Summary of Contents for Tempress Systems TS-6303
- Page 1 Furnace Reference Manual Tempress Systems Inc. Furnace manual M320_01 January 2004...
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Page 3: Table Of Contents
TABLE OF CONTENTS Table of contents 1. Introduction ............1-1 Scope of the manual ..............1-1 Furnace models ................ 1-1 2. Description ............2-1 Diffusion system................ 2-1 Components of the furnace............2-3 Furnace cabinet ................ 2-4 Scavenger................. 2-4 Available models............2-4 2.4.1 Description of the Scavenger........ - Page 4 TABLE OF CONTENTS Installation of the Quartz Tube..........4-5 Test and Calibration Procedure ..........4-6 Pre-Cleaning of the Process Tube ..........4-6 Automatic profiling procedure ........... 4-8 Automatic profiling procedure ........4-8 4.8.1 4.8.1.1 Introduction to profiling ........ 4-8 4.8.1.2 Profiling recipe setup........4-9 automatic profiling preparation ........
- Page 5 LIST OF FIGURES List of figures Figure 2-1 Outline drawing of a Furnace System, model TS6804..2-2 Figure 2-2 Round scavenger box layout (Diffusion) ....... 2-5 Figure 2-3 Cooling unit ................2-5 Figure 2-4 Fast Cooldown principle............2-6 Figure 2-5 Heating element for diffusion furnaces........2-8 Figure 2-6 Tube adaptors, support and radiation heat shield ....
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Page 6: Introduction
The contents of this manual and drawings are to provide the necessary instructions and information for installing, adjustment, operating, maintenance and understanding of the Amtech/Tempress Systems Furnace. Before starting up, installing, operating and/or maintaining the system, read this manual first. - Page 7 INTRODUCTION The TS-6000 series The TS-6000 series is a line of horizontal furnaces for up to 150 mm. (6 inch) wafers. This system is standard equipped with an accurate 3 zone digital controller for optimum temperature control. In this line the following models are available: •...
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Page 8: Description
DESCRIPTION 2.Description Diffusion system The Furnace is designed to perform Diffusion/Atmospheric and Low Pressure Chemical Vapor Deposition (LPCVD) processing on wafers from 75 mm up to 300 mm, and may be installed in a cleanroom environment. The furnace is housed in a utilized cabinet of heavy gauge metal construction with a Clean Room Compatible Polyurethane finish. -
Page 9: Figure 2-1 Outline Drawing Of A Furnace System, Model Ts6804
DESCRIPTION Figure 2-1 Outline drawing of a Furnace System, model TS6804 URNACE EFERENCE ANUAL... -
Page 10: Components Of The Furnace
DESCRIPTION A: top view of the furnace with scavenger 1: Water outlet Bulkhead Swagelok (furnace cooling) 2: Water inlet Bulkhead Swagelok (furnace cooling) 3: Exhaust Furnace 4: Water outlet Bulkhead Swagelok (cooling vacuum-flanges) 5: Water inlet Bulkhead Swagelok (cooling vacuum-flanges) 6: Exhaust scavenger-box 7: Exhaust scavenger-housing B: sideview of the furnace... -
Page 11: Furnace Cabinet
DESCRIPTION Furnace cabinet The furnace is housed in a utilized cabinet of heavy gauge metal construction with a Clean Room Compatible Polyurethane finish. (See Figure 2-1). • Optional: Cabinet over-temperature protection sensor on top of the cabinet. Scavenger All 3-stack and 4-stack furnaces are provided with a toxic gas scavenger. Depending on the application, with or without a front door. -
Page 12: Cooling Unit
DESCRIPTION Figure 2-2 Round scavenger box layout (Diffusion) Cooling unit The cooling module is mounted on the top of the furnace. It is a water/air heat exchanger, with high-efficiency aluminium fins, for optimised surface area. The water quantity (preferably soft water) is 3-7 l/min, depending on the inlet water temperature. (see Figure 2-1 and Figure 2-3) The electrical fans on top of the module extract the hot air through the radiator fins and cooled air is blown-out in the room again. -
Page 13: Fast Cooldown
DESCRIPTION Fast Cooldown Air is forced by a blower to travel between the heating element mantle and the outside of the process tube. The direction of airflow is alternated to achieve balanced cooling faster than the conventional furnace. The air used for cooling is re-circulated. It is cooled by a water-cooled heat exchanger built in, in the furnace cabinet. -
Page 14: Heating Elements (Disposacore)
DESCRIPTION At the start of the cool-down step, the DTC checks the current temperature setpoint, the paddle setpoint (target temperature) and the ramp (slope) to see if forced cooling is necessary. If it is, the DTC calculates a profile (temperature over time) required to reach the target setpoint, and sets the blower speed to an appropriate value (determined by an algorithm). -
Page 15: Heating Elements, Tube Adapters, Isolation Collars
DESCRIPTION • High operating capacity CONNECTOR FOR POWER STAINLESS STEEL MANTLE Figure 2-5 Heating element for diffusion furnaces Life-time and maximum temperature The typical lifetime of a heating element is 5-15 years but is highly dependent on many factors. Strong temperature fluctuation and high temperature may reduce the actual lifetime. Note: Keep in maximum recommended temperature, overshoot will highly increase the ageing of the heating element. - Page 16 DESCRIPTION • Wear protective clothing and equipment appropriate for the hazard, this include overall, hat, dust mask (with a particulate air filter cartridge to DIN 3181 P3), goggles and gloves. • Reduce underfoot debris, keep the work area clean. • Use a vacuum cleaner with a HEPA filter.
