User Manuals: Inficon SQM-160 Rate Thickness Monitor

User Manuals: Inficon SQM-160 Rate Thickness Monitor

Manuals and User Guides for Inficon SQM-160 Rate Thickness Monitor. We have 1 Inficon SQM-160 Rate Thickness Monitor manual available for free PDF download: Operating Manual

Inficon SQM-160 Operating Manual

Inficon SQM-160 Operating Manual (120 pages)

Multi-Film Rate/Thickness Monitor

Brand: Inficon | Category: Measuring Instruments | Size: 3.87 MB

Table of Contents

Table of Contents
9
Introduction
13
Chapter 1 Related Manuals

14
- Instrument Safety
  14
- Definition of Notes, Cautions and Warnings
  14
- General Safety Information
  15
- Earth Ground
  15
  - How to Contact INFICON
    16
- Returning Your SQM-160
  17
  - Specifications
    17
- Measurement
  17
- Film Parameters
  17
- System Parameters
  18
- Digital I/O
  18
- General Specifications
  19
  - Unpacking and Inspection
    20
  - Parts and Options Overview
    20
- Base Configurations
  20
- Accessories
  21
- Sensors
  21
  - Quick Start
    23
Chapter 2

23
- Introduction
  23
- Installation
  23
- Front Panel
  24
- Rear Panel
  25
- System Connections
  26
- Film Setup
  28
- Depositing a Film
  29
  - Operation
    31
Chapter 3

31
- Introduction
  31
- Menu Selection
  31
- Film Menu
  32
- System Menu
  34
- Sensor Selection
  36
- Sensor Frequency
  37
- Sensor Tooling
  38
- Display Units
  39
- Crystal Life
  39
- Zero Thickness
  39
- Shutter Operation
  40
- Dual Sensors
  40
- Rate Sampling
  41
- Time Setpoint
  42
- Thickness Setpoint
  43
- Simulate Mode
  44
- Defaulting the Memory
  44
- Relay Operation
  45
- Analog Output Configuration
  46
- I/O Connections
  46
- Rack Mounting Procedure
  48
  - Comm Software
    49
Chapter 4

49
- Introduction
  49
- Installation
  49
- Main Window
  50
- Data Log Menu
  52
- Films Menu
  54
- System Menu
  56
- Communications Menu
  57
- Graph Options
  58
- Help Menu
  59
  - Communications
    61
Chapter 5 Introduction

61
- RS-232C Serial Port
  61
- USB Port
  61
  - TCP/IP Ethernet Port
    62
- How to Set up the Network Protocol on the PC
  62
- How to Change the IP Address of the SQM-160
  65
  - Comm Software
    65
  - Communications Protocol
    66
  - Commands
    67
  - Command
    67
  - Command: a
    67
  - Command: B
    68
  - Command: C
    68
  - Command: D
    69
  - Command: J
    69
  - Command: L
    69
  - Command: M
    69
  - Command: N
    69
  - Command: O
    69
  - Command: P
    70
  - Command: R
    70
  - Command: S
    70
  - Command: T
    70
  - Command: U
    70
  - Command: W
    71
  - Command: y
    71
  - Command: Z
    71
    
    CRC Examples
    72
    
    Visual Basic® 5/6
    72
    
    Java
    74
    
    Troubleshooting and Maintenance
    77
Chapter 6

77
- Troubleshooting Guide
  77
- Troubleshooting
  78
- Troubleshooting the SQM-160
  78
- Troubleshooting Sensors
  79
- Troubleshooting Computer Communications
  84
  - Replacing the Crystal
    84
  - Front Load
    85
  - Cool Drawer
    86
  - Bakeable Sensor
    88
  - Operating Manual
    89
- Sputtering Sensor
  89
- Crystal Snatcher
  90
  - Crystal Sensor Emulator
    91
    
    Ipn 760-601-G2
    91
- Diagnostic Procedures
  92
- Measurement System Diagnostic Procedure
  92
- Feedthrough or In-Vacuum Cable
  93
  - Diagnostic Procedure
    93
- Sensor Head or Monitor Crystal Diagnostic Procedure
  94
- System Diagnostics Pass but
  95
  - Crystal Fail Message Remains
    95
  - Sensor Cover Connection
    96
- Compatible Sensor Heads
  96
- Incompatible Sensor Heads
  96
  - Emulator Specifications
    97
    
    Calibration Procedures
    99
Chapter 7

99
- Importance of Density, Tooling and Z-Ratio
  99
- Determining Density
  99
- Determining Tooling
  100
- Laboratory Determination of Z-Ratio
  100
  - Measurement and Theory
    103
Chapter 8 Basics

103
- Monitor Crystals
  104
- Period Measurement Technique
  106
- Z-Match Technique
  107
- Active Oscillator
  108
  - Material Table
    111
Appendix A

111
- Introduction
  111
- A.1 Introduction
  111

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