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TURBOVAC 361 C
User Manuals: LEYBOLD TURBOVAC 361 C Pump
Manuals and User Guides for LEYBOLD TURBOVAC 361 C Pump. We have
2
LEYBOLD TURBOVAC 361 C Pump manuals available for free PDF download: Operating Instructions Manual
LEYBOLD TURBOVAC 361 C Operating Instructions Manual (44 pages)
Turbomolecular pumps with external frequency converter
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 2 MB
Table of Contents
Table of Contents
2
Important Safety Information
5
Mechanical Hazards
5
Electrical Hazards
6
Hazards Caused by Materials and Substances
7
Thermal Hazards
7
Danger of Ignition
8
Dangers in Connection with Safety-Related Measures and Precautions
8
Risk of Damaging the Pump
8
1 Description
9
Design
9
Standard Equipment
9
Ordering Data
13
Accessories
13
2 Transport and Storing
15
3 Installation
16
Conforming Utilization
16
3.1.1 Non-Conforming Utilization
16
Operating Environment
18
Fitting Accessories
18
Attach the Pump to the Vacuum Chamber
19
Forevacuum Connection
25
Connect the Cooling
26
Connecting the Purge Gas and Venting Device
29
Connecting the Frequency Converter
30
4 Operation
32
Media Compatibility / Purge Gas
32
Start-Up
32
Switching on
33
Shutting down
34
Venting
35
Bakeout
36
Removing the Pump from the System
36
5 Maintenance
37
Cleaning
37
Leybold Service
37
6 Troubleshooting
38
7 Waste Disposal
40
EU Declaration of Conformity
41
EC Declaration of Incorporation
42
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LEYBOLD TURBOVAC 361 C Operating Instructions Manual (22 pages)
TURBOVAC SERIES Turbomolecular pumps with grease-lubricated bearings
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 0 MB
Table of Contents
Operating Instructions
1
1 Description
2
Table of Contents
2
Compatibility with Pumped Media
2
Order Data
3
Standard Equipment
3
Technical Data
4
2 Connections
8
Connecting the Pump to the Vacuum Chamber
9
Operating Environment
9
Connecting the Cooling
12
Connecting the Purge Gas and Airing Device
12
Making the Forevacuum Connection
12
Connecting the TURBOTRONIK
13
Bakeout
14
3 Operation
14
Switching on
14
Switching off
15
Venting
15
Removing the Pump from the System
16
Cleaning
17
4 Maintenance
17
Service by LEYBOLD
17
5 Troubleshooting
18
EC Manufacturer's Declaration
19
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