Stanford Research Systems RGA300 Analyzer Manuals

Manuals and User Guides for Stanford Research Systems RGA300 Analyzer. We have 1 Stanford Research Systems RGA300 Analyzer manual available for free PDF download: Operating Manual And Programming Reference

Stanford Research Systems RGA300 Operating Manual And Programming Reference

Stanford Research Systems RGA300 Operating Manual And Programming Reference (362 pages)

Residual Gas Analyzer

Brand: Stanford Research Systems | Category: Measuring Instruments | Size: 3 MB

Table of Contents

Table of Contents

5
- Specifications
  14
- Command List
  16
1-1 Chapter 1 Getting Started

19
- Chapter 1 Getting Started
  19
- Unpacking
  20
  - Before You Open the Box
    20
  - Checklist
    20
    
    Standard Equipment / Supplies
    20
    
    Accessories
    20
    
    Optional Equipment
    20
    
    Related Equipment
    21
- Installation
  22
  - Introduction
    22
  - Probe Installation
    22
    
    Hardware Requirements
    23
    
    Procedure
    24
  - Electronics Control Unit Installation
    26
    
    Hardware Requirements
    26
    
    Procedure
    28
  - RGA Windows Installation
    29
    
    Minimum System Requirements (Single Head Operation)
    29
    
    Procedure
    29
  - Turning on the RGA
    30
- Running the SRS RGA System
  31
Chapter 2 Rga General Operation

33
Chapter 3 Rga Quadrupole Probe

47
- Introduction
  48
- Ionizer
  49
  - Description
    49
  - Principle of Operation
    49
  - Parameter Settings
    50
- Quadrupole Mass Filter
  53
  - Description
    53
  - Principle of Operation
    54
  - Mass Range, Resolution and Throughput
    55
  - Zero Blast Suppression
    57
- Ion Detector
  58
  - Description
    58
  - Faraday Cup Operation
    59
  - Electron Multiplier Operation
    59
- Hardware Modifications
  63
Chapter 4 Rga Electronics Control Unit

67
- Introduction
  68
- Front Panel
  69
- Rear Panel
  70
  - 24VDC@2.5A Connector
    70
  - Rs232/Dce/28.8K Connector
    71
  - Locking Knobs
    71
  - Power Entry Module (Option 02)
    71
  - Led&#X92;'S
    71
  - LED Functionality
    72
    
    STATUS (Green) Led's
    72
    
    ERROR (Red) Led's
    73
    
    ERROR (Red) Led&#X92;'S
    73
- Electrometer
  74
  - Detection Limit Vs. Scan Rate
    74
  - Adjusting the Zero of the Ion Detector
    75
- Mass Filter Power Supply
  76
- Maintenance and Service
  77
5-1 Chapter 5 Rga Windows Software

79
- Chapter 5 RGA Windows Software
  79
- Overview
  81
  - Program Structure
    81
  - RGA Files
    81
    
    RGA Files (.Rga)
    81
    
    RGA Scan Log Files (.Ana .Hst .Tbl)
    81
    
    RGA ASCII Data Files (.Asc)
    82
    
    RGA Graph Metafiles (.Wmf)
    82
  - System Requirements
    82
    
    RGA ASCII Data Files (.Txt)
    82
- Getting Started
  83
  - Starting the RGA Software
    83
  - Connecting to a Head
    83
  - Shutting down the RGA System
    83
- Features and Operation
  85
  - The RGA Window
    85
  - Multiple Head Operation
    85
  - Display Modes
    85
    
    Analog (Mode Menu)
    85
    
    Histogram (Mode Menu)
    86
    
    P Vs T (Mode Menu)
    87
    
    Leak Test (Mode Menu)
    88
    
    Annunciator (Mode Menu)
    88
    
    Library (Mode Menu)
    89
  - Data Acquisition
    89
  - Scan Data Logging
    89
  - Graph Management
    90
  - Head Management
    90
  - Sensitivity Factors
    91
  - Spectrum Analysis
    91
  - Background Data
    91
- RGA Head and Scan Parameters
  92
- Display Modes
  94
- General Utilities
  96
  - Using the Data Cursors
    96
    
