVAC CRYOGENICS INCORPORATED...

  • Page 97: Rms10T Refrigerator Unit

    Refrigerator Unit Instruction Manual 6. RMS10T Refrigerator Unit φ76.2 φ152.4 RMS10T REFRIGERATOR 147.7 φ152.4 φ97 (199.9) O-RING GROOVE I.D. (223.8) ULVAC CRYOGENICS INCORPORATED...

  • Page 98: Rms50T Refrigerator Unit

    Dimensional Drawings 7. RMS50T Refrigerator Unit φ89 φ152.4 RMS50T REFRIGERATOR φ152.4 147.7 φ101 (199.9) O-RING GROOVE I.D. (223.8) ULVAC CRYOGENICS INCORPORATED...

  • Page 99: Rms80T Refrigerator Unit

    Refrigerator Unit Instruction Manual 8. RMS80T Refrigerator Unit φ108.8 φ152.4 RMS80T REFRIGERATOR φ152.4 195.2 φ110 O-RING GROOVE I.D. (247.4) (281.5) ULVAC CRYOGENICS INCORPORATED...

  • Page 100: Rms150T Refrigerator Unit

    Dimensional Drawings 9. RMS150T Refrigerator Unit φ108.8 φ152.4 RMS150T REFRIGERATOR φ152.4 (264.7) φ110 O-RING GROOVE I.D. (316.9) (299.9) (281.5) F-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 101: Service Network

    ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 102 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 103 Chapter 3 Installation and Chapter 4 Operation have been revised. P.5-2 Table 5-1 Title of this table has been changed. P.5-4 Caution for charging helium gas has been added. Appendix B 20A Flexible Hose Specifications have been added. Service Network has been revised. ULVAC CRYOGENICS INCORPORATED...
  • Page 104 “Service Network” has been revised. Appendix F Drawing of RMS80T has been modified. 2021-06-04 2021JE13 The refrigerator models have been changed. 1.2 Specifications The content in Table 1-1 has been modified. 2023-07-18 2023JU14 “Safety Instructions” has been revised. ULVAC CRYOGENICS INCORPORATED...

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