Denton Vacuum DESK V Operating Manual

Sputter/etch unit and accessories

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DESKV

DESK V - SPUTTER/ETCH UNIT AND ACCESSORIES

Desk V TSC

Desk V

DENTON VACUUM, LLC

1259 N. CHURCH STREET

MOORESTOWN, NJ 08057

PHONE: 856-439-9100

FAX: 856-439-9111

WWW.DENTONVACUUM.COM

Watch the Desk V videos here:

https://www.youtube.com/user/Dentonvacuum

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Page 1 DESK V - SPUTTER/ETCH UNIT AND ACCESSORIES Desk V TSC Desk V Desk V DENTON VACUUM, LLC 1259 N. CHURCH STREET MOORESTOWN, NJ 08057 PHONE: 856-439-9100 FAX: 856-439-9111 WWW.DENTONVACUUM.COM Watch the Desk V videos here: https://www.youtube.com/user/Dentonvacuum Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 2: Table Of Contents
FRONT VIEW OF UNIT ............................... 6 REAR VIEW OF UNIT ..............................7 ELECTRICAL REQUIREMENTS ............................. 8 DESK V HP & DESK V TSC ............................8 CARBON ROD ACCESSORY AND CARBON YARN ACCESSORY ..................9 ENVIRONMENTAL CONDITIONS ..........................9 OPTIONS ................................10 ROTATION ................................
Page 3 ....................26 MANUAL SPUTTER ............................27 St an d ar d Desk V HP ............................27 ..................27 MANUAL SPUTTER DESK V TSC .......................... 29 TIMED SPUTTER ..............................31 Desk V TSC ................................32 Desk V Timed Recipe Programming ........................34 How to Use Timed Recipe Programming ......................
Page 4 TYPICAL PERFORMANCE DA T A ............................. 66 PUMP DOWN ..............................66 DEPOSITION RATE ..............................69 P ACKING DESK V FOR RETURN ............................. 72 PACKING PHOTOS ..............................73 SUGGESTED SP ARES ................................. 74 CONSUMABLES FOR DESK V AND TSC ........................74 FUSES .................................
Page 5: Introduction
INTRODUCTION GENERAL DESCRIPTION The Denton Vacuum DESK V Cold Sputter/Etch Unit is designed to deposit a conductive coating on an SEM sample and to provide some limited surface cleaning in some models. A standard 6” diameter Glass Cylinder with top and bottom seals sits on the aluminum Baseplate.
Page 6: System Views
If this equipment is used in a manner not specified by Denton Vacuum, the protection provided by the equipment may be impaired. A complete understanding of this control system is recommended before operating the vacuum system. SYSTEM VIEWS FRONT VIEW OF UNIT Head Support Front Panel Removal;...
Page 7: Rear View Of Unit
Vent Gas Connection (N2) Fuse 3: AC HVB Board 2 Amps Process Gas Connection (Ar) Fuse 4: PLC Touch Screen 1 Amp NOTE: ALL FUSES MUST OF TIME DELAY OR SLOW BLOW TYPE Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 8: Electrical Requirements
Picture depicts the tilting, rotating omni found in the Desk V. The rubber belt controls the rotation of the specimen stage, while the chain turns the tilting mechanism at a different speed. As the white plastic insert moves around the angled cylinder, it causes the specimen table to tilt.
Page 9: Carbon Rod Accessory And Carbon Yarn Accessory
 Mains supply voltage fluctuations not to exceed +/-10% of the nominal voltage.  Other supply voltage fluctuations as stated by the manufacturer.  Pollution degree 2 in accordance with IEC 664. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 10: Options
CARBON YARN EVAPORATION  Replaces sputter head with low voltage carbon yarn evaporation.  Replaces the 6” x 6” Pyrex cylinder with a 6” x 9” Pyrex cylinder.  Stand-alone power supply. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 11: Safety Warnings
Operating and maintenance manuals have been provided and should be thoroughly understood before any operations are contemplated. Only personnel with proper training and process experience should operate the system. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 14: Safety Symbols
Caution! Two people are required to lift the unit from the shipping carton. The Denton Desk V system is shipped is a heavy-duty cardboard carton. The unit is shipped with oil in the mechanical pump. To unpack the unit, use the following procedure: Open top of carton.
Page 15: Emergency Stop Button
