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TURBOVAC 1100 C
User Manuals: LEYBOLD TURBOVAC 1100 C Pump
Manuals and User Guides for LEYBOLD TURBOVAC 1100 C Pump. We have
2
LEYBOLD TURBOVAC 1100 C Pump manuals available for free PDF download: Operating Instructions Manual
LEYBOLD TURBOVAC 1100 C Operating Instructions Manual (44 pages)
Turbomolecular pumps with external frequency converter
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 2 MB
Table of Contents
Table of Contents
2
Important Safety Information
5
Mechanical Hazards
5
Electrical Hazards
6
Hazards Caused by Materials and Substances
7
Thermal Hazards
7
Danger of Ignition
8
Dangers in Connection with Safety-Related Measures and Precautions
8
Risk of Damaging the Pump
8
1 Description
9
Design
9
Standard Equipment
9
Ordering Data
13
Accessories
13
2 Transport and Storing
15
3 Installation
16
Conforming Utilization
16
3.1.1 Non-Conforming Utilization
16
Operating Environment
18
Fitting Accessories
18
Attach the Pump to the Vacuum Chamber
19
Forevacuum Connection
25
Connect the Cooling
26
Connecting the Purge Gas and Venting Device
29
Connecting the Frequency Converter
30
4 Operation
32
Media Compatibility / Purge Gas
32
Start-Up
32
Switching on
33
Shutting down
34
Venting
35
Bakeout
36
Removing the Pump from the System
36
5 Maintenance
37
Cleaning
37
Leybold Service
37
6 Troubleshooting
38
7 Waste Disposal
40
EU Declaration of Conformity
41
EC Declaration of Incorporation
42
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LEYBOLD TURBOVAC 1100 C Operating Instructions Manual (28 pages)
Turbomolecular pump with grease-lubricated bearings
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 0 MB
Table of Contents
Deutsch
2
1 Beschreibung
2
Table of Contents
2
Bestelldaten
3
Lieferumfang
3
Technische Daten
3
2 Anschluss
4
Pumpe an den Vakuumbehälter Anbauen
5
Umweltbedingungen
5
Vorvakuum-Anschluss
6
Kühlung Anschließen
7
Sperrgas und Belüftung Anschließen
7
Rotorlager-Überwachung Anschließen
8
TURBOTRONIK Anschließen
8
3 Betrieb
9
Einschalten
9
Abschalten
10
Belüften
10
Pumpe aus der Anlage Ausbauen
10
Service bei Leybold
11
4 Wartung
11
5 Fehlersuche
12
EG-Herstellererklärung
13
English
14
1 Description
14
Order Data
15
Standard Equipment
15
Technical Data
15
2 Connections
16
Connecting the Pump to the Vacuum Chamber
17
Operating Environment
17
Making the Forevacuum Connection
18
Connecting the Cooling
19
Connecting the Purge Gas and the Airing Device
19
Connecting the Rotor Bearing Monitoring Unit
20
Connecting the TURBOTRONIK
20
3 Operation
21
Switching on
21
Switching off
22
Venting
22
4 Maintenance
23
Removing the Pump from the System
23
Service by Leybold
23
5 Troubleshooting
24
EC Manufacturer's Declaration
25
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