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PX-500
March PX-500 Manuals
Manuals and User Guides for March PX-500. We have
1
March PX-500 manual available for free PDF download: User Manual
March PX-500 User Manual (13 pages)
Plasma Asher
Brand:
March
| Category:
Medical Equipment
| Size: 0 MB
Table of Contents
Shelf Configuration
2
For RIE Plasma(Directional)
2
For Direct Plasma
3
For Downstream Plasma
3
Shelves
3
Tool Operation
4
Load the Substrate
4
Programming
4
Standard Setting for Parameters
4
Running the Process
5
Retreving the Substrate
6
Chamber Pressure Vs Gas Flow Rate
7
Actual Flow Rate Vs Flow Setting
8
Ashing Rates for Photomask SC1827 Resist
9
Process Controller Module
10
RF Power Generator
12
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