CENTROTHERM E1200 HT 260-3 Furnace Manuals

Manuals and User Guides for CENTROTHERM E1200 HT 260-3 Furnace. We have 1 CENTROTHERM E1200 HT 260-3 Furnace manual available for free PDF download: Operating Instructions Manual

CENTROTHERM E1200 HT 260-3 Operating Instructions Manual

CENTROTHERM E1200 HT 260-3 Operating Instructions Manual (233 pages)

Horizontal Furnace Equipment

Brand: CENTROTHERM | Category: Furnace | Size: 4.42 MB

Table of Contents

Table of Contents

5
List of Figures

17
- Operating Instruction Remarks
  
  21
  - Description of Symbols and Notes
    22
  - Definitions
    24
  - Operating Company
    24
  - Trained Workers
    24
  - Operating Personnel
    24
  - Copyright
    24
  - Liability for Material Defects
    25
- Introduction
  
  27
  - Technical Data
    27
  - Dimensions and Weight
    27
  - Media Supply Connections
    27
  - Cooling Water
    27
  - Compressed Air
    28
  - Nitrogen
    28
  - Oxygen and Other Gases (Option)
    28
  - Exhaust Air Removal
    28
  - Electricity
    28
  - Operating Data
    29
  - Ambient Air
    29
  - Wafers
    29
  - Thermocouples
    29
  - Process Boat
    29
  - Process Tube
    30
  - Heating Cassette with Water Cooled Jacket
    30
  - Control System
    30
  - Process Overview
    31
  - Diffusion
    31
  - Oxidation
    31
  - Chemical Vapor Deposition
    31
  - Plasma Enhanced Chemical Vapor Deposition
    32
  - Safety Concept
    32
  - Safety-Relevant Aspects of the Mechanical Construction
    32
  - Safety-Relevant Aspects of the System Functions
    33
- Safety
  
  35
  - Correct Use
    35
  - Incorrect Use
    35
  - General Safety Instructions
    35
  - Safety Devices
    36
  - Emergency Stop Switch
    37
  - Security System Functions
    37
  - Notes on the Software for Equipment Operation
    40
  - Workstations of the Operating and Service Personnel
    40
  - Figure 3-2: Workstations for Operation and Preventive Maintenance
    40
  - Safety Notes
    41
  - Operation and Handling
    41
  - Maintenance and Preventive Maintenance
    42
  - Electrical Engineering
    43
  - Pneumatic System
    44
  - Gas
    44
  - Safety Labeling on the Equipment
    46
  - Firefighting
    49
- Functional Description
  
  51
  - Figure 4-1: Schematic Total View
    51
  - Loading Station
    52
  - Figure 4-2: Loading Station Example CVD System
    52
  - Transport Box Storage
    53
  - Loading Box
    53
  - Wafer Transfer System (WTS)
    53
  - Loading Trolley
    54
  - Slider
    54
  - Lift and Storage
    54
  - Figure 4-3: Loading Trolley for CVD Processes
    54
  - Loading Machine
    55
  - Process Boat
    55
  - Laminar Flow Box
    55
  - Horizontal Furnace
    56
  - Heating Cassette
    56
  - Figure 4-4: Schematic Heating Cassette Without Water Cooled Jacket
    56
  - Figure 4-5: Schematic Heating Cassette with Water Cooled Jacket
    57
  - Process Tube
    58
  - Tube Closure
    58
  - Power Electronics
    58
  - Cooling System
    59
  - Figure 4-6: Water Cooling with Stack Heat Exchanger
    59
  - Figure 4-7: Air Cooling
    60
  - TEOS Cabinet
    61
  - Figure 4-8: TEOS Cabinet
    61
  - Figure 4-9: Components of the TEOS Cabinet
    62
  - Gas Cabinet
    63
  - Synthesis Steam Generator
    63
  - Bubbler System
    64
  - Flaring Unit
    64
  - Control Elements in the Door
    64
  - Distributor Cabinet
    65
  - Vacuum System
    65
  - Transformer Box
    66
  - Exhaust System
    66
  - Toxic Gas Exhaust
    66
  - Exhaust Suction Box in the Gas Cabinet
    66
  - Display and Operating Elements
    66
  - Signal Lamp and Horn
    66
  - Operating Panel
    68
  - Buttons on the Touchscreen
    69
  - User Interface of the CMI Computer
    70
  - Figure 4-11: Basic User Interface Layout
    70
  - CESAR Control Computer
    71
  - Centrotherm Machine Safety (CMS)
    71
  - Cell Controller
    72
  - Centrotherm Cell Control Recipe Manager (CCC-RM)
    72
  - Protgraf
    72
  - Process Description
    73
  - Process Flow Oxidation/Diffusion/Annealing
    73
  - Process Flow LPCVD/PECVD
    74
- Transport
  
  75
  - Special Safety Measures
    75
  - Packaging
    75
  - Technical Instructions for Transport
    76
  - Incoming Inspection
    77
  - Scope of Delivery
    77
  - Transport Damages
    77
  - Storage Measures
    77
- Assembly
  
  79
  - Preparing the Installation Site
    79
  - Equipment Check
    79
  - Installation
    80
- Commissioning and Decommissioning
  
  81
  - Preparation for Initial Startup
    81
  - Initial Startup
    81
  - Startup
    82
  - Conditioning and Test Process Runs
    83
  - Tests with Handling System While Operating
    84
  - Putting out of Operation
    85
  - Switching off the Equipment
    85
  - Shutting down the Equipment
    86
  - Waste Disposal
    86
- Operation
  
  87
  - User Interface Arrangement of the CMI Computer
    87
  - Title Bar
    88
  - Figure 8-2: Title Fields in the Title Bar
    88
  - Command Bar
    90
  - Navigation Bar
    91
  - Jobs" Information Field
    92
  - Job List" Area
    92
  - Process Tubes" Area
    93
  - Process Capability
    93
  - Figure 8-5: Status of Process Tubes and Recipes
    93
  - Figure 8-6: Buttons for Process Capability
    93
  - Status of Process Tubes
    94
  - User Login
    95
  - Startup
    96
  - Startup from "Pause" Status
    96
  - Startup from "Break" Status
    96
  - Startup from "Empty" Status
    96
  - Shutdown
    97
  - Running the Equipment to "Pause" Status
    97
  - Running the Equipment to "Break" Status
    97
  - Running the Equipment to "Empty" Status
    97
  - Toggling the Process Capability
    98
  - Alarm Handling
    99
  - Alarm Display
    99
  - Figure 8-10: Alarm List
    99
  - Responding to an Alarm
    100
  - CESAR Control System Alarm Message
    100
  - Lift Alarm Message
    100
  - CESAR Control Computer User Interface
    101
- Maintenance
  
  105
- Preventive Maintenance
  
  181
- Spare and Wearing Parts
  
  227
  - Ordering Spare Parts
    227
  - List of Spare and Wearing Parts
    227
  - Waste Disposal
    227
- Appendix
  
  229
  - Declaration of Conformity, Nameplate, Test Report
    229
  - Drawings, Circuit Diagrams, Overviews
    229
  - Information on the Control System
    230
  - Information on the Load Unit
    230
  - Information on the Gas System
    230
  - Information on Process Technology
    230
  - Spare and Wearing Parts
    231
  - DIN Safety Datasheets
    231
  - Declaration of Contamination
    231
  - Suppliers' Documents
    232
  - Licenses
    233

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