Newport ZVR-PC Manuals

Manuals and User Guides for Newport ZVR-PC. We have 1 Newport ZVR-PC manual available for free PDF download: User Manual

Newport ZVR-PC User Manual

Newport ZVR-PC User Manual (26 pages)

Integrated Vertical and Rotation Stage for Wafer Positioning

Brand: Newport | Category: Valve Positioners | Size: 1 MB

Table of Contents

Warranty
2
Table of Contents
3
EC Declaration of Conformity
5
Definitions and Symbols
6
Warnings
7
Caution
8
1 Introduction

9
2 Description

10
- Design Details
  10
3 Characteristics

11
- Definitions
  11
- Mechanical Specifications
  12
- Load Specification Definitions
  12
- Load Characteristics and Stiffness
  13
- Stage Weights
  13
4 Drives and Motors

13
- Stepper Drive Axes
  13
- DC-Servo Drive Axis
  14
- Sensor Position
  14
- Feedback Signal Position
  15
- Pinouts
  15
- MCAB-3 Cable
  16
5 Connection to Newport Controllers

17
- Warnings on Controllers
  17
- Connection
  18
- Cables
  18
- MSCABLE-3 Cable
  18
6 Connection to Non-Newport Electronics

19
- Connections
  19
8 Dimensions

21
- ZVR-PP Stage
  21
- ZVR-PC Stage
  22
9 Maintenance

23
- Repair
  23
- Calibration
  23
- Service Form
  25

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