Seiko Seiki STPH803C Manuals

Manuals and User Guides for Seiko Seiki STPH803C. We have 1 Seiko Seiki STPH803C manual available for free PDF download: Instruction Manual

Seiko Seiki STPH803C Instruction Manual (125 pages)

Turbomolecular Pump System

Brand: Seiko | Category: Water Pump | Size: 1.8 MB

Applied Standards
9
Precautions
9
Request
9
Limited Warranty
10
Table of Contents
12
Precautions for Safe Operation of the STP Pump
17
Usable Gases
17
Maintenance and Inspection Precautions
17
Labels
18
Operation Principle of the STP Pump
22
Figure 2.1 Cross Sectional View of the STP Pump
23
Unpacking
24
Unpacking the STP Pump and the STP Control Unit
24
Accessories
25
Table 3.1 Accessories
25
Figure 3.1 Example of Lifting the STP Pump
25
Installation of the STP Pump
26
Name and Function of each Part
26
Figure 4.1 Configuration of the STP Pump
27
Precautions before Installation
28
Operating Environment
28
Installation Area
29
Bench
29
How to Install the STP Pump
31
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
31
Cleaning the Seal
32
STP Pump Installation Positions
33
Figure 4.3 STP Pump Installation Positions
33
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
33
How to Secure the STP Pump
34
Table 4.1 Tightening Torque of Bolt
34
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
35
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
35
Table 4.3 Number of Claw Clamps by Size of Flange
36
Figure 4.6 Shape of Reduced Diameter Shank Bolts
36
Figure 4.7 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
37
Figure 4.8 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
37
Vacuum Piping
38
Connecting the Purge Port
40
Figure 4.9 Connecting the Purge Port
40
Gas Pumping, Cooling and Baking the STP Pump
41
Gas Pumping
41
How to Introduce a Purge Gas
41
Cooling the STP Pump
42
Water Cooling Method
42
Baking the STP Pump
43
Attaching a Baking Heater
43
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
44
Installation of the STP Control Unit
45
Name and Function of each Part
45
Front Panel
45
Figure 6.1 STP Control Unit Front Panel
47
Rear Panel
48
Figure 6.2 STP Control Unit Rear Panel
48
Precautions before Installation
49
Operating Environment
49
Insulation Test
49
Installation Area
50
Figure 6.3 Peripheral Space of the STP Control Unit
50
Attaching the STP Control Unit to a Rack
51
Figure 6.4 Example of Securing the STP Control Unit
51
Cable Connection
52
Name and Dimensions of each Cable
52
Figure 6.5 External Dimensions of each Cable
52
Figure 6.6 External Dimensions of each Cable
53
How to Connect the Cables
54
Table 6.1 Connecting the Power Cable
55
Connecting to Semiconductor Equipment
56
Connecting to Power
56
Emergency off Circuit (EMO Circuit)
56
How to Start/Stop the STP Pump
57
Before Starting
57
Start Procedures
58
Stop Procedures
58
Manual Operation
59
Powering on
59
Starting the STP Pump
59
Stopping the STP Pump
60
Starting the STP Pump after Stopping
60
Powering off
60
Starting the STP Pump after a Safety Function Operates
60
Remote Operation
61
Powering on
61
Starting/Stopping the STP Pump
61
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
61
Starting the STP Pump after Stopping
62
Powering off
62
Starting the STP Pump after a Safety Function Operates
62
Table 7.2 Reset Operation During Remote Operation (REMOTE X7)
62
Operating the TMS Unit (for Use with the TMS Unit Only)
63
Starting/Stopping
63
Temperature Control
63
Figure 7.1 STP Pump Operation Procedures
64
Remote Input/Output Signal Connector
65
Input Signal Pins
65
Table 8.1 REMOTE X7 Input Signal Pins
66
Figure 8.1 REMOTE X7 Input Signal Pins
67
Output Signal Pins
68
Table 8.2 REMOTE X7 Output Signal Pins
68
Figure 8.2 REMOTE X7 Output Signal Pins
70
Table 8.3 Rated Contacts for Relays CR1 to CR8
71
Adjustment Methods
72
Tuning
72
Tuning Method
72
Each of Data after Tuning
73
Table 9.1 Data List
73
Figure 9.1 Tuning Procedures
74
Confirmation Mode
75
Parameter Set Mode
77
Figure 9.3 Parameter Setting Method
78
Figure 9.4 Remote Mode Setting Method
79
Safety Functions
80
Power Failure
80
Table 10.1 States of Lamps and REMOTE Output Signals at a Power Failure
81
Table 10.2 Operations of the STP Pump after a Power Recovery
81
Abnormal State of Magnetic Bearing
82
Excessive Vibration
82
Motor Driver Overload
82
Overheating Inside the STP Pump
82
Overheating Inside the STP Control Unit
83
Overspeed
83
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
83
Troubleshooting, Maintenance, and Inspection
88
Troubleshooting Immediately after an Abnormality/Error Occurs
88
Troubleshooting Power Failure
88
Troubleshooting Other Abnormality/Error
88
When Error Message Is Displayed on LCD
89
Error Messages
89
Table 11.1 Error Messages
90
Other Abnormalities
95
Abnormalities When Powering on
95
Abnormalities When Performing the STP Pump Start Operation
95
Table 11.2 Troubleshooting after Powering on
95
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
95
Other Abnormalities
96
Table 11.4 Troubleshooting While the STP Pump Is Rotating
96
WARNING" Message Display Function
97
First Damage Limit
97
Second Damage Limit
98
ERROR RECORD" Message Display Function
98
Maintenance and Inspection
99
Cleaning and Decontamination
100
Table 11.5 Cleaning and Decontamination
100
Inspecting the Deposit
101
Overhaul
102
Transporting for Repair or Overhaul
103
Storage and Disposal
104
Storage of the STP Pump
104
Storage of the STP Control Unit
104
Disposal
105
Specifications
106
Specifications for the STP Pump
106
Table 13.1 Specifications for the STP Pump
106
Figure 13.1 External Appearance of the STP Pump (STP-H803 Series)
107
Figure 13.2 External Appearance of the STP Pump (STP-H1303 Series)
108
Specifications for the STP Control Unit
110
Table 13.2 Specifications for the STP Control Unit
110
Unit Conversion Table
114

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