Leybold vacuum 400081V0021 High Pump Manuals

Manuals and User Guides for Leybold vacuum 400081V0021 High Pump. We have 1 Leybold vacuum 400081V0021 High Pump manual available for free PDF download: Manual

Leybold vacuum 400081V0021 Manual

Leybold vacuum 400081V0021 Manual (84 pages)

Turbomolecular Pump with Magnetic Bearing

Brand: Leybold vacuum | Category: Water Pump | Size: 2 MB

Table of Contents

Table of Contents
2
1 Description

4
- System Overview
  4
- Compatibility with Pumped Media
  5
Contents

6
- Design of the MAG
  6
- Function and Design of the MAG.DRIVE Digital
  6
- Standard Specification
  8
- Technical Data
  10
  - Purge Gas
    13
  - Mag.drivedigital
    13
  - Pump Configuration
    15
- Ordering Data
  15
2 Installation

23
- General Safety Information
  23
- Unpacking - Storing - Transportation
  24
- Operating Environment
  24
- Connecting the MAG to the Vacuum Chamber
  34
- Connecting the Backing Pump
  36
- Connecting the Cooling Water
  39
- Connecting the Purge Gas
  40
- Installing the MAG.DRIVE Digital
  42
- Power Supply Connection X19
  42
- Pump Connection
  42
- Control Plug X14
  43
- Interface Connector
  45
3 Operation

48
4 Plug-In Control

52
- Operation with Plug-In Control
  52
- Operating Statuses
  54
- Operating Menu
  56
- Basic Menu
  56
- Menu System Info
  57
- Menu Failure Storage
  58
- Menu Set Converter
  59
- Menu Set Pump
  61
- Menu Set TMS
  61
- Menu Set Purge / Vent
  61
- Total View of the Menu
  62
- Temperature Management System
  64
- Power Control System (PCS)
  65
5 Maintenance

66
- Cleaning
  66
- Changing the Rotor
  66
- Changing the Touch down Bearings
  66
- Cleaning the Frequency Converter Internally
  66
- Removing the Pump from the System
  66
- Service at Leybold's
  68
  - Troubleshooting
    70
- Warning Messages
  70
- Failure Messages
  72
- Malfunctions
  77

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