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Page 17: Support And Sealing
DESCRIPTION Support and sealing • Tubes may be supported by tube supports and centered by tube adapters. The use of tube supports for high temperature elements is not recommended. • Radiation heat shield (1 per tube), made of Moldatherm insulation plate and ®... -
Page 18: Furnace Temperature Control
DESCRIPTION Furnace temperature control • The Digital Temperature Controller provides master/slave or independent zone control. It features proportional, integral and derivative (PID) temperature control functions. • Digital Temperature Controller, with 3 to 5 zone spike (optional) and paddle control per tube. Ramping, limit alarms, TC break and power failure alarms and 4 temperature recipes. -
Page 19: Installation
• If there is any visible damage, notify Amtech/Tempress Systems verbally and in writing. This must be done within 24 hours, after arrival of the shipment. •... -
Page 20: Installation
INSTALLATION CAUTION Lift or pull the wrappings away from all stainless steel surfaces. Do not drag packing materials across the equipment surfaces as this may cause damage. • Depending what type of packing material is being used; a final de-dusting must be done before it is put into position. -
Page 21: The Scavenger
Final alignment and facility functionality will be checked by the Amtech/Tempress Systems-engineer. • The Amtech/Tempress Systems engineer will do purging of all toxic gas lines. The scavenger • Scavenger exhaust (standard) duct has a 108 mm O.D. outlet (check for the right O.D. -
Page 22: Start-Up
START-UP 4.Start-up Introduction After the furnace is installed and leveled correctly, the start-up may begin. Definition of Chapter Contents: • Pre-operation checks. • Burn in elements. • Tube installation. • As this is a general start-up procedure for diffusion furnaces, some items are optional. -
Page 23: Figure 4-1 : Spike Thermocouple
START-UP • For element oxidation, the outer ends of the heating element have to be closed by using heat resistant insulating material, such as quartz wool (to be provided by the customer). Figure 4-1 Spike thermocouple Figure 4-2 Tube adapter •... -
Page 24: Fast Cooldown
Note: More than 2 bar results in unnecessary high closing pressure. WARNING In case of unauthorized break of seal of the pressure relief valve, Tempress Systems Inc. cannot accept any responsibility in case of any damage on the system. Burn-in and Oxidation of an Heating element... - Page 25 START-UP A. Use the following steps for standard Kanthal A1 or APM Heating elements: • Heat it up from ambient up to 600 C with maximum power/slope value. • Testing of the Redundant Thermocouple Excess Temperatures, in each zone, by giving a setpoint of 600 degrees, on the “Excess Temperature Controller".
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Page 26: Installation Of The Quartz Tube
START-UP Installation of the Quartz Tube Follow the procedure as described below for installing a Quartz Tube: • Unpack the quartz tube and inspect for any type of damage. If any damage is visible, then... (for further information, see item 3.2). •... -
Page 27: Test And Calibration Procedure
START-UP • Check if there are any gaps between the process tube and the tube adapters and between the radiation shield and the quartz tube. If there are gaps, fill them up with heat resisted insulating material, such as quartz wool. •... - Page 28 START-UP • Paddles and wafer boats: Insert at 500 to 800 C and ramp up. • TCA-Run dry O at 4 liters/min. N carrier gas at 300 ml/min. through bubbler at C for time indicated. • HCL-Run dry O at 4 liters/min. and HCL at 250 ml/min. for time indicated. •...