NOTICE: You MUST save all packing material, box, and skid in the event the unit has to be returned for repair. If the unit is returned without the standard packaging materials, Denton Vacuum cannot be responsible for shipping damages. Emergency Stop Button...
Page 16: Installation Instructions
Verify that the incoming power connection is set for the proper voltage!  Place the Desk V in the desired location. All systems are shipped with the fuse block installed for low voltage (100 – 120 VAC) operation. The following instructions are necessary only if the system will be connected to high voltage (200 -240 VAC) supply.
Page 17 (100 -120 VAC) and high voltage (200 – 240 VAC) input supply.  Re-install the fuse block in the proper orientation for high voltage (200 – 240 VAC) supply. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 18  Connect Argon to the Gas inlet  Recommended for clean, inert atmosphere for sputtering.  Some users of the Desk V will be satisfied with system operation using room air as the sputtering gas. If room air is to be used, no connection is required.
Page 19: Chamber Preparations
This is the open position for sputtering. Rotate knob clockwise to spread the segments, and then move the spread shutter back over specimen pedestal. This is the position for etching. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 20: Mechanical Pump Installation
MECHANICAL PUMP INSTALLATION The mechanical pump installed Step #1: Installation of vacuum hose to the pump Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 21 Step #2 - Installation of vacuum hose to the rear of the DESK V 4. . Step #3 - Mist Filter Installation Check oil level in the mechanical pump. If the oil level is ½ full in the sight glass, the pump is ready.
Page 22: Target Installation & Replacement
2. Remove grid screen 3. Remove retaining ring 4. Center target on plate 5. Replace retaining ring 6. Replace grid screen and close sputter head The Desk V is ready for operation. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 23: Initial Start-Up
Check the mechanical pump oil level only after it has been running for a few minutes. This will give the oil a chance to be distributed throughout the pump and will give a more accurate level reading. Turn the mechanical off before checking oil level Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 24: Start-Up Procedure
Select the desired operating screen from the on-screen menu.  Manual or Timed Sputter  Manual or Timed Etch  Overview Operation of the system is described in detail in the Operation section of this manual. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 25: Opening The Chamber
NOTE: The sputter head WILL only Tilt 180 degrees so the target is facing up. Grasp under side of top plate and lift. Tilt it back so that the target faces up. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 26: Description Of Controls
NOTE: This section of the operating manual describes controls for the Standard Desk V as well as the Desk TSC. There are differences between the two. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 27: Screens
(Torr), Etch Set point (mAmps), Process Time (seconds), and Vent after Etch Enabled are programmed from this screen. System parameters are displayed on this screen: Vent after Etch Enabled Indicator and Timed Etch Enabled Indicator. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 28: Manual Sputter
Power Supply is available on this screen.  Inactive buttons are RED. Buttons will switch to GREEN when active.  Safety interlocks are in place to prevent unsafe operation of the sputter power supply. The Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 30: Manual Sputter Desk V Tsc
 This feature will shut down the pumps and safely vent the chamber to atmosphere. The Vent Time Remaining will count down the delay required before venting the chamber to atmosphere. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 31  Turbo @ Speed indicator will display when turbo pump is at full operating speed (if equipped).  The Overview button will return to the Overview screen.  The Screens button will return to the Screens menu. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 32: Timed Sputter
 Process Time allows for adjustment of the Process Timer set point of the Sputter Power supply. A pop-up data entry screen is available by pressing the Process Time data box. The current Sputter Timer set point is displayed. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 33: Desk V Tsc
