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DH Instruments MOLSTIC-S Manuals
Manuals and User Guides for DH Instruments MOLSTIC-S. We have
2
DH Instruments MOLSTIC-S manuals available for free PDF download: Operation And Maintenance Manual, Installation Sheet
DH Instruments MOLSTIC-S Operation And Maintenance Manual (44 pages)
Engineered Mounting Systems for molbloc-S Mass Flow Elements
Brand:
DH Instruments
| Category:
Racks & Stands
| Size: 1 MB
Table of Contents
Table of Contents
3
1 Introduction
7
Product Overview
7
Specifications
7
General Specifications
7
Component Identification of the Available Molstic-S Configurations
8
Molstic-S, Single 1/4 In., Standard Configuration
8
Figure 1. Molstic-S, Single 1/4 In., Standard Configuration
8
Molstic-S, Single 1/2 In., Standard Configuration
9
Figure 2. Molstic-S, Single 1/2 In., Standard Configuration
9
Molstic-S, Dual 1/4 In., Standard Configuration
10
Figure 3. Molstic-S, Dual 1/4 In., Standard Configuration
10
Molstic-S, Dual 1/2 In., Standard Configuration
11
Figure 4. Molstic-S, Dual 1/2 In., Standard Configuration
11
Molstic-S, Single 1/4 In., with Regulation
12
Figure 5. Molstic-S, Single 1/4 In., with Regulation
12
Molstic-S, Single 1/2 In., with Regulation
13
Figure 6. Molstic-S, Single 1/2 In., with Regulation
13
Molstic-S, Dual 1/4 In., with Regulation
14
Figure 7. Molstic-S, Dual 1/4 In., with Regulation
14
Molstic-S, Dual 1/2 In., with Regulation
15
Figure 8. Molstic-S, Dual 1/2 In., with Regulation
15
Molstic-S, Single 1/4 In., with Low- or MID- Flow Metering Valve
16
Figure 9. Molstic-S, Single 1/4 In., with Low- or MID-Flow Metering Valve
16
Molstic-S, Dual 1/4 In., with Low- or MID- Flow Metering Valve
17
Figure 10. Molstic-S, Dual 1/4 In., with Low- or MID-Flow Metering Valve
17
Molstic-S, Single 1/4 In., with Low- or MID- Flow Metering Valve and Regulation
18
Figure 11. Molstic-S, Single 1/4 In., with Low- or MID-Flow Metering Valve and Regulation
18
Molstic-S, Dual 1/4 In., with Low- or MID- Flow Metering Valve and Regulation
19
Figure 12. Molstic-S, Dual 1/4 In., with Low- or MID-Flow Metering Valve and Regulation
19
1 I N S T a L L a T I O
21
Unpacking and Inspection
21
Removing from Packaging
21
Inspecting Contents
21
Accessories Included with Molstic-Sshipments
21
Table 1. Accessory Kit, 1/4 In. Molstic-S Versions, P/N 401938
21
Table 2. Accessory Kit, 1/2 In. Molstic-S Versions, P/N 401939
21
Site Requirements
22
Initial Setup
22
Preparation for Operation
22
Installation and Swapping of Molbloc-S
22
Replacing Vcr Inlet Flanges on Molbloc-S (as Required)
22
Figure 13. Replacing Molbloc-S Flanges
23
Installation of Molbloc-S Onto Molstic-S
24
Figure 14. Installation of Molbloc-S Onto Molstic-S
24
Figure 15. Molbloc-S VCR Face Seal Connection
25
Molstic-S Interconnections
26
Gas Supply Connections to Molstic-S
26
Molstic-S Use with Dhi Supplied Regulators
27
Figure 16. Molstic-S with Supplied Regulator
27
Figure 17. Molstic-S with Supply Only Platform
27
Molstic-S Use with Regulators Not Supplied by Dhi
28
Inlet Connection - Molstic-S Use with Dut Upstream
28
Figure 18. Molstic-S with DUT Upstream
29
Inlet Connection - Molstic-S Use with Dut Downstream
30
Outlet Connection - Molbloc-S Outlet Connection
30
Connecting, Disconnecting and Mounting Molbloc-Swith Iso-Kf Style Vacuum Flange (Molbloc-S Outlet Fitting)
30
Iso-Kf Style Vacuum Flange Fittings
30
Figure 19. Molbloc-S with ISO-KF Style Flange
30
Making and Breaking Procedure for Molbloc-Siso-Kf Vacuum Flange Connection
31
Molstic-S Use with Dut Upstream
31
Molstic-S Use with Dut Downstream
31
Figure 20. ISO-KF Style Flange
31
Table 3. Molbloc-S Adaptor Kits
32
Figure 21. Molstic-S with DUT Upstream
32
1000 M O L S T I C - S O P E R a T I O
35
System Pressurization and Regulator Adjustment - Pressure Reducing Regulator
35
System Pressurizaion
35
Regulator Maximum Pressure Adjustment
36
Pressure Reducing Regulator Adjustment
36
System Pressurization and Regulator Adjustment - Back Pressure Regulator
36
System Pressurization
37
Back Pressure Regulator Maximum Pressure Adjustment
37
Locking the Back Pressure Regulator Adjustment (Optional)
37
Back Pressure Regulator Operation
37
Leak Check Recommendations
38
Molstic-S Flow Control
38
Dut with Flow Control Capability
38
Dut Without Flow Control Capability
39
Flow Control Using Metering Valves
39
Flow Control Using the Pressure Regulator
39
4 O P T I O N S a N D U P G R a D E
41
Regulator Upgrade to Molstic-S
41
Upgrade of Molstic-S with 1/4 In. Metering Valve
41
Upgrade of Single Molstic-S to Dual Channel
41
Table 4. Metering Valve Use with Molbloc-S
41
Figure 22. Metering Valve
41
1000 M O L S T I C - S M a I N T E N a N C E a N D R E C O M M E N D a T I O N
43
Filter Cleaning
43
Handling
43
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DH Instruments MOLSTIC-S Installation Sheet (2 pages)
molstic-S Supply Only Platform 1/4 in. and 1/2 in.
Brand:
DH Instruments
| Category:
Controller
| Size: 0 MB
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