MKS Newport IMS-LM-S Series Manuals

Manuals and User Guides for MKS Newport IMS-LM-S Series. We have 1 MKS Newport IMS-LM-S Series manual available for free PDF download: User Manual

MKS Newport IMS-LM-S Series User Manual

MKS Newport IMS-LM-S Series User Manual (30 pages)

High-Performance Long-Travel Linear Motor Stages

Brand: MKS | Category: Engine | Size: 1 MB

Table of Contents

Warranty
2
Table of Contents
3
EC Declaration of Conformity
5
Definitions and Symbols
6
Warnings
7
Caution
9
1 Introduction

11
2 Description

12
- Design Details
  12
3 Characteristics

13
- Definitions
  13
- Mechanical Specifications
  14
- Hard Stop: Speed Limitation Versus Load
  15
- Load Characteristics and Stiffness
  15
- Stage Weights
  15
4 Drive and Motor

16
- Motor Characteristics
  16
- Command Signals
  16
- Sensor Positions
  17
- Position Feedback Signals
  17
- Pinouts
  18
- Cables
  19
5 Stage Installation

20
- Unpacking
  20
- Mounting Conditions
  20
6 Connection to Newport Controllers

21
- Operating with Newport Controllers/Drives
  21
- Warnings on Controllers
  21
- Connection
  22
- Wiring
  22
7 Connection to Non-Newport Controllers

23
- Connections
  23
8 Dimensions

24
- M-)IMS-LM-S Stages
  24
- Top Plate Interfaces
  25
  - IMS-LM-S Stages Top Plate Interface
    25
  - M-IMS-LM-S Stages Top Plate Interface
    25
- Cable Chains
  26
9 Maintenance

27
- Repair
  27
- Calibration
  27
- Edh0398En1011
  28
- Service Form
  29

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