Related Manuals for Newport ZVR Series
Summary of Contents for Newport ZVR Series
- Page 1 ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning ’ ANUAL...
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Page 2: Warranty
Integrated Vertical and Rotation Stages for Wafer Positioning Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. -
Page 3: Table Of Contents
4.1 Stepper Drive Axes ...................5 4.2 DC-Servo Drive Axis ..................6 4.3 Sensor Position..................6 4.4 Feedback Signal Position .................7 4.5 Pinouts......................7 4.6 MCAB-3 Cable ....................8 — Connection to Newport Controllers ........9 5.1 Warnings on Controllers ................9 5.2 Connection....................10 5.3 Cables .......................10 5.4 MSCABLE-3 Cable..................10 —... - Page 4 ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning — Dimensions .................13 8.1 ZVR-PP Stage....................13 8.2 ZVR-PC Stage ...................14 — Maintenance ................15 9.1 Maintenance ....................15 9.2 Repair .......................15 9.3 Calibration ....................15 Service Form ......................17 EDH0316En1031 — 11/18...
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Page 5: Ec Declaration Of Conformity
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning EC Declaration of Conformity ZVR Series EU Declaration of Conformity following Annex II-1A of Directive 2006/42/EC on machinery The manufacturer: MICRO-CONTROLE Spectra-Physics, 9, rue du Bois Sauvage 91055 Évry CEDEX, FRANCE Hereby declares that the machinery: Description: "... -
Page 6: Definitions And Symbols
Note indicates additional information that must be considered by the user or operator. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations. -
Page 7: Warnings
Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous. WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. -
Page 8: Caution
When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism. CAUTION Contact your Newport service facility to request cleaning and specification control every year. viii... -
Page 9: Introduction
Integrated Vertical and Rotation Stages for Wafer Positioning Integrated Vertical and Rotation Stages for Wafer Positioning ZVR Series —Introduction This manual provides operating instructions for the ZVR series stages: • ZVR-PC • ZVR-PP (Stepper motor vertical, DC rotation) (Stepper motor vertical and rotation) ZVR stage. -
Page 10: Description
(separated by 120 degrees) along the outer circumference of the stage. Ordinary designs use a single cam, wedge, or screw located at the centre of the stage. Newport’s three point design benefits applications that have slight to extreme unbalanced loading such as wafer probing which can impart vertical forces at locations along the outer edges of the chuck. -
Page 11: Characteristics
Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All Newport motion electronics can compensate for linear errors. The relation between absolute accuracy and on-axis accuracy is as follows:... -
Page 12: Mechanical Specifications
Integrated Vertical and Rotation Stages for Wafer Positioning Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com Mechanical Specifications Theta Rotation Stage Specifications ZVR-PP ZVR-PC Travel Range (°) -
Page 13: Load Characteristics And Stiffness
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning Load Characteristics and Stiffness Cz, Normal center load capacity on bearings 100 N Mz, Nominal torque 1 Nm k α Jz, Max. load inertia 0.050 kg.m Q, Off-center load (N) Q Cz ÷... -
Page 14: Dc-Servo Drive Axis
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning DC-Servo Drive Axis The ZVR-PC rotation axis is equipped with a DC-motor. DC-Motor Performance Specifications and Characteristics Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer (°) (°/s) Voltage (V) -
Page 15: Feedback Signal Position
“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. Pinouts The pinout diagrams for the ZVR stages SUB-D15M connectors are shown below. -
Page 16: Mcab-3 Cable
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning MCAB-3 Cable Two 3-meter MCAB-3 cables are supplied with each ZVR stage (see section 5.3: ”Cables”). SUB-D25M SUB-D25F CONNECTOR CONNECTOR (0.6 MM ) WHITE 1 (AWG20) WHITE 1 (0.6 MM... -
Page 17: Connection To Newport Controllers
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions. -
Page 18: Connection
(ground continuity provided by the cable). For applications where the standard 3-meter cable (MSCABLE-3) included with your stage is not adequate, Newport offers a 10-m longer length cable (MSCABLE-10) designed to ensure the integrity of your positioning application. -
Page 19: Connection To Non-Newport Electronics
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning —Connection to Non-Newport Electronics Connections WARNING Newport is not responsible for malfunction or damage of ZVR stages when used with non-Newport controllers. WARNING “ ” Newport guarantees compliance of ZVR stages only if used with Newport cables and controllers. - Page 20 ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning —Disabling Limit Switches of the Rotation Axis The rotation stage of the ZVR is equipped with optical limit switches set to ±165°. These limit switches can be disabled for continuous 360° rotation.
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Page 21: Dimensions
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning —Dimensions ZVR-PP Stage 6.26 6 HOLES M6 THD 2 SUB-D15M CONNECTORS (159) AT 60° ON ø2.36 (60) ø7.32 (186) 3 ADJUSTMENT SCREWS M4 TO ADJUST TOP PLATE 6.30 (160) 5.91 ø1.97... -
Page 22: Zvr-Pc Stage
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning ZVR-PC Stage 6 HOLES M6 THD 6.26 2 SUB-D15M CONNECTORS AT 60° ON ø2.36 (60) (159) ø7.32 (186) 3 ADJUSTMENT SCREWS M4 TO ADJUST TOP PLATE 6.30 (160) 5.91 ø1.97 7.32... -
Page 23: Maintenance
CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty. Calibration CAUTION It is recommended to return your ZVR stage to Newport once a year for recalibration to its original specifications. EDH0316En1031 — 11/18... - Page 24 ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning EDH0316En1031 — 11/18...
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Page 25: Service Form
Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0316En1031 —... - Page 26 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com...
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