SPI Supplies plasma prep III Manuals

SPI Supplies plasma prep III Manuals

Manuals and User Guides for SPI Supplies plasma prep III. We have 1 SPI Supplies plasma prep III manual available for free PDF download: Operation Manual

SPI Supplies plasma prep III Operation Manual

SPI Supplies plasma prep III Operation Manual (29 pages)

plasma cleaner

Brand: SPI Supplies | Category: Analytical Instruments | Size: 0 MB

Table of Contents

Section1 - Contents

4
- Manual Layout
  4
- Table of Contents
  5
- Section Contents
  5
- Illustrations
  6
Section 2 - Health and Safety

7
Section 3 - Introduction

11
- Return of Goods
  11
- Returns Procedure
  11
- Version 1.0
  11
Section 4 - Description

12
- Overview
  12
- Typical Plasma Process
  12
- Technical Specifications
  13
- Equipment Controls and Indicators
  14
- Front Panel
  14
- Rear Panel
  15
- Equipment Description
  16
- RF Generator
  16
- Vacuum System
  16
- Gas Supply System
  16
- Reaction Chamber
  16
Section 5 - Installation

16
- Site Requirements
  16
- Assembly
  17
- Installing the Outer Chamber
  17
- Engaging the TEM Specimen Stage Adapter
  18
- Vacuum Pump Installation
  18
- Connecting the Process Gas
  19
Section 6 - Operation

20
- Overview
  20
- Initial Pump down and Operation
  20
- Loading Samples
  20
- Shut down Procedure
  21
- Connecting the Plasma Prep III Process Controller
  22
Section 7 - Maintenance

23
- Overview
  23
- O-Ring Maintenance
  23
- Cleaning
  23
- Vacuum System Adjustments
  24
- Replacement Parts
  25
Section 8 - Replacement Parts

25
Section 9 - Technical Diagrams

26

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