SUSS MA6 Manuals

SUSS MA6 Manuals

Manuals and User Guides for SUSS MA6. We have 1 SUSS MA6 manual available for free PDF download: User Manual

SUSS MA6 User Manual

SUSS MA6 User Manual (139 pages)

Mask Aligners

Brand: SUSS | Category: Laboratory Equipment | Size: 15 MB

Table of Contents

Table of Contents
3
Preface
5
1 Operation of the Machine

9
- Definitions
  11
  - How to Use this Manual
    11
  - Key Led's
    11
  - Coordinate Systems
    12
  - Components of the Exposure Optics
    13
    
    Exposure Lamp
    14
    
    Ellipsoidal Mirror
    14
    
    Cold Light Mirror
    14
    
    Fly's Eye Lens
    14
    
    Condenser Lens
    14
    
    Filters
    14
    
    Integrator Block
    14
    
    Field Lens
    14
    
    Turning Mirror
    14
    
    Front Lens
    14
    
    Cleaning of Optical Parts
    15
    
    Deep UV Exposure
    15
- Controls and Indicators
  16
  - Alignment Stage Controls
    16
  - Front Panel Controls
    17
  - Keyboard Controls
    19
  - TSA-Microscope Controls
    23
    
    M 3Xx Microscope
    24
    
    Dual Video Microscope DVM 6/8
    26
  - Lamp House Controls
    26
  - Joystick and Buttons
    27
- Operating Procedures
  28
  - Power on Procedure
    28
  - First Mask Print Mode
    28
  - Top Side Alignment
    29
  - Bottom Side Alignment
    31
  - Single Bottom Side Alignment
    32
- Advanced Technology
  34
  - Exposure Programs
    34
  - Multiple Exposure
    35
  - Wedge Error Compensation
    35
  - Load Mask by Slide
    35
- Step by Step Machine Interactions
  37
  - Select Mask Loading Type
    37
  - SELECT PROGRAM for Exposure
    38
  - EDIT PARAMETER Menu
    39
  - Changing the TSA, BSA and Stage Alignment Speed
    40
  - EDIT PROGRAM Menu
    41
  - Change Mask
    42
  - Load Wafer
    43
  - Load Mask by Slide
    44
2 Maintenance

47
- General
  47
- General Maintenance
  47
- Visual Checks
  47
- Test Run
  47
- Safety System Check
  47
- Preventive Maintenance for MA6/ MA8
  47
  - Cleaning
    47
  - Lamp Service
    48
  - Greasing
    48
  - WEC-Check
    48
  - Recommended SUSS Service
    48
- Measuring the Intensity/ Uniformity of the Exposure Light
  48
  - Power Supply Calibration
    48
  - Alignment of Lamp in Ellipsoid Mirror
    49
- Replacement of the Exposure Lamp 1000 W
  51
- Replacement of the Microscope Lamp
  54
- Cleaning of Optical Components
  55
  - Cleaning Materials
    56
  - Application Technique
    56
  - Cleaning Procedure
    56
  - Safe Clean-Up after Use of Solvents
    58
  - Removal and Re-Insertion of Specific Optical Components
    58
  - Conclusion
    59
- Facts and Data for Maintenance and Service
  59
3 Appendix

61

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