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Summary of Contents for MKS Newport IMS-LM-S Series
- Page 1 IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages ’ ANUAL...
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Page 2: Warranty
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. -
Page 3: Table Of Contents
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Table of Contents Warranty .........................ii EC Declaration of Conformity................v Definitions and Symbols..................vi Warnings .......................vii Caution ........................ix — Introduction .................1 — Description ...................2 2.1 Design Details ....................2 — Characteristics ................3 3.1 Definitions ....................3 3.2 Mechanical Specifications ...............4 3.3 Hard Stop: Speed Limitation Versus Load ..........5 3.4 Load Characteristics and Stiffness ............5 3.5 Stage Weights ....................5... - Page 4 IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages — Connection to Non-Newport Controllers ....13 7.1 Connections .....................13 — Dimensions .................14 8.1 (M-)IMS-LM-S Stages ................14 8.2 Top Plate Interfaces................15 IMS-LM-S Stages Top Plate Interface.............15 M-IMS-LM-S Stages Top Plate Interface ..........15 8.3 Cable Chains ....................16 —...
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Page 5: Ec Declaration Of Conformity
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages EC Declaration of Conformity IMS-LM-S Series EU Declaration of Conformity following Annex II-1A of Directive 2006/42/EC on machinery The manufacturer: MICRO-CONTROLE Spectra-Physics, 9, rue du bois sauvage F-91055 Evry FRANCE Hereby declares that the machinery: Description: "... -
Page 6: Definitions And Symbols
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document. -
Page 7: Warnings
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages WARNING When the IMS-LM-S stage is installed or combined with other instruments in a machine, additional testing to directive 2006/42/EC may be required. It is the responsibility of the end-user or integrator to perform a risk-analysis and the necessary tests to conform to the EC directives. - Page 8 IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages WARNING Do not insert or drop objects into this stage, this may cause an electric shock, or lock the drive. Do not use this stage if any foreign objects have entered the stage. Switch off the motor power and then disconnect the electronics power supply.
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Page 9: Caution
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Caution CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment. CAUTION Do not place this stage in a location affected by dust, oil fumes, steam or high humidity. - Page 10 IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages EDH0398En1011 — 09/18...
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Page 11: Introduction
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages High-Performance Long-Travel Linear Motor Stages IMS-LM-S Series —Introduction This manual provides operating instructions for the IMS-LM-S stage that you have purchased. Inside this manual you will find useful information and technical references. It is recommended the user download all support documentation from the IMS-LM-S page of the Newport website to have as reference. -
Page 12: Description
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Description The IMS-LM-S series of linear motor stages are designed for self-supporting applications with travel ranges from 300 mm to 1200 mm. The stages feature a robust design with high performance at low cost, making them cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, pick and place, DNA sequencing, or laser machining. -
Page 13: Characteristics
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Characteristics Definitions Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”. This standard gives the definition of position uncertainty which depends on the 3 following parameters: Absolute Accuracy Difference between ideal position and real position. -
Page 14: Mechanical Specifications
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Mechanical Specifications Travel Range (mm) IMS-LM-S IMS-LM-SA-S Travel Range (mm) 300, 400, 500, 600, 800, 1000 and 1200 800, 1000 and 1200 Minimum Incremental Motion (nm) Bidirectional Repeatability, 300 & 400-: ±0.08 (±0.25) –... -
Page 15: Hard Stop: Speed Limitation Versus Load
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Hard Stop: Speed Limitation Versus Load IMS-LM-S stage uses electrical end-of-run and elastomer hard stops to stop the carriage as smoothly as possible past the end-of-runs. The overtravel allowed by the hard stops is 8 mm. When the stage is used with Newport controllers, the factory settings of the "software limits"... -
