Ulvac LR 90 Dry Vacuum Pump Manuals

Manuals and User Guides for Ulvac LR 90 Dry Vacuum Pump. We have 1 Ulvac LR 90 Dry Vacuum Pump manual available for free PDF download: Instruction Manual

Ulvac LR 90 Instruction Manual

Ulvac LR 90 Instruction Manual (101 pages)

DRY VACUUM PUMP

Brand: Ulvac | Category: Water Pump | Size: 4 MB

Table of Contents

Table of Contents
10
1 Specification

12
- Overall Configuration
  13
  - Pump Structure
    13
  - System Flow
    15
- Specifications for Utilities
  20
- Dimensional Drawings
  23
- Description of Controller
  30
- Utility Panel
  31
- Performance Curve
  32
2 Installation

34
- For Safety Use
  34
- Installation and Storage Requirements
  42
  - Unpack
    42
  - Transit
    43
  - Environmental Requirements for Installation
    44
  - Other Requirements
    44
  - Earthquake Resistant Measures
    45
- Piping
  47
  - Piping for Inlet-Outlet Ports
    47
  - Nitrogen Gas Piping
    49
  - Cooling Water Piping
    50
- Wiring
  51
  - Power Wiring
    51
  - Wiring for Remote Control
    52
  - Communication
    55
3 Operation Procedure

57
- Flowchart for Operation
  57
- Prior Operation
  58
- Selecting LOCAL (Manual)/Remote
  59
- Start and Stop
  59
- Checking the Pump Run Status
  60
- Set Item Change
  61
- List of Set Items
  62
- Preliminary Operation (Setting of Utilities)
  78
- Operation
  79
- Stop
  80
- Self-Diagnostic Function
  81
- Logging Function
  81
4 Inspection and Maintenance

82
- Inspection
  82
- Maintenance
  82
- Troubleshooting
  86
  - Major Troubles
    86
  - In Case of Alarm Signal
    87
5 Warranty Terms

89
- Warranty Product
  89
- Warranty Period
  89
- Warranty Coverage
  89
- How to Respond
  90
- Others
  90
Attached Material

91
- Communication System Supplementation
  92
  - C-1 Communication Connector Connection Chart
    92
  - C-2 Communication Command
    93

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