 Process set point allows for adjustment of the process pressure start set point. A pop-up data entry screen is available by pressing the set point data boxes. The current Process set point is displayed. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 34  The Timed Sputter running button will start the Sputter power Supply and the Process Timer.  The Abort button will end a Timed Sputter process immediately.  The Overview button will return to the Overview screen. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 35: Desk V Timed Recipe Programming
Desk V Timed Recipe Programming Timed Recipe Programming provides access to the creation and storage of up to 10 separate recipes. Parameters include Recipe Name, Process Set points (Torr and milliamps), Process Time (seconds), Vent after Sputter Select and Timed Sputter Enable.
Page 36: How To Use Timed Recipe Programming
To input data, touch cell. NOTE: The difference between “with turbo” and “without turbo” in recipe programming is that when using a turbo molecular pump, one can select pressure settings (as found in set point 1 and set point 2). How to Use Timed Recipe Programming To create a Timed Recipe from the Timed Sputter screen, select Recipe.
Page 37 A few notes regarding operation of the Timed Recipe Programming follow:  The system will automatically pump down to the Process set point before activating the Timed Sputter process.  Timed Sputter processes can be started with the chamber at atmospheric pressure or from any pressure, but the sputtering process will not begin above the Process set point.
Page 38: Manual Etch
DESK V HP Manual Etch operations are available on the Etch screen.  Select Manual Etch screen from the Screen menu. Standard Desk V HP  ON/OFF operation of the Mechanical Pump, Gas Valve, and Etch Power Supply is available on this screen.
Page 39  The Screens button will return to the Screens menu.
Page 40  Select Manual Etch screen from the Screen menu. DESK TSC ETCH is not an option with rotation. Manual Etch operations are available on the Etch screen.  ON/OFF operation of the Mechanical Pump, Gas Valve, and Etch Power Supply is available on this screen.
Page 41: Timed Etch
TIMED ETCH ETCH IS NOT AN OPTION WITH ROTATION Timed Etch operations are available on the Timed Etch screen.  Select Timed Etch from the Main screen.  ON/OFF operation of the Etch Power Supply is a push button on this screen. Inactive buttons are RED.
Page 42  The Abort button will end a Timed Etch process immediately.  The Overview button will return to the Overview screen. Desk V TSC Timed Etch operations are available on the Timed Etch screen. Note: Turbo Pump must be OFF to operate the Manual Etch function.
Page 43: Overview
 The Abort button will end a Timed Etch process immediately.  The Overview button will return to the Overview screen. OVERVIEW DESK V HP Select Overview from any other screen. All active system parameters are graphically displayed on the Overview screen.
Page 44 - Timed Etch is enabled; Vent After Sputter is enabled. System Auto Venting - Ten minute delay timer is counting down. Desk V TSC only. NOTE: The Abort button will stop a Timed Sputter or Etch process immediately.  The Screens button will return to the Screens menu.
Page 45: Operation
- Timed Etch is enabled; Vent After Sputter is enabled. System Auto Venting - Ten minute delay timer is counting down. Desk V TSC only. NOTE: The Abort button will stop a Timed Sputter or Etch process immediately.  The Screens button will return to the Screens menu.
Page 46: Etch
The cylinder is evacuated by a two-stage, direct-drive, Mechanical Pump (externally mounted) and a turbo pump (Desk V TSC only), which is mounted to a flange in the side of the metal chamber. The mechanical pump provides rough vacuum and the turbo molecular pump (Desk V TSC only) provides pumping into the high vacuum range.
Page 47  Increase the Etch set point to desired level (0 - 10 milliamps).  Actual current will be displayed on the Manual Etch and the Overview screens.  Turn the Etch Power On.  Etch for the desired time. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 48: Sputter
Standard Desk V HP Desk TSC  For the Desk V HP: From the Manual Sputter screen, turn the mechanical pump ON. Wait for the Vacuum pressure to drop below 4.0e-2 Torr.  For DESK V TSC: Turn ON the optional Turbo Molecular pump and wait for the pressure to drop to the desired starting vacuum level.
