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ATH 500 MT
Pfeiffer Vacuum ATH 500 MT Manuals
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1
Pfeiffer Vacuum ATH 500 MT manual available for free PDF download: Operating Instructions Manual
Pfeiffer Vacuum ATH 500 MT Operating Instructions Manual (78 pages)
Magnetically levitated turbopump
Brand:
Pfeiffer Vacuum
| Category:
Water Pump
| Size: 7 MB
Table of Contents
Table of Contents
3
1 About this Manual
8
Validity
8
Applicable Documents
8
Products Concerned
8
Target Group
9
Conventions
9
Instructions in the Text
9
Pictographs
9
Labels
9
Abbreviations
10
Trademark Proof
10
2 Safety
11
General Safety Information
11
Safety Instructions
11
Safety Instructions Relating to Flammable/Pyrophoric Materials
13
Precautions
14
Intended Use
15
Misuse
15
3 Transportation and Storage
16
Receipt of the Product
16
Handling the Pump
16
Storage
17
4 Product Description
18
Product Identification
18
Scope of Delivery
18
Product Applications
18
Human/Machine Interface
19
Fig. 1: Description of an M Version ATH 500 Pump
19
Fig. 2: Description of an MT Version ATH 500 Pump
19
Electronic Drive Unit
20
Fig. 3: Example of Integrated Electronic Drive Unit
20
5 Installation
22
Equipment Installation Conditions
22
Installation Specifications
22
Fig. 4: Mechanical Connection of the Pump to the Equipment
22
Tbl. 1: Loads Exerted on the Equipment
23
Fig. 5: Graph of the Loads Exerted on the Equipment
23
Securing the Equipment and the Frame
24
Positioning the Pump
24
Tbl. 2: Securing the High Vacuum Flange (Inlet Flange)
24
Fig. 6: Operating Positions
25
Fig. 7: Installating the Pump Horizontally
25
Connecting to the Pumping Line
26
Fig. 8: Installing the Pump Inlet Facing up
26
Pump Exhaust Connection
27
Pump Inlet Connection
27
Connecting the Water Circuit
28
Procedure for Assembly Connectors
28
Connecting the Pump to the Water Circuit
29
Installation of the Air Cooling Accessory
30
Fig. 9: Assembly of the Air Cooling Accessory
30
Nitrogen Circuit Connection
31
Inert Gas Purge
31
Installation of the Purge Accessory
32
Fig. 10: Purge Flow Diagram
32
Fig. 11: Purge Set
32
Connection of the Air Inlet Solenoid Valve
33
Check that the Installation Is Leaktight
34
Electrical Connection
34
Customer Electrical Installation Protection
35
Connection to External Power Supply
36
Fig. 12: 48 VDC Power Supply Male Connector
36
Fig. 13: Fan Wiring to 48 VDC External Power Supply (Accessory)
36
Fig. 14: Typical Electrical Wiring Diagram
37
6 Operation
38
Preliminary Precautions for Use
38
Starting the Pump
39
Powering on
39
Pumping Start-Up
39
Fig. 15: Pumping Installation Diagram
39
Restarting the Pump after an Emergency Equipment Stop
40
Shutting down the Pump
40
Pumping Shutdown
40
Powering off
41
Prolonged Stoppage
41
Operation Monitoring
41
Tbl. 3: Meaning of LED on the Ehercat Interface
42
Tbl. 4: Meaning of LED on the Remote/Rs232-Rs485/Profibus Interface
42
7 Advanced Settings
43
Pump Temperature Management System
43
Pump Braking
43
8 Interfaces for Control
44
Control Modes
44
Control Via the HHR
44
Powering on
45
DISPLAY Menu
46
SETUP Menu
47
SER NUM Menu
47
Control Via the REMOTE Connector
48
Logic Input Wiring
48
Fig. 16: Remote Connector: Control by Direct Voltage
48
Logic Output Wiring
49
Fig. 17: Remote Connector: Control by Dry Contacts
49
Fig. 18: Remote Connector: Logic Outputs
49
Command Via the RS-232/RS-485 Serial Link
50
Connections
50
Communication Protocol
51
Command List
52
Operation Via Fieldbus
56
9 Maintenance
57
Maintenance Safety Instructions
57
Maintenance Frequency
58
On-Site Maintenance
59
Exchange Procedure by a Replacement Product
59
Disconnecting the Pump from the Installation
59
Draining the Water Circuit
60
Preparing the Pump for Shipping
60
10 Decommissioning
62
Shutting down for Longer Periods
62
Recommissioning
62
Disposal
62
11 Malfunctions
64
Malfunction and Fault Indication
64
Malfunction
64
12 Service Solutions by Pfeiffer Vacuum
67
13 Accessories
69
14 Spare Parts
70
15 Technical Data and Dimensions
71
General
71
Technical Data
71
1Environmental Characteristics
73
2Cooling Water Characteristics
73
3Nitrogen Characteristics
74
4Electrical Characteristics
74
Tbl. 15: Characteristics of the 48 VDC External Power Supply
75
Fig. 19: ATH 500 M Dimensions
75
Fig. 20: Air Cooled ATH 500 M Dimensions
75
Fig. 21: ATH 500 MT Dimensions
76
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