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Page 29: Automatic Profiling Procedure
START-UP General information: • Relative thermal expansion rates: SiC 4.8; Poly 3.8; Si 2.7;SiO • Typical cleaning frequency for Si is every 100 cycles (based on 1000 Å per cycle or 100,000 Å build up). • Typical cleaning frequency for Poly operations is every 40 cycles (based on 5000 Å per cycle or 200,000 Å... -
Page 30: Profiling Recipe Setup
START-UP Spike TC failure during normal process. It will allow the process run to finish using the Power Output instead of the Spike Value saving a valuable process batch. Four (4) different Profile Temperature Tables (A-B-C-D) are available for use in different process environments, such as atmospheric-vacuum or dry-wet. - Page 31 START-UP Note: do not touch the wafers. If a wafer is touched or dropped on the floor, don’t use this wafer for processing. BOAT IN In this step the boatloader moves to the boat in position (system dependent) at the programmed speed (adjusted in mm/min).
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Page 32: Automatic Profiling Preparation
START-UP UNLOAD WAFERS In this step the system waits for the operator to unload the wafers. A sonalert alarm will sound. When unloading is done press <START>. After reaching the END command of the profile process recipe, the recipe will return to step 0, the safety status. -
Page 33: Profile Recipe Selection
START-UP CAUTION Extreme care is required to prevent breakage of profile TC or profile TC connection on process tube. 4.8.3.1 Profile recipe selection First, the desired profile temperatures need to be edited into the Profile Temperature Table. a) Go to Certifications-submenu-Temperature Controller Certifications-submenu- Profile Temperature Table on the touchscreen. -
Page 34: Summary Automatic Profiling
START-UP Summary automatic profiling 4.8.5 a. Determine the required Profile Temperatures and edit the appropriate Profile Temperature Table and PROFILE recipe. b. Prepare the system using the Automatic Profiling Preparation Procedure. This places the Profile TC and assigns the control zones. c. -
Page 35: Maintenance
MAINTENANCE 5.Maintenance Introduction With this system, maintenance is reduced to a minimum. It is only necessary on the rare occasion when a part fails. Replacement of parts is described in the following paragraphs. Heating Element Coil • The heating element must be replaced by a new one, when it is out of order. •... -
Page 36: Figure 5-1 The Heating Element Adjustment
MAINTENANCE • Remove straps and power cables from the heating element • Lift the heating element from the support and remove it carefully. • Place the new element and follow the instructions, as described above, in reverse and adjust the heating element. After the adjustment, the procedure as described in item Burn-in and Oxidation of an Heating element), must be followed again. -
Page 37: Heating Elements
MAINTENANCE • The heating element must be placed so that the thermocouple-holes are right in front of the holes of the 'tunnel’ and the powertraps are above the tunnel. • If the heating element is in the final position, it will be held in its position through straps. -
Page 38: Heat Exchanger
MAINTENANCE • The furnace can now be used again. Heat Exchanger If the heat exchanger is leaking or clogged, replace it by a new one. Check monthly if all fans are running smoothly. If one fan is out of order, it can be replaced at the next convenient moment. -
Page 39: Tube Change
MAINTENANCE Tube change CAUTION Use cleanroom gloves for handling quartz. CAUTION No special directions are necessary to remove process tubes. However, after every tube change, if a gap exists between the process tube and the adapter, it must be repacked with fiberfax wool This will prevent air movement within the furnace and resultant temperature cycling. -
Page 40: Tube Change Lpcvd And Vacuum System Tubes
MAINTENANCE Tube change LPCVD and vacuum system tubes CAUTION Use cleanroom gloves for handling quartz. The tube exchange is required at the moment there has been a deposition of approx. 20 microns. This however is strongly depending on the particle additions at processing. In case the particles get above spec, the tube should be exchanged. -
Page 41: Preventive Maintenance
MAINTENANCE Preventive Maintenance Maintenance of the furnace is divided in three sections. These are daily maintenance, monthly maintenance and yearly maintenance. On the next pages a list with the three sections dealing about the maintenance is inserted: Daily Maintenance: Check if element is still working property (check if there is an alarm on the display of the controller). - Page 42 MAINTENANCE Switch furnace off Yearly Maintenance: Make sure all voltages are off Check all wiring for loose connections of the power cables and all strips. Check the amount of water flowing through the heat exchanger. Remove spike TC’s. Remove quartz tubes, tube adaptor, etc. Clean inside of heating element with vacuum cleaner.
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Page 43: Calibration/Adjustments
CALIBRATION / ADJUSTMENT 6.Calibration/Adjustments • Spikes will be calibrated with the paddle thermocouples (Automatic profiling) (for more information, see the DTC-Technical Manual). • Change only the PID-adjustments if the furnace temperature isn't stable (for more information, see the DTC-Technical Manual). •... -
Page 44: Trouble Shooting
TROUBLE SHOOTING 7.Trouble Shooting PROBLEM: POSSIBLE CAUSE AND SOLUTION (-S): 1. Excess Temperature alarm: • Thermocouple break (one of the LED’s will be lighted). • Setpoint of the Excess Temperature is lower then the setpoint of the Temperature Controller. • Overtemperature of a zone 2.
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