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Inficom SQM-160 Manuals
Manuals and User Guides for Inficom SQM-160. We have
1
Inficom SQM-160 manual available for free PDF download: Operating Manual
Inficom SQM-160 Operating Manual (144 pages)
Multi-film rate/thickness monitor
Brand:
Inficom
| Category:
Measuring Instruments
| Size: 5.44 MB
Table of Contents
Table of Contents
9
Introduction and Specifications
15
Chapter 1 Introduction
15
Related Manuals
16
Instrument Safety
16
Definition of Notes, Cautions, and Warnings
16
General Safety Information
17
Earth Ground
18
How to Contact INFICON
18
Returning SQM-160
19
Specifications
19
Measurement
19
Film Parameters
20
System Parameters
20
Digital I/O
21
General Specifications
21
Unpacking and Inspection
22
Configurations and Accessories
22
Configurations
22
Accessories
23
Oscillator Kits
23
Rack Mounting Options
23
Sensors
24
Installation
25
Chapter 2 Installation Requirements
25
Parts Requirements
25
Ground Requirements
26
Establishing Earth Ground
27
Rack Mounting Procedure
27
Full Rack Extender
27
Inventory
27
Installation
28
Rack Adapter
32
Inventory
32
Installation
32
Rear Panel Interfaces
35
System Connections
36
Sensor Connections
37
I/O Connections
38
Operation
41
Chapter 3
41
Introduction
41
Front Panel Controls
41
Menu Selection
43
Film Menu
44
System Menu
45
Sensor Selection
49
Sensor Frequency
50
Sensor Tooling
51
Display Units
52
Crystal Life
52
Zero Thickness
53
Shutter Operation
53
Dual Sensors
53
Rate Sampling
54
Time Setpoint
55
Thickness Setpoint
56
Simulate Mode
57
Defaulting the Memory
57
Relay Operation
58
Analog Output Configuration
58
Depositing a Film
59
Chapter 4
61
Introduction
61
Installation
61
Update of an Older Version of SQM-160 Comm
62
Start the SQM-160 V2 Comm Software
63
Main Window
64
Menu Bar Functions
65
File Menu
66
Edit Menu
67
View Menu
67
Help Menu
67
Main Window Control Functions
68
Data Log Window
69
Log File Pane
70
Duration Pane
71
Time Range Pane
71
Sampling Interval Pane
71
Films Window
71
System Parameters Window
75
Communications Setup Window
77
Establishing Communications
78
Command Field
80
Configure Graph(S) Window
81
Help Menu
83
Chapter 5 Introduction
85
Serial Port
85
USB Port
86
Ethernet Port
86
How to Set up the Network Protocol on the Computer
86
Accessing Network Settings in Windows XP
87
Accessing Network Settings in Windows 7 and Windows 8
90
How to Change the SQM-160 IP Address
92
Comm Software
93
Command Packet (Host to SQM-160 Message)
93
Communications Protocol
93
SQM-160 Comm Software
93
Response Packet (SQM-160 to Host Message)
94
Calculating the CRC
95
Commands
96
Command
97
Command: a
97
Command: B
99
Command: C
100
Command: D
101
Command: J
101
Command: L
101
Command: M
102
Command: O
102
Command: P
103
Command: R
103
Command: S
103
Command: T
104
Command: U
104
Command: W
104
Command: y
105
Command: Z
105
CRC Examples
106
Visual Basic® 5/6
106
Java
108
Troubleshooting and Maintenance
111
Chapter 6
111
Troubleshooting Guide
111
Maintenance
122
Spare Parts
122
Persistent Crystal Fail Indication
123
Calibration Procedures
125
Chapter 7
125
Importance of Density, Tooling and Z-Ratio
125
Determining Density
125
Determining Tooling
126
Laboratory Determination of Z-Ratio
127
Measurement and Theory
129
Chapter 8 Basics
129
Monitor Crystals
130
Period Measurement Technique
132
Z-Match Technique
134
Material Table
135
Appendix A
135
Introduction
135
A.1 Introduction
135
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