User Manuals: Denton Vacuum DESK V TSC Film Deposition

Manuals and User Guides for Denton Vacuum DESK V TSC Film Deposition. We have 1 Denton Vacuum DESK V TSC Film Deposition manual available for free PDF download: Operating Manual

Denton Vacuum DESK V TSC Operating Manual

Denton Vacuum DESK V TSC Operating Manual (81 pages)

SPUTTER/ETCH UNIT AND ACCESSORIES

Brand: Denton Vacuum | Category: Laboratory Equipment | Size: 3 MB

Table of Contents

Table of Contents
2
Introduction
5
- General Description
  5
- System Views
  6
  - Front View of Unit
    6
  - Rear View of Unit
    7
- Electrical Requirements
  8
  - Desk V Hp & Desk V Tsc
    8
  - Carbon Rod Accessory and Carbon Yarn Accessory
    9
- Environmental Conditions
  9
- Options
  10
  - Rotation
    10
  - Thickness Monitor
    10
  - Carbon Rod Evaporation
    10
  - Carbon Yarn Evaporation
    10
Safety Warnings
11
- Safety Symbols
  14
Unpacking & Setup
14
- System
  14
  - Emergency Stop Button
    15
Installation Instructions
16
- Voltage Selection
  16
  - Chamber Preparations
    19
Mechanical Pump Installation
20
The Mechanical Pump Installed
20
Target Installation & Replacement
22
Initial Start-Up
23
- Inspection
  23
Start-Up Procedure
24
- Opening the Chamber
  25
Description of Controls
26
- System Start Screen
  26
  - Screens
    27
- Manual Sputter
  28
  - Stand Ard Desk V HP
    28
- Manual Sputter Desk V Tsc
  30
  - Timed Sputter
    32
Desk V TSC
33
Desk V Hp
38
- Timed Etch
  41
- Overview
  43
Operation
45
- Etch
  46
- Sputter
  48
- Timed Etch Operation
  50
- Timed Sputter Operation
  51
- Shut-Down Procedure
  53
- Options
  53
  - Quartz Crystal Monitor
    53
  - Desk V Tsc
    54
  - Carbon Rod Accessory
    55
Carbon Yarn Accessory
58
- Loading the Carbon Yarn
  59
Maintenance
60
- General Maintenance
  60
  - Mechanical Pump
    60
  - Mechanical Pump - Oil Change
    61
  - Sputter Target
    61
Troubleshooting
63
Acuum Performance da T a Sheet
65
Used Target
66
Typical Performance Data
67
- Pump down
  67
- Deposition Rate
  70
Packing Desk V for Return
73
- Packing Photos
  74
Suggested Spares
75
- Consumables for Desk V and Tsc
  75
- Fuses
  76
- Consumables for Carbon Rod Accessory
  77
- Consumables for Carbon Yarn Accessory
  78
- Targets for Desk V and Tsc
  79
- Adjusting the Vacuum Safety Bellows Switch
  80
  - Emergency Stop Button
    81
  - Battery Advisory
    81

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