Page 49 NOTE: Do not close the manual Gas Flow valve. Leave this set to the desired gas flow required for the Timed Sputter process.  Turn OFF the optional Turbo pump (Desk V TSC) from the Vacuum screen. The system control will wait ten (10) minutes before turning off the Mechanical Pump (to protect the turbo pump).
Page 50: Timed Etch Operation
 4.0e-2 Torr is the fixed set point for all models.  When the fixed set point is reached:  The Gas Valve will open (to the manually adjusted flow set point).  System will stabilize for 30 seconds. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 51: Timed Sputter Operation
 Set the desired Sputter power set point. 0 – 100 milliamps ( 5.0E-3 to 7.0E-3 on TSC Models )  Set the desired Process Time set point. 0 – 600 seconds.  Select Vent after Sputter Enabled if desired.  Set the desired Process set point (Desk TSC only). Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 52  Activate the Timed Sputter Running button and the system will operate as follows:  Pumps will start and pump the chamber to the initial vacuum level:  Below 4.0e-2 Torr is the fixed set point for the Standard Desk V.  The Process set point is programmable for the Desk V TSC.
Page 53: Shut-Down Procedure
SHUT-DOWN PROCEDURE 1. Turn off all sub-systems (sputter, etch, gas, rotation). 2. For DESK V TSC option, turn off turbo pump, and wait TEN (10) minutes before turning off mechanical pump, or the turbo pump will be damaged. 3. Turn off mechanical pump.
Page 54: Desk V Tsc
Turbo Pump to reach process pressure control in the Chamber. WARNING! Ten (10) minutes must elapse between turning off the turbo pump and turning off the mechanical pump, or the turbo pump will be damaged. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 55: Carbon Rod Accessory
When the cover slip is over coated, the gold color will change:  To copper with 100 Å of carbon  To orange with 150 Å of carbon  To purple with 200 Å Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 56 Operation The Desk V sputter head must be flipped over. Replace the standard 6.0” diameter by 6.0” high Pyrex cylinder with the 6" D. x 9" H. Pyrex cylinder. Mount the Carbon Rod accessory plate to the top of the larger Pyrex cylinder.
Page 57 Above 7.5e-2 Torr, the thickness of the carbon film will diminish rapidly, as compared to the expected thickness. If the carbon chamber will not pump below 1.0e-1 Torr, check by substituting the Desk V chamber. If that pumps down, then the trouble is probably with the “L” gaskets on the carbon chamber. Wipe them clean with a lint free cloth and Isopropanol Alcohol.
Page 58: Carbon Yarn Accessory
 To purple with 200 Å Operation The Desk V sputter head must be rotated to the side. Replace the standard 6.0” diameter by 6.0” high Pyrex cylinder with the 6" D. x 9" H. Pyrex cylinder. Mount the Carbon Yarn accessory plate to the top of the larger Pyrex cylinder.
Page 59: Loading The Carbon Yarn
The chamber should first be pumped to 50 m Torr or less. Denton Vacuum supplies a carbon of excellent quality. It is suggested that a low power setting, to degas the carbon, be used; slowly raise to evaporate. Degas the carbon (bright red) for 5 to 10 seconds.
Page 60: Maintenance
MAINTENANCE GENERAL MAINTENANCE The Desk V will operate more efficiently if kept clean. Scale build-up on the baseplate should be cleaned off weekly and the surface cleaned with Isopropanol alcohol using a lint free cloth or paper and solvent. Be sure all debris is vacuumed away. Clean coating build-up from the cylinder with a metal polish.
Page 61: Mechanical Pump - Oil Change
SPUTTER TARGET TOOLS REQUIRED  Small Phillips screwdriver & target INSTRUCTIONS 1. Open sputter head 2. Remove grid screen 3. Remove retaining ring 4. Center target on plate 5. Replace retaining ring Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 62 6. Replace grid screen and close sputter head PLASMA PROBLEMS If the plasma is flickering during sputtering, the problem is a high voltage short or starvation of gas. Add more gas before checking other possibilities. Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 63: Troubleshooting
Vacuum leak in system. e. Find and repair leak. Pirani gauge tube Clean or replace Pirani bad or dirty. Gauge tube. g. Turbo pump off [turbo g. Check fuses and Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 64 Normal wear pattern, out, about the size of target depleted. a half dollar. 10. Turbo pump will not a. Blown fuse. a. Replace fuse. b. Bad connection. b. Check cables. operate.[Turbo units only] Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da...