    Cursor Command
    96
    
    Cursor Properties Command
    96
  - Scheduled Saving of Data
    96
    
    Logging Scans
    96
    
    Viewing Scans
    96
  - Browsing through the Gas Library
    97
  - Analyzing the Mass Spectrum
    98
    
    Spectrum Analysis Description
    98
    
    Analysis Procedure
    98
  - Averaging Scan Spectrum
    98
  - Pressure Reduction
    99
  - Y-Axis Unit Change
    99
- Head Calibration and Security
  100
  - Tuning the RGA Sensitivity
    100
  - Adjusting the CEM Gain
    100
  - Peak Tuning the RGA Head
    101
  - Securing the RGA Head
    102
  - RGA On-Line Help
    103
    
    Context Sensitive Help
    103
    
    Help Search
    103
    
    Help Index
    103
    
    Commonly Asked Questions
    103
    
    Sample Scans
    103
Chapter 6 Programming the Rga Head

105
- Introduction
  108
- The RGA COM Utility
  109
- LED Indicators
  110
- RS232 Interface
  110
- Command Syntax
  111
  - Examples of Command Formats
    111
  - Programming Tips
    112
- Communication Errors
  113
  - Command Errors
    113
  - Parameter Errors
    113
  - Jumper Protection Violation
    113
- Troubleshooting the RGA Communications
  115
- Programming the RGA Head
  116
  - Initializing the RGA Head
    116
  - Programming the Ionizer
    117
  - Programming the Detector
    118
  - Setting up Analog Scans
    120
  - Setting up Histogram Scans
    122
  - Single Mass Measurements
    124
  - Total Pressure Measurements
    126
  - Storing Information in the RGA Head
    127
  - Programming the Quadrupole Mass Filter
    128
  - Error Checking the RGA
    129
- RGA Command Set
  133
  - Initialization Commands
    134
    
    In0, In1, In2
    134
  - Ionizer Control Commands
    136
    
    Dgparam, Param: 0 - 20
    136
    
    Eeparam, Param: 25 - 105
    137
    
    Flparam, Param: 0.00 - 3.50, *, ?
    138
    
    Ieparam, Param: 0,1
    140
    
    Vfparam, Param: 0 - 150
    140
  - Detection Control Commands
    142
    
    Hvparam, Param: 0 - 2490
    144
    
    Nfparam, Param: 0 - 7
    146
  - Scan and Measurement Commands
    148
    
    Hsparam, Param:0 - 255
    149
    
    Mfparam, Param: 1 - M_MAX
    151
    
    Miparam, Param: 1 - M_MAX
    151
    
    Mrparam, Param:0 - M_MAX
    152
    
    Saparam, Param: 10 - 25
    154
    
    Sc[Param], Param: 0 - 255
    155
    
    Tp?, Tp0, Tp1
    156
  - Parameter Storage Commands
    159
    
    Mgparam, Param: 0.0000 - 2000.0000
    159
    
    Mvparam, Param: 0 - 2490
    159
    
    Spparam, Param:0.0000 - 10.0000
    160
    
    Stparam, Param:0.0000 - 100.0000
    160
  - Mass Filter Control Commands
    162
    
    Mlparam, Param: 0.0000 - M_MAX
    162
  - Error Reporting Commands
    163
  - Tuning Commands
    167
    
    Diparam, Param: 0 - 255
    167
    
    Dsparam, Param: -0.8500 - +0.8500
    168
    
    Riparam, Param: -86.0000 - +86.0000, *, ?, None
    169
    
    Rsparam, Param: 600.0000 - 1600.0000, *, ?, None
    171
- Error Byte Definitions
  173
Chapter 7 Rga Tuning

177
- Introduction
  178
- Tuning Options
  179
- Peak Tuning Procedure
  180
  - Introduction
    180
  - General Procedure
    181
  - Peak Position Tuning Algorithms
    182
  - Peak Width Tuning Algorithms
    184
  - Temperature Effects on the Mass Scale Calibration
    185
- Sensitivity Tuning Procedure
  187
- Electron Multiplier Tuning Procedure
  190
Chapter 8 Rga Maintenance

