User Manuals: Tempress Systems TS-6303 Furnace

Manuals and User Guides for Tempress Systems TS-6303 Furnace. We have 1 Tempress Systems TS-6303 Furnace manual available for free PDF download: Reference Manual

Tempress Systems TS-6303 Reference Manual

Tempress Systems TS-6303 Reference Manual (44 pages)

Tempress Systems Furnace Reference Manual

Brand: Tempress Systems | Category: Furnace | Size: 1 MB

Table of Contents

Table of Contents
3
1 Introduction

6
- Scope of the Manual
  6
- Furnace Models
  6
2 Description

8
3 Installation

19
- Introduction
  19
- Unpacking
  19
- Installation
  20
- The Furnace
  20
- The Scavenger
  21
- Inspection
  21
4 Start-Up

22
- Introduction
  22
- Figure 4-1 : Spike Thermocouple
  23
- Figure 4-2 : Tube Adapter
  23
- Fast Cooldown
  24
- Burn-In and Oxidation of an Heating Element
  24
- Installation of the Quartz Tube
  26
- Figure 4-3 : P Osition of the Thermocouple
  26
- Test and Calibration Procedure
  27
- Pre-Cleaning of the Process Tube
  27
- Automatic Profiling Procedure
  29
  - Introduction to Profiling
    29
  - Profiling Recipe Setup
    30
  - Automatic Profiling Preparation
    32
  - Paddle TC Installation
    32
    
    Profile Recipe Selection
    33
  - Automatic Profiling RUN
    33
  - Summary Automatic Profiling
    34
5 Maintenance

35
- Introduction
  35
- Heating Element Coil
  35
- Figure 5-1 the Heating Element Adjustment
  36
- Heating Elements
  37
- The SCR-Module
  37
- Heat Exchanger
  38
- Tube Change
  39
- Tube Change Diffusion System Tubes
  39
- Tube Change LPCVD and Vacuum System Tubes
  40
- Preventive Maintenance
  41
6 Calibration/Adjustments

43
7 Trouble Shooting

44

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