LEYBOLD COMBIVAC CM 52 Manuals

Manuals and User Guides for LEYBOLD COMBIVAC CM 52. We have 1 LEYBOLD COMBIVAC CM 52 manual available for free PDF download: Instruction Manual

LEYBOLD COMBIVAC CM 52 Instruction Manual (60 pages)

Vacuum Gauge Controller

Brand: LEYBOLD | Category: Controller | Size: 1 MB

Table of Contents
3
Table of Figures
7
Table of Tables
7
Description
8
Validity
8
Part Number
8
Nameplate
8
Conforming Utilisation
8
Responsibility and Warranty
9
Shipping Damage
9
Safety
10
General Information
10
Key to the Symbols
10
Basic Safety Information
10
General Equipment Description
11
Combivac CM
11
THERMOVAC (Pirani) Method of Measurement
11
Principle of Measurement for IONIVAC (Extractor or Bayard-Alpert)
11
Connectable Gauge Heads
12
Gauge Head Cables
12
Accessories
12
Technical Data
13
General Data
13
Mechanical Data
13
Standard Parameters (Factory Defaults)
14
Sensor-Dependent Parameters
14
4.1.2.2 General Parameters
14
Environment
14
Standards
15
Mains Connection
15
Measurement Channels
15
TM Measurement Channels
15
IONIVAC Measurement Channel
16
Measurement
16
Switching Functions / Relay Outputs
16
Switching Function Relay
16
Ready Signal Relay
16
Outputs and Inputs
17
Analog Output
17
External Control
17
Serial Interfaces
17
4.5.3.1 Rs232
17
4.5.3.2 Rs485
17
Profibus-DP
17
Installation
18
Supplied Equipment
18
Mechanical Installation
18
Rack Installation
19
Front Panel Installation
19
Benchtop Instrument
20
Connections
21
Rear Side of the Instrument
21
Mains Connection
21
Erdung
22
THERMOVAC Measurement Channels (TM 1 and TM 2)
22
IONIVAC Measurement Channel (IONIVAC)
22
Analog Output and External Control (Analog Output / Extern Control)
23
RS232 / RS485 Interface (Interface RS232 / RS485)
24
Profibus-DP Interface (Interface Profibus-DP)
24
Relay Output (Relay Output)
25
Operation
26
Front Panel
26
Display
26
Control Pushbuttons
27
Switching on and off
27
Switching on
27
Switching off
27
Operating Modes
28
Measurement Mode
28
Selection
28
Description
28
Pushbutton Functions
29
Measurement Channel Selection
29
6.4.3.2 Parameter Mode Selection
29
6.4.3.3 Switching the IONIVAC on
29
6.4.3.4 Funktion Degas
30
6.4.3.5 Switching the IONIVAC off
30
THERMOVAC Alignment
31
Parameter Mode
32
Selection
32
Parameter Groups
32
Operating Concept
33
Parameters
34
Switching Function Parameters (para SP)
34
Basic Terms
34
Configuring the Switching Functions
35
Adjustment Range
35
Sensor Parameters (para Sen)
36
Filament Material THERMOVAC (FIL)
36
Measured Value Filter (Filt)
36
Type of Gas Correction THERMOVAC
37
Type of Gas Correction IONIVAC
37
Sensor Switch-On Type (S-On)
38
Sensor Switch-On Value (T-On)
38
Switch-On Delay for Extractor Gauge Head (Delay)
38
Sensor Switch-Off Type (S-Off)
39
Sensor Switch-Off Value (T-Off)
39
Sensitivity Setting for IONIVAC Gauge Head (Sens)
39
General Parameters (para Gen)
40
Unit of Measurement (Unit)
40
Analog Output (Analog)
40
Display Format (Digit)
40
Display Brightness (Bri)
41
Profibus (Pb)
41
Baud Rate (Baud)
41
Interface (Rs)
41
Computer Interface
42
Basics
42
Connection
42
Nomenclature
42
Communication
43
Protocol
43
General String Structure
43
Command Set (Mnemonics)
44
Command Overview
44
RPV (Read Pressure Value)
45
RVN (Read Version Number)
45
RSS (Read Set Point Status)
45
SHV (Set HV On/Off)
46
SDG (Set Degas On/Off)
46
SKL (Set Key Lock On/Off)
46
SAC (Save Actual Configuration)
47
RSA (Read Serial Adress)
47
SSA (Set Serial Adress)
47
RGP (Read General Parameter)
47
SGP (Set General Parameter)
48
RGC (Read Gas Correction)
49
SGC (Set Gas Correction)
49
RSC (Read Sensor Control)
49
SSC (Set Sensor Control)
50
RSP (Read Set Point)
50
SSP (Set Set Point)
51

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