Laurell WS-650 lite Series Spin Coater Manuals

Manuals and User Guides for Laurell WS-650 lite Series Spin Coater. We have 2 Laurell WS-650 lite Series Spin Coater manuals available for free PDF download: Operation Manual, Installation Instructions Manual

Laurell WS-650 lite Series Operation Manual

Laurell WS-650 lite Series Operation Manual (84 pages)

Spin Processor

Brand: Laurell | Category: Computer Hardware | Size: 2.54 MB

Table of Contents

Table of Contents
2
Section 1 - Health, Safety and Environmental
5
Laurell Technologies Environmental, Health and Safety Policy
6
Hazard Warnings
6
Level of Hazard Intensity
7
Hazard Pictograms
8
Hazard Avoidance Text
9
Emergency Shutdown Option (Station Installations Only)
9
Emo (Emergency Machine Off) Procedure
10
Protective Apparel
10
Potential Exposure Hazards
11
Electrical Hazards
11
Static Electricity: Bonding and Grounding
12
Bonding
12
Grounding
12
Moving Parts Hazards
13
Audio Noise Hazards
13
Chemical Hazards and Compatibility
13
Solvents
14
Isopropyl Alcohol
15
Hydrogen Peroxide
15
Sulfuric Acid
16
Hazardous Waste
16
Chemical Disposal
17
Additional Safety Precautions
17
Environmental
18
Materials Safety Data Sheets
18
Mixing Incompatible Chemicals
19
Recommended Abatement Technology
19
Local Restrictions (Example)
19
Equipment Disposal
20
Section 2 - Installation
21
Facility Requirements
21
Facilities
21
Power Requirements
21
Main Circuit Breaker
21
Dimensions
21
Ambient Temperature
21
Chamber Pressure
22
Dispense Liquids
22
Exhaust Requirements
22
Vacuum Pump (Option)
22
Secondary Containment and Spill Prevention Features
22
Installation
23
Spin Processor Connections
23
Compression Fitting Assembly
24
Dimensional Drawings
24
All Information Contained in this Manual Is the Property of Laurell Technologies Corporation® and Is NOT to be Edited, Reproduced or Distributed Without Express Written Permission from a Corporate Officer
24
Drain and Exhaust Connections
25
Indeck Connections
27
Section 3 - Operation Procedures - 650 Controller
29
Power
30
Interlocks
30
Lid Interlock
30
Vacuum Interlock
30
Seal Purge Interlock
32
Exhaust Flow Interlock
32
Keypad
33
Operational Keys
34
The Lcd Display
39
Select Process" Screens
39
Run Mode" Screens
40
RUN MODE" - DISPLAYED FIELDS - See Figure 3-11
41
Run Mode" - Operation
45
Edit Mode" Screens
48
EDIT MODE - DISPLAYED FIELDS - See Figure 3-15
48
Edit Mode" - Operation
50
Info Mode" Screens
53
INFO MODE" - STATISTICS - DISPLAYED FIELDS - See Figures 3-21A & 3-21B
53
INFO MODE" - CONFIGURATION - DISPLAYED FIELDS - See Figures 3-22A-3-22E54
54
INFO MODE" - about - DISPLAYED FIELDS - See Figures 3-23A
57
Programming the 650 Controller
57
Running the 650 Controller
58
Removing/Changing Chucks
59
Screw On" Chuck
59
Press-On" or "Screw Down" Chuck
59
High Performance Drive (Hpd2) Motor - Press-On or Screw down Chuck
61
High Performance Drive Motor (Hpd2)
61
Programming the Hpd2
61
Firmware Version
63
WAFER SIZE Vs. SPIN SPEED
63
Section 4 - Maintenance
65
Revision Date: 7/26/2011
65
Error Messages
66
Vacuum Loss (on Units Equipped with Vacuum Sensor Only.)
69
Removing, Cleaning and Installing the Vacuum Valve
69
Vacuum Chuck Wet Test
72
Cleaning and Replacing the Chuck O-Ring
73
O-Ring Composition, Uses & Recognition
74
O-RING PART LIST for WS-400X - Xxnpp/Tfm-LITE
75
Motor Operation
77
Motor Calibration
78
Replacement Parts
78
Warranty
78
Section 5 - Appendix
79

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Laurell WS-650 lite Series Installation Instructions Manual

Laurell WS-650 lite Series Installation Instructions Manual (24 pages)

SPIN PROCESSOR

Brand: Laurell | Category: Computer Hardware | Size: 2.22 MB

Table of Contents

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