User Manuals: MeiVac MAK Series Magnetron Sputtering

Manuals and User Guides for MeiVac MAK Series Magnetron Sputtering. We have 1 MeiVac MAK Series Magnetron Sputtering manual available for free PDF download: Owner's Operation And Maintenance Manual

MeiVac MAK Series Owner's Operation And Maintenance Manual

MeiVac MAK Series Owner's Operation And Maintenance Manual (61 pages)

Sputtering Sorces

Brand: MeiVac | Category: Paint Sprayer | Size: 2 MB

Table of Contents

Table of Contents
3
Introducing US, a Division of Meivac, Inc
4
Meivac, Inc. QUALITY ASSURANCE
4
Introducing MAK Sputter Sources
4
Magnetron Sputtering
5
RF Sputtering
7
Operation of the MAK
8
- Vacuum Systems
  8
Installation of Sources
10
Power Hook-Up
12
- DC Connection
  12
- Rf Connection
  12
Target Parameters
14
- Purity
  14
- Surface
  14
- Target Dimensions
  14
- Target Suppliers
  14
- Machinable Materials
  15
- Non-Machinable Materials
  16
Target Mounting
16
Rate Vs. Power
18
Relative Sputtering Rates of 50 Materials
18
Relative Rates of Sputtering Sources Vs Distance
19
Returns & Warranty
20
Appendix A: Mak Technical Specifications
21
Appendix B: Target Suppliers
23

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