Page 16: Drive And Motor
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Drive and Motor Motor characteristics IMS-LM-S stages are equipped with a 3-phase synchronous ironcore linear motor and a linear steel scale. Magnet Pitch (Commutation period) 24 mm Motor constant 180 N Force sensitivity 38.9 N/Arms Back-emf constant 31.7 V/m/s... -
Page 17: Sensor Positions
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Sensor Positions Direction + X Values – Hard – End-of-Run Mech. Home + End-of-Run + Hard (mm) Limit Limit Zero Position Limit Limit IMS300LM-S 126.5 ±0.5 ±0.25 279.5 ±0.25 ±0.5 732.5 IMS400LM-S 126.5 ±0.5 ±0.25 329.5... -
Page 18: Pinouts
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Pinouts The pinout diagrams for IMS-LM-S stage connectors are shown below. 4.5.1 Motor Connector (P1) SUB-D9M Phase L Motor Phase L Motor Phase M Motor Phase M Motor Thermistor 1 Phase N Motor Phase N Motor Ground Thermistor 2... -
Page 19: End-Of-Runs & Thermistor Connector (P3)
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages 4.5.3 End-of-Runs & Thermistor Connector (P3) SUB-D9F + End-of-Run – End-of-Run Mechanical Zero N.C. +5 V Thermistor 1 Ground Thermistor 2 Ground Cables The IMS-LM-S stages are supplied without cables. The appropriate cable kit must be ordered separately, in accordance with the XPS controller configuration used. -
Page 20: Stage Installation
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Stage Installation Unpacking The IMS-LM-S stage will be delivered to your site in packaging designed for safe transport. Attached to the body of the stage are handles for safe removal from packaging. It is recommended to carefully lift the stage from packaging using these handles. -
Page 21: Connection To Newport Controllers
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Connection to Newport Controllers NOTE Visit www.newport.com for compatible Newport controllers. Operating with Newport Controllers/Drives Newport provides detailed documentation for connecting and configuring IMS-LM-S stages with compatible Newport controllers/drives. Newport controllers proprietary plug-and-play ESP technology will automatically load configuration parameters for the stage based on best factory settings in a no load condition. -
Page 22: Connection
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized. Contact your electrician to check your receptacles. WARNING This product is equipped with a 3-wire grounding type plug. Any interruption of the grounding connection can create an electric shock hazard. -
Page 23: Connection To Non-Newport Controllers
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Connection to Non-Newport Controllers Connections WARNING Newport is not responsible for malfunction or damage of IMS-LM-S stages when used with non-Newport controllers. WARNING “ ” Newport guarantees compliance of IMS-LM-S stages only if used with the appropriate Newport cable kit and a XPS series controller. -
Page 24: Dimensions
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Dimensions (M-)IMS-LM-S Stages MODEL SHOWN: IMS300LM-S 7.09 (180) DIMENSIONS IN INCHES (AND MILLIMETERS) SIDE VIEW 7.05 IMS300LM-S TO IMS600LM-S (179) 3.54 (90) 1.10 (28) (21) (21) 5.91 (150) 5.91 (150) 5.91 (150) SIDE VIEW IMS800LM(-SA)-S TO IMS1200LM(-SA)-S 2 HOLES CLR FOR M6 SCREW... -
Page 25: Top Plate Interfaces
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Top Plate Interfaces 8.2.1 IMS-LM-S Stages Top Plate Interface MODEL SHOWN: IMS-LM INTERFACE 8 HOLES M4 THD, 5 HOLES M5 THD / ø5.39 (137), DEPTH: .47 (12) EQUIDISTANT AT 60°, DIMENSIONS IN INCHES (AND MILLIMETERS) DEPTH: .35 (9) 5.08 5 HOLES M5 THD ON ø6.85 (174),... -
Page 26: Cable Chains
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages Cable Chains NOTE IMSLMC for stages with a travel of 300 to 600 mm IMSLMC2 for stages with a travel of 800 to 1200 mm CARRIAGE FASTENING 2 CHC M4 .31 (8) SCREWS CABLE CHAIN INTERFAC (REVERSIBLE) CABLE CHAIN... -
Page 27: Maintenance
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages —Maintenance RECOMMENDATION Please contact Technical Sales Support team for recommendations on application specific maintenance. Maintenance The IMS-LM-S stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution. -
Page 28: Edh0398En1011
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages EDH0398En1011 — 09/18... -
Page 29: Service Form
Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0398En1011 —... - Page 30 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com e-mail: france@newport.com Technical Support...
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