191
- Warnings
  193
- Probe Bakeout
  195
  - Procedure
    196
- Ionizer Degas
  197
- Ionizer Replacement
  198
  - Equipment
    198
  - Procedure
    198
- Filament Replacement
  201
  - Handling and Care of the Filament
    201
  - Equipment
    201
  - Procedure
    201
- CDEM Handling and Care
  204
  - Handling and Mounting
    204
  - Operating Pressure
    204
  - Operating Temperature
    204
  - Bakeout Temperature
    204
  - Operating Voltage
    204
  - Initial Pump-Down
    204
  - Contamination
    204
  - Storage
    205
- CDEM Pre-Conditioning
  206
- CDEM Refreshment
  207
  - Materials
    207
  - Procedure
    207
- CDEM Replacement
  208
  - Equipment
    208
  - Procedure
    208
- Quadrupole Filter Cleaning
  211
  - Equipment
    211
  - Procedure
    212
- SRS Probe Refurbishing Service
  215
Chapter 9 Rga Troubleshooting

217
- Warnings
  218
- Internal Error Detection in the SRS RGA
  219
- Basic Troubleshooting
  221
- Built-In Hardware Checks
  226
  - 24V DC Power Supply
    226
  - Electrometer
    226
  - Quadrupole Mass Filter RF P/S
    227
  - Filament&#X92;'S Background Protection Mode
    228
Chapter 10 Rga Circuit Description

229
- Overview of the RGA
  231
- Circuit Description
  232
  - General Description
    232
  - Circuit Boards
    233
- Description of Schematics
  234
  - Microprocessor
    234
  - Digital I/O Ports
    234
  - The LED Port
    235
  - The MPX Port
    235
  - The MISC Port
    235
  - Clocks
    235
  - RS232 Interface
    236
  - Schematic Name: QMSE_T2
    236
    
    I/V Calibration
    236
    
    A/D Conversion
    236
    
    Power-Up Conditioning
    237
    
    DC Control Voltages
    237
    
    RF Amplitude Detection
    237
    
    RF Amplitude Control
    238
    
    Foldback Current Limiting
    238
  - Schematic Name: QMSE_B1
    239
    
    Mass Filter RF Supply
    239
    
    DC Potentials
    240
  - Schematic Name: QMSE_B2
    240
    
    Filament Heater Supply
    240
    
    Bias Regulators
    241
  - Schematic Name: QMSE_B3
    242
    
    Power Supplies
    242
  - Schematic Name: QMSE_V1
    242
    
    Signal Conditioning
    242
  - Schematic Name: QMSE_V2
    243
    
    Electron Multiplier High Voltage Power Supply
    243
- Chapter 11 RGA Probe Assembly
  245
- Feedthru Flange Connectors Schematic
  245
- O100MAX Maximum Insertion Nipple Drawing
  245
  - Leak Testing
    258
- RGA Probe Assembly Schematic
  245
Appendix C Do I Need a Ppm100 Partial Pressure Monitor for My Srs Rga?

269
- Introduction
  270
- What Is the PPM100 Controller
  271
- How Does the PPM100 Interface to the SRS RGA
  272
- Leak Test Analysis
  273
- Partial Pressure Monitor and Control
  273
- What Does the PPM100 Controller Do
  273
- Mass Spec Display
  274
- Analog I/O Ports
  275
- RGA Control
  275
- Capacitance Manometer Readings (CM1-4)
  276
- Data Logging (Charts and Tables)
  276
- Computer Interfaces (RS-232, GPIB and USB)
  278
- Vacuum Process Control
  278
- Internet Access
  279
- Who Should Consider the PPM100
  281
- Do I Still Need RGA Windows
  284
- PPM100 Specifications
  285
Vacuum References

320
- Residual Gas Analysis
  321
- Vacuum Technology Books
  321
- High Pressure Sampling / D
  328
- Quantitative Measurements with
  328
- Vacuum System Contamination
  334
- Vacuum Pumps
  337
- Pirani/Thermocouple Gauges
  345
- Rotor Gauge
  345
- Esorption
  347
- Publications
  349

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