Page 65: Acuum Performance Da T A Sheet
Turbo** * Standard Desk V with mechanical pump. ** Desk V TSC with mechanical pump and turbo pump. Turn Turbo pump on at 1.0e+0 (1 Torr). To evaluate the performance of the vacuum system, periodically record the vacuum pressure during...
Page 66: Used Target
USED TARGET TYPICAL WEAR PATTERN ON USED TARGET...
Page 67: Typical Performance Data
TYPICAL PERFORMANCE DATA PUMP DOWN Desk V: Pump Down (typical) Chamber open before pump down Time 5 sec. 5 min. (Seconds) mTorr mTorr mTorr Desk V Pump Down (typical) 5 sec. 5 min. Pressure(mTorr)
Page 68 DESK V TSC: Pump Down (typical) Mechanical Pump ONLY TC gauge FR gauge Time Pressure Pressure (mTorr) (mBar)
Page 69 DESK V TSC Pump Down (typical) Mechanical Pump & Turbo Pump ON TC gauge FR gauge Time Pressure Pressure (mTorr) (mBar) (Minutes) Turbo ON Turbo at Speed...
Page 70: Deposition Rate
1.0E-02 1.0E-03 1.0E-04 1.0E-05 1.0E-06 TIME (minutes) DEPOSITION RATE Desk V: Gold Deposition Rate (typical) Initial pressure < 20 mTorr Source to substrate distance = 2.375" (60 mm) Timed Sputter = 10 minutes (600 seconds) Gold Target Material: Gas: 50 mTorr...
Page 71 Target Material: Gold / Palladium Gas: Pressure : 50 mTorr Film Deposition Power Current Thickness Rate Å Å / sec. mAmps 0.68 1.58 1390 2.32 2210 3.68 Target Material: Gold Gas: Argon Pressure : 50 mTorr Film Deposition Power Current Thickness Rate Å...
Page 72 Desk V Deposition Rates (typical) Gold Air 50 mTorr Gold / Paladium Air 50 mTorr Gold Argon 50 mTorr Gold / Paladium Argon 50 mTorr Current (mAmps)
Page 73: Packing Desk V For Return
PACKING DESK V FOR RETURN (See photos on the next page.) It may be necessary to return the Desk V unit for repair. Follow these instructions for safe return of the unit. If available, use original packing materials, box, and skid received with your system from Denton Vacuum.
Page 74: Packing Photos
NOTE: Denton Vacuum WILL NOT be responsible for any damages sustained in shipment, including warranty work. For a fee, Denton Vacuum can provide packing materials to customers for the unit’s return. PACKING PHOTOS Customer is responsible for return freight charges. Denton can recommend a carrier for the unit’s return...
Page 75: Suggested Spares
SUGGESTED SPARES CONSUMABLES FOR DESK V AND TSC CONSUMABLES FOR DESK V AND TSC PART NO. DESCRIPTION LOCATION QTY. 6” D. X 6” H. PYREX CYLINDER DSK004-0016 DESK V DESK V PYREX CYLINDER, 6” CYLINDER GASKET DSK001-0045 DESK V TSC ST ST CHAMBER...
Page 76: Fuses
FUSES FUSES FOR DESK V AND TSC PART NO. DESCRIPTION LOCATION QTY. 10 AMP, 250V, TIME DELAY, FUS001-0047 MAIN FUSE (110V) CERAMIC BODY 8 AMP, 250V, TIME DELAY, FUS001-0053 MAIN FUSE (230V) CERAMIC BODY 5 AMP, 250V, TIME DELAY, FUS001-0067...
Page 77: Consumables For Carbon Rod Accessory
DESCRIPTION LOCATION QTY. 6” D. X 9” H. PYREX CYLINDER CHB005-0057 DESK V CARBON ACCSY. 6” D. X 3.5” H. PYREX DSK001-0047 DESK V TSC CARBON ACCSY. CYLINDER 6” GASKET 6” PYREX CYLINDER DSK001-0045 CAR001-0014 CERAMIC BUSHING CARBON FIXTURE SPR001-0024...
Page 78: Consumables For Carbon Yarn Accessory
LOCATION QTY. 6” D. X 9” H. PYREX CYLINDER CHB005-0057 DESK V CARBON ACCSY. 6” D. X 3.5” H. PYREX CYLINDER DSK001-0047 DESK V TSC CARBON ACCSY. 6” GASKET 6” D. PYREX CYLINDER DSK001-0045 YRN001-0001 CARBON YARN CARBON FIXTURE CAR001-0015...
Page 79: Targets For Desk V And Tsc
FOR 2” DIAMETER AND 50MM X 50MM TARGETS (Aluminum) DSK004-0017 DSK003-0036 FOR 2” DIAMETER AND 50MM X 50MM TARGETS FOR TSC (stainless steel) PRECIOUS METAL PRICES ARE SUBJECT TO CHANGE WITH MARKET VALUE. PLEASE CALL DENTON VACUUM AT 856-439-9100 FOR A QUOTATION.
Page 80: Adjusting The Vacuum Safety Bellows Switch
Adjusting the Vacuum Safety Bellows Switch 1) Remove the top cover on the sputter head and locate the bellows safety switch. 2) The bellows safety switch is a round cylinder with 3 wires (red, white, and black) coming from the top (the name Whitman Controls can be found on the side). 3) Pump system down to a vacuum level between 10 torr and 100 torr ( 1.0E+01 and 1.0E+2).
Page 81: Emergency Stop Button
Battery Advisory: Note: The battery in your Desk V tool is not rechargeable and the life expectancy is 1 -1.5 Years. To avoid losing the program on your screen, keep the tool plugged in and the tool on. The screen must always be powered (24 VDC). Should you